EP2344868A2 - Capteur électrochimique et son procédé de fabrication - Google Patents

Capteur électrochimique et son procédé de fabrication

Info

Publication number
EP2344868A2
EP2344868A2 EP09771500A EP09771500A EP2344868A2 EP 2344868 A2 EP2344868 A2 EP 2344868A2 EP 09771500 A EP09771500 A EP 09771500A EP 09771500 A EP09771500 A EP 09771500A EP 2344868 A2 EP2344868 A2 EP 2344868A2
Authority
EP
European Patent Office
Prior art keywords
electrochemical sensor
nanoparticles
substrate
sensor
matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09771500A
Other languages
German (de)
English (en)
Inventor
Alexander Kaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanoscale Systems Nanoss GmbH
Original Assignee
Nanoscale Systems Nanoss GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoscale Systems Nanoss GmbH filed Critical Nanoscale Systems Nanoss GmbH
Publication of EP2344868A2 publication Critical patent/EP2344868A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Definitions

  • the invention relates to an electrochemical sensor, in particular for the detection and / or quantification of chemical substances or substances in the smallest amounts or concentrations. It further relates to a method of manufacturing such a sensor.
  • sensors can be used in a variety of applications.
  • Such sensors can be used, in particular, to measure the smallest amounts of chemical and biochemical substances, such as gases or biomolecules, eg. B. be used advantageously in the following areas:
  • the invention has for its object to provide a sensor, in particular an electrochemical sensor, with which even very small amounts or concentrations of a chemical target substance are detectable or quantifiable in a particularly reliable manner with high accuracy. Furthermore, a particularly suitable method for producing such a sensor is to be specified.
  • this object is achieved according to the invention with a detector zone, whose electrical conductivity through electronic tunneling, ionization or hopping processes, in particular between localized states or Nanoparticles, and whose electrochemical interaction is determined with a target substance to be detected.
  • the invention is based on the consideration that the sensor should be favorably oriented towards an electrical or electronic measuring principle with regard to the most favorable usability and further processing of the measured values or signals supplied.
  • a metrologically particularly well-accessible parameters of the sensor so in particular its conductivity or electrical resistance, should be specified such that the sensor even on the smallest changes in the number of particles or concentration of the chemical target substance in its environment is very sensitive to a comparatively pronounced change in its electrical conductivity or its electrical resistance.
  • the electrochemical interaction of said tunneling or hopping processes with the target substance to be detected can take place directly, in particular by contact of the carrier medium loaded with the target substance with the detector zone, or indirectly, ie over certain short distances.
  • an exchange of electrons or ions or also an electrostatic or electromagnetic interaction between the sensor and the target substance can take place by contact or interaction of the target substance present in gaseous or liquid phase with the detector zone of the sensor, which / the electron concentration or the electron mobility in the Material of the detector zone and / or in particular the coupling between the nanoparticles changed.
  • electrically neutral substances such as water can be detectable, since even dipole moments can disturb the local electron concentration in the detector zone.
  • the temperature dependence of their electrical conductivity is preferably approximately given by the relationship In ⁇ ⁇ T 7 .
  • the detector zone is designed such that the characteristic exponent ⁇ of this relationship has a value between 0 and 1, preferably about 0.25, about 0.5 or about 1.
  • the detector zone is formed of nanoparticles embedded in a matrix and having a higher electrical conductivity than the matrix material.
  • the material forming this advantageously has a particularly suitable morphology.
  • the morphology in the detector zone is preferably selected such that a multiplicity of comparatively small zones with comparatively high electrical conductivity are formed, which are connected to one another via intermediate zones of comparatively low electrical conductivity or adjoin one another.
  • the material forming the detector zone could, for example, have an amorphous, nano or polycrystalline structure.
  • the detector zone is formed of nanoparticles embedded in a matrix of suitably selected, in particular nonconductive, material of comparatively low electrical conductivity and of higher electrical conductivity than the matrix material.
