EP2607706A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

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Publication number
EP2607706A3
EP2607706A3 EP12194041.5A EP12194041A EP2607706A3 EP 2607706 A3 EP2607706 A3 EP 2607706A3 EP 12194041 A EP12194041 A EP 12194041A EP 2607706 A3 EP2607706 A3 EP 2607706A3
Authority
EP
European Patent Office
Prior art keywords
stator
disks
housing
vacuum pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12194041.5A
Other languages
English (en)
French (fr)
Other versions
EP2607706A2 (de
EP2607706B1 (de
Inventor
Markus Henry
Jürgen BREZINA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2607706A2 publication Critical patent/EP2607706A2/de
Publication of EP2607706A3 publication Critical patent/EP2607706A3/de
Application granted granted Critical
Publication of EP2607706B1 publication Critical patent/EP2607706B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Eine Vakuumpumpe, bei der es sich insbesondere um eine Turbomolekularpumpe handelt, weist in einem Pumpengehäuse (20) einen mehrere Rotorscheiben (12) aufweisenden Rotor auf. Ferner ist in dem Gehäuse (20) ein Stator angeordnet, dessen Statorscheiben (14) zwischen benachbarten Rotorscheiben (12) angeordnet sind. Zwischen den Statorscheiben (14) sind Statorringe (22) angeordnet. Um eine exakte Positionierung der Statorscheiben (14) und eine gute Wärmeabfuhr an den Gehäuseflächen (30, 36) zu gewährleisten, ist insbesondere in einem mittleren Bereich ein Federelement (24) vorgesehen. Das Federelement (24) ersetzt einen Statorring (22) und erzeugt axiale Kräfte (26, 28).
EP12194041.5A 2011-12-23 2012-11-23 Vakuumpumpe Active EP2607706B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202011109517U DE202011109517U1 (de) 2011-12-23 2011-12-23 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2607706A2 EP2607706A2 (de) 2013-06-26
EP2607706A3 true EP2607706A3 (de) 2014-04-09
EP2607706B1 EP2607706B1 (de) 2018-10-17

Family

ID=47428489

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12194041.5A Active EP2607706B1 (de) 2011-12-23 2012-11-23 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP2607706B1 (de)
DE (1) DE202011109517U1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
FR3135306B1 (fr) * 2022-05-05 2024-05-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé d’assemblage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0478882A1 (de) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (de) * 2000-03-02 2001-09-05 Pfeiffer Vacuum GmbH Turbomolekularpumpe
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013672U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0478882A1 (de) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (de) * 2000-03-02 2001-09-05 Pfeiffer Vacuum GmbH Turbomolekularpumpe
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
EP2607706A2 (de) 2013-06-26
EP2607706B1 (de) 2018-10-17
DE202011109517U1 (de) 2013-03-25

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