EP2549112B1 - Mehrstufen-Trockenvakuumpumpe - Google Patents

Mehrstufen-Trockenvakuumpumpe Download PDF

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Publication number
EP2549112B1
EP2549112B1 EP12177089.5A EP12177089A EP2549112B1 EP 2549112 B1 EP2549112 B1 EP 2549112B1 EP 12177089 A EP12177089 A EP 12177089A EP 2549112 B1 EP2549112 B1 EP 2549112B1
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EP
European Patent Office
Prior art keywords
vacuum pump
discharge
channel
annular seal
pump according
Prior art date
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Active
Application number
EP12177089.5A
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English (en)
French (fr)
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EP2549112A3 (de
EP2549112A2 (de
Inventor
Stéphane Crochet
Patrick Philippe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
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Publication date
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Publication of EP2549112A2 publication Critical patent/EP2549112A2/de
Publication of EP2549112A3 publication Critical patent/EP2549112A3/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Definitions

  • the present invention relates to a multi-stage dry type vacuum pump having load shedding means for discharging a flow of gas from the outlet of a pump stage to the discharge.
  • the invention applies in particular to a dry type vacuum pump comprising two rotary lobes type "Roots” or “Claw", or type spiral or screw or another similar principle.
  • the multi-stage vacuum pumps comprise several series pumping stages in which circulates a gas to be pumped between a suction and a discharge.
  • vacuum pumps rotary lobes also known as “Roots” with two or three lobes or double-billed, also known as "Claw”.
  • the rotary lobe pumps comprise two rotors of identical profiles, rotating inside a stator in opposite directions. During rotation, the gas to be pumped is trapped in the free space between the rotors and the stator, and is driven by the rotor to the next stage or after the last stage discharge outlet. The operation is carried out without any mechanical contact between the rotors and the stator, which allows the total absence of oil in the pumping stages.
  • the last pump stages on the discharge side may have a generated volume, that is to say a volume of pumped gas, smaller than that of the first pump stages, on the suction side.
  • enclosures are evacuated since the atmospheric pressure, to be able to transfer a substrate in a treatment room maintained at low pressure.
  • the vacuum pump must absorb large initial gas flows, which are not admitted by the last pump stages on the discharge side.
  • Some vacuum pumps therefore provide a load shedding means connecting the output of a suction pump stage to unload.
  • the load shedding means makes it possible to evacuate the excess gas flow coming from the outlet of the pumping stage to be discharged directly to the discharge of the vacuum pump.
  • the load shedding means comprises a steel ball resting in a cast iron seat of the channel.
  • Each cycle of evacuation / return to atmospheric pressure of the enccinte requires lowering the pressure in the chamber from the atmospheric pressure, and vice versa.
  • Some cycles are particularly fast, for example of the order of a dozen seconds, which implies that the steel ball drops every six seconds on its seat, which can cause premature wear of the load shedding means.
  • EP 0 347 706 discloses a vacuum pump of the state of the art.
  • One of the aims of the present invention is to propose a dry type vacuum pump having a load shedding means whose life is increased.
  • the subject of the invention is a dry multistage multi-stage vacuum pump comprising a plurality of pumping stages respectively comprising an inlet and an outlet, the pumping stages being connected in series between a suction and a discharge of the vacuum pump, the vacuum pump further comprising load shedding means comprising a channel connecting the output of a pump stage to be discharged at the discharge.
  • the shedding means comprises at least one annular seal having a radial projection base surmounted by a frustoconical opening, the radial projection being housed in an annular groove of the channel and the frustoconical opening forming a seat for a ball of the unloading means, the annular seal being made in one piece.
  • the radial projection is housed in the annular channel groove to secure the annular seal in the channel.
