EP2576089A1 - Dispositif de nettoyage et procédé de nettoyage d'un produit à nettoyer - Google Patents

Dispositif de nettoyage et procédé de nettoyage d'un produit à nettoyer

Info

Publication number
EP2576089A1
EP2576089A1 EP11721497.3A EP11721497A EP2576089A1 EP 2576089 A1 EP2576089 A1 EP 2576089A1 EP 11721497 A EP11721497 A EP 11721497A EP 2576089 A1 EP2576089 A1 EP 2576089A1
Authority
EP
European Patent Office
Prior art keywords
cleaning
liquid
cleaning liquid
cleaning device
dirt particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11721497.3A
Other languages
German (de)
English (en)
Inventor
Harald Kunz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecoclean GmbH
Original Assignee
Duerr Ecoclean GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Duerr Ecoclean GmbH filed Critical Duerr Ecoclean GmbH
Publication of EP2576089A1 publication Critical patent/EP2576089A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Definitions

  • the present invention relates to a cleaning device for cleaning a cleaning product, which comprises a bath of a cleaning liquid, in which the cleaning material is at least partially disposed during a cleaning process.
  • the cleaning devices of this type used in industrial cleaning technology have a washing mechanism, with which more or less targeted mechanical energy is transferred via the cleaning liquid to the items to be cleaned in order to achieve the removal of dirt particles from the items to be cleaned.
  • a back contamination by the cleaning fluid also called wash liquor
  • wash liquor is not effectively suppressed here in most cases.
  • the present invention has for its object to provide a cleaning device of the type mentioned, which allows reliable and thorough particle cleaning, especially with small particle dimensions.
  • the cleaning device comprises a charging device for electrostatic charging of the cleaning material.
  • the present invention is based on the concept of achieving a good cleaning effect in that the items to be cleaned and the dirt particles adhering thereto are charged electrostatically in the same direction.
  • a Coulomb force is generated, which leads to a mutual repulsion of all charged particles.
  • the cleaning material Since the cleaning material has a significantly higher mass than the dirt particles and also is usually immobilized on or in a cleaning material carrier, this electrostatic repulsive force leads to a removal of the adhering dirt particles from the surface of the cleaning material.
  • a back contamination of the cleaning material is practically impossible or at least very difficult due to the same direction charge of cleaning material and dirt particles.
  • the cleaning device with charging device according to the invention is particularly suitable for the cleaning of dirt particles with very small dimensions, preferably of dirt particles with a largest dimension of 20 pm or less, in particular of 15 pm or less, particularly preferably of 5 pm or less.
  • the cleaning device according to the invention offers very significant advantages, since in the electrostatic cleaning principle just with decreasing particle size better cleaning results are to be expected.
  • the cleaning device according to the invention with an electrostatic charging device makes it possible to prevent back contamination of the cleaning material from the cleaning liquid, in particular without flow rinsing, so that a problematic from an environmental point of view
  • an electrically non-conductive cleaning liquid In order to be able to charge the items to be cleaned electrostatically, an electrically non-conductive cleaning liquid must be used.
  • the cleaning fluid is a dielectric.
  • the cleaning liquid can consist of a single chemical substance or represent a mixture of different chemical substances.
  • the cleaning liquid Since the electric coulomb force acting as a repulsive force between the dirt particles and the items to be cleaned is reciprocal to the electric permittivity of the cleaning liquid disposed between the dirt particles and the items to be cleaned, it is favorable if the cleaning liquid has a low permittivity of 10 or less, preferably 5 or less, in particular of 3 or less. It is particularly favorable if the electrical permittivity is only slightly above the lower limit of 1 (corresponding to the permittivity of the vacuum).
  • the cleaning liquid comprises an organic solvent, in particular a hydrocarbon compound.
  • the cleaning liquid is preferably formed entirely from an organic solvent, in particular from a hydrocarbon compound, or from a mixture of organic solvents, in particular hydrocarbon compounds.
  • the cleaning liquid preferably comprises a non-polar solvent and is particularly preferably substantially completely formed from a non-polar solvent or from a mixture of nonpolar solvents.
  • the cleaning fluid has a low (dynamic) viscosity ⁇ .
  • the cleaning liquid has a lower viscosity ( ⁇ ) than water at a temperature of 20 ° C. at the cleaning temperature of the cleaning liquid during the cleaning process.
  • the dynamic viscosity of water at a temperature of 20 ° C is about 1 mPa ⁇ s. It is also possible to use a cleaning liquid whose viscosity ( ⁇ ) at 20 ° C. is higher than the viscosity of water in the same
