EP2376257B1 - Dispositif pour meuler des deux côtés des pièces plates - Google Patents

Dispositif pour meuler des deux côtés des pièces plates Download PDF

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Publication number
EP2376257B1
EP2376257B1 EP09795315A EP09795315A EP2376257B1 EP 2376257 B1 EP2376257 B1 EP 2376257B1 EP 09795315 A EP09795315 A EP 09795315A EP 09795315 A EP09795315 A EP 09795315A EP 2376257 B1 EP2376257 B1 EP 2376257B1
Authority
EP
European Patent Office
Prior art keywords
work
workpieces
disk
deburring
working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP09795315A
Other languages
German (de)
English (en)
Other versions
EP2376257A1 (fr
Inventor
Adrian Fries
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters GmbH
Original Assignee
Peter Wolters GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peter Wolters GmbH filed Critical Peter Wolters GmbH
Publication of EP2376257A1 publication Critical patent/EP2376257A1/fr
Application granted granted Critical
Publication of EP2376257B1 publication Critical patent/EP2376257B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/005—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B24D13/145—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face having a brush-like working surface

Definitions

  • the invention relates to a device for double-sided grinding flat workpieces with an upper and a lower working disk, each having a work surface with an abrasive coating, wherein the work surfaces between them form a working gap, can be ground in the workpieces, wherein at least one of the working disks means a drive is rotatably driven, and further comprising means for guiding the workpieces in the working gap.
  • Double-sided surface grinding machines for the precise machining of workpieces with two plane-parallel surfaces.
  • Corresponding machines are available in a large number of different designs.
  • Common double-side grinding machines have in common is that they have two mostly annular working discs, which are facing with an abrasive material faces facing each other and form between them a working gap through which the workpieces are guided while being processed on both sides simultaneously.
  • a double-sided grinding machine with planetary kinematics is called, as in DE 195 47 085 A1 is described.
  • a double side grinder is also known EP 0 941 803 A2 ,
  • the present invention seeks to provide a device of the type mentioned above, with a two-sided grinding machining is also possible with low effort and high quality of burrs prone to burring.
  • the invention solves the problem in that at least one of the working wheels deburring means are arranged, which are adapted to deburr the workpieces during their processing in the device.
  • the workpieces to be machined are moved by the guide means in the working gap formed between the working surfaces of the working disks and at the same time ground on both sides by the work surfaces by at least one of the Working disks are driven in rotation.
  • the working wheels can be arranged coaxially for machining. But it is also a non-coaxial alignment of the working wheels possible.
  • the machining of the flat workpieces usually serves to produce plane-parallel workpiece surfaces. They can for example consist of a metallic material, in particular a steel material.
  • the workpieces can also be, for example, semiconductor wafers or other workpieces.
  • the device according to the invention therefore has deburring means arranged on at least one working disk.
  • the deburring means according to the invention can be provided in particular on both working disks.
  • the deburring means are arranged so that the workpieces come into contact with the working surfaces as well as with the deburring means on their path traveled in the apparatus in the course of their processing.
  • the device according to the invention combines the functionality of a double-sided surface grinding machine with that of a deburring machine, so that the workpieces are simultaneously ground and deburred. There is thus an in situ deburring during processing.
  • the deburring means are integrated in the working surface of the at least one working disk.
  • the workpieces are therefore simultaneously deburred during their processing in the working gap in this.
  • the at least one working disk has at least one receptacle formed in the region of the working surface, in particular at least one groove, in which the deburring means are arranged.
  • corresponding recesses for the deburring means are formed in the end face defining the working gap of the at least one working disk.
  • the deburring means can therefore be arranged extending in an annular manner in the work surface and / or extending radially in the work surface and / or running in an arcuate manner in the work surface.
  • the means for guiding the workpieces have at least one, in particular a plurality, arranged in the working gap rotor disc which receives the workpieces to be machined in recesses and can be rotated by means of a rolling device, whereby recorded in the rotor disc Workpieces move along cycloidal paths in the working gap.
  • the rolling device can have an inner and an outer pin or ring gear in a conventional manner, wherein at least one of the pin or ring gears can be rotated by means of a drive.
  • the at least one rotor disc can then have correspondingly on its periphery an external toothing, with which it rolls upon rotation of at least one of the pin or ring gears on this.
  • the device for guiding the workpieces in the working gap, the workpieces also for processing from an area outside the working gap into the working gap into and out of this addition may, for example, have a rotatably driven guide disk, the axis of rotation of which is arranged essentially parallel but offset relative to the or the axes of rotation of the working disks. Through this guide disc, the workpieces can be kept and in the course of the rotation of the guide disc in the working gap into, through and out through this out of the working gap.
  • the deburring means may comprise deburring brushes which protrude with their bristles over the plane of the working surface of the at least one working disk.
  • the brushes may have individual bristle tufts provided with Abrasivkömern for deburring.
  • the bristle tufts are arranged one behind the other along an annular, radial or arcuate course of the deburring means, for example. They protrude slightly beyond the plane spanned by the working surface of the respective working disk, ie in particular into the working gap. The workpieces then come in contact with the bristles during machining and are deburred in this way. In practice, it has proved to be suitable if the bristles protrude over a length of 0.1 mm to 1 mm beyond the work surfaces in the working gap.
  • the deburring means in particular the Entgratungsbürsten, be adjustable in height.
  • this height adjustment can be defined exactly how far the deburring protrude into the working gap.
  • an optionally continuous adjustment of the position of the deburring means can be carried out in order to maintain the desired supernatant even with a wear of the deburring.
