EP2913534A3 - Vakuumpumpenanordnung - Google Patents

Vakuumpumpenanordnung Download PDF

Info

Publication number
EP2913534A3
EP2913534A3 EP15152122.6A EP15152122A EP2913534A3 EP 2913534 A3 EP2913534 A3 EP 2913534A3 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 A3 EP2913534 A3 EP 2913534A3
Authority
EP
European Patent Office
Prior art keywords
connecting element
pump
vacuum pump
counter flange
pump assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15152122.6A
Other languages
English (en)
French (fr)
Other versions
EP2913534A2 (de
EP2913534B1 (de
Inventor
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2913534A2 publication Critical patent/EP2913534A2/de
Publication of EP2913534A3 publication Critical patent/EP2913534A3/de
Application granted granted Critical
Publication of EP2913534B1 publication Critical patent/EP2913534B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mutual Connection Of Rods And Tubes (AREA)

Abstract

Vakuumpumpenanordnung, insbesondere Turbomolekularpumpenanordnung, mit einer einen Rotor, einen Stator sowie ein Gehäuse umfassenden Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein Verbindungselement (18) mit einer Vakuumkammer verbindbar ist, wobei das Verbindungselement (18) mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar und an einem der Vakuumkammer zugeordneten Gegenflansch (20) fixierbar ist. Das Verbindungselement (18) mit wenigstens einem Zahn (22) versehen ist, der bei an dem Gegenflansch (20) fixiertem Verbindungselement (18) zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch (20) eingedrückt ist oder in eine in dem Gegenflansch (20) vorgesehene Aufnahmevertiefung eingreift.
EP15152122.6A 2014-02-28 2015-01-22 Vakuumpumpenanordnung Active EP2913534B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014102680.2A DE102014102680A1 (de) 2014-02-28 2014-02-28 Vakuumpumpenanordnung

Publications (3)

Publication Number Publication Date
EP2913534A2 EP2913534A2 (de) 2015-09-02
EP2913534A3 true EP2913534A3 (de) 2015-09-09
EP2913534B1 EP2913534B1 (de) 2021-05-19

Family

ID=52354904

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15152122.6A Active EP2913534B1 (de) 2014-02-28 2015-01-22 Vakuumpumpenanordnung

Country Status (3)

Country Link
EP (1) EP2913534B1 (de)
JP (1) JP2015165134A (de)
DE (1) DE102014102680A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030B1 (de) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2025064433A1 (en) * 2023-09-18 2025-03-27 Danaher Cryogenics, Ltd. Vacuum canister clamp system and methods

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1517045A2 (de) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Verbindungselement
EP2133581A2 (de) * 2008-06-12 2009-12-16 Pfeiffer Vacuum GmbH Verbindungselement
EP2290242A2 (de) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062085A (en) * 1979-10-30 1981-05-20 Pfaudler Werke Ag Clamping Assemblies and Screw Clamps for Use Therewith
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US6050614A (en) * 1996-12-17 2000-04-18 General Electric Company Bolted seal joint assembly
DE102005020904A1 (de) 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1517045A2 (de) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Verbindungselement
EP2133581A2 (de) * 2008-06-12 2009-12-16 Pfeiffer Vacuum GmbH Verbindungselement
EP2290242A2 (de) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Vakuumpumpe

Also Published As

Publication number Publication date
JP2015165134A (ja) 2015-09-17
EP2913534A2 (de) 2015-09-02
EP2913534B1 (de) 2021-05-19
DE102014102680A1 (de) 2015-09-03

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