  • the cleaning liquid therefore preferably has a lower viscosity than 1 mPa ⁇ s at the cleaning temperature of the cleaning liquid during the cleaning process.
  • Cleaning process is preferably more than 20 ° C and preferably less than 80 ° C.
  • the cleaning device comprises a cleaning material carrier and a cleaning container for receiving the bath of cleaning liquid, wherein the cleaning material carrier is electrically isolated from the cleaning container.
  • the electrical potential difference generated by means of the charging device between the items to be cleaned and the cleaning container can in
  • High voltage range and are preferably more than about 10 kV.
  • the cleaning container is grounded.
  • the cleaning device comprises a rotating device for rotating the cleaning material and / or for rotating a cleaning material carrier, on which the cleaning material is arranged.
  • a rotation of the cleaning material and / or the cleaning material carrier which may be in particular a continuous rotary movement or a pivoting movement with changing the direction of rotation, the detachment of the dirt particles by generating a flow in the bath of the cleaning liquid can be supported, and / or the Removal of the dissolved from the cleaning material dirt particles away from the cleaning can be promoted.
  • the charging device comprises an electrical connection line which is guided through a rotary shaft of the rotating device.
  • the item to be cleaned may comprise a single piece of cleaning material or a plurality of items to be cleaned, which are formed separately from one another.
  • the cleaning device comprises a particle separator for separating dirt particles from the cleaning liquid.
  • Such a particle separator may in principle comprise any filter element.
  • the particle separator comprises a precipitation element charged opposite the material to be cleaned (and thus also opposite to the dirt particles). Furthermore, it can be provided that the particle separator is formed by an area of a cleaning container, which contains the bath of the cleaning liquid and is charged opposite to the item to be cleaned (and thus also to the dirt particles).
  • the region of the cleaning container charged in the opposite direction to the object to be cleaned preferably comprises a bottom region of the cleaning container. Charged particles of dirt move towards the ground, where they are discharged and remain there due to gravity.
  • the portion of the cleaning container serving as a particle separator may also comprise the entire cleaning container.
  • the cleaning device comprises a flow-generating device for generating a flow of the cleaning liquid in the bath of the cleaning liquid.
  • Such a flow of the cleaning liquid can serve in particular to move the dirt particles detached from the cleaning product to a particle separator of the cleaning device.
  • the flow of the cleaning fluid can also be used to exert an additional detachment force on the dirt particles which adhere to the surface of the cleaning material.
  • the flow generating device it can be provided that by means of the flow generating device, a flow of the cleaning liquid flooding the cleaning material is generated and / or that a jet of the cleaning liquid which acts on the cleaning product is generated.
  • the flow-generating device may in particular comprise a pump for conveying the cleaning fluid.
  • the flow-generating device may comprise at least one nozzle for generating a cleaning liquid jet, preferably directed onto the cleaning material.
  • the cleaning device may further comprise an ultrasonic generator.
  • At least one ultrasonic generator is disposed within the bath of the cleaning liquid.
  • the cleaning device may comprise a cleaning chamber flooded with the cleaning liquid.
  • the cleaning device may comprise a movement device for introducing the items to be cleaned into the bath of the cleaning liquid (and for dispensing the items to be cleaned from the bath of the cleaning liquid).
  • the present invention further relates to a method for cleaning a cleaning product.
  • the present invention has the further object of providing such a method for cleaning a cleaning product, by means of which a reliable and thorough cleaning of the cleaning material, in particular in the case of contamination with dirt particles of small dimensions is possible.
  • the cleaning method according to the invention and the cleaning device according to the invention are based on the principle that repel the same direction electrical charges.
  • the cleaning liquid may be a combustible liquid.
  • the cleaning liquid during the electrostatic cleaning process has a temperature which is higher than the flash point of the cleaning liquid.
  • the electrostatic charging of the items to be cleaned can be combined with a flood washing, an ultrasonic cleaning and / or a vibration cleaning.
  • the cleaning liquid is preferably filtered in order to prevent re-contamination of the cleaning material from the cleaning liquid.
  • a recontamination of the cleaning material from the cleaning liquid is prevented by the repulsive Coulomb force between the charged cleaning material and the same direction charged dirt particles.
  • a cleaning container or a cleaning chamber, in which or in which the bath of the cleaning liquid is arranged, can form an opposite pole charged to the material to be cleaned.
