EP2963240A3 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP2963240A3 EP2963240A3 EP15168903.1A EP15168903A EP2963240A3 EP 2963240 A3 EP2963240 A3 EP 2963240A3 EP 15168903 A EP15168903 A EP 15168903A EP 2963240 A3 EP2963240 A3 EP 2963240A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
- F01C21/104—Stators; Members defining the outer boundaries of the working chamber
- F01C21/108—Stators; Members defining the outer boundaries of the working chamber with an axial surface, e.g. side plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/24—Level of liquid, e.g. lubricant or cooling liquid
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014109383.6A DE102014109383B4 (de) | 2014-07-04 | 2014-07-04 | Vakuumpumpe |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2963240A2 EP2963240A2 (fr) | 2016-01-06 |
| EP2963240A3 true EP2963240A3 (fr) | 2016-07-06 |
| EP2963240B1 EP2963240B1 (fr) | 2020-07-01 |
Family
ID=53365753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP15168903.1A Active EP2963240B1 (fr) | 2014-07-04 | 2015-05-22 | Pompe à vide |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP2963240B1 (fr) |
| DE (1) | DE102014109383B4 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3330483B1 (fr) * | 2016-12-05 | 2021-02-03 | Pfeiffer Vacuum Gmbh | Pompe à vide avec accouplement pour compenser le désalignement de l'arbre |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0459107A1 (fr) * | 1990-05-29 | 1991-12-04 | Leybold Aktiengesellschaft | Pompe à vide à palettes et son procédé d'approvisionnement en huile |
| DE4325282A1 (de) * | 1993-07-28 | 1995-02-02 | Leybold Ag | Vakuumpumpe mit Zusatzeinrichtung |
| DE102006058837A1 (de) * | 2006-12-13 | 2008-06-19 | Pfeiffer Vacuum Gmbh | Schmiermittelgedichtete Drehschiebervakuumpumpe |
| WO2011037132A1 (fr) * | 2009-09-25 | 2011-03-31 | 株式会社アルバック | Pompe à vide rotative à huile |
| EP2431568A2 (fr) * | 2010-09-17 | 2012-03-21 | Pfeiffer Vacuum GmbH | Des moyens de fixation pour une pompe à vide |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3744942A (en) | 1971-07-16 | 1973-07-10 | Borg Warner | Rotary sliding vane compressor with hydrostatic bearings |
| EP2530325B1 (fr) | 2010-01-29 | 2018-10-17 | Ulvac Kiko, Inc. | Pompe |
-
2014
- 2014-07-04 DE DE102014109383.6A patent/DE102014109383B4/de active Active
-
2015
- 2015-05-22 EP EP15168903.1A patent/EP2963240B1/fr active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0459107A1 (fr) * | 1990-05-29 | 1991-12-04 | Leybold Aktiengesellschaft | Pompe à vide à palettes et son procédé d'approvisionnement en huile |
| DE4325282A1 (de) * | 1993-07-28 | 1995-02-02 | Leybold Ag | Vakuumpumpe mit Zusatzeinrichtung |
| DE102006058837A1 (de) * | 2006-12-13 | 2008-06-19 | Pfeiffer Vacuum Gmbh | Schmiermittelgedichtete Drehschiebervakuumpumpe |
| WO2011037132A1 (fr) * | 2009-09-25 | 2011-03-31 | 株式会社アルバック | Pompe à vide rotative à huile |
| EP2431568A2 (fr) * | 2010-09-17 | 2012-03-21 | Pfeiffer Vacuum GmbH | Des moyens de fixation pour une pompe à vide |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2963240A2 (fr) | 2016-01-06 |
| DE102014109383B4 (de) | 2022-03-24 |
| DE102014109383A1 (de) | 2016-01-07 |
| EP2963240B1 (fr) | 2020-07-01 |
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