EP3061973B1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP3061973B1
EP3061973B1 EP16157019.7A EP16157019A EP3061973B1 EP 3061973 B1 EP3061973 B1 EP 3061973B1 EP 16157019 A EP16157019 A EP 16157019A EP 3061973 B1 EP3061973 B1 EP 3061973B1
Authority
EP
European Patent Office
Prior art keywords
pair
rotors
gears
pump
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16157019.7A
Other languages
English (en)
French (fr)
Other versions
EP3061973A1 (de
Inventor
Yoshinori Ojima
Naoya Yoshida
Atsushi Shiokawa
Shinichi Sekiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2016006803A external-priority patent/JP6240229B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP3061973A1 publication Critical patent/EP3061973A1/de
Application granted granted Critical
Publication of EP3061973B1 publication Critical patent/EP3061973B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0064—Magnetic couplings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor

Definitions

  • the present invention relates to a vacuum pump.
  • a vacuum pump is a pump which creates negative pressure inside a container by evacuating gas from the container.
  • vacuum pumps There are various types of vacuum pumps.
  • a vacuum pump is known which evacuates gas by rotating a pair of pump rotors, provided on a pair of opposite shafts, synchronously in opposite directions.
  • a motor rotor having a permanent magnet provided on the outer periphery, or a motor rotor having a permanent magnet embedded on the inside thereof is provided on each of the pair of shafts, and a magnetic coupling is formed through a stator core by different magnetic pole faces of the motor rotors.
  • This vacuum pump uses a magnetic coupling between the motor rotors to rotate the pair of pump rotors synchronously in opposite directions. Since this vacuum pump forms a magnetic coupling through the stator core, a magnetic circuit is formed not only between the two shafts but also inside the single shafts, which results in a weak magnetic coupling force.
  • a gear which suppresses the loss of synchronization between the pair of pump rotors is mounted on each of the pair of shafts. Since the pump rotors are synchronized by means of the gears in order to compensate for the weak magnetic coupling force, the load applied to the gears is relatively large. Accordingly, the gears are increased in size to retain a relatively high strength. Moreover, to suppress wear due to contact etc. of the gears, it is conceivable to provide a space, filled with lubricating oil etc., separately from a motor chamber and a pump chamber and provide the gears inside that space. However, this aspect makes the structure of the vacuum pump complicated and causes an increase in size of the vacuum pump.
  • a vacuum pump having an enhanced magnetic coupling force is also known.
  • a motor rotor having a permanent magnet provided on the outer periphery is mounted on each of a pair of shafts, and a magnetic coupling is directly formed by different magnetic pole faces of the motor rotors without a stator core interposed therebetween. According to this vacuum pump, it is possible to rotate the two shafts synchronously in opposite directions without using a gear.
  • WO 2004/031585 A1 was used as a basis for the preamble of claim 1 and discloses a screw pump which includes a pair of screw rotors having teeth which are held in mesh with each other for drawing and discharging a fluid by rotating the screw rotors synchronously in opposite directions.
  • the teeth of the screw rotors have the same shape as each other and are coiled helically in opposite directions.
  • the teeth of the screw rotors have an axial tooth profile which allows a pair of facing teeth surfaces of the screw rotors to be brought into contact with each other only at a pitch line when the pair of facing teeth surfaces are brought into contact with each other.
  • the vacuum pump which directly forms a magnetic coupling, suctions a small solid, synchronization between the pump rotors may be lost as the solid is caught between the pump rotors, and the pump rotors may come into contact with each other. In this case, the vacuum pump may stop. Even if the solid is removed by the rotary force of the pump rotors, any contact between the pump rotors may result in damage to the pump rotors. In this case, the vacuum pump can no longer maintain its performance, and the vacuum pump may stop.
  • a vacuum pump is provided as set forth in claim 1.
  • the pair of gears come into contact with each other so as to resolve the loss of synchronization between the pair of pump rotors.
  • contact between the pump rotors can be suppressed.