  • the cleaning material is negative and the working chamber positively charged.
  • the cleaning container or the cleaning chamber which or which contains the bath of the cleaning liquid, preferably grounded.
  • the cleaning liquid serves as an insulator between the cleaning material on the one hand and the opposite pole on the other.
  • an organic cleaning liquid for example a hydrocarbon compound, is used as the cleaning liquid.
  • Fig. 1 is a schematic sectional view of a cleaning device for cleaning a cleaning material with a cleaning container which is filled with a bath of a cleaning liquid, and a rotatable rotatesgut carrier and a charging device for electrostatic charging of the cleaning material carrier and the cleaning material.
  • Figure 2 is a schematic representation of a dipped in the bath of cleaning liquid cleaning material with adhering dirt particles.
  • Figure 3 is a schematic representation of the cleaning material with the adhering dirt particles of Figure 2, after the cleaning material and the adhering thereto dirt particles have been charged electrostatically.
  • FIGS. 2 and 3 shows a schematic representation of the cleaning material and the dirt particles from FIGS. 2 and 3 after the dirt particles have detached from the items to be cleaned due to the electrostatic repulsive force
  • 5 is a schematic sectional view of a second embodiment of a cleaning device in which an electrical connection line for the electrostatic charging of the cleaning material carrier and the cleaning material is guided through a wall of the cleaning container;
  • FIG. 6 is a schematic sectional view through a third embodiment of a cleaning device, which comprises a flow-generating device for generating a flow of the cleaning liquid through the cleaning container and an ultrasonic generator for applying ultrasound to the cleaning product.
  • a cleaning device 100 shown schematically in FIG. 1 comprises a cleaning container 102, which is at least partially filled with a bath 104 of a cleaning liquid up to a bath level 106.
  • the cleaning device 100 For receiving a cleaning material 108, which may consist of several separate items 110, the cleaning device 100 comprises a cleaning material carrier 112, which may in particular include a washing basket 114, which is a for the cleaning liquid and for the from
  • the cleaning device 100 comprises a rotating device 118, by means of which the cleaning material carrier 112 is rotatable about an axis of rotation 120, for example substantially horizontally oriented.
  • the rotating device 118 comprises a rotating shaft indicated as a whole by 122, which can be driven to rotate by means of a rotary drive motor (not shown).
  • a cleaning material carrier side portion 124 of the rotary shaft 122 is rotatably connected to the cleaning material carrier 112 and disposed within the bath 104.
  • the tellsgutieri therefrom portion 124 of the rotary shaft 122 is connected via an electrically insulating insulating portion 126 with a drive-side portion 128 of the rotary shaft 122, which engages the rotary drive motor and which is arranged in the outer space of the cleaning container 102.
  • the insulating portion 126 is rotatably supported on a wall 130 of the cleaning container 102 and forms part of a rotary passage through the wall 130, which is sealed by a (not shown) radial shaft seal so that no cleaning liquid from the bath 104 into the outer space of the cleaning tank 102 pass can.
  • the cleaning device 100 comprises a charging device 132, which in turn comprises a voltage source 134, in particular a DC voltage source having a positive pole 136 and a negative pole 138, and an electrical connection line 140, by means of which one of the poles 136 or 138, for example the negative pole 138 in that the voltage source 134 is electrically conductively connected to the cleaning material carrier 112.
  • the electrical connection line 140 is passed through an inner space 142 of the rotary shaft 122.
  • the electrical connection line 140 may be held by one or more in the interior 142 of the rotary shaft 122 arranged insulators 144, which have an electrical insulation effect, at a distance from the outer wall of the rotary shaft 122.
  • the respective pole 138 or 136 which is not connected to the object to be cleaned 112, for example the positive pole 136, of the voltage source 134 is connected via a further electrical connecting line 146 to an electrode 148 arranged, for example, on the inner wall of the cleaning container 102, which in this embodiment the cleaning device 100 serves as a separation element 149 of a particle separator 150.
  • the electrode 148 is grounded via the further electrical connection line 146 or via a separate grounding line.
  • the electrode 148 may be electrically conductively connected to the wall 130 of the cleaning container 102, so that the cleaning container 102 is grounded.
  • the item to be cleaned 112 can be introduced into the bath 104 in that the initially empty cleaning container 102 is filled with the bath 104 of the cleaning liquid until substantially all of the item to be cleaned 112 with the cleaning material 108 received therein is below the level 106.
  • the cleaning device 100 is designed as a so-called chamber system, in which the cleaning liquid is moved, while the cleaning material remains substantially stationary.