  • Such locally changing zones with low and high conductivity are thus formed, for example, by composite systems of conductive nanocrystallites embedded in an electrically insulating matrix (base medium), interfering or trapping sites or dopings.
  • Such systems characterized by a nanocrystalline structure are also referred to as nanocomposites.
  • the nanoparticles can be formed of material with suitably high electrical conductivity, for example, of semiconducting or superconducting material. However, a particularly needs-based adjustment of desired properties can be achieved by the nanoparticles advantageously metallic, in particular of gold (Au), tungsten or platinum (PI) are formed.
  • Au gold
  • PI platinum
  • the matrix inorganic, organic or dielectric material or polymer material is provided.
  • the material forming the detector zone which is provided as sensory active material, is designed with particular regard to the desired strong dependence of the electrical conductivity on the interaction with the target substance with regard to the choice of its respective parameters.
  • the nanoparticles or the localized states causing impurities in terms of their size, spacing, nature and particle number density in the embedding in the matrix are selectively and selectively selected with regard to the possible interaction with the target substance.
  • the parameters mentioned are advantageously selected in such a way that the resulting electrical conductivity is essentially dominated by the electronic tunneling, ionization or hopping processes mentioned.
  • the nanoparticles have an average particle size of up to 10 nm, preferably up to 1 nm.
  • particle sizes of up to 100 nm or more are also conceivable, provided that they are electrically sufficiently isolated from one another and their distances are sufficiently small so that tunnel effects can be established between them.
  • adjusting the particle size is advantageously taken into account that just when using the nanocomposite comparatively small particles in comparison to larger particles have a larger specific (inner) surface, so surface in relation to the volume, so that they have a special high possess energetic reactivity with the target substance.
  • a sensor with a rough, nanocrystalline surface is therefore fundamentally more sensitive to an electrochemical reaction than a sensor with a smooth surface.
  • the detector zone is formed by a coating applied to a carrier body or a substrate. Since the sensor is constructed in its detector zone on the basis of nanocomposites, it can be carried out using very suitable manufacturing or deposition methods in laterally very small dimensioned dimensions. As a result, the sensor and in particular its detector zone in the manner of a nanosensor can be placed on a larger structure, for example a larger substrate, precisely and as needed at a designated location, which is particularly suitable for detecting the respective target substance. In particular, this also makes it possible to equip a substrate with a comparatively complex system with various sensor functionalities.
  • a microarray or grid of different nano sensors which are designed, sized and / or designed for the interaction with target substances, can be provided in a simple manner, each nanosensor advantageously being designed in each case for the detection of a specific chemical substance type.
  • each nanosensor advantageously being designed in each case for the detection of a specific chemical substance type.
  • a plurality of detector zones differing from one another with regard to the choice of material of the matrix and / or the nanoparticles and / or the size and / or density of the nanoparticles are arranged on a common carrier body.
  • a method which is particularly adaptable to the design principles of the sensor, in particular the provision of the detector zone and thus particularly suitable for the production, with which the object in question is achieved according to the invention is deposition by local energy excitation, such as, for example, an ion beam-induced, pyrolytically induced or photon-beam-induced deposition, particularly advantageously the electron-beam-induced deposition (EBID).
  • EBID electron-beam-induced deposition
  • local energy stimulation is meant in particular that the lateral Elongation of the resulting by the energization depositions significantly lower, for example, some nm to a few microns, than the dimensions of the substrate used for deposition, for example, some 100 microns or a few mm.
  • the methods mentioned are based on the physical and chemical transformation processes of a precursor gas present at the beam location taking place under a screened particle beam consisting of electrons, ions or photons, or a beam of electromagnetic waves.
  • the landfill structuring process is based on the principle that molecules of a starting substance (precursor), which are in the gas phase and adsorb on a surface within a vacuum environment, with a locally concentrated energy radiation, for example, from focused electrons, ions or photons or others energetically bundled objects can exist, be excited and permanently fixed by a decomposition or conversion process of their bonds as sediment or landfill on a surface of a nearby substrate.
