EP2461942A4 - Procédé et système de traitement d éléments optiques à l aide d une finition magnétorhéologique - Google Patents
Procédé et système de traitement d éléments optiques à l aide d une finition magnétorhéologiqueInfo
- Publication number
- EP2461942A4 EP2461942A4 EP20100806996 EP10806996A EP2461942A4 EP 2461942 A4 EP2461942 A4 EP 2461942A4 EP 20100806996 EP20100806996 EP 20100806996 EP 10806996 A EP10806996 A EP 10806996A EP 2461942 A4 EP2461942 A4 EP 2461942A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- magnetorheological
- finish
- optical elements
- processing optical
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23079309P | 2009-08-03 | 2009-08-03 | |
| US12/760,418 US8271120B2 (en) | 2009-08-03 | 2010-04-14 | Method and system for processing optical elements using magnetorheological finishing |
| US12/782,566 US8780440B2 (en) | 2009-08-03 | 2010-05-18 | Dispersion compensation in chirped pulse amplification systems |
| PCT/US2010/044138 WO2011017266A1 (fr) | 2009-08-03 | 2010-08-02 | Procédé et système de traitement déléments optiques à laide dune finition magnétorhéologique |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2461942A1 EP2461942A1 (fr) | 2012-06-13 |
| EP2461942A4 true EP2461942A4 (fr) | 2013-01-23 |
| EP2461942B1 EP2461942B1 (fr) | 2015-12-02 |
Family
ID=43526750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP10806996.4A Active EP2461942B1 (fr) | 2009-08-03 | 2010-08-02 | Procede et systeme de traitement d'elements optiques a l'aide d'une finition magnetorheologique |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8271120B2 (fr) |
| EP (1) | EP2461942B1 (fr) |
| KR (1) | KR101379547B1 (fr) |
| CA (1) | CA2769650C (fr) |
| WO (1) | WO2011017266A1 (fr) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8613640B2 (en) * | 2010-12-23 | 2013-12-24 | Qed Technologies International, Inc. | System for magnetorheological finishing of substrates |
| US8896293B2 (en) * | 2010-12-23 | 2014-11-25 | Qed Technologies International, Inc. | Method and apparatus for measurement and control of magnetic particle concentration in a magnetorheological fluid |
| CN102848287B (zh) * | 2012-09-14 | 2014-09-17 | 中国人民解放军国防科学技术大学 | 光学零件中高频误差的组合式加工方法 |
| CN103252686B (zh) * | 2013-06-06 | 2016-01-20 | 青岛理工大学 | 钛合金人工膝关节磁流变抛光加工装置 |
| CN103692294B (zh) * | 2013-11-11 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | 米量级光学元件的超高精度加工方法 |
| US9779872B2 (en) | 2013-12-23 | 2017-10-03 | Kla-Tencor Corporation | Apparatus and method for fine-tuning magnet arrays with localized energy delivery |
| CN104690652B (zh) * | 2015-02-13 | 2017-01-11 | 浙江工业大学 | 一种人工关节软性磨粒流湍流加工装置 |
| CN107283255A (zh) * | 2017-07-28 | 2017-10-24 | 哈尔滨奥瑞德光电技术有限公司 | 一种用于蓝宝石晶棒平磨导向边的工装 |
| CN107617933B (zh) * | 2017-11-06 | 2023-05-05 | 广东工业大学 | 一种动态磁场磁流变抛光装置 |
| CN108857589A (zh) * | 2018-06-26 | 2018-11-23 | 南通大学 | 一种磁流变抛光设备的磁极调节单元保护系统 |
| CN109623507A (zh) * | 2019-01-02 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | Yag板条激光晶体反射面形加工方法 |
