EP2674396A4 - Verfahren zur herstellung von graphen und graphen - Google Patents

Verfahren zur herstellung von graphen und graphen

Info

Publication number
EP2674396A4
EP2674396A4 EP12745110.2A EP12745110A EP2674396A4 EP 2674396 A4 EP2674396 A4 EP 2674396A4 EP 12745110 A EP12745110 A EP 12745110A EP 2674396 A4 EP2674396 A4 EP 2674396A4
Authority
EP
European Patent Office
Prior art keywords
graphene
producing
producing graphene
graphene obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12745110.2A
Other languages
English (en)
French (fr)
Other versions
EP2674396A1 (de
EP2674396B1 (de
Inventor
Takatoshi Yamada
Jaeho Kim
Masatou Ishihara
Yoshinori Koga
Masataka Hasegawa
Sumio Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of EP2674396A1 publication Critical patent/EP2674396A1/de
Publication of EP2674396A4 publication Critical patent/EP2674396A4/de
Application granted granted Critical
Publication of EP2674396B1 publication Critical patent/EP2674396B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122Incoherent waves
    • B01J19/126Microwaves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation
    • C01B32/186Preparation by chemical vapour deposition [CVD]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Conductive Materials (AREA)
EP12745110.2A 2011-02-10 2012-02-10 Verfahren zur herstellung von graphen Not-in-force EP2674396B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011027260 2011-02-10
JP2011077342 2011-03-31
PCT/JP2012/053098 WO2012108526A1 (ja) 2011-02-10 2012-02-10 グラフェンの製造方法およびグラフェン

Publications (3)

Publication Number Publication Date
EP2674396A1 EP2674396A1 (de) 2013-12-18
EP2674396A4 true EP2674396A4 (de) 2014-03-19
EP2674396B1 EP2674396B1 (de) 2016-07-20

Family

ID=46638738

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12745110.2A Not-in-force EP2674396B1 (de) 2011-02-10 2012-02-10 Verfahren zur herstellung von graphen

Country Status (5)

Country Link
US (1) US9156699B2 (de)
EP (1) EP2674396B1 (de)
JP (1) JP5686418B2 (de)
KR (1) KR101939615B1 (de)
WO (1) WO2012108526A1 (de)

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JPS6446520A (en) * 1987-08-12 1989-02-21 Nippon Denso Co Resistance device for preheating plug of diesel engine
KR101423988B1 (ko) * 2012-12-13 2014-08-01 광주과학기술원 레이저 플라즈마 스펙트럼을 이용한 시료 내 측정 대상 원소의 정량 분석 방법
TWI603913B (zh) * 2012-12-13 2017-11-01 財團法人工業技術研究院 石墨烯片的形成裝置與形成方法
US9242865B2 (en) 2013-03-05 2016-01-26 Lockheed Martin Corporation Systems and methods for production of graphene by plasma-enhanced chemical vapor deposition
CN103193224B (zh) * 2013-04-17 2015-07-08 苏州大学 在非金属基底上低温制备石墨烯薄膜的方法
JP6176711B2 (ja) * 2013-06-10 2017-08-09 国立研究開発法人産業技術総合研究所 グラフェン膜の欠陥修復方法及びグラフェン膜の透過率測定装置
WO2015126139A1 (en) 2014-02-19 2015-08-27 Samsung Electronics Co., Ltd. Wiring structure and electronic device employing the same
KR102402545B1 (ko) * 2014-02-19 2022-05-27 삼성전자주식회사 배선 구조 및 이를 적용한 전자소자
CN104392945A (zh) * 2014-10-31 2015-03-04 北京工业大学 一种基于场效应估算cvd方法生长在铜箔上的石墨烯迁移率的方法
KR101940702B1 (ko) * 2016-09-02 2019-01-21 순천대학교 산학협력단 플라즈마 표면처리 된 플렉서블 기판을 이용한 그래핀 투명전극 제조방법
US9812295B1 (en) 2016-11-15 2017-11-07 Lyten, Inc. Microwave chemical processing
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
WO2018169889A1 (en) 2017-03-16 2018-09-20 Lyten, Inc. Carbon and elastomer integration
CN109721049B (zh) * 2017-10-30 2021-03-16 中国科学院苏州纳米技术与纳米仿生研究所 一种边缘齐整的石墨烯条带、其制备方法及应用
US10756334B2 (en) 2017-12-22 2020-08-25 Lyten, Inc. Structured composite materials
KR102861875B1 (ko) 2018-01-04 2025-09-19 라이텐, 인코포레이티드 공진 가스 센서
WO2019143559A1 (en) 2018-01-16 2019-07-25 Lyten, Inc. Microwave transparent pressure barrier
WO2019220903A1 (ja) * 2018-05-16 2019-11-21 国立研究開発法人産業技術総合研究所 グラファイト薄膜、グラファイト薄膜積層体、およびそれらの製造方法
WO2019240784A1 (en) 2018-06-13 2019-12-19 Hewlett-Packard Development Company, L.P. Graphene printing
KR102563925B1 (ko) 2018-08-31 2023-08-04 삼성전자 주식회사 반도체 제조 장치
US11309545B2 (en) 2019-10-25 2022-04-19 Lyten, Inc. Carbonaceous materials for lithium-sulfur batteries
US11489161B2 (en) 2019-10-25 2022-11-01 Lyten, Inc. Powdered materials including carbonaceous structures for lithium-sulfur battery cathodes
US11999649B2 (en) 2020-08-04 2024-06-04 Lyten, Inc. Methods for manufacturing or reinforcing carbon-containing glass materials

