EP2740943A3 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP2740943A3 EP2740943A3 EP13194311.0A EP13194311A EP2740943A3 EP 2740943 A3 EP2740943 A3 EP 2740943A3 EP 13194311 A EP13194311 A EP 13194311A EP 2740943 A3 EP2740943 A3 EP 2740943A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- nanoparticles
- production
- metal
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/90—Alloys not otherwise provided for
- F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/121—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/22—Non-oxide ceramics
- F05D2300/224—Carbon, e.g. graphite
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
- F05D2300/6032—Metal matrix composites [MMC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/61—Syntactic materials, i.e. hollow spheres embedded in a matrix
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Carbon And Carbon Compounds (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012222230.8A DE102012222230A1 (de) | 2012-12-04 | 2012-12-04 | Vakuumpumpe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2740943A2 EP2740943A2 (de) | 2014-06-11 |
| EP2740943A3 true EP2740943A3 (de) | 2015-12-02 |
| EP2740943B1 EP2740943B1 (de) | 2018-01-10 |
Family
ID=49674192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP13194311.0A Active EP2740943B1 (de) | 2012-12-04 | 2013-11-25 | Vakuumpumpe |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP2740943B1 (de) |
| JP (1) | JP2014111939A (de) |
| CN (1) | CN103850949A (de) |
| DE (1) | DE102012222230A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014109004A1 (de) * | 2014-06-26 | 2015-12-31 | Pfeiffer Vacuum Gmbh | Siegbahnstufe |
| WO2016071348A1 (de) * | 2014-11-05 | 2016-05-12 | Magna powertrain gmbh & co kg | Verdichter sowie verfahren zur herstellung eines verdichterrads |
| EP3085964B1 (de) * | 2015-04-21 | 2019-12-11 | Pfeiffer Vacuum Gmbh | Herstellung eines vakuumpumpen-teils mittels eines metallischen, generativen fertigungsverfahrens |
| WO2018174013A1 (ja) * | 2017-03-23 | 2018-09-27 | エドワーズ株式会社 | 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード |
| JP7342574B2 (ja) * | 2019-09-27 | 2023-09-12 | 株式会社島津製作所 | 真空ポンプ |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10053663A1 (de) * | 2000-10-28 | 2002-05-08 | Leybold Vakuum Gmbh | Mechanische kinetische Vakuumpumpe mit Rotor und Welle |
| WO2007022332A2 (en) * | 2005-08-16 | 2007-02-22 | The Boc Group, Inc. | Turbomolecular pump with static charge control |
| DE60030833T2 (de) * | 1999-12-21 | 2007-03-29 | Boc Edwards Japan Ltd. | Vakuumpumpe |
| WO2008130739A1 (en) * | 2007-04-17 | 2008-10-30 | General Electric Company | Articles made from composite materials having toughened and untoughened regions |
| DE102008025700A1 (de) * | 2008-05-29 | 2009-12-03 | Siemens Aktiengesellschaft | Radiallüfter, insbesondere Scheibenlüfter, sowie Verwendungen eines derartigen Radiallüfters |
| DE102010021240A1 (de) * | 2010-05-21 | 2011-11-24 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Oberflächenbehandlung |
| GB2490127A (en) * | 2011-04-19 | 2012-10-24 | Rolls Royce Plc | Aerofoil assembly |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03107598A (ja) * | 1989-09-20 | 1991-05-07 | Ntn Corp | 軸流真空ポンプの表面処理方法 |
| US6095754A (en) | 1998-05-06 | 2000-08-01 | Applied Materials, Inc. | Turbo-Molecular pump with metal matrix composite rotor and stator |
| JP2001221186A (ja) * | 2000-02-04 | 2001-08-17 | Tokyo Electron Ltd | 軸流真空ポンプ及び処理装置 |
| ITTO20020770A1 (it) * | 2002-09-06 | 2004-03-07 | Varian Spa | Metod0 per fabbricare rotori di pompe da vuoto e prodotti |
| DE102005027097A1 (de) * | 2005-06-11 | 2006-12-14 | Pfeiffer Vacuum Gmbh | Statorscheibe für Turbomolekularpumpe |
| JP5274446B2 (ja) | 2006-04-29 | 2013-08-28 | エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング | ターボ分子ポンプのローター又はステーター |
| DE102007044031A1 (de) * | 2007-09-14 | 2009-03-19 | Bayer Materialscience Ag | Kohlenstoffnanoröhrchenpulver, Kohlenstoffnanoröhrchen und Verfahren zu ihrer Herstellung |
| WO2010091704A1 (en) | 2009-02-16 | 2010-08-19 | Bayer International Sa | A compound material comprising a metal and nano particles and a method for producing the same |
| WO2011032791A1 (en) | 2009-09-17 | 2011-03-24 | Bayer International Sa, Ftb | A compound material comprising a metal and nanoparticles |
| US20120045318A1 (en) * | 2010-08-19 | 2012-02-23 | General Electric Company | Method and apparatus for air flow control |
-
2012
- 2012-12-04 DE DE102012222230.8A patent/DE102012222230A1/de not_active Ceased
-
2013
- 2013-11-25 EP EP13194311.0A patent/EP2740943B1/de active Active
- 2013-12-03 JP JP2013250093A patent/JP2014111939A/ja active Pending
- 2013-12-03 CN CN201310642564.0A patent/CN103850949A/zh active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60030833T2 (de) * | 1999-12-21 | 2007-03-29 | Boc Edwards Japan Ltd. | Vakuumpumpe |
| DE10053663A1 (de) * | 2000-10-28 | 2002-05-08 | Leybold Vakuum Gmbh | Mechanische kinetische Vakuumpumpe mit Rotor und Welle |
| WO2007022332A2 (en) * | 2005-08-16 | 2007-02-22 | The Boc Group, Inc. | Turbomolecular pump with static charge control |
| WO2008130739A1 (en) * | 2007-04-17 | 2008-10-30 | General Electric Company | Articles made from composite materials having toughened and untoughened regions |
| DE102008025700A1 (de) * | 2008-05-29 | 2009-12-03 | Siemens Aktiengesellschaft | Radiallüfter, insbesondere Scheibenlüfter, sowie Verwendungen eines derartigen Radiallüfters |
| DE102010021240A1 (de) * | 2010-05-21 | 2011-11-24 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Oberflächenbehandlung |
| GB2490127A (en) * | 2011-04-19 | 2012-10-24 | Rolls Royce Plc | Aerofoil assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103850949A (zh) | 2014-06-11 |
| EP2740943B1 (de) | 2018-01-10 |
| DE102012222230A1 (de) | 2014-06-05 |
| JP2014111939A (ja) | 2014-06-19 |
| EP2740943A2 (de) | 2014-06-11 |
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