  • the initial material deposition serves at the same time as a germination point for new deposits, which are guided by the local position of the energy effect and their residence time, so that can be deposited on the substrate, depending on the focusability of the energy source with up to nanometer precision accuracy any three-dimensional objects.
  • both the size of the nanocrystallites and their distances and starting materials during the manufacturing process by the environmental parameters such as beam acceleration voltage, beam current, precursor material, etc.
  • the environmental parameters such as beam acceleration voltage, beam current, precursor material, etc.
  • precursor materials are organic, inorganic, dielectric or organometallic complexes, monomers, Oligomers, polymers or mixtures of these monomers, oligomers and polymers used, which are preferably in the gas phase and have a particularly favorable for landfill vapor pressure.
  • the abovementioned deposition method is suitable in particular both for producing a surface coating for producing the detector zone on a substrate serving as carrier body in the manner of a subsequent finishing of the carrier body as well as for producing a bulk body, in which the basic The sensor itself is already formed from the nanoparticles embedded in the matrix and thus, in its entirety, forms the detector zone.
  • an energetic particle beam provided for energetic excitation of the precursor substances or a local pyrolytic treatment, for example by a laser beam is guided laterally or three-dimensionally with respect to the substrate as a function of a predetermined desired geometry of the deposit.
  • a plurality of mutually different detector zones can be deposited to form a complex sensor system.
  • the temperature of the substrate is suitably controlled during deposition. This influences the speed of the surface diffusion processes on the substrate, which leads to a controllable rate of subsequent delivery of precursor material and thus to a controlled growth rate of the deplonate.
  • the replenishment rate may also be controlled by either increasing or decreasing the temperature of the precursor source, as this directly affects the precursor vapor pressure.
  • the pyrolytic or pyrolytically induced deposition can advantageously also be used.
  • Solid landfills can also be deposited on a substrate by heating the substrate after an undirected adsorption of precursor molecules, for example from below over a heating wire or from above through a laser beam. The energy input then locally effects the desired conversion of the precursor materials.
  • landfill structuring in particular by the production of the detector zone or the entire body of the sensor by electron beam induced deposition or by ion beam induced, pyrolytically induced or photon beam induced deposition, a particularly high flexibility in setting desired properties of the final product can be achieved.
  • a suitable Structure for the matrix not only the electrical conductivity in the sense of the desired sensitivity in a change of interaction with the environment can be adjusted properly, but rather allows a targeted influencing of the manufacturing parameters in the landfill of the structures also a targeted influence on other microscopic properties.
  • the advantages achieved by the invention are in particular that by providing a detector zone based on nanoparticles embedded in a matrix, a particularly sensitive dependence of the electrical conductivity of the detector zone on changes in the ambient conditions of the sensor, in particular the particle density of the selected target substance, in the smallest Scale is achievable.
  • particularly sensitive measurements can be carried out, which are accompanied by the smallest changes in the quantity of the target substance.
  • the local concentration of the target substance is particularly precisely measurable, so that highly accurate sensors can be provided on the basis of such measurements.
  • Such sensors can, for example, in the measurement of very small amounts of chemical and biochemical substances, such as gases or biomolecules, eg. B. be used advantageously in the following areas:
  • the detector zone or even the entire sensor by landfill structuring methods such as in particular the electron beam induced deposition also the targeted production of microscopic structures with a high bandwidth desired properties is possible, in particular by suitable material and parameter choices, the electrical properties particularly favorable and targeted and selective the selected target substance can be adjusted.
  • extremely miniaturized sensors or sensor elements can be produced by the use of the electron beam-induced deposition, wherein in particular the detection geometry can be selected almost freely.