  • the wear of the deburring will be faster or slower than the wear of the abrasive coatings of the working wheels.
  • the height adjustment of the deburring means can be done, for example, by exchangeable fixed or adjustable spacer elements on which the deburring means, for example the deburring brushes are mounted.
  • an adjustment is also conceivable, for example, by means of adjusting screws, which can be operated manually or by motor and thus allow a height adjustment.
  • the deburring means can be driven in rotation. By a rotation of the deburring the deburring effect is improved.
  • the deburring means can be driven by the same drive as the at least one working disk. But it is also conceivable to provide for the deburring their own, different drive than the working disk.
  • the speeds for the working wheels and the deburring means can be selected independently and set, for example, opposite directions of rotation become.
  • the flexibility is increased and the Entgratungs
  • FIG. 1 the basic structure of a device according to the invention for two-sided machining of flat workpieces is shown.
  • the in the example in FIG. 1 The device shown is a Doppeltownschleifmaschine 10 with planetary kinematics.
  • the device 10 has an upper pivoting arm 12, which can be pivoted about a pivot axis 16 mounted on a lower base 14 about a vertical axis.
  • On the pivot arm 12 is an annular upper work disk 18 worn.
  • the upper working disk 18 is in a FIG. 1 not shown drive motor rotatably driven.
  • the working disk 18 has a working surface, which is provided in the example shown with an abrasive coating.
  • the base 14 has a support portion 20 which carries an annular lower working disk 22. It also has a work surface on its upper side.
  • the lower working disk 22 is also rotatably driven via a drive motor, not shown, in particular in opposite directions to the upper working disk 18.
  • On the lower working disk 22 a plurality of carriers 24 are shown, each having recesses 26 for workpieces to be machined.
  • the carriers 24 each have an outer toothing 28 with which they engage with an inner pin collar 30 and an outer pin ring 32 of the device. It is formed in this way a rolling device, wherein the rotor discs 24 are also rotated during rotation of the lower working disk 22, for example via the inner pin ring 30 in rotation.
  • the arranged in the recesses of the rotor discs 24 workpieces then move along cycloid trajectories.
  • the workpieces to be ground are inserted into the recesses 26 of the carriers 24.
  • the two working wheels 18, 22 are aligned coaxially with each other. They then form a working gap between them, in which the carriers 24 are arranged with the workpieces held by them.
  • the upper working disk 16 is then pressed onto the workpieces by means of a high-precision loading system. It then acts from the upper and the lower working disk 18, 22 each have a contact pressure on the workpieces to be machined and these are ground simultaneously on both sides.
  • the structure and function of such a double-side processing machine 10 are known in the art.
  • FIG. 2 is a part of a device according to the invention according to a second embodiment shown in a perspective view.
  • the upper working disk 18 has, as in the in FIG. 1 illustrated example, a work surface 34 with an abrasive coating.
  • the lower working disk 22 likewise has a working surface 36 with an abrasive coating.
  • the work surfaces 34, 36 define between them the working gap.
  • the upper and lower working disks 18, 22 are aligned substantially coaxially with each other and rotate about axes of rotation 38, 39 FIG. 1
  • the device according to the invention has the device according to FIG. 2 no planetary kinematics.
  • the device has to guide the workpieces in the working gap according to FIG. 2 a likewise annular guide disc 40, are held in the workpieces to be machined (not shown) in receptacles 41.
  • the guide plate 40 is rotationally driven. Its axis of rotation 42 is substantially parallel to the axis of rotation 38 of the working wheels 18, 22, but offset from this. In particular, the axes of rotation 38, 39 of the working wheels 18, 22 may be slightly tilted against each other to allow the entry of the workpieces in the working gap.
  • a rotation of the guide plate 40 are in FIG. 2 not shown in the pictures 41 held workpieces passed through the working gap formed between the rotating working wheels 18, 22 and machined in the working gap corresponding double-sided grinding.
  • FIG. 3 and 4 is an example of the in FIG. 1 and FIG. 2 shown devices usable annular lower working disk 22 is shown.
  • deburring means 44 in the illustrated example Entgratungsbürsten 44, integrated into the work surface 36.
  • the working disk 22 in the region of its working surface 36 has an annular peripheral groove 46, in which the Entgratungsbürsten 44 are arranged. These thus also run circumferentially in the work surface 36.
  • the Entgratungsbürsten 44 have, for example, a plurality of bristle tufts, not shown, which are arranged along the course of the Entgratungsbürsten 44 one behind the other.
  • a work disk 22 is shown according to another example not according to the invention. Unlike in the Figures 3 and 4 As shown, the deburring brushes 44 are arranged outside of the working surface 36 on the working disk 22 in this working disk 22.
  • the Entgratungsbürsten 44 are annularly circumferentially disposed on the outer periphery 48 of the working disk 22 and secured in a manner not shown. The attachment may be provided on the work disk 22 or otherwise independent of the work disk 22.
  • the workpieces held in the guide disk 40 come into or out of the work gap formed between the work surfaces 34, 36 in the course of their rotation with the guide disk 40 into the area of action of the deburring brushes 44 and are correspondingly deburred.
  • deburring means 44 may also be arranged annularly circumferentially on the inner circumference 50 of the working disk 22. That in the Figures 5 and 6 Example shown is particularly suitable for use in a device as shown schematically in FIG FIG. 2 is shown.
  • deburring means 44 may be advantageous.
  • the work disk 22 in a plan view in the work surface 36 integral deburring brushes 44 shown extending radially in the work surface 36.
  • the deburring means 44 could be guided by corresponding receptacles 46 and, for example, extend arcuately in the working surface 36 or describe a different course.
  • FIGS. 3 to 7 By way of example, a lower working disk 22 is shown, of course, alternatively or in addition to the lower working disk 22, the upper working disk 18 may also be provided with deburring means according to the invention.
  • the Entgratungsbürsten 44 shown in the figures are adjustable in height, so that even with a wear of the brush 44 at any time a sufficient projection of the Entgratungsbürsten 44 is ensured beyond the worktop plane out into the working gap. In the example shown, this supernatant is set between 0.1 and 1 mm.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Claims (8)