| CN111266938B (zh) * | 2020-03-26 | 2021-11-12 | 平湖市鼎天机械有限责任公司 | 一种工件抛光方法 |
| CN111948828B (zh) * | 2020-08-25 | 2021-12-17 | 中国工程物理研究院激光聚变研究中心 | 一种无时空畸变的激光脉冲展宽方法 |
| US12691548B2 (en) | 2020-10-08 | 2026-07-28 | Corning Incorporated | Methods for compensating for crystal structure differential material removal rates in sub-aperture figuring processes |
| CN113021086A (zh) * | 2021-03-29 | 2021-06-25 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种用于机器人末端的打磨装置及其打磨方法 |
| CN114012512B (zh) * | 2021-10-29 | 2022-08-16 | 哈尔滨工业大学 | 一种基于激光加热、水浴加热、化学作用共同辅助的小球头磁流变抛光方法 |
| CN113977361B (zh) * | 2021-10-29 | 2022-08-16 | 哈尔滨工业大学 | 一种基于激光辐照降低磁流变液粘度的小球头磁流变抛光工艺方法 |
| CN114273991B (zh) * | 2021-12-30 | 2022-10-28 | 淮安市力恒液压机械有限公司 | 一种液压换向阀生产用加工装置及方法 |
| KR102987872B1 (ko) | 2022-03-07 | 2026-07-07 | 삼성디스플레이 주식회사 | 연마 장치 및 이를 이용한 연마 방법 |
| CN118650496A (zh) * | 2024-07-22 | 2024-09-17 | 武汉大衍精密光电技术有限公司 | 一种加工抛光处理方法及系统 |
| CN120395562B (zh) * | 2025-07-01 | 2025-09-02 | 中国科学院长春光学精密机械与物理研究所 | 基于传感器调控加工姿态的磁流变抛光设备及方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3748015A (en) | 1971-06-21 | 1973-07-24 | Perkin Elmer Corp | Unit power imaging catoptric anastigmat |
| US5180150A (en) * | 1992-01-24 | 1993-01-19 | Hughes Danbury Optical Systems, Inc. | Apparatus for providing consistent registration of semiconductor wafers |
| US5795212A (en) * | 1995-10-16 | 1998-08-18 | Byelocorp Scientific, Inc. | Deterministic magnetorheological finishing |
| US6819438B2 (en) | 2000-06-02 | 2004-11-16 | Gsi Lumonics Corporation | Technique for fabricating high quality optical components |
| US20020081943A1 (en) | 2000-12-11 | 2002-06-27 | Hendron Jeffrey J. | Semiconductor substrate and lithographic mask processing |
| US6922599B2 (en) | 2001-08-13 | 2005-07-26 | The Boeing Company | System and method for producing an assembly by directly implementing three-dimensional computer-aided design component definitions |
| US6746310B2 (en) | 2002-08-06 | 2004-06-08 | Qed Technologies, Inc. | Uniform thin films produced by magnetorheological finishing |
| US8666142B2 (en) * | 2008-11-18 | 2014-03-04 | Global Filtration Systems | System and method for manufacturing |
-
2010
- 2010-04-14 US US12/760,418 patent/US8271120B2/en active Active
- 2010-08-02 KR KR1020127005535A patent/KR101379547B1/ko active Active
- 2010-08-02 EP EP10806996.4A patent/EP2461942B1/fr active Active
- 2010-08-02 WO PCT/US2010/044138 patent/WO2011017266A1/fr not_active Ceased
- 2010-08-02 CA CA2769650A patent/CA2769650C/fr active Active
Non-Patent Citations (1)
| Title |
|---|
| No further relevant documents disclosed * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011017266A1 (fr) | 2011-02-10 |
| KR20120066631A (ko) | 2012-06-22 |
| US20110028071A1 (en) | 2011-02-03 |
| EP2461942A1 (fr) | 2012-06-13 |
| EP2461942B1 (fr) | 2015-12-02 |
| CA2769650C (fr) | 2018-03-06 |
| US8271120B2 (en) | 2012-09-18 |
| CA2769650A1 (fr) | 2011-02-10 |
| KR101379547B1 (ko) | 2014-03-28 |
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