  • the channel In normal operation of the vacuum pump, that is to say for pumping a permissible gas flow for the vacuum pump, the channel is closed by the ball.
  • the ball is supported in the frustoconical opening of the annular seal, sealingly closing the mouth of the channel, thereby preventing the pumped gas from short-circuiting the next pump stages.
  • the gas stream raises the ball of its seat, which opens the channel and allows to evacuate the surplus gas from the pumping stage to offload to the discharge.
  • the load shedding means thus bypasses the following pumping stages.
  • the figures 1 and 2 illustrate an exemplary embodiment of a dry type multi-stage vacuum pump 1.
  • the vacuum pump 1 comprises two rotary lobe shafts of "Roots” type.
  • the invention also applies to other types of multistage dry type vacuum pumps, such as "Claw” type or another similar principle.
  • the multi-stage vacuum pump 1 comprises several pumping stages, six in this example, TA, T1, T2, T3, T4, TR, connected in series between a suction 2 and a delivery 3 of the vacuum pump 1 and in which a gas to be pumped can circulate.
  • the rotating shafts extend into the pumping stages by rotary lobe rotors (not visible) and are driven on the discharge stage side by a motor M of the vacuum pump 1.
  • the pump in vacuum 1 is called “dry” because in operation, the rotors rotate inside the stator 4 of the vacuum pump 1 in opposite directions without any mechanical contact between the rotors and the stator 4, which allows the total absence oil.
  • the vacuum pump has a flow rate of 180m 3 / h.
  • the six pumping stages are successively connected in series between the suction 2 and the discharge 3, respectively TA, T1, T2, T3, T4, TR. Each floor has an entrance and an exit.
  • the successive stages are connected in series one after the other by respective inter-stage lines connecting the output of the preceding pumping stage to the input of the next stage.
  • the first pump stage TA whose input communicates with the suction 2 of the vacuum pump 1 is also called the "suction stage”.
  • the last pump stage TR whose output 18 communicates with the discharge 3 of the vacuum pump 1 is also called “discharge stage”.
  • the pump stages T1, T2, T3 and T4 connected in series between the suction stage TA and the discharge stage TR are also called intermediate stages.
  • the vacuum pump 1 comprises a means for unloading a pumping stage.
  • the first intermediate pumping stage T1 has a greater generated volume than that of the next pumping stage T2, which limits the flow rate of the vacuum pump 1. This is therefore the first stage of intermediate pumping T1 (also called second pumping stage) which comprises a means for offloading the surplus gas flow.
  • the load shedding means comprises a channel 5 connecting the outlet 6 of the second pump stage T1 to the discharge 3 of the vacuum pump 1.
  • the load shedding means makes it possible to evacuate the possible excess of gas flows coming from the outlet 6 of the second pump stage T1 to discharge 3 of the vacuum pump 1.
  • the channel 5 is for example made in a discharge housing 8 of the vacuum pump 1.
  • the discharge housing 8 is disposed under the pumping stages TA, T1, T2, T3, T4, TR. It is fixed to the stator 4 by conventional fastening means 9.
  • the discharge housing 8 is for example made in one piece, cast iron as the stator 4 of the vacuum pump 1.
  • the channel 5 has two mouths 7a, 7b arranged in shunt.
  • the mouths 7a, 7b have a frustoconical portion 10a, 10b formed over a throat annular 11a, 11b.
  • the unloading means also comprises two annular seals 12a, 12b and two balls 13a, 13b.
  • each annular seal 12a, 12b has a radial projection base 14a, 14b surmounted by a frustoconical opening 15a, 15b.
  • the radial projection 14a or 14b is housed in the annular groove 11a, 11b of a respective mouth 7a, 7b of the channel 5 in order to secure the respective annular seal 12a, 12b in the channel 5.
  • the base of the annular seal 12a, 12b presents for example a toric shape.
  • the annular groove 11a, 11b has for example a cylindrical shape, which allows to leave a game around the toric base of the seal 12a, 12b allowing its interlocking elastic in the groove.
  • the balls 13a, 13b rest on the annular seals 12a, 12b and are partially housed in blind cavities 16a, 16b formed in the casing 4 of the vacuum pump 1 vis-à-vis the mouths 7a, 7b of the channel 5.
  • the balls 13a, 13b are for example steel.