  • the bath 104 of the cleaning liquid remains substantially stationary and the cleaning material carrier 112 is immersed with the cleaning material 108 disposed therein in the bath 104 of the cleaning liquid and removed from the bath 104 after completion of the cleaning process.
  • the cleaning device 100 is designed as a so-called dipping system, in which the cleaning material is moved while the bath 104 of the cleaning liquid remains substantially stationary.
  • the cleaning liquid used is preferably a dielectric, in particular in the form of a non-polar organic solvent.
  • the permittivity of the cleaning liquid is 10 or less, particularly preferably 5 or less, in particular 3 or less.
  • the permittivity ⁇ is approximately 2.
  • the present cleaning device 100 described operates as follows:
  • the cleaning material carrier 112 contacting cleaning material 108, thus in electrically conductive connection with the Material to be cleaned 112 is, electrostatically charged by the cleaning material 108 via the electrical connection line 140 with one of the two poles 136, 138, for example, with the negative pole 138, the voltage source 134 is connected.
  • the voltage source provides an electrical voltage of preferably 1 kV or more, in particular 10 kV or more.
  • the adhesion force A may be composed of various components. Possible components of this adhesion force may be, for example, capillary forces, magnetic forces, electrostatic attraction forces between unequal charges (with electrically non-conductive contaminant particles 152), and attractive forces due to oils or fats arranged in the space between the contaminant particles 152 and the surface 154 of the cleansing material 108.
  • the cleaning material 108 with the dirt particles 152 adhering thereto is immersed in the dielectric cleaning liquid, and / or the cleaning vessel 102 was filled with the dielectric cleaning liquid.
  • the cohesive force A is superimposed on the remaining adhesion force A, which on the dirt particles 152 on the one hand and on account of the identicity of the charge on the cleaning material 108 on the other hand acts as a repulsive force, which counteracts the adhesion force A.
  • a negative charge that is to say an excess of electrons or an electron pressure, is generated on the cleaning material 108 and the dirt particles 152.
  • the amount of Coulomb force F c is calculated as follows:
  • F c 1 / (4 ⁇ ⁇ ⁇ ⁇ ) ⁇ (qi ⁇ q 2 ) / r 2 , where ⁇ denotes the permittivity of the cleaning liquid, qi the electrical charge of the cleaning material 108 and q 2 the electrical charge of the dirt particle 152.
  • the permittivity of the cleaning fluid is at least 1 (lower limit, according to the permittivity of the vacuum).
  • the permittivity ⁇ is about 80.
  • the Coulomb force is proportional to the charge of the cleaning material 108 and the charge of the dirt particle 152, high electrical charge densities lead to high Coulomb forces.
  • the charge density is square in the Coulomb force, since a high electric charge density leads to a high electrical charge of the cleaning material 108 and to a high electrical charge of the dirt particle 152 to be removed.
  • r denotes the distance between the charged bodies (items to be cleaned 108 and dirt particles 152). Since the Coulomb force increases inversely proportional to the square of the distance of the charged bodies, very high results for r against zero
  • the electrical voltage provided by the voltage source 134, which is applied to the cleaning material 108, is selected so that the
  • the adhesion force A is no longer effective.
  • the dirt particles 152 in addition to the Coulomb force acts in FIG. 4 denotes fluidity of the cleaning fluid (also referred to as "wash liquor").
  • the resulting acceleration vector is always directed in this case along the bore axis to the open end of the bore, so that the dirt particles 152 by the resulting
  • the Coulomb forces also prevent the recontamination of the cleaning product 108 after removal of the dirt particles 152.
  • the acceleration acting on a dirt particle 152 is directed along the resultant of the forces acting on the dirt particle 152, respectively; However, the moving speed of the dirt particle 152 may have a different direction.
  • the first accelerated by the Coulombkraft dirt particles 152 are braked by friction in the cleaning fluid.
  • Cleaning liquids which have a low viscosity at the temperature of the cleaning liquid during the cleaning process, are therefore particularly well suited.
  • Cleaning process is less than 1 mPa ⁇ s (which corresponds to the viscosity of water at a temperature of 20 ° C).
  • the (dynamic) viscosity of petroleum at 20 ° C is about 0.65 mPa ⁇ s.
  • the particle separator 150 is designed as an electrostatic precipitator with an electrode 148 charged in opposite directions to the charge of the dirt particles 154.
  • a non-polar organic solvent or a mixture of non-polar organic solvents is used as the cleaning liquid.
  • liquid gases such as carbon dioxide or methane
  • Essential for the suitability of a cleaning liquid is that it is in the operating conditions of the cleaning device 100 during the cleaning process in the liquid state and under these conditions has the lowest possible electrical permittivity ⁇ .