  • FIG. 1 a miniaturized electrochemical sensor
  • FIG. 2 a landfill growing up on a substrate
  • FIG. FIG. 3 shows a measuring arrangement with a sensor according to FIG. 1 ,
  • FIG. 4 is a diagram with a number of energy levels
  • FIG. 5 shows the sensor according to FIG. 1 with a plurality of detector zones.
  • the miniaturized sensor 1 according to FIG. 1 is in particular for use as an electrochemical sensor for the detection and / or quantification of chemical Substances or substances provided even in the smallest amounts or concentrations. Alternatively, however, a variety of other applications in microsensors or biosensors or the like is conceivable.
  • the miniaturized sensor 1 comprises a substrate or a base body 4, which is provided with a detector zone 10, which in turn is formed by embedded in a matrix 12, preferably metallic nanoparticles 14.
  • the matrix 12 is configured as a polymer matrix in which the metallic nanoparticles 14 are embedded.
  • the nanoparticles 14 thereby form embedded localized states for electrical charges. These may alternatively or additionally also be formed by interfering or trapping sites or by structural disorder, for example in an amorphous medium.
  • the nanocrystals are not absolutely necessary for the sensor effect. However, they are advantageous in the operation of the sensor, since it additionally enhances the sensor effect. This is accomplished by allowing the crystallites to be constructed using the proposed fabrication method to have diameters on the order of 1 nanometer or below. These particles have a particularly increased surface area to volume ratio. Due to their microscopic roughness compared with the target substance to be detected, therefore, they have a higher energetic reactivity or an increased effective sensor surface than homogeneous solid bodies with a smooth surface. External influences on the electrical conduction mechanisms, such as the hopping or tunneling capability, are thereby promoted or enhanced, the electrochemical sensor effect is also increased overall.
  • the corresponding parameters are selected such that the electrical transport between the nanoparticles 14 within the matrix 12 is characterized by hopping processes and via tunneling processes.
  • the conduction mechanism in the detector zone 10 therefore takes place the thermally activated hopping mechanism (hopping, nearest neighbor hopping, variable-ranking hopping) between localized sites and arises from a quantum-mechanical tunneling effect. Compliance with this boundary condition ensures that the electrical conductivity of the detector zone 10 depends very strongly and sensitively on the coupling between the nanoparticles 14 and thus on the electromagnetic environment of the sensor 1, so that this can be detected with high sensitivity and resolution.
  • the sensor 1 according to FIG. 1 is based on a substrate of conventional design based on silicon, which serves as a carrier body 16 and is provided to form the detector zone 10 with a superficial coating.
  • the type of sensor 1 of FIG. 1 thus corresponds to a refinement of a conventional substrate in which the detector zone 10 provided for the desired high measuring resolution is applied by subsequent coating.
  • the deposition method proposed for the sensor production such as the electron-beam-induced deposition
  • the sensor does not necessarily rely on silicon as the substrate backing
  • the sensor except for silicon, can practically also be deposited on any other solid support.
  • the proposed deposition method is particularly flexible way to equip or refine different materials, surfaces or already prefabricated or existing structures later with sensor functionality.
  • An example is a "lab-on-a-chip" application, which may have many flow channels or measuring chambers for gases and liquids, for example. These Lab-on a-chips are usually prefabricated with silicon mask technology.
  • the proposed method for the production of an electrochemical sensor would make it possible to retrofit such a chip at any point with sensor functionality.
  • the detector zone 10 of the sensor 1 and possibly also the entire base body 4 are produced by so-called landfill structuring, wherein particular growth of the respective structures in those spatial areas is generated and limited to these, in which the formation of the desired structures is provided. This eliminates the need for other miniaturized structures subsequent, such as lithographic etching.
  • the method of the so-called electron-beam-induced or ion beam-induced deposition is provided in the exemplary embodiment. A development phase of the corresponding structures is shown in FIG. 2 shown.
  • precursor substances as shown in FIG. 2 are shown in the form of particles 50, brought in gaseous form in the vicinity of a substrate 52. Adhesion forces between the precursor molecules and the substrate cause adsorption of precursor material on the substrate.