  • the annular seals 12a, 12b are made in one piece, for example by molding. They are elastomeric, for example silicone, which improves their mechanical strength and resistance to the high temperatures of the heated pump.
  • the balls 13a, 13b close the mouths 7a, 7b of the channel 5 sealingly.
  • the frustoconical openings 15a, 15b of the annular seals 12a, 12b also allow self centering of the ball 13a, 13b and its damping at the moment when the balls fall on the seat of the respective annular seal 12a, 12b.
  • the annular seal 12a, 12b has an external frustoconical portion received in the complementary frustoconical portion 10a, 10b of the mouth 7a, 7b of the channel 5.
  • the frustoconical outer portion of the seal 12a, 12b matches the complementary shape of the portion frustoconical 10a, 10b of the mouth 7a, 7b respective channel 5.
  • the reinforcement provided by the frustoconical mouth of the channel 5 improves the mechanical strength of the annular seal 12a, 12b and its attachment in the mouth 7a, 7b .
  • a discharge pipe 17 is also provided in the discharge box 8, for connecting the outlet 18 of the last pump stage TR (or discharge stage) to the discharge 3 of the vacuum pump 1.
  • the discharge pipe 17 has a housing 19 to receive a muffler 20 of the vacuum pump 1, interposed between the outlet 18 of the last pumping stage TR and the discharge 3.
  • the muffler 20 is for example a "quarter-wave tube”.
  • the discharge housing 8 also comprises a clearance 21 placing the housing 19 in communication with the mouths 7a, 7b of the channel 5 when the balls 13a, 13b are raised ( figures 3 , 4 and 5 ).
  • the mouths 7a, 7b are closed.
  • the two balls 13a, 13b are supported in the frustoconical openings 15a, 15b of the respective annular seals 12a, 12b, sealingly closing the mouths 7a, 7b of the channel 5, thus preventing the pumped gas from short-circuiting the pumping stages.
  • the pumped gas follows the path represented by the dashed arrows on the figure 4 the gas to be pumped is sucked by the six pumping stages and leaves at the outlet 18 of the discharge stage TR. Then, the gas enters the discharge pipe 17, and passes through the housing 19, via the silencer 20, up to the discharge 3 of the vacuum pump 1.
  • the excess gas lifts the balls 13a, 13b of their respective seat against the bottom of the blind cavities 16a, 16b, clearing the openings of the channel 5 (see for example the mouth 7a on the figure 3 ).
  • the gas is then evacuated from the second pump stage T1 to the discharge 3.
  • the unloaded gas follows the path represented by the arrows in solid lines on the figure 4 at the outlet 6 of the second pump stage T1, the gas passes under the balls 13a, 13b in the shoulder 21, then in the housing 19, through the silencer 20, and rejoins the discharge 3 of the vacuum pump 1
  • the load-shedding means thus makes it possible to short-circuit the last four pump stages T2, T3, T4 and TR.
  • the channel 5 is open, everything happens as if the vacuum pump 1 had only its first two active pumping stages, respectively the suction stage TA and the first intermediate stage T1.
  • the figure 3 shows for purposes of illustration, a first mouth 7b closed and a second mouth open 7a. In reality, these open and close almost simultaneously since they are arranged in derivation.
  • the unloading means comprises two assemblies associating a mouthpiece 7a, 7b, an annular seal 12a, 12b and a ball 13a, 13b.
  • the vacuum pump may have only one assembly with a single mouth of the channel, receiving an annular seal and a ball (not shown).
  • Two bypass assemblies are used in the example illustrated to off-load a larger gas flow while maintaining a small footprint.
  • the second intermediate stage T2 has a smaller generated volume than the previous intermediate stage T1. It is therefore this third pump stage T2 which limits the flow rate of the vacuum pump 1.
  • the gas at the outlet of the first intermediate stage T1 is therefore unloaded.
  • the choice of the pumping stage to be unloaded depends on the geometry of the vacuum pump and more particularly on the volume generated in the pumping stages. It is the pumping stage with the highest compression ratio that will be shed. Thus according to other configurations not shown, the pumping stage to be off is the first pumping stage. As the generated volume decreases with increasing pressure, the pumping stages to be off-loaded are most often the first or the second pumping stage. It is also conceivable to unload several pumping stages, such as for example the first two pumping stages.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (11)