  1. Dispositif pour meuler des deux côtés des pièces plates avec des meules de travail supérieure et inférieure (18, 22) qui présentent chacune une face de travail (34, 36) avec un revêtement de meulage, les faces de travail (34, 36) formant entre elles une fente de travail dans laquelle des pièces peuvent être meulées, au moins une des meules de travail (18, 22) pouvant être entraînée en rotation au moyen d'un entraînement, et présentant également un équipement pour le guidage des pièces dans la fente de travail, caractérisé en ce que sur au moins une des meules de travail (18, 22) il sont disposé des moyens d'ébarbage (44) qui sont constitués pour ébarber les pièces pendant leur usinage dans le dispositif, la meule de travail (18, 22) au moins au nombre de un présentant au moins un logement (46) qui est formé dans la zone de la face de travail (34, 36) et dans lequel sont disposés les moyens d'ébarbage (44).
  2. Dispositif selon la revendication 1, caractérisé en ce que le logement au moins au nombre de un est au moins une rainure (46).
  3. Dispositif selon une des revendications 1 ou 2, caractérisé en ce que les moyens d'ébarbage (44) sont disposés placés sous forme annulaire sur la périphérie dans la face de travail (34, 36) et/ou radialement dans la face de travail (34, 36) et/ou placés en forme d'arc dans la face de travail (34, 36).
  4. Dispositif selon une des revendications précédentes, caractérisé en ce que l'équipement pour le guidage des pièces présente au moins un disque mobile (24) disposé dans la fente de travail, qui loge dans des évidements (26) les pièces à usiner et qui peut être mis en rotation au moyen d'un dispositif de roulement, de sorte que des pièces logées dans le disque mobile (24) se déplacent le long de trajectoires cycloïdales.
  5. Dispositif selon une des revendications précédentes, caractérisé en ce que les moyens d'ébarbage (44) présentent des brosses d'ébarbage (44) qui, avec leurs poils, dépassent du niveau de la face de travail (34, 36) de la meule de travail (18, 22) au moins au nombre de un.
  6. Dispositif selon la revendication 5, caractérisé en ce que les moyens d'ébarbage (44) sont réglables en hauteur.
  7. Dispositif selon une des revendications précédentes, caractérisé en ce que les moyens d'ébarbage (44) peuvent être entraînés en rotation.
  8. Dispositif selon la revendication 7, caractérisé en ce que les moyens d'ébarbage (44) peuvent être entraînés en rotation indépendamment de la meule de travail (18, 22) au moins au nombre de un.
EP09795315A 2008-12-22 2009-11-18 Dispositif pour meuler des deux côtés des pièces plates Not-in-force EP2376257B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008063228A DE102008063228A1 (de) 2008-12-22 2008-12-22 Vorrichtung zur beidseitigen schleifenden Bearbeitung flacher Werkstücke
PCT/EP2009/008184 WO2010072289A1 (fr) 2008-12-22 2009-11-18 Dispositif pour meuler des deux côtés des pièces plates