Citations (1)

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Publication number Priority date Publication date Assignee Title
US20090155561A1 (en) * 2007-12-17 2009-06-18 Samsung Electronics Co., Ltd. Single crystalline graphene sheet and process of preparing the same

Family Cites Families (5)

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KR20090026568A (ko) * 2007-09-10 2009-03-13 삼성전자주식회사 그라펜 시트 및 그의 제조방법
KR101443217B1 (ko) * 2007-09-12 2014-09-19 삼성전자주식회사 그라펜 쉘 및 그의 제조방법
KR101443222B1 (ko) * 2007-09-18 2014-09-19 삼성전자주식회사 그라펜 패턴 및 그의 형성방법
US20100301212A1 (en) * 2009-05-18 2010-12-02 The Regents Of The University Of California Substrate-free gas-phase synthesis of graphene sheets
US20130048339A1 (en) * 2010-03-08 2013-02-28 William Marsh Rice University Transparent electrodes based on graphene and grid hybrid structures

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
US20090155561A1 (en) * 2007-12-17 2009-06-18 Samsung Electronics Co., Ltd. Single crystalline graphene sheet and process of preparing the same

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
ALEXANDER MALESEVIC ET AL: "Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition", NANOTECHNOLOGY, IOP, BRISTOL, GB, vol. 19, no. 30, 30 July 2008 (2008-07-30), pages 305604, XP020136787, ISSN: 0957-4484 *
C.N.R. RAO ET AL: "Graphene: The New Two-Dimensional Nanomaterial", ANGEWANDTE CHEMIE INTERNATIONAL EDITION, vol. 48, no. 42, 5 October 2009 (2009-10-05), pages 7752 - 7777, XP055100165, ISSN: 1433-7851, DOI: 10.1002/anie.200901678 *
HOJATI-TALEMI P ET AL: "Preparation of graphene nanowalls by a simple microwave-based method", CARBON, ELSEVIER, OXFORD, GB, vol. 48, no. 14, 6 July 2010 (2010-07-06), pages 3993 - 4000, XP027247356, ISSN: 0008-6223, [retrieved on 20100706] *
MARCINEK M ET AL: "Microwave plasma chemical vapor deposition of graphitic carbon thin films", CARBON, ELSEVIER, OXFORD, GB, vol. 48, no. 5, 28 December 2009 (2009-12-28), pages 1552 - 1557, XP026893528, ISSN: 0008-6223, [retrieved on 20100205], DOI: 10.1016/J.CARBON.2009.12.052 *
See also references of WO2012108526A1 *
YUAN G D ET AL: "Graphene sheets via microwave chemical vapor deposition", CHEMICAL PHYSICS LETTERS, ELSEVIER BV, NL, vol. 467, no. 4-6, 5 January 2009 (2009-01-05), pages 361 - 364, XP025817310, ISSN: 0009-2614, [retrieved on 20081127], DOI: 10.1016/J.CPLETT.2008.11.059 *
ZHENGZONG SUN ET AL: "Growth of graphene from solid carbon sources", NATURE, NATURE PUBLISHING GROUP, UNITED KINGDOM, vol. 468, 25 November 2010 (2010-11-25), pages 549 - 552, XP002671191, ISSN: 0028-0836, [retrieved on 20101110], DOI: 10.1038/NATURE09579 *

Also Published As

Publication number Publication date
US20130327981A1 (en) 2013-12-12
KR20140014113A (ko) 2014-02-05
US9156699B2 (en) 2015-10-13
EP2674396A1 (de) 2013-12-18
KR101939615B1 (ko) 2019-01-17
EP2674396B1 (de) 2016-07-20
JPWO2012108526A1 (ja) 2014-07-03
JP5686418B2 (ja) 2015-03-18
WO2012108526A1 (ja) 2012-08-16

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