EP2813710A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2813710A3
EP2813710A3 EP20140172006 EP14172006A EP2813710A3 EP 2813710 A3 EP2813710 A3 EP 2813710A3 EP 20140172006 EP20140172006 EP 20140172006 EP 14172006 A EP14172006 A EP 14172006A EP 2813710 A3 EP2813710 A3 EP 2813710A3
Authority
EP
European Patent Office
Prior art keywords
stage
vacuum pump
regenerative
conveying element
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20140172006
Other languages
German (de)
English (en)
Other versions
EP2813710A2 (fr
Inventor
Christian Dr. Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2813710A2 publication Critical patent/EP2813710A2/fr
Publication of EP2813710A3 publication Critical patent/EP2813710A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP20140172006 2013-06-15 2014-06-11 Pompe à vide Withdrawn EP2813710A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201320005458 DE202013005458U1 (de) 2013-06-15 2013-06-15 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP2813710A2 EP2813710A2 (fr) 2014-12-17
EP2813710A3 true EP2813710A3 (fr) 2015-03-25

Family

ID=50927991

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20140172006 Withdrawn EP2813710A3 (fr) 2013-06-15 2014-06-11 Pompe à vide

Country Status (2)

Country Link
EP (1) EP2813710A3 (fr)
DE (1) DE202013005458U1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1101945A2 (fr) * 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
EP2631488A2 (fr) * 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1101945A2 (fr) * 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
EP2631488A2 (fr) * 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP2813710A2 (fr) 2014-12-17
DE202013005458U1 (de) 2014-09-16

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