EP2936093A2 - Élément capteur, thermomètre et procédé de détermination d'une température - Google Patents

Élément capteur, thermomètre et procédé de détermination d'une température

Info

Publication number
EP2936093A2
EP2936093A2 EP13802354.4A EP13802354A EP2936093A2 EP 2936093 A2 EP2936093 A2 EP 2936093A2 EP 13802354 A EP13802354 A EP 13802354A EP 2936093 A2 EP2936093 A2 EP 2936093A2
Authority
EP
European Patent Office
Prior art keywords
sensor element
reference element
element according
measuring section
phase transition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13802354.4A
Other languages
German (de)
English (en)
Inventor
Peter Seefeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser Wetzer GmbH and Co KG
Original Assignee
Endress and Hauser Wetzer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser Wetzer GmbH and Co KG filed Critical Endress and Hauser Wetzer GmbH and Co KG
Publication of EP2936093A2 publication Critical patent/EP2936093A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers
    • G01K15/005—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements

Definitions

  • the invention relates to a sensor element, a thermometer, the use of the sensor element, and to a method for determining a predetermined temperature.
  • Such sensor elements which are used for example for detecting a temperature and for example consist of a temperature-dependent resistor, have become known from a multiplicity of applications, in particular process automation technology.
  • Transition temperature occurs a sudden change in impedance.
  • Vanadium oxide-based thin-film hot-element elements have been disclosed, in which a thin layer consisting predominantly of a vanadium oxide material is applied to a suitable substrate, the vanadium oxide material also being doped with foreign atoms. In principle, it is a problem in the temperature measurement a reliable
  • Temperature to validate, adjust, calibrate and / or calibrate the sensor the so-called temperature sensor element.
  • Process automation technology are such sensor elements as, for example, in
  • Thermometers or generally devices for determining a temperature often integrated into the process so that an expansion of such a device is often possible only with great effort or requires special devices, such as installation fittings, which are at all suitable for this purpose.
  • special devices such as installation fittings, which are at all suitable for this purpose.
  • the object is achieved by a sensor element, a thermometer with a sensor element, the use of the sensor element and a method for determining a predetermined temperature.
  • the object is achieved by a sensor element, wherein the sensor element comprises a measuring section which is separated by a dielectric from a reference element, which reference element consists of a material which undergoes a phase transition at a predetermined temperature, through which the electrical Conductivity of the material changes.
  • the sensor element is arranged with respect to the measuring path such that in the case of a phase transition of the
  • Reference element capacitively coupled to the reference element or with a portion of the measuring path of the reference element.
  • the material is such
  • a change of a measuring signal with which the measuring path is acted upon in dependence of the present phase of Reference element can be determined. This can affect the, in the immediate
  • the measuring path has a meandering course at least in sections.
  • Course can be made a particularly large contact area of the measuring section to the dialectic, on which the measuring section is preferably applied.
  • the measuring path consists of a metallic material, preferably platinum.
  • the measuring path and the reference element are arranged on the same substrate.
  • the substrate may have a front and a back, wherein the reference element on the
  • Rear side and the measuring path are arranged on the front side of the substrate.
  • a layer separating the measuring path and the reference element serves as a dielectric.
  • the dielectric is preferably the substrate on which the measuring section and preferably also the reference element are applied.
  • the material comprising the reference element is a transition metal, preferably vanadium or a vanadium oxide or a transition metal-containing, preferably a vanadium or a vanadium oxide-containing material.
  • the measuring path, the dielectric and / or the reference element consist of a thin film or a thick film.
  • the measuring section and the reference element are in the form of a thin-film layer.
  • the electrical resistance of the sensor element changes as a result of the phase transition.
  • the reference element transitions through the phase transition from a state with a first electrical conductivity into a state with a second electrical conductivity.
  • the reference element passes through the phase transition from a state in which the reference element electrically in an essentially isolated manner into an electrically conductive state.
  • the measurement path is acted upon by a measurement signal, preferably an impedance measurement, to determine the phase state of the reference element.
  • one or more signal taps may be provided, is defined by the measuring section on a thin film segment.
  • Impedance measurement can then be determined which belongs to the measuring path or the sensor element capacitance, which depends on the present phase of the
  • Reference element has different values.
  • the sensor element is based on, the acted upon by the measuring signal measuring path, a temperature or the
  • a temperature preferably the predetermined temperature at which the material from which the reference element is made a phase transition undergoes determined.
  • a characteristic, in particular step-shaped, waveform of the measurement signal can be established.
  • the reference element consists of several sections with different phase transition temperatures, preferably of a material with different doping, wherein the sections are particularly preferably separated from one another.
  • this allows a multi-stage course of the impedance or the capacitance or in general a measuring signal with which the measuring path is acted upon, be carried out.
  • the sections have a different thickness, thickness and / or doping. Such measures can influence the transition temperature at which a phase transition of the material takes place.
  • thermometer With regard to the thermometer, the object is achieved by a thermometer with a sensor element according to one of the previous embodiments.
  • thermometer Use of the sensor element for adjustment, validation, calibration and / or calibration of a thermometer solved.
  • the object is achieved by a method for determining a predetermined temperature, wherein a measurement signal is applied to a measurement path, which measurement path is separated by a dielectric from a reference element, which reference element undergoes a phase transition at the predetermined temperature, wherein the measurement signal with a
  • Reference value is compared to determine the phase of the reference element. On the basis of the determined phase, the present temperature can thus also be closed and this temperature value determined with the measurement signal can be compared.
  • the impedance measurement is carried out by applying the measurement path to the measurement signal.
  • the measuring section and the reference element can thus in the case in the
  • Reference element is an electrically conductive state, as a capacitor act, which capacitor, for example, the function of a bandpass, so that only certain measurement signals or measurement signals are transmitted unfiltered with a certain frequency proportion over the measuring path.