  • the pair of motor rotors directly form a magnetic coupling and the magnetic coupling force is sufficiently large.
  • the pair of pump rotors are synchronously rotated by the magnetic coupling force of the pair of motor rotors alone, and the pair of gears do not come into contact with each other. Accordingly, the strength required of the pair of gears is relatively small, so that the size of the pair of gears can be reduced. Moreover, since the pair of gears come into contact with each other infrequently and do not easily wear, it is not necessary to dispose the pair of gears in a space filled with lubricating oil, for example. Therefore, the vacuum pump can be simplified in structure and reduced in
  • the pair of gears come into contact with each other before the pair of pump rotors come into contact with each other.
  • the pair of pump rotors are synchronized.
  • the pair of pump rotors can synchronously rotate while keeping out of contact with each other.
  • the vacuum pump of one embodiment may further include armatures disposed outside the outer periphery of the pair of motor rotors, and the armatures may be disposed in an elliptical shape with a predetermined clearance kept to the outer periphery of the pair of motor rotors. Accordingly, the pair of motor rotors can directly form a magnetic coupling and produce a sufficiently large magnetic coupling force.
  • the pair of gears may be disposed in a space not filled with a lubricant.
  • the pair of gears may be disposed inside a pump chamber where the pair of pump rotors are disposed.
  • the pair of gears may be disposed inside a motor chamber where the pair of motor rotors are disposed.
  • the vacuum pump can be simplified in structure and reduced in size.
  • At least one of the pair of gears may be formed of a self-lubricating material. At least one of the pair of gears may be formed of a resin. The surface of at least one of the pair of gears may be coated with a lubricant.
  • FIG. 1 is a schematic cross-sectional view of the vacuum pump of one embodiment.
  • a screw vacuum pump will be described as an example of a vacuum pump.
  • the present invention is applicable not only to a screw vacuum pump but also to a synchronous opposite rotation-type vacuum pump such as a Roots pump.
  • a vacuum pump 1000 of this embodiment is used, for example, to evacuate gas from a space where an object to be analyzed with a scanning electron microscope is installed.
  • the vacuum pump 1000 can also be used for various other applications including evacuation of gas in semiconductor manufacturing equipment.
  • the vacuum pump 1000 includes a drive motor unit 200, and a pair of pump rotor units 300, 400 which are driven to rotate by the drive motor unit 200.
  • the pump rotor unit 300 includes a pump main shaft 310 and a screw-type pump rotor 312 mounted on the pump main shaft 310.
  • the pump rotor unit 400 includes a pump main shaft 410 disposed facing the pump main shaft 310 and a screw-type pump rotor 412 mounted on the pump main shaft 410.
  • the pump rotor 312 and the pump rotor 412 face each other. As shown in FIG. 1 , the screw of the pump rotor 312 and the screw of the pump rotor 412 are separated from each other with predetermined clearances S1, S2 kept therebetween.
  • the pump rotor 312 and the pump rotor 412 are disposed inside a pump chamber 500 which is formed by an upper casing (not shown) and a lower casing 330.
  • First ends of the pump main shafts 310, 410 are supported by bearings 340, 440.
  • the pump main shafts 310, 410 are supported by bearings 342, 442 at a border part between the drive motor unit 200 and the pump rotor units 300, 400.
  • Second ends of the pump main shafts 310, 410 protrude toward the drive motor unit 200 from the positions where the pump main shafts 310, 410 are supported by the bearings 342, 442.
  • the drive motor unit 200 includes motor rotors 110, 210, a stator yoke 120, and gears 380, 480.
  • the motor rotors 110, 210 are mounted on the second ends of the pump main shafts 310, 410, respectively.
  • the motor rotor 110 and the motor rotor 210 face each other.
  • the stator yoke 120 surrounds the motor rotors 110, 210.
  • the gears 380, 480 are mounted on the pump main shafts 310, 410, respectively.
  • the gear 380 and the gear 480 face each other.
  • the motor rotors 110, 210, the stator yoke 120, and the gears 380, 480 are disposed inside a motor chamber 600 which is formed by a motor frame 130.
  • FIG. 2 is a cross-sectional view showing the structure of the drive motor of one embodiment.
  • FIG. 3 is a view showing the connection of the windings of the drive motor.