  • Suitable cleaning fluids are flammable liquids and / or liquids which may form flammable mixtures with atmospheric oxygen.
  • the cleaning device 100 must satisfy the explosion protection requirements resulting therefrom.
  • the cleaning process is ended and the item to be cleaned 108 is removed from the cleaning liquid carrier bath 104 with the item to be cleaned 112 removed, by lifting out the cleaning material carrier 112 from the bath 104 and / or by lowering the bath level 106th
  • a second embodiment of a cleaning device 100 shown in FIG. 5 differs from that shown in FIG. 1, in that the electrical connecting line 140, by means of which an electrically conductive contact between the cleaning material carrier 112 and one of the poles 134, 136 of the voltage source 134 of the charging device 132 is produced, does not pass through the rotary shaft 122 of the rotary device 118 but is passed through a location 156 of the wall 130 of the cleaning container 102.
  • the cleaning material support 112 is not rotatable about any angle about the rotation axis 120, but only within a limited rotation angle range, which is defined by the length of lying within the cleaning tank 102 portion 158 of the electric
  • Connection line 140 is specified.
  • FIG. 5 illustrated second embodiment of a cleaning device 100 in terms of structure and function with the in FIG. 1, the above description of which is incorporated herein by reference.
  • a third embodiment of a cleaning device 100 shown in FIG. 6 differs from the one shown in FIG. 1 illustrated first embodiment in that, to generate a flow in the bath 104 of the cleaning liquid, a flow-generating device 160 is provided, which in particular comprises a pump 162 which is connected on the suction side via a suction line 164 and on the pressure side via a pressure line 166 to the cleaning container 102.
  • a flow-generating device 160 which in particular comprises a pump 162 which is connected on the suction side via a suction line 164 and on the pressure side via a pressure line 166 to the cleaning container 102.
  • the particle separator 150 is preferably disposed in the suction line 164 of the flow generating device 160 in this embodiment.
  • the particle separator 150 may in particular be formed as an electrostatic precipitator 168, the Abscheidevid, which are flowing from the sucked cleaning liquid, connected by an electrical connecting line 146 'to that pole 136 of the voltage source 134, which is opposite to the pole 138, with the Clearing material 108 is connected so that the separation surfaces of the electrostatic precipitator 168 are opposite to the cleaning material 108 and thus opposite to the detached from the cleaning material 108 dirt particles 152 are loaded.
  • the charged dirt particles 152 are accelerated toward the oppositely charged separation surfaces of the electrostatic precipitator 168 by attractively acting Coulomb forces and separated there and thus separated from the flow of the cleaning liquid by the flow generation device 160.
  • an electrostatic precipitator 168 basically any other filter element, in particular an electrically non-charged filter element, can be used to separate the dirt particles 152 from the cleaning fluid.
  • the cleaned by removing the dirt particles 152 cleaning liquid is returned by means of the pump 162 in the bath 104.
  • this recycling of the cleaning liquid into the bath 104 can take place by means of a flooding and / or spraying mechanism (not shown), by means of which a stream of cleaning liquid directed towards the material to be cleaned is generated, which helps to detach the dirt particles 152 from the material to be cleaned 108.
  • the transport of the dirt particles 152 to the particle separator 150 is also improved by flooding or spraying the cleaning product 108.
  • flooding or spraying of the cleaning material 108 also enables the cleaning of very large and massive dirt particles, in which the adhesion force A outweighs the repulsive Coulomb force F c .
  • the repulsive Coulomb force prevents re-attachment of the dirt particles to the cleaning material 108.
  • a flow directed from the material to be cleaned 108 to the particle separator 150 is generated in the bath 104 of the cleaning liquid.
  • the third embodiment of a cleaning device 100 is preferably provided with an ultrasound generator 170, which is arranged in the cleaning container 102 such that it acts on the cleaning material 108 with ultrasound 172.
  • an ultrasound generator 170 which is arranged in the cleaning container 102 such that it acts on the cleaning material 108 with ultrasound 172.
  • Vibrations of the cleaning material 108 can be particularly high mechanically established adhesion forces A (for example, due to high
  • the ultrasonic generator 170 may also be omitted, so that the cleaning device 100 then in contrast to the first embodiment of the cleaning device shown in FIG. 1 additionally comprises only the flow generation device 160.
  • the flow generating device 160 is omitted, so that in this case the cleaning device 100 additionally comprises only the ultrasound generator 170 in contrast to the first embodiment shown in FIG.
  • Fig. 6 illustrated third embodiment of a cleaning device 100 in terms of structure and function with the illustrated in Fig. 1 the first embodiment, to the above description in this respect reference is made.