  • a deposition zone 54 in the immediate vicinity of the substrate 52 the precursor substances are energetically excited to undergo conversion, whereby the conversion products in solid and non-volatile form as sediment or dispartate 56 are permanently deposited on the substrate 52.
  • the initial material deposition on the substrate 52 serves at the same time as a germination point for new deposits, which are guided by the local position of the action of energy and their residence time, so that can generate almost any three-dimensional objects on the substrate 52.
  • the excitation for the conversion and thus for the deposition takes place by local energy excitation or -applizierung, for which purpose an electron beam 58 is provided in the embodiment.
  • a measuring arrangement 60 with the sensor 1 is shown schematically in FIG. 3 shown.
  • the detector zone 10 of the sensor 1 is electrically connected to a current source 62, which may be designed in particular as a constant current source.
  • a voltage sensor 64 By means of a voltage sensor 64, the voltage V present at a given current flow over the detector zone 10 can be tapped, so that the electrical resistance or the electrical conductivity of the detector zone 10 can be measured via this arrangement. Due to the specific design of the detector zone 10, this changes due to its electrochemical interaction with a target substance to be detected in its environment, for example water (H.sub.2O), hydrochloric acid (HCl) or the like.
  • the type of reaction of the detector zone 10 to the presence of the target substance is shown in the energy diagram of FIG. 4 schematically illustrated.
  • an area characteristic is plotted on the x-axis and an energy value E on the y-axis.
  • the detector zone 10 are located localized electronic states which are represented by their respective energy levels 70, 72, 74, 76, 78 as shown in FIG. 4 registered, are characterized.
  • the energy levels 70, 72, 74 represent localized energy states between which an electron exchanges its places by means of a thermally activated hopping or hopping mechanism.
  • a hopping process between the energy levels 72 and 74 which may for example also be associated with two adjacent nanocrystallites 14, is shown by way of example.
  • two adjacent localized energy states 76, 78 can be increased by the amount .DELTA.E in their energetic distance from one another by electrical or electrochemical interaction with the target substance.
  • the electron e would now have to overcome a greater amount of energy compared to the unchanged energy levels (such as the energy levels 72, 74) in order to exchange the places assigned to the energy levels 76, 78.
  • the electron mobility by increasing the energetic distance between these energy levels diminished or the electrical resistance of the detector zone 10 is increased.
  • FIG. 5 shows a sensor V, in which a plurality of detector zones 10 are arranged on a common carrier body 16. These are each connected independently to suitable current sources 62 and voltage sensors 64, so that their respective electrical resistance or their respective electrical conductivity can be measured independently of the others.
  • a suitable spatial arrangement of the detector zones 10 relative to each other a spatially resolved detection of the intended target substance is possible.
  • the detector zones 10 may differ from each other with regard to the choice of material of the matrix and / or the nanoparticles or their other microscopic properties and thus be adapted to different target substances with regard to their interaction with the environment.
  • a parallel detection or processing mixed states of different chemicals or the like can be detected in a single, simultaneous measurement step.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention porte sur un capteur électrochimique (1), à l'aide duquel on doit pouvoir détecter ou quantifier d'une manière particulièrement fiable, avec une grande précision, même les quantités ou concentrations les plus faibles d'une substance chimique cible. A cette fin, le capteur (1) comprend selon l'invention une zone de détection (10), noyée dans une matrice (12), formée de nanoparticules (14) qui par rapport au matériau de la matrice ont une conductivité électrique plus élevée, zone de détection dont la conductivité électrique (s) est définie par des processus électroniques de tunnel, d'ionisation ou de saut de longueur variable entre les nanoparticules (14), et par leur interaction électrochimique avec une substance cible à détecter.
EP09771500A 2008-10-22 2009-10-22 Capteur électrochimique et son procédé de fabrication Withdrawn EP2344868A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810052645 DE102008052645A1 (de) 2008-10-22 2008-10-22 Elektrochemischer Sensor und Verfahren zu dessen Herstellung
PCT/EP2009/007563 WO2010046105A2 (fr) 2008-10-22 2009-10-22 Capteur électrochimique et son procédé de fabrication