  • the motor rotors 110, 210 have permanent magnets 112, 212 provided around their surfaces. Specifically, in this embodiment, the permanent magnets 112, 212 each have three pairs of poles, and six poles, S, N, S, N, S, and N, are provided around each of the motor rotors 110, 210.
  • the vacuum pump including a surface permanent magnet (SPM) motor which has the permanent magnets 112, 212 provided around the surfaces of the motor rotors 110, 210 has been illustrated, but the present invention is not limited to this example.
  • the present invention is also applicable to a vacuum pump including an interior permanent magnet (IPM) motor which has a permanent magnet embedded inside the motor rotor.
  • the stator yoke 120 surrounds the motor rotors 110, 210 in an elliptical shape.
  • the stator yoke 120 is provided with a plurality of armatures 122.
  • the armatures 122 each include an armature iron core 124 and a winding 126 wound around the armature iron core 124.
  • the armatures 122 are positioned by being fitted into the common stator yoke 120.
  • the armatures 122 are disposed at a distance of a predetermined clearance ⁇ 1 from the outer peripheral surfaces of the motor rotors 110, 210.
  • the armatures 122 are disposed in an elliptical shape with a predetermined clearance kept to the outer periphery of the pair of motor rotors 110, 210.
  • Each winding 126 is divided into six slots, U, V, W, U', V', and W'.
  • the windings U', V', and W' are opposite in phase to the windings U, V, and W, respectively.
  • the windings U1, U2, V1, V2, and W1, W2 are connected in series, and they are windings with an equal number of turns.
  • the windings U1, U1', V1, V1', W1, and W1' and the windings U2, U2', V2, V2', W2, and W2' are disposed symmetrically with respect to a line of symmetry B.
  • the windings U1, U2, V1, V2, W1, and W2 and the windings U1', U2', V1', V2', W1', and W2' are disposed symmetrically with respect to a line of symmetry C.
  • the winding 126 has the windings U1, U2 connected in series and the windings U1', U2', which are opposite in phase to the windings U1, U2, connected in series, and the windings U1, U2 and the windings U1', U2' are connected in parallel to constitute the U-phase.
  • the motor rotors 110, 210 are disposed with a predetermined center distance t kept therebetween.
  • the motor rotors 110, 210 have the permanent magnets 112, 212, which are magnetized in six poles, alternately as N and S at regular intervals, respectively provided on the outer periphery.
  • each two poles facing each other across the line of symmetry C of the six-pole permanent magnets 112, 212 are used as a magnetic coupling.
  • the motor rotors 110, 210 form a magnetic coupling by having their different magnetic pole faces facing each other, and synchronously rotate only in the opposite directions from each other.
  • the outer peripheries of the motor rotors 110, 210 face each other with a predetermined clearance distance ⁇ 0 kept therebetween.
  • the motor rotors 110, 210 directly face each other across a space, without a stator core, such as an iron core, interposed therebetween. That is, the vacuum pump 1000 of this embodiment is a vacuum pump in which the motor rotors 110, 210 directly form a magnetic coupling.
  • too large a clearance between the motor rotors 110, 210 causes a decrease in magnetic coupling force.
  • the drive motor unit 200 includes 12 armatures 122.
  • the armatures 122 are disposed in groups of six poles so as to be symmetrical with respect to the line of symmetry C.
  • the windings 126 are wound around the armature iron cores 124 in the same phase and in the opposite directions.
  • an opposite-phase relation is established as the windings 126 at symmetrical positions are energized in the opposite directions.
  • the drive motor unit 200 is driven as one motor. Since the drive motor unit 200 is driven as one three-phase motor, there may also be one drive power source device.
  • FIG. 4A to FIG. 9A are views showing the flow of an electric current through the wirings connected as shown in FIG. 3 .
  • FIG. 4B to FIG. 9B are views showing the flow of an electric current through the armature windings of the drive motor of FIG. 2 and the rotation of the pump rotors.
  • the drive motor unit 200 According to the magnetic pole position of the motor rotors 110, 210, the drive motor unit 200 repeatedly switches energization in six ways as indicated by the arrows in FIG. 4A to FIG. 9A .
  • the drive motor unit 200 continues rotation by rotating the motor rotors 110, 210 synchronously in opposite directions, the directions of the arrows in FIG. 4B to FIG. 9B .
  • the number of the magnetic poles of the motor rotors 110, 210, the number of the armatures 122, and the combination thereof are not limited to those shown in this embodiment but are arbitrary.