Landscapes

  • Electrostatic Separation (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

L'invention concerne un dispositif de nettoyage (100) pour nettoyer un produit à nettoyer (108), comportant un bain (104) de liquide de nettoyage dans lequel le produit à nettoyer (108) est au moins en partie placé pendant un processus de nettoyage. L'invention vise à créer un dispositif de nettoyage qui permette de nettoyer des particules de manière fiable et à fond, surtout lorsque ces particules sont de petite taille. A cet effet, le dispositif de nettoyage (100) comporte un dispositif de charge (132) pour soumettre le produit à nettoyer (108) à une charge électrostatique.
EP11721497.3A 2010-05-31 2011-05-17 Dispositif de nettoyage et procédé de nettoyage d'un produit à nettoyer Withdrawn EP2576089A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010029510 DE102010029510A1 (de) 2010-05-31 2010-05-31 Reinigungsvorrichtung und Verfahren zum Reinigen eines Reinigungsgutes
PCT/EP2011/058004 WO2011151176A1 (fr) 2010-05-31 2011-05-17 Dispositif de nettoyage et procédé de nettoyage d'un produit à nettoyer

Publications (1)

Publication Number Publication Date
EP2576089A1 true EP2576089A1 (fr) 2013-04-10

Family

ID=44312297

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11721497.3A Withdrawn EP2576089A1 (fr) 2010-05-31 2011-05-17 Dispositif de nettoyage et procédé de nettoyage d'un produit à nettoyer

Country Status (4)

Country Link
EP (1) EP2576089A1 (fr)
CN (1) CN102917810A (fr)
DE (1) DE102010029510A1 (fr)
WO (1) WO2011151176A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103958759B (zh) 2011-12-08 2020-02-14 大宇电子株式会社 壁装式滚筒洗衣机

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Publication number Priority date Publication date Assignee Title
JPH06232103A (ja) * 1993-02-01 1994-08-19 Fujitsu Ltd 洗浄方法
DE4306645A1 (de) 1993-03-03 1994-09-08 David Jackson Verfahren zum Reinigen, Sterilisieren und Implantieren von Substraten mittels eines Hochenergetischen verdichteten Fluids
DE19922195A1 (de) * 1999-05-12 2000-11-16 Linde Tech Gase Gmbh Reinigungsvorrichtung
CN2489463Y (zh) * 2001-06-25 2002-05-01 吴湘涵 薄片型电子元件的清洗装置
JP2002363800A (ja) * 2002-03-26 2002-12-18 Olympus Optical Co Ltd 電極体及び超音波電解洗浄装置
JP2005030378A (ja) * 2003-05-30 2005-02-03 Mahindra & Mahindra Ltd 重力充填式燃料供給ポンプを備えるディーゼルエンジンのセルフエア抜き燃料供給システム
TWI420579B (zh) * 2005-07-12 2013-12-21 創意科技股份有限公司 And a foreign matter removing method for a substrate
US7648582B2 (en) 2005-12-23 2010-01-19 Lam Research Corporation Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

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Also Published As

Publication number Publication date
CN102917810A (zh) 2013-02-06
DE102010029510A1 (de) 2011-12-01
WO2011151176A1 (fr) 2011-12-08

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