Publications (1)

Publication Number Publication Date
EP2344868A2 true EP2344868A2 (fr) 2011-07-20

Family

ID=41718239

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09771500A Withdrawn EP2344868A2 (fr) 2008-10-22 2009-10-22 Capteur électrochimique et son procédé de fabrication

Country Status (8)

Country Link
US (1) US8907677B2 (fr)
EP (1) EP2344868A2 (fr)
JP (1) JP5369186B2 (fr)
CN (1) CN102257381A (fr)
CA (1) CA2777603A1 (fr)
DE (1) DE102008052645A1 (fr)
RU (1) RU2502992C2 (fr)
WO (1) WO2010046105A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201207583D0 (en) * 2012-05-01 2012-06-13 Isis Innovation Electrochemical detection method and related aspects
US9857498B2 (en) * 2014-06-05 2018-01-02 Baker Hughes Incorporated Devices and methods for detecting chemicals
MD4495C1 (ro) * 2016-09-09 2018-01-31 Николай АБАБИЙ Senzor de etanol pe bază de oxid de cupru
US10145009B2 (en) 2017-01-26 2018-12-04 Asm Ip Holding B.V. Vapor deposition of thin films comprising gold
DE102018203842A1 (de) * 2018-03-14 2019-09-19 Robert Bosch Gmbh Sensortag zur Detektion von Feinstaubpartikeln und Staubmaske

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2175265A1 (fr) * 2008-10-08 2010-04-14 IEE International Electronics & Engineering S.A.R.L. Capteur d'hydrogène et son procédé de fabrication

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674320A (en) * 1985-09-30 1987-06-23 The United States Of America As Represented By The United States Department Of Energy Chemoresistive gas sensor
US4900405A (en) * 1987-07-15 1990-02-13 Sri International Surface type microelectronic gas and vapor sensor
US6344271B1 (en) * 1998-11-06 2002-02-05 Nanoenergy Corporation Materials and products using nanostructured non-stoichiometric substances
DE19713719C2 (de) 1997-04-03 2002-11-14 Kuehn Hans R Sensor zur Messung physikalischer und / oder chemischer Größen und Verfahren zur Herstellung eines Sensors
DE69922776T2 (de) * 1999-01-21 2005-12-08 Sony International (Europe) Gmbh Nanoteilchenstruktur zur Anwendung in einer elektronischen Anordnung, insbesondere in einem chemischen Sensor
JP4137317B2 (ja) * 1999-10-07 2008-08-20 独立行政法人科学技術振興機構 微小立体構造物、その製造方法及びその製造装置
DE60144014D1 (de) 2001-07-19 2011-03-24 Max Planck Gesellschaft Chemische Sensoren aus Nanopartikel-Dendrimer-Komposit-Materialen
US6881582B2 (en) * 2001-11-08 2005-04-19 Council Of Scientific And Industrial Research Thin film ethanol sensor and a process for the preparation
JP2004244649A (ja) * 2003-02-10 2004-09-02 National Institute For Materials Science ２次元又は３次元ナノ構造物の作製方法
WO2005015792A2 (fr) 2003-08-06 2005-02-17 Purdue Research Foundation Fabrication de reseaux nanoparticulaires
JP2006005110A (ja) * 2004-06-17 2006-01-05 National Institute For Materials Science 微細構造の作製方法及び作製装置
JP2006123150A (ja) * 2004-11-01 2006-05-18 National Institute For Materials Science 電子ビーム誘起蒸着法を用いたナノ構造作成制御方法
EP1854160B1 (fr) * 2005-02-10 2017-06-21 Yeda Research And Development Co., Ltd. Structures redox actives et dispositifs utilisant celles-ci
EP1790977A1 (fr) * 2005-11-23 2007-05-30 SONY DEUTSCHLAND GmbH Capteur chimique à base de nanoparticules/nanofibres, réseau de tels capteur, utilisation et procédé de fabrication de celui-ci, et procédé de détection d`un analyte
DE102006004922B4 (de) 2006-02-01 2008-04-30 Nanoscale Systems Nanoss Gmbh Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb
DE602007001133D1 (de) * 2007-03-30 2009-06-25 Sony Deutschland Gmbh Verfahren zum Verändern der Empfindlichkeit und/oder Selektivität eines Chemieresistenzsensorarrays
EP2215464B1 (fr) 2007-11-20 2015-10-07 Technion Research & Development Foundation Ltd. Système de capteurs, utilisation de capteurs, et procedee de détection basé sur des nanoparticules cubiques coiffées par un revêtement organique.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2175265A1 (fr) * 2008-10-08 2010-04-14 IEE International Electronics & Engineering S.A.R.L. Capteur d'hydrogène et son procédé de fabrication