  1. Mehrstufen-Trockenvakuumpumpe, umfassend eine Vielzahl von Pumpstufen (TA, T1, T2, T3, T4, TR), jeweils umfassend einen Eingang und einen Ausgang, wobei die Pumpstufen in Serie zwischen einer Ansaugleitung (2) und einer Förderleitung (3) der Vakuumpumpe montiert sind, wobei die Vakuumpumpe ferner ein Entlastungsmittel aufweist, umfassend einen Kanal (5), der den Ausgang (6) einer zu entlastenden Pumpstufe (T1) an die Förderleitung (3) anschließt, dadurch gekennzeichnet, dass das Entlastungsmittel mindestens eine Ringdichtung (12a, 12b) umfasst, die einen Sockel aufweist, der einen radialen Vorsprung (14a, 14b) bildet, der über einer kegelstumpfartigen Öffnung (15a, 15b) montiert ist, wobei der radiale Vorsprung (14a, 14b) in einer Ringnut (11a, 11b) des Kanals (5) angeordnet ist und die kegelstumpfartige Öffnung (15a, 15b) einen Sitz für eine Kugel (13a, 13b) des Entlastungsmittels bildet, wobei die Ringdichtung (12a, 12b) aus einem Stück hergestellt ist.
  2. Vakuumpumpe nach Anspruch 1, bei der die Ringdichtung (12a, 12b) einen äußeren kegelstumpfartigen Abschnitt aufweist, der in einem komplementären kegelstumpfartigen Abschnitt (10a, 10b) der Einmündung des Kanals (5) aufgenommen ist, die über der Ringnut (11a, 11b) ausgenommen ist.
  3. Vakuumpumpe nach einem der vorhergehenden Ansprüche, bei der der Sockel der Ringdichtung (12a, 12b) eine Wulstform aufweist.
  4. Vakuumpumpe nach einem der Ansprüche 1 bis 3, bei der die Ringdichtung (12a, 12b) ein Elastomermaterial umfasst.
  5. Vakuumpumpe nach einem der Ansprüche 1 bis 3, bei der die Ringdichtung (12a, 12b) ein Silikonmaterial umfasst.
  6. Vakuumpumpe nach einem der Ansprüche 1 bis 3, bei der die Ringdichtung (12a, 12b) aus Silikon besteht.
  7. Vakuumpumpe nach einem der vorhergehenden Ansprüche, bei der der Kanal (5) den Ausgang (6) der zweiten Pumpstufe (T1) mit der Förderleitung (3) verbindet.
  8. Vakuumpumpe nach einem der vorhergehenden Ansprüche, bei der das Entlastungsmittel umfasst:
    - zwei Ringdichtungen (12a, 12b), deren Sockel in einer jeweiligen Ringnut (11a, 11b) der beiden Einmündungen (7a, 7b) des Kanals (5), die versetzt vorgesehen sind, angeordnet ist,
    - zwei Kugeln (13a, 13b), die in einer kegelstumpfartigen Öffnung einer jeweiligen Ringdichtung (12a, 12b) aufgenommen werden.
  9. Vakuumpumpe nach einem der vorhergehenden Ansprüche, umfassend ein Fördergehäuse (8), in dem angeordnet sind:
    - eine Förderleitung (17), die derart vorgesehen ist, dass sie den Ausgang (18) der letzten Pumpstufe (TR) mit der Förderleitung (3) der Vakuumpumpe (1) verbindet, wobei die Förderleitung (17) eine Lagerung (19) für die Aufnahme eines Schalldämpfers (20) der Vakuumpumpe (1) aufweist, die zwischen dem Ausgang (18) der letzten Pumpstufe (TR) und der Förderleitung (3) angeordnet ist, und
    - der Kanal (5), der an mindestens einer Einmündung, die mit der Lagerung (19) in Verbindung steht, mündet.
  10. Vakuumpumpe nach Anspruch 9, bei der das Fördergehäuse (8) aus einem Stück hergestellt ist.
  11. Vakuumpumpe nach Anspruch 10, bei der das Fördergehäuse (8) aus Gusseisen hergestellt ist.
EP12177089.5A 2011-07-21 2012-07-19 Mehrstufen-Trockenvakuumpumpe Active EP2549112B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1102279A FR2978214B1 (fr) 2011-07-21 2011-07-21 Pompe a vide multi-etagee de type seche