Publications (2)

Publication Number Publication Date
EP2376257A1 EP2376257A1 (fr) 2011-10-19
EP2376257B1 true EP2376257B1 (fr) 2013-01-02

Family

ID=42102187

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09795315A Not-in-force EP2376257B1 (fr) 2008-12-22 2009-11-18 Dispositif pour meuler des deux côtés des pièces plates

Country Status (8)

Country Link
US (1) US9004981B2 (fr)
EP (1) EP2376257B1 (fr)
JP (1) JP5360623B2 (fr)
KR (1) KR20110096153A (fr)
CN (1) CN102264508B (fr)
DE (1) DE102008063228A1 (fr)
SG (1) SG172157A1 (fr)
WO (1) WO2010072289A1 (fr)

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JP2015030058A (ja) * 2013-08-02 2015-02-16 信越半導体株式会社 ドレッシング方法及びドレッシング装置
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CN104924197A (zh) * 2015-05-28 2015-09-23 海宁奇晟轴承有限公司 一种自动双盘研磨机
CN108608314B (zh) * 2018-06-08 2019-10-11 大连理工大学 一种用于双面电化学机械抛光平面构件的设备及方法
CN110293481B (zh) * 2019-06-26 2021-12-24 西安奕斯伟材料科技有限公司 一种研磨设备和研磨设备的清洁方法
CN111906625B (zh) * 2020-06-29 2022-06-24 陈正林 一种木剑磨砂装置
CN112108949B (zh) * 2020-09-10 2022-05-20 肇庆中彩机电技术研发有限公司 一种精密轴承宽度研磨装置及其研磨方法
CN112192144B (zh) * 2020-10-21 2024-09-13 大连东鼎工业设备有限公司 一种风电偏航制动盘修复装置
CN113843678B (zh) * 2021-10-15 2024-12-17 广东鸿特精密技术（台山）有限公司 一种去除工件正反面毛刺的抛光机
CN115042029A (zh) * 2022-08-12 2022-09-13 潍坊谷合传动技术有限公司 一种用于车桥组件端面精加工的打磨抛光装置
CN116197762B (zh) * 2023-04-20 2023-08-08 瑞安市江南铝业有限公司 一种铝合金工件表面去毛刺装置

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US9004981B2 (en) 2015-04-14
DE102008063228A1 (de) 2010-06-24
JP2012513310A (ja) 2012-06-14
KR20110096153A (ko) 2011-08-29
SG172157A1 (en) 2011-07-28
JP5360623B2 (ja) 2013-12-04
CN102264508B (zh) 2013-12-18
CN102264508A (zh) 2011-11-30
EP2376257A1 (fr) 2011-10-19
WO2010072289A1 (fr) 2010-07-01
US20110300785A1 (en) 2011-12-08

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