  • Reference element or the material from which the reference element is made can thus be determined a characteristic particular step-shaped capacitance profile of the sensor element or the measuring path.
  • a sensor element is preferably proposed for temperature measurement, in particular in devices of process automation technology, such as
  • a measuring insert can be used.
  • Such devices have, for example, a protective tube by introducing the measuring insert can to detect the temperature of a medium.
  • the sensor element has for this purpose, for example, at least one or preferably several
  • a first of these thin-film segments can consist, for example, of a meander-shaped platinum thin film which is applied to a dielectric substrate which consists, for example, of an aluminum oxide-containing ceramic.
  • the metallic thin film serving as a measuring path can capacitively couple to another thin-film segment which
  • vanadium oxide-containing thin film segment is of the meandering
  • Platinum thin film segment for example, which is applied to the same substrate, separated by a dielectric intermediate layer. Through this intermediate layer, a capacitive coupling of the reference element serving thin film segment is carried out to the measuring section. Vanadium oxide undergoes a reaction at a temperature of about 60 ° C
  • phase transformation leads to a change in resistance of the vanadium oxide. This is used according to the invention, a due to a capacitive coupling between the
  • Resistance element for example in the form of a thin film layer or a thin film segment is configured, can at the same time as the
  • the measuring path or the reference element may be applied in the form of a thin film on a front side of the substrate and on a rear side of the substrate opposite the front side.
  • planar etching or a planar depression which was carried out by ablation techniques, be provided to several parallel connected
  • Vanadium oxide layers of different doping next to each other to arrange and marginal contact.
  • the reference element can also consist of a plurality of, for example step-shaped superimposed, ie superimposed vanadium oxide layers which, for example, have a different doping.
  • the doping serves to reduce or increase the phase transition temperature of the reference element.
  • a change in the phase transition temperature can also be done by adjusting the thickness or width of the layers. For example, this can result in a stepped change in impedance of the measuring path or of the entire capacitive measuring arrangement.
  • the substrate may also be coated on one side only.
  • a meander-shaped metallic structure that forms the first measuring section may be coated with a dielectric cover layer of 0.2 to 3 ⁇ m.
  • a plurality of superposed, at least partially overlapping layers of a reference material, for example vanadium oxide with different doping can be arranged on this cover layer. Measuring path and reference element thus form a
  • FIG. 1 is a schematic representation of a first embodiment of the proposed invention, in a plan view
  • FIG. 3 shows a schematic representation of a third embodiment of the proposed invention, in a cross section
  • FIG. 4 shows a schematic illustration of a fourth embodiment of the invention
  • FIG. 5 shows a schematic representation of a fifth embodiment of the
  • Figure 1 shows a substrate 3, i. a support on which a measuring section 1 1 is applied in the form of a meandering metallic wire. On the wire, a cover layer 16 is applied, which serves as a dielectric, and the measuring section 1 1 separated from one on the cover layer 16 of a reference material 12.
  • the measuring section 1 1 is provided with taps 4 and 6, the tapping or
  • Actuate the measuring section 1 1 serve with a measuring signal. Further, a tap 5 is provided on the reference element 12, via which tap the capacitance of the existing of the measuring section 1 1 and the reference element 12 capacitor can be determined.
  • Reference element 12 changes, based on the determination of the capacitance between the measuring section and the reference element 12, the achievement of
  • Phase transition temperature can be determined.
  • the substrate 3 can also serve as a dielectric and, for example, the measuring section 11 can be arranged on a side of the substrate 3 opposite the reference element 12.
  • Figure 2 shows an embodiment of the proposed invention, wherein instead of one, a plurality of reference elements or a reference element, which consists of sections (12, 13, 14, 15) which have a different phase transition temperature.
  • the sections (12, 13, 14, 15) may, for example, consist of vanadium oxide layers with different doping.
  • These vanadium oxide layers may, for example. Via a conductor-like tap 9, 10 (collectively), preferably marginal, i. at one edge of the layers or
  • Sections 12, 13, 14, 15 running be electrically contacted. Furthermore, these layers can be contacted individually via a point-like electrical contact.
  • the capacity of the reference element 12 and measuring section 1 1 existing sensor element can be determined. Since the various sections 12, 13, 14, 15 or layers have different transition temperatures, there is also a step-like curve of the capacity when passing through the respective one
  • Figure 3 shows an embodiment of the proposed invention in which on one side of the substrate 3, the front side, the measuring section 1 1 arranged and on the
  • Phase transition temperatures exist, with the electrical properties of Materiealien depending on the phase in which the respective reference material 12, 13, 14, 15 is dependent.
  • the layers 12, 13, 14, 15 are marginally electrically connected to one another via a conductor-like tap.
  • Reference element 12 existing capacitor step or stepwise.
  • FIG. 4 shows an embodiment in which, on a substrate 3 as well as in FIG. 1, a measuring section made of a metallic material is applied and of a
  • Cover layer 16 is covered.
  • a reference element which has a plurality of juxtaposed sections 12, 13, 14, 15, applied to the cover layer or the substrate.
  • the sections 12, 13, 14, 15 of the reference element are connected marginally by a first conductor-like and a second conductor-like tap 9, 10 electrically connected to each other. However, only a portion of these portions may be electrically connected together, while another portion, for example, may include one or more portions that are electrically isolated from one another.
  • a reference temperature such as.
  • a temperature range or a phase transition temperature on the one hand by a signal tap between the first and second conductor-like tap 9 , 10 and on the other hand between one of the conductor-like taps 9, 10 and the measuring section 1 1 to
  • Figure 5 shows an exploded view of an embodiment of the proposed invention.
  • a measuring section 1 1 are applied, which in turn is covered by a cover layer 16.
  • the cover layer 16 serves as a dielectric.
  • a reference element can be applied, which has a plurality of peripherally contacted sections 12, 13, 14, 15, which sections 12, 13, 14, 15 preferably have a different phase transition temperature.
  • the measuring section 11 is preferably one
  • the reference element 12 can thus be used for in-situ calibration of the temperature-dependent resistance, ie, without having to remove a corresponding measuring device from a container and if necessary. To interrupt the process that takes place in the container.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Thermistors And Varistors (AREA)

