EP2549115A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP2549115A3
EP2549115A3 EP12174596.2A EP12174596A EP2549115A3 EP 2549115 A3 EP2549115 A3 EP 2549115A3 EP 12174596 A EP12174596 A EP 12174596A EP 2549115 A3 EP2549115 A3 EP 2549115A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
disk
sheet metal
outer radius
metal stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12174596.2A
Other languages
English (en)
French (fr)
Other versions
EP2549115A2 (de
Inventor
Michael Schweighöfer
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2549115A2 publication Critical patent/EP2549115A2/de
Publication of EP2549115A3 publication Critical patent/EP2549115A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe (1) mit einem Rotor (10) und wenigstens einer Blechstatorscheibe (24,26,28), wobei wenigstens eine Blechstatorscheibe (24,26,28) eine erste Teilscheibe (50) und eine zweite Teilscheibe (52) und sich zwischen einem inneren Radius (202) und einem äußeren Radius (204) erstreckende Schaufeln (54) aufweist, wobei wenigstens ein Blockiermittel (60,62,64,681,682,74,76,82,90,92) zur Verhinderung eines Übereinandergleitens der Teilscheiben (50,52) vorgesehen ist, welches wenigstens teilweise zwischen dem inneren und dem äußeren Radius (202,204) angeordnet ist.
EP12174596.2A 2011-07-20 2012-07-02 Turbomolekularpumpe Withdrawn EP2549115A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201110108115 DE102011108115A1 (de) 2011-07-20 2011-07-20 Turbomolekularpumpe

Publications (2)

Publication Number Publication Date
EP2549115A2 EP2549115A2 (de) 2013-01-23
EP2549115A3 true EP2549115A3 (de) 2015-08-05

Family

ID=46466192

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12174596.2A Withdrawn EP2549115A3 (de) 2011-07-20 2012-07-02 Turbomolekularpumpe

Country Status (2)

Country Link
EP (1) EP2549115A3 (de)
DE (1) DE102011108115A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013207269A1 (de) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
DE102013114576A1 (de) * 2013-12-19 2015-06-25 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
JP6660176B2 (ja) * 2015-12-25 2020-03-11 エドワーズ株式会社 真空ポンプ及びそれに使用される分割静翼部

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004353652A (ja) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd 分子ポンプ
DE69928866T2 (de) * 1998-06-23 2006-07-06 Boc Edwards Japan Ltd. Turbomolekularpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69928866T2 (de) * 1998-06-23 2006-07-06 Boc Edwards Japan Ltd. Turbomolekularpumpe
JP2004353652A (ja) * 2003-05-01 2004-12-16 Osaka Vacuum Ltd 分子ポンプ

Also Published As

Publication number Publication date
DE102011108115A1 (de) 2013-01-24
EP2549115A2 (de) 2013-01-23

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