EP2835536A3 - Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux - Google Patents

Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Download PDF

Info

Publication number: EP2835536A3
Authority: EP; European Patent Office
Prior art keywords: yielding; vacuum pump; surface roughness; lower gas; special surface
Prior art date: 2013-08-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP20140176840

Other languages

German (de)

English (en)

Other versions

EP2835536B1 (fr

EP2835536A2 (fr

Inventor

Dr. Aleksandr Shirinov

Michael Schweighöfer

Tobias Stoll

Sebastian Oberbeck

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-08-06

Filing date

2014-07-14

Publication date

2015-05-06

2014-07-14 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2014-07-14 Priority to EP16171240.1A priority Critical patent/EP3104014B1/fr

2014-07-14 Priority to EP16171251.8A priority patent/EP3088743B1/fr

2015-02-11 Publication of EP2835536A2 publication Critical patent/EP2835536A2/fr

2015-05-06 Publication of EP2835536A3 publication Critical patent/EP2835536A3/fr

2018-11-28 Application granted granted Critical

2018-11-28 Publication of EP2835536B1 publication Critical patent/EP2835536B1/fr

Status Active legal-status Critical Current

2034-07-14 Anticipated expiration legal-status Critical

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
- F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/50—Intrinsic material properties or characteristics
- F05D2300/516—Surface roughness

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

EP14176840.8A 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Active EP2835536B1 (fr)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
EP16171240.1A EP3104014B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP16171251.8A EP3088743B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102013108482.6A DE102013108482A1 (de)	2013-08-06	2013-08-06	Vakuumpumpstufe

Related Child Applications (4)

Application Number	Title	Priority Date	Filing Date
EP16171240.1A Division EP3104014B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP16171240.1A Division-Into EP3104014B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP16171251.8A Division EP3088743B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP16171251.8A Division-Into EP3088743B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration

Publications (3)

Publication Number	Publication Date
EP2835536A2 EP2835536A2 (fr)	2015-02-11
EP2835536A3 true EP2835536A3 (fr)	2015-05-06
EP2835536B1 EP2835536B1 (fr)	2018-11-28

Family

ID=51176220

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
EP16171251.8A Active EP3088743B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP14176840.8A Active EP2835536B1 (fr)	2013-08-06	2014-07-14	Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux
EP16171240.1A Not-in-force EP3104014B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
EP16171251.8A Active EP3088743B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
EP16171240.1A Not-in-force EP3104014B1 (fr)	2013-08-06	2014-07-14	Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière

Country Status (2)

Country	Link
EP (3)	EP3088743B1 (fr)
DE (1)	DE102013108482A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102014109004A1 (de) *	2014-06-26	2015-12-31	Pfeiffer Vacuum Gmbh	Siegbahnstufe
DE102017121777A1 (de) *	2017-09-20	2019-03-21	Lutz Pumpen Gmbh	Modifizierte Seitenkanalpumpe sowie Verfahren zum Betrieb einer solchen
EP3867497A4 (fr) *	2018-10-15	2022-07-13	The Regents of the University of Michigan	Optimisation du pompage de viscosités variables par le biais d'une pompe tesla miniaturisée microtexturée
EP3594498B1 (fr)	2019-11-06	2022-01-05	Pfeiffer Vacuum Gmbh	Système avec un dispositif de recyclage des gaz