Publications (3)

Publication Number Publication Date
EP2549112A2 EP2549112A2 (de) 2013-01-23
EP2549112A3 EP2549112A3 (de) 2013-02-06
EP2549112B1 true EP2549112B1 (de) 2015-09-02

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EP12177089.5A Active EP2549112B1 (de) 2011-07-21 2012-07-19 Mehrstufen-Trockenvakuumpumpe

Country Status (3)

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EP (1) EP2549112B1 (de)
KR (1) KR101945542B1 (de)
FR (1) FR2978214B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110770444A (zh) * 2017-06-17 2020-02-07 莱宝有限公司 多级旋转活塞泵

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Publication number Priority date Publication date Assignee Title
FR3109806B1 (fr) * 2020-04-29 2022-09-30 Pfeiffer Vacuum Technology AG Pompe à vide primaire et Installation
FR3112176B1 (fr) * 2020-10-09 2023-03-17 Pfeiffer Vacuum Pompe à vide primaire et Installation
WO2021219307A1 (en) * 2020-04-29 2021-11-04 Pfeiffer Vacuum Primary vacuum pump and installation
FR3128747B1 (fr) * 2021-11-03 2025-08-22 Pfeiffer Vacuum Pompe à vide multi-étagée

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CH416916A (de) * 1964-10-08 1966-07-15 Balzers Patent Beteilig Ag Olgedichtete mechanische rotierende Vakuumpumpe
US4295794A (en) * 1979-01-22 1981-10-20 Robinair Manufacturing Corporation Selective mode multi-stage vacuum pump
US5244352A (en) * 1988-06-24 1993-09-14 Siemens Aktiengesellschaft Multi-stage vacuum pump installation
JP2510903Y2 (ja) * 1989-03-24 1996-09-18 株式会社 神戸製鋼所 スクリュ式真空ポンプ用消音器
JP2001263516A (ja) 2000-03-15 2001-09-26 Iseki & Co Ltd リリーフバルブ
JP2008175166A (ja) * 2007-01-19 2008-07-31 Anest Iwata Corp 圧縮機の逆止弁
KR200444303Y1 (ko) * 2008-10-31 2009-05-04 안영세 가스 자동 차단장치
DE102009017886A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Schraubenvakuumpumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110770444A (zh) * 2017-06-17 2020-02-07 莱宝有限公司 多级旋转活塞泵
CN110770444B (zh) * 2017-06-17 2021-10-08 莱宝有限公司 多级旋转活塞泵

Also Published As

Publication number Publication date
FR2978214A1 (fr) 2013-01-25
EP2549112A3 (de) 2013-02-06
FR2978214B1 (fr) 2013-08-16
KR20130011970A (ko) 2013-01-30
KR101945542B1 (ko) 2019-02-07
EP2549112A2 (de) 2013-01-23

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