EP2592909A4 - Röntgenstrahlerzeugungsvorrichtung - Google Patents
Röntgenstrahlerzeugungsvorrichtung Download PDFInfo
- Publication number
- EP2592909A4 EP2592909A4 EP11803672.2A EP11803672A EP2592909A4 EP 2592909 A4 EP2592909 A4 EP 2592909A4 EP 11803672 A EP11803672 A EP 11803672A EP 2592909 A4 EP2592909 A4 EP 2592909A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- generating device
- ray generating
- ray
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/32—Tubes wherein the X-rays are produced at or near the end of the tube or a part thereof which tube or part has a small cross-section to facilitate introduction into a small hole or cavity
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010156296 | 2010-07-09 | ||
| JP2010179649 | 2010-08-10 | ||
| JP2010179643 | 2010-08-10 | ||
| PCT/JP2011/065625 WO2012005338A2 (ja) | 2010-07-09 | 2011-07-07 | X線発生装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2592909A2 EP2592909A2 (de) | 2013-05-15 |
| EP2592909A4 true EP2592909A4 (de) | 2017-01-11 |
| EP2592909B1 EP2592909B1 (de) | 2019-02-13 |
Family
ID=45441605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP11803672.2A Not-in-force EP2592909B1 (de) | 2010-07-09 | 2011-07-07 | Elektronenstrahlemitter und verfahren zur elektronenemission |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8976932B2 (de) |
| EP (1) | EP2592909B1 (de) |
| JP (1) | JP5895300B2 (de) |
| CN (1) | CN102972099B (de) |
| WO (1) | WO2012005338A2 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013058342A1 (ja) * | 2011-10-18 | 2013-04-25 | 株式会社Ｂｓｒ | 荷電粒子放射装置および同装置を用いたｘ線発生装置 |
| GB2517671A (en) * | 2013-03-15 | 2015-03-04 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal |
| WO2016056639A1 (ja) | 2014-10-08 | 2016-04-14 | 株式会社Ｂｓｒ | 荷電粒子放射方法及びその装置並びにｘ線発生方法及びその装置 |
| RU2018136347A (ru) * | 2016-04-14 | 2020-05-14 | Фелдрайх Каро Руиз Аб | Аппарат для радиационной терапии, включающий модуль ионизации и источник ультрафиолетового света |
| GB201622206D0 (en) | 2016-12-23 | 2017-02-08 | Univ Of Dundee See Pulcea Ltd Univ Of Huddersfield | Mobile material analyser |
| US12135299B2 (en) * | 2020-01-27 | 2024-11-05 | Shimadzu Corporation | X-ray fluorescence analyzer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995020241A1 (en) * | 1994-01-21 | 1995-07-27 | Photolelectron Corporation | X-ray source with shaped radiation pattern |
| US20070274452A1 (en) * | 2006-05-24 | 2007-11-29 | Joerg Freudenberger | X-ray unit having an x-ray radiator with a thermionic photocathode and a control circuit therefor |
| WO2010116709A1 (ja) * | 2009-04-07 | 2010-10-14 | 有限会社アドテックセンシングリサーチ | Ｘ線発生装置及びそれを用いる複合装置並びにｘ線発生方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56164531A (en) * | 1980-05-21 | 1981-12-17 | Hitachi Ltd | Manufacture of semiconductor |
| JPH0769738B2 (ja) | 1989-09-01 | 1995-07-31 | 株式会社不二越 | ロボットの制御方法及び装置 |
| JP3090910B2 (ja) | 1999-01-19 | 2000-09-25 | 株式会社エー・イー・ティー・ジャパン | 超小形ｘ線発生装置 |
| CN1272989C (zh) * | 2000-07-28 | 2006-08-30 | 杰特克公司 | 产生x－光的方法和装置 |
| WO2004062050A2 (en) * | 2003-01-02 | 2004-07-22 | Jmar Research Inc. | Method and apparatus for generating a membrane target for laser produced plasma |
| KR100951729B1 (ko) * | 2003-03-07 | 2010-04-07 | 삼성전자주식회사 | 전자빔 포커싱 장치 및 이를 채용한 전자빔 프로젝션리소그라피 시스템 |
| JP4497889B2 (ja) * | 2003-10-29 | 2010-07-07 | アルバック・ファイ株式会社 | 電子分光分析方法及び分析装置 |
| JP4056970B2 (ja) * | 2003-12-05 | 2008-03-05 | 国立大学法人京都大学 | 異極像結晶体を用いたｘ線発生装置 |
| JP5019302B2 (ja) * | 2007-03-26 | 2012-09-05 | 学校法人同志社 | 異極像結晶を用いたｘ線発生装置 |
| TWI617805B (zh) * | 2012-09-14 | 2018-03-11 | Ebara Corp | Inspection device |
-
2011
- 2011-07-07 US US13/808,971 patent/US8976932B2/en not_active Expired - Fee Related
- 2011-07-07 WO PCT/JP2011/065625 patent/WO2012005338A2/ja not_active Ceased
- 2011-07-07 JP JP2012523921A patent/JP5895300B2/ja not_active Expired - Fee Related
- 2011-07-07 EP EP11803672.2A patent/EP2592909B1/de not_active Not-in-force
- 2011-07-07 CN CN201180033368.2A patent/CN102972099B/zh not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995020241A1 (en) * | 1994-01-21 | 1995-07-27 | Photolelectron Corporation | X-ray source with shaped radiation pattern |
| US20070274452A1 (en) * | 2006-05-24 | 2007-11-29 | Joerg Freudenberger | X-ray unit having an x-ray radiator with a thermionic photocathode and a control circuit therefor |
| WO2010116709A1 (ja) * | 2009-04-07 | 2010-10-14 | 有限会社アドテックセンシングリサーチ | Ｘ線発生装置及びそれを用いる複合装置並びにｘ線発生方法 |
| EP2418671A1 (de) * | 2009-04-07 | 2012-02-15 | AdTech Sensing Research Inc. | Röntgenstrahlengenerator und zusammengesetzte vorrichtung damit sowie verfahren zur erzeugung von röntgenstrahlen |
Non-Patent Citations (2)
| Title |
|---|
| "Nanosecond Electrical and Optical Pulses and Self Phase Conjugation from Photorefractive Lithium Niobate Fibers and Crystals", SPIE, PO BOX 10 BELLINGHAM WA 98227-0010 USA, 2007, XP040245147 * |
| See also references of WO2012005338A2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012005338A3 (ja) | 2012-03-15 |
| JPWO2012005338A1 (ja) | 2013-09-05 |
| EP2592909A2 (de) | 2013-05-15 |
| CN102972099B (zh) | 2016-03-23 |
| JP5895300B2 (ja) | 2016-03-30 |
| WO2012005338A2 (ja) | 2012-01-12 |
| EP2592909B1 (de) | 2019-02-13 |
| US8976932B2 (en) | 2015-03-10 |
| US20130129054A1 (en) | 2013-05-23 |
| CN102972099A (zh) | 2013-03-13 |
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