Also Published As

Publication number Publication date
RU2502992C2 (ru) 2013-12-27
DE102008052645A1 (de) 2010-05-06
CN102257381A (zh) 2011-11-23
US20120019258A1 (en) 2012-01-26
JP5369186B2 (ja) 2013-12-18
JP2012506543A (ja) 2012-03-15
RU2011120331A (ru) 2012-11-27
CA2777603A1 (fr) 2010-04-29
WO2010046105A3 (fr) 2010-06-24
US8907677B2 (en) 2014-12-09
WO2010046105A2 (fr) 2010-04-29

Similar Documents

Publication Publication Date Title
EP2179266B1 (fr) Procédé de fabrication d'un élément élastique
EP2220482B1 (fr) Détecteur de gaz à sélectivité améliorée
Lee et al. A hydrogen gas sensor using single-walled carbon nanotube Langmuir–Blodgett films decorated with palladium nanoparticles
US20120097917A1 (en) Aligned, Coated Nanowire Arrays for Gas Sensing
EP2344868A2 (fr) Capteur électrochimique et son procédé de fabrication
WO2004109807A2 (fr) Structure composite a semi-conducteur parametree comprenant des canaux de dopage integres, procede pour la produire et son utilisation
DE102013214341A1 (de) Verfahren zum Herstellen einer Nanopore zum Sequenzieren eines Biopolymers
DE102015004114B4 (de) Oberflächenverstärkendes plasmonisches Substrat
EP1379862B1 (fr) Paire d'electrodes de mesure, biodetecteur comportant une telle paire d'electrodes de mesure et procede de production de cette derniere
WO2022236354A1 (fr) Procédé de production d'un capteur et capteur
EP3066459B1 (fr) Dispositif et procédé de mesure de tensions et potentiels électriques faibles sur un échantillon chimique ou biologique ou d'autres échantillons
Lu et al. DNA-templated photo-induced silver nanowires: fabrication and use in detection of relative humidity
DE112014004740B4 (de) Nanofluidischer Sensor umfassend räumlich getrennte funktionelle Sensing-Komponenten
DE102013212735B4 (de) Sensorbauteil für einen Gas- und/oder Flüssigkeitssensor, Herstellungsverfahren für ein Sensorbauteil für einen Gas- und/oder Flüssigkeitssensor und Verfahren zum Detektieren mindestens eines Stoffs in einem gasförmigen und/oder flüssigen Medium
EP2172416A1 (fr) Structure nano-électromécanique et procédé de sa fabrication
DE102019004191B4 (de) Gassensor und verfahren zur herstellung eines gassensors
DE102017206124A1 (de) Fluidsensor, Verfahren zum Bereitstellen desselben und Verfahren zum Bestimmen eines Bestandteils eines Fluids
EP3559659A1 (fr) Dispositif de détection pour déterminer et, le cas échéant, mesurer une concentration de plusieurs gaz et procédé pour fabriquer un dispositif de détection
EP2331726B1 (fr) Procédé pour le dépôt, sous l'effet d'un faisceau d'électrons, d'un matériau conducteur
DE102004013305A1 (de) Dehnungsempfindliche Sensorschicht durch eingebettete elektrisch leitfähige Atomcluster
US11231381B2 (en) Hydrogen gas sensors based on nanoparticle-decorated, patterned carbon nanotube ropes
Hetznecker Untersuchung der gassensitiven Eigenschaften von SnO2/NASICON-Kompositen
EP1330833B1 (fr) Spectrometre electronique
WO2018210628A1 (fr) Procédé de fabrication d'une structure de couches nanocristalline sensible aux gaz, structure de couches nanocristalline sensible aux gaz correspondante et capteur de gaz comprenant une structure de couches nanocristalline sensible aux gaz correspondante
DE102005056118A1 (de) Sicherheits- und/oder Wertdokument mit Gefahrenstoffsensor

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA RS

17P Request for examination filed

Effective date: 20110518

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20140502

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20140913