Citations (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3317868A1 (de) *	1983-05-17	1984-11-22	Leybold-Heraeus GmbH, 5000 Köln	Reibungspumpe
JPS63147990A (ja) *	1986-12-09	1988-06-20	Daikin Ind Ltd	複合真空ポンプ
FR2619867A1 (fr) *	1987-08-24	1989-03-03	Pfeiffer Vakuumtechnik	Pompe moleculaire polyetages
JPH01267390A (ja) *	1988-04-18	1989-10-25	Daikin Ind Ltd	渦流形真空ポンプ
DE3932228A1 (de) *	1988-09-28	1990-04-05	Hitachi Ltd	Turbovakuumpumpe
EP0568069A2 (fr) *	1992-04-29	1993-11-03	Varian Associates, Inc.	Pompes à vide turbomoléculaires
GB2298457A (en) *	1994-09-19	1996-09-04	Hitachi Ltd	Vacuum pump
EP0805275A2 (fr) *	1996-05-03	1997-11-05	The BOC Group plc	Pompes à vide
US5709528A (en) *	1996-12-19	1998-01-20	Varian Associates, Inc.	Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
DE202004010821U1 (de) *	2003-07-23	2004-12-23	The Boc Group Plc, Windlesham	Vakuumpumpenbauteil
US20050118013A1 (en) *	2003-11-21	2005-06-02	Downham Stephen E.	Vacuum pumping arrangement
DE102005008388A1 (de) *	2005-02-24	2006-08-31	Gebr. Becker Gmbh & Co Kg	Laufrad und Seitenkanalmaschine mit Laufrad
EP1724469A2 (fr) *	2005-05-12	2006-11-22	Varian, Inc.	Pompe turbomoléculaire hybride
JP2009062812A (ja) *	2007-09-04	2009-03-26	Osaka Vacuum Ltd	分子ポンプ
EP2253851A2 (fr) *	2009-05-16	2010-11-24	Pfeiffer Vacuum GmbH	Pompe à vide

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Publication number	Priority date	Publication date	Assignee	Title
DE643732C (de) *	1934-05-26	1937-04-15	Siemens Schuckertwerke Akt Ges	Selbstansaugende Kreiselpumpe mit Fluessigkeitsabdichtung
DE691098C (de) *	1937-03-19	1940-05-16	Siemens Schuckertwerke Akt Ges	Fluegelrad fuer eine Fluegelradpumpe mit Fluessigkeitsabdichtung
DE1428251B2 (de) *	1963-03-09	1970-06-11	Siemens AG, 1000 Berlin u. 8000 München	Ringgebläse nach dem Seitenkanalprinzip
US3917431A (en) *	1973-09-18	1975-11-04	Dresser Ind	Multi-stage regenerative fluid pump
FR2282548A1 (fr) *	1974-08-08	1976-03-19	Liber Jean Claude	Pale perfectionnee pour machine a pales tournant dans un fluide
US4325672A (en) *	1978-12-15	1982-04-20	The Utile Engineering Company Limited	Regenerative turbo machine
DE3029507A1 (de) *	1980-08-04	1982-03-04	Röhrnbacher, Emmerich, 7507 Pfinztal	Seitenkanalgeblaese
SE444350B (sv) *	1981-02-10	1986-04-07	Dustcontrol Ab	Sidokanalpump med oppet lophjul
DE3823514A1 (de) *	1988-07-12	1990-01-18	Kayser Herold Uwe	Seitenkanalmaschine
DE3932288A1 (de)	1989-09-28	1991-04-11	Markus Heinermann	Gangschaltungskomponente fuer eine fahrradgangschaltung
SU1758246A1 (ru) *	1990-02-15	1992-08-30	Научно-исследовательский институт энергетического машиностроения МГТУ им.Н.Э.Баумана	Двухступенчата вихрева машина
IT1241431B (it) *	1990-03-09	1994-01-17	Varian Spa	Pompa turbomolecolare perfezionata.
JPH05133388A (ja) *	1991-11-08	1993-05-28	Daikin Ind Ltd	ドライ型真空ポンプ
EP0567874B1 (fr) *	1992-04-27	1995-09-06	Gebrüder Becker GmbH & Co.	Machine à courant pour la compression d'un gaz
EP0767308B1 (fr) *	1995-10-06	2000-03-01	Siemens Aktiengesellschaft	Compresseur à canal latéral
US5819524A (en) *	1996-10-16	1998-10-13	Capstone Turbine Corporation	Gaseous fuel compression and control system and method
JP3638818B2 (ja) *	1999-05-20	2005-04-13	愛三工業株式会社	ウエスコ型ポンプ
DE10012666A1 (de) *	2000-03-15	2001-09-20	Fhp Motors Gmbh	Pumpe, insbesondere Umwälzpumpe für Haushaltsmaschinen wie Wasch- und/oder Geschirrspülmaschinen
DE10108631B4 (de) *	2001-02-22	2005-06-30	Nash-Elmo Industries Gmbh	Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums
DE10334950A1 (de)	2003-07-31	2004-12-09	Nash_Elmo Industries Gmbh	Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
DE10357546A1 (de) *	2003-12-10	2005-07-07	Pfeiffer Vacuum Gmbh	Seitenkanalpumpstufe
JP4252507B2 (ja) *	2004-07-09	2009-04-08	愛三工業株式会社	燃料ポンプ
DE102007053016A1 (de) *	2007-11-05	2009-05-07	Gardner Denver Deutschland Gmbh	Seitenkanalverdichter
DE102009008792A1 (de) *	2009-02-13	2010-08-19	Continental Automotive Gmbh	Kraftstoffpumpe und Verfahren zur Fertigung einer Kraftstoffpumpe
DE102009021620B4 (de) *	2009-05-16	2021-07-29	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102009028646A1 (de) *	2009-08-19	2011-02-24	Robert Bosch Gmbh	Förderaggregat
DE102010019940B4 (de)	2010-05-08	2021-09-23	Pfeiffer Vacuum Gmbh	Vakuumpumpstufe