  • the number of the magnetic poles of each of the motor rotors 110, 210 may be four, and the number of the armatures 122 may be six.
  • FIG. 10 is a view schematically showing the clearance between the teeth of the gears.
  • FIG. 10 shows only a part of the gears 380, 480.
  • the clearances between teeth 380a of the gear 380 and teeth 480a of the gear 480 are set to G1, G2.
  • the clearances G1, G2 between the teeth 380a of the gear 380 and the teeth 480a of the gear 480 are backlash dimensions which satisfy the relation G1, G2 ⁇ S1, S2.
  • the pump rotors 312, 412 and the gears 380, 480 are formed so as to satisfy the relation G1, G2 ⁇ S1, S2.
  • the motor rotors 110, 210 directly form a magnet coupling between the opposite different magnetic poles, without an iron core interposed therebetween, and rotate synchronously in opposite directions.
  • the gears 380, 480 can rotate without coming into contact with each other. Therefore, the vacuum pump 1000 can eliminate contact resistance of the gears 380, 480 and loss of grease or lubricating oil.
  • this embodiment can provide the vacuum pump 1000 which suffers little gear loss and is highly efficient as well as capable of highspeed rotation.
  • the vacuum pump 1000 of this embodiment can rotate the pump rotors 312, 412 synchronously in opposite directions without causing the pump rotors 312, 412 to come into contact with each other.
  • the vacuum pump of this embodiment includes the gears 380, 480.
  • the gears 380, 480 come into contact with each other so as to resolve the loss of synchronization between the pump rotors 312, 412.
  • the vacuum pump 1000 can suppress contact between the pump rotors.
  • the clearances S1, S2 between the pump rotor 312 and the pump rotor 412 are larger than the clearances G1, G2 between the teeth 380a of the gear 380 and the teeth 480a of the gear 480. Accordingly, when synchronization between the pump rotors 312, 412 is lost, the gear 380 and the gear 480 come into contact with each other before the pump rotor 312 and the pump rotor 412 come into contact with each other. As the gear 380 and the gear 480 come into contact with each other and corotate, the pump rotors 312, 412 are synchronized. As a result, the pump rotor 312 and the pump rotor 412 can synchronously rotate while keeping out of contact with each other.
  • the motor rotors 110, 210 directly form a magnetic coupling and the magnetic coupling force is sufficiently large as described above. Therefore, in a normal state where the vacuum pump 1000 has not suctioned a small solid etc., the pump rotors 312, 412 are synchronously rotated by the magnetic coupling force of the motor rotors 110, 210 alone. As a result, in the normal state, the gears 380, 480 keep the clearances G1, G2 and do not come into contact with each other. That is, the gears 380, 480 are emergency components in case of loss of synchronization between the pump rotors 312, 412 due to an abnormal state where the vacuum pump 1000 has suctioned a small solid etc.
  • the gears 380, 480 keep the clearances G1, G2 and do not come into contact with each other in the normal state, the strength required of the gears 380, 480 is relatively small. Therefore, according to the vacuum pump 1000 of this embodiment, the size of the gears 380, 480 can be reduced. Since the gears 380, 480 come into contact with each other infrequently and do not easily wear, it is not necessary to dispose the gears 380, 480 in a space filled with lubricating oil, for example.
  • the gears 380, 480 are disposed inside the motor chamber 600 which is a space not filled with a lubricant.
  • the gears 380, 480 may be disposed inside the pump chamber 500 which is a space not filled with a lubricant.
  • the gears 380, 480 can be used without using lubricating oil or grease.
  • At least one of the gears 380, 480 may be formed of a self-lubricating material such as Teflon (R) or a resin.
  • At least a part of the gears 380, 480 may be formed of a self-lubricating material.
  • at least a part of the teeth 380a, 480a may be formed of a self-lubricating material, or the entire surface of at least one of the gears 380, 480 or the surface of the contact part between the gears 380, 480 may be formed of a self-lubricating material.
  • the surface of at least one of the gears 380, 480 may be coated with a lubricant.
  • the vacuum pump 1000 can be simplified in structure and reduced in size, since it is not necessary to provide a space, filled with a lubricant, separately from the pump chamber 500 and the motor chamber 600.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (8)

