EP2942111A3 - Vorrichtung zur ablagerung von partikeln auf einem substrat, und ablagerungsverfahren, bei dem eine solche vorrichtung zum einsatz kommt - Google Patents

Vorrichtung zur ablagerung von partikeln auf einem substrat, und ablagerungsverfahren, bei dem eine solche vorrichtung zum einsatz kommt Download PDF

Info

Publication number
EP2942111A3
EP2942111A3 EP15166479.4A EP15166479A EP2942111A3 EP 2942111 A3 EP2942111 A3 EP 2942111A3 EP 15166479 A EP15166479 A EP 15166479A EP 2942111 A3 EP2942111 A3 EP 2942111A3
Authority
EP
European Patent Office
Prior art keywords
chamber
particles
deposit
producing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15166479.4A
Other languages
English (en)
French (fr)
Other versions
EP2942111B1 (de
EP2942111A2 (de
Inventor
Emmanuel Picard
Julien Cordeiro
Kévin Berton
David Peyrade
Marc Zelsmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Joseph Fourier Grenoble 1
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Universite Joseph Fourier Grenoble 1
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA, Universite Joseph Fourier Grenoble 1, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP2942111A2 publication Critical patent/EP2942111A2/de
Publication of EP2942111A3 publication Critical patent/EP2942111A3/de
Application granted granted Critical
Publication of EP2942111B1 publication Critical patent/EP2942111B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/12—Applying particulate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C3/00—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
    • B05C3/18—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material only one side of the work coming into contact with the liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
EP15166479.4A 2014-05-08 2015-05-05 Vorrichtung zur ablagerung von partikeln auf einem substrat, und ablagerungsverfahren, bei dem eine solche vorrichtung zum einsatz kommt Not-in-force EP2942111B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1454166A FR3020767A1 (fr) 2014-05-08 2014-05-08 Dispositif de realisation d'un depot de particules sur un substrat et procede de depot utilisant un tel dispositif

Publications (3)

Publication Number Publication Date
EP2942111A2 EP2942111A2 (de) 2015-11-11
EP2942111A3 true EP2942111A3 (de) 2016-01-20
EP2942111B1 EP2942111B1 (de) 2019-04-24

Family

ID=51063697

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15166479.4A Not-in-force EP2942111B1 (de) 2014-05-08 2015-05-05 Vorrichtung zur ablagerung von partikeln auf einem substrat, und ablagerungsverfahren, bei dem eine solche vorrichtung zum einsatz kommt

Country Status (3)

Country Link
US (1) US9839938B2 (de)
EP (1) EP2942111B1 (de)
FR (1) FR3020767A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3071257B1 (fr) 2017-09-19 2021-08-20 Safran Ceram Procede d'injection d'une suspension chargee dans une texture fibreuse et procede de fabrication d'une piece en materiau composite
FR3072038B1 (fr) * 2017-10-05 2021-11-05 Centre Nat Rech Scient Procede d'assemblage de particules gravitationnel

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6068878A (en) * 1998-09-03 2000-05-30 Micron Technology, Inc. Methods of forming layers of particulates on substrates
WO2008014604A1 (en) * 2006-08-02 2008-02-07 Nanometrix Inc. Modular transfer apparatus and process
US20110159700A1 (en) * 2009-12-31 2011-06-30 Aurotek Corportion Film formation system and film formation method
US20120040164A1 (en) * 2010-08-12 2012-02-16 Academia Sinica Large-area particle-monolayer and method for fabricating the same
US20120171448A1 (en) * 2010-11-24 2012-07-05 Austin Joseph Akey Ordered assembly of nanoparticles in spatially defined regions

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7241341B2 (en) * 2002-05-10 2007-07-10 Nanometrix Inc. Method and apparatus for two dimensional assembly of particles
US20150290669A1 (en) * 2012-10-26 2015-10-15 Massachusetts Institute Of Technology Devices and Methods for Layer-by-Layer Assembly

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6068878A (en) * 1998-09-03 2000-05-30 Micron Technology, Inc. Methods of forming layers of particulates on substrates
WO2008014604A1 (en) * 2006-08-02 2008-02-07 Nanometrix Inc. Modular transfer apparatus and process
US20110159700A1 (en) * 2009-12-31 2011-06-30 Aurotek Corportion Film formation system and film formation method
US20120040164A1 (en) * 2010-08-12 2012-02-16 Academia Sinica Large-area particle-monolayer and method for fabricating the same
US20120171448A1 (en) * 2010-11-24 2012-07-05 Austin Joseph Akey Ordered assembly of nanoparticles in spatially defined regions

Also Published As

Publication number Publication date
EP2942111B1 (de) 2019-04-24
US9839938B2 (en) 2017-12-12
EP2942111A2 (de) 2015-11-11
FR3020767A1 (fr) 2015-11-13
US20150321216A1 (en) 2015-11-12

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