Abstract

Élément capteur qui comporte une section de mesure (11) séparée d'un élément de référence (12) par un diélectrique (16), ledit élément de référence (12) étant constitué d'un matériau qui connaît à une température prédéfinie un changement de phase provoquant une modification de la conductivité électrique du matériau.
EP13802354.4A 2012-12-18 2013-12-06 Élément capteur, thermomètre et procédé de détermination d'une température Withdrawn EP2936093A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012112575.9A DE102012112575A1 (de) 2012-12-18 2012-12-18 Sensorelement, Thermometer sowie Verfahren zur Bestimmung einer Temperatur
PCT/EP2013/075791 WO2014095425A2 (fr) 2012-12-18 2013-12-06 Élément capteur, thermomètre et procédé de détermination d'une température

Publications (1)

Publication Number Publication Date
EP2936093A2 true EP2936093A2 (fr) 2015-10-28

Family

ID=49726777

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13802354.4A Withdrawn EP2936093A2 (fr) 2012-12-18 2013-12-06 Élément capteur, thermomètre et procédé de détermination d'une température

Country Status (4)

Country Link
US (1) US20160047699A1 (fr)
EP (1) EP2936093A2 (fr)
DE (1) DE102012112575A1 (fr)
WO (1) WO2014095425A2 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015112426A1 (de) * 2015-07-29 2017-02-02 Endress + Hauser Wetzer Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung der Temperatur eines Mediums
DE102015112425A1 (de) * 2015-07-29 2017-02-02 Endress + Hauser Wetzer Gmbh + Co. Kg Verfahren und Vorrichtung zur in situ Kalibrierung eines Thermometers
DE102016123856A1 (de) * 2016-12-08 2018-06-14 Endress + Hauser Wetzer Gmbh + Co. Kg Verfahren zur in situ Kalibrierung eines Thermometers
DE102017100264A1 (de) * 2017-01-09 2018-07-12 Endress + Hauser Wetzer Gmbh + Co. Kg Vorrichtung und Verfahren zur in situ Kalibrierung eines Thermometers
DE102017100266A1 (de) * 2017-01-09 2018-07-12 Endress + Hauser Wetzer Gmbh + Co. Kg Temperatur-Grenzwertgeber
DE102018121494A1 (de) 2018-09-04 2020-03-05 Endress + Hauser Wetzer Gmbh + Co Kg Messeinsatz mit Zustandsüberwachung
DE102019124604A1 (de) * 2019-09-12 2021-03-18 Endress + Hauser Wetzer Gmbh + Co. Kg Nicht invasives Thermometer
DE102019124605A1 (de) * 2019-09-12 2021-03-18 Endress + Hauser Wetzer Gmbh + Co. Kg Nicht invasives Thermometer
DE102019129475A1 (de) 2019-10-31 2021-05-06 Endress + Hauser Wetzer Gmbh + Co. Kg Nicht invasives Thermometer
US12372417B2 (en) * 2022-07-01 2025-07-29 International Business Machines Corporation Adjustable transition edge thermometer

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Also Published As

Publication number Publication date
US20160047699A1 (en) 2016-02-18
WO2014095425A3 (fr) 2014-09-25
DE102012112575A1 (de) 2014-07-03
WO2014095425A2 (fr) 2014-06-26

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