  1. Vakuumpumpe (1000), die Folgendes aufweist:
    ein Paar von Wellen (310, 410), die zueinander weisend angeordnet sind;
    ein Paar von Pumpenrotoren (312, 412), die auf dem Paar von Wellen (310, 410) vorgesehen sind; und
    ein Paar von Motorrotoren (110, 210), die auf dem Paar von Wellen (310, 410) vorgesehen sind und direkt eine magnetische Kopplung bilden, indem sie unterschiedliche Magnetpole der Magnete (112, 212) aufweist, die zueinander weisen;
    dadurch gekennzeichnet, dass
    ein Paar von Zahnrädern (380, 490) auf dem Paar von Wellen (310, 410) vorgesehen ist,
    wobei
    ein Zwischenraum zwischen den Zähnen des Paars von Zahnrädern (380, 480) so eingestellt ist, dass das Paar von Zahnrädern (380, 480) nicht in Kontakt miteinander kommt, und
    der Zwischenraum zwischen den Zähnen des Paars von Zahnrädern (380, 480) so eingestellt ist, dass er kleiner als ein Zwischenraum zwischen dem Paar von Pumpenrotoren (312, 412) ist.
  2. Vakuumpumpe gemäß Anspruch 1, die ferner Anker (122) aufweist, die außerhalb des Außenumfangs des Paars von Motorrotoren (110, 210) angeordnet sind, wobei die Anker (122) in einer elliptischen Form angeordnet sind, wobei ein vorbestimmter Abstand zu dem Außenumfang des Paars von Motorrotoren (110, 210) gehalten wird.
  3. Vakuumpumpe gemäß Anspruch 1 oder 2, wobei das Paar von Zahnrädern (380, 480) in einem Raum angeordnet ist, der nicht mit einem Schmiermittel gefüllt ist.
  4. Vakuumpumpe gemäß Anspruch 3, wobei das Paar von Zahnrädern (380, 480) innerhalb einer Pumpenkammer (500) angeordnet ist, in der das Paar von Pumprotoren (312, 412) angeordnet ist.
  5. Vakuumpumpe gemäß Anspruch 3, wobei das Paar von Zahnrädern (380, 480) innerhalb einer Motorkammer (600) angeordnet ist, in der das Paar von Motorrotoren (110, 210) angeordnet ist.
  6. Vakuumpumpe gemäß einem der Ansprüche 1 bis 5, wobei zumindest eines der Paare von Zahnrädern (380, 480) aus einem selbstschmierenden Material gebildet ist.
  7. Vakuumpumpe gemäß einem der Ansprüche 1 bis 5, wobei zumindest eines der Paare von Zahnrädern (380, 480) aus einem Harz gebildet ist.
  8. Vakuumpumpe gemäß einem der Ansprüche 1 bis 5, wobei die Oberfläche von zumindest einem des Paares von Zahnrädern (380, 480) mit einem Schmiermittel bedeckt ist.
EP16157019.7A 2015-02-25 2016-02-23 Vakuumpumpe Active EP3061973B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015035641 2015-02-25
JP2016006803A JP6240229B2 (ja) 2015-02-25 2016-01-18 真空ポンプ