2013
- 2013-08-06 DE DE102013108482.6A patent/DE102013108482A1/de not_active Withdrawn
2014
- 2014-07-14 EP EP16171251.8A patent/EP3088743B1/fr active Active
- 2014-07-14 EP EP14176840.8A patent/EP2835536B1/fr active Active
- 2014-07-14 EP EP16171240.1A patent/EP3104014B1/fr not_active Not-in-force

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3317868A1 (de) *	1983-05-17	1984-11-22	Leybold-Heraeus GmbH, 5000 Köln	Reibungspumpe
JPS63147990A (ja) *	1986-12-09	1988-06-20	Daikin Ind Ltd	複合真空ポンプ
FR2619867A1 (fr) *	1987-08-24	1989-03-03	Pfeiffer Vakuumtechnik	Pompe moleculaire polyetages
JPH01267390A (ja) *	1988-04-18	1989-10-25	Daikin Ind Ltd	渦流形真空ポンプ
DE3932228A1 (de) *	1988-09-28	1990-04-05	Hitachi Ltd	Turbovakuumpumpe
EP0568069A2 (fr) *	1992-04-29	1993-11-03	Varian Associates, Inc.	Pompes à vide turbomoléculaires
GB2298457A (en) *	1994-09-19	1996-09-04	Hitachi Ltd	Vacuum pump
EP0805275A2 (fr) *	1996-05-03	1997-11-05	The BOC Group plc	Pompes à vide
US5709528A (en) *	1996-12-19	1998-01-20	Varian Associates, Inc.	Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
DE202004010821U1 (de) *	2003-07-23	2004-12-23	The Boc Group Plc, Windlesham	Vakuumpumpenbauteil
US20050118013A1 (en) *	2003-11-21	2005-06-02	Downham Stephen E.	Vacuum pumping arrangement
DE102005008388A1 (de) *	2005-02-24	2006-08-31	Gebr. Becker Gmbh & Co Kg	Laufrad und Seitenkanalmaschine mit Laufrad
EP1724469A2 (fr) *	2005-05-12	2006-11-22	Varian, Inc.	Pompe turbomoléculaire hybride
JP2009062812A (ja) *	2007-09-04	2009-03-26	Osaka Vacuum Ltd	分子ポンプ
EP2253851A2 (fr) *	2009-05-16	2010-11-24	Pfeiffer Vacuum GmbH	Pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MARYLAND METRICS: "SURFACE ROUGHNESS TABLES", 1 January 1998 (1998-01-01), XP055155944, Retrieved from the Internet <URL:http://mdmetric.com/pdf/surfruff.pdf> [retrieved on 20141201] *

Also Published As

Publication number	Publication date
EP3088743A1 (fr)	2016-11-02
DE102013108482A1 (de)	2015-02-12
EP3104014B1 (fr)	2021-09-29
EP3088743B1 (fr)	2019-12-25
EP2835536B1 (fr)	2018-11-28
EP3104014A1 (fr)	2016-12-14
EP2835536A2 (fr)	2015-02-11

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