Publications (2)

Publication Number Publication Date
EP3061973A1 EP3061973A1 (de) 2016-08-31
EP3061973B1 true EP3061973B1 (de) 2017-12-13

Family

ID=55446645

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16157019.7A Active EP3061973B1 (de) 2015-02-25 2016-02-23 Vakuumpumpe

Country Status (1)

Country Link
EP (1) EP3061973B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2813078T3 (es) 2016-12-15 2021-03-22 Carrier Corp Compresor de tornillo con engranaje magnético
CN108194353B (zh) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0733804B1 (de) * 1995-03-20 2002-12-18 Ebara Corporation Vakuumpumpe
JP3315581B2 (ja) 1995-03-20 2002-08-19 株式会社荏原製作所 真空ポンプ
JP4014336B2 (ja) 1999-07-16 2007-11-28 株式会社荏原製作所 ２軸同期反転駆動モータ
WO2004031585A1 (en) * 2002-10-04 2004-04-15 Ebara Densan Ltd. Screw pump and method of operating the same
DE102010045881A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP3061973A1 (de) 2016-08-31

Similar Documents

Publication Publication Date Title
US10447102B2 (en) Permanent magnet electrical machines and methods of assembling the same
US20170117762A1 (en) Permanent-magnet dynamo-electric machine and compressor using the same
EP1378982B1 (de) Kommutatorloser Motor und damit versehener hermetischer Verdichter
US9438096B2 (en) Electric motor and magnetic gear
EP3032717A1 (de) Bürstenloser motor
CN1822473B (zh) 电动机、压缩机和空调
EP3061973B1 (de) Vakuumpumpe
EP1964242B1 (de) Rotorbaugruppe zur verwendung in einem netz-start-permanentmagnet-synchronmotor
CN102106058A (zh) 永磁体同步电动机
CN101981784B (zh) 定子、电动机及压缩机
WO2015193963A1 (ja) 圧縮機、冷凍サイクル装置、および空気調和機
WO2013002658A2 (en) Multipolar, axial flux motor, especially for pump
WO2013099477A1 (ja) 永久磁石電動機及び圧縮機
US20060066168A1 (en) Bonded rotor laminations
US10483813B2 (en) Rotor having flux filtering function and synchronous motor comprising same
JP6240229B2 (ja) 真空ポンプ
DK3126269T3 (en) Drive system with electric motor and transmission
US20070138893A1 (en) Rotor assembly for use in line start permanent magnet synchronous motor
JP2016100927A (ja) 永久磁石式回転電機及びそれを用いた圧縮機
JP2016171646A (ja) 永久磁石式回転電機、並びにそれを用いる圧縮機
CN110431727A (zh) 具有在磁回路中的转换元件的电动机
EP3291414A2 (de) Geschalteter reluktanzmotor mit axialer laminierter konstruktion
RU2630254C2 (ru) Электрический двигатель с низким моментом короткого замыкания, приводное устройство с несколькими двигателями и способ изготовления такого двигателя
EP4152568A1 (de) Rotor und elektromotor
JP2020067032A (ja) 真空ポンプおよび真空ポンプの製造方法

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20170227

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: F04C 29/00 20060101ALI20170517BHEP

Ipc: F04C 25/02 20060101AFI20170517BHEP

Ipc: F04C 18/12 20060101ALN20170517BHEP

Ipc: F04C 18/16 20060101ALI20170517BHEP

INTG Intention to grant announced

Effective date: 20170608

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

RIN1 Information on inventor provided before grant (corrected)

Inventor name: SHIOKAWA, ATSUSHI

Inventor name: OJIMA, YOSHINORI

Inventor name: YOSHIDA, NAOYA

Inventor name: SEKIGUCHI, SHINICHI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: EBARA CORPORATION

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 954670

Country of ref document: AT

Kind code of ref document: T

Effective date: 20171215

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602016001039

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 3

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180313

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 954670

Country of ref document: AT

Kind code of ref document: T

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180314

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180313

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20180413

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602016001039

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20180914

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20180228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180223

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180223

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180228

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190228

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180223

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20160223

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

Ref country code: MK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171213

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230428

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20251231

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20260106

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20260102

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20260130

Year of fee payment: 11