EP3096021A1 - Télé-diagnostic d'appareils sous vide - Google Patents

Télé-diagnostic d'appareils sous vide Download PDF

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Publication number
EP3096021A1
EP3096021A1 EP15168485.9A EP15168485A EP3096021A1 EP 3096021 A1 EP3096021 A1 EP 3096021A1 EP 15168485 A EP15168485 A EP 15168485A EP 3096021 A1 EP3096021 A1 EP 3096021A1
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EP
European Patent Office
Prior art keywords
diagnostic data
vacuum device
vacuum
data
entirety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15168485.9A
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German (de)
English (en)
Other versions
EP3096021B1 (fr
EP3096021B2 (fr
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15168485.9A priority Critical patent/EP3096021B2/fr
Priority to JP2016096837A priority patent/JP2017002898A/ja
Publication of EP3096021A1 publication Critical patent/EP3096021A1/fr
Publication of EP3096021B1 publication Critical patent/EP3096021B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/90—Remote control, e.g. wireless, via LAN, by radio, or by a wired connection from a central computer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/80—Diagnostics

Definitions

  • the invention relates to a vacuum device and a remote diagnosis method for vacuum devices.
  • Vacuum devices such as, in particular, vacuum pumps or the like are used in various fields of technology in order to create a vacuum necessary for a respective process.
  • Vacuum devices typically have a user-friendly, relatively simple user interface and / or user interface provided only for limited data exchange with the user.
  • a user interface or user interface mostly only serves to retrieve the data necessary for the current requirement or for normal operation on site, such as data for the states on / off, the rotational speed, an error status or the like.
  • the invention has for its object to provide a vacuum device and a remote diagnosis method with which the aforementioned problems are eliminated. It should be ensured in the simplest possible way that the diagnostic data required for a remote diagnosis can be provided completely and unadulterated, even in environments where a high level of data security is required.
  • the vacuum device comprises a device for generating a total of diagnostic data of the vacuum device suitable at a remote analysis location, a retrieval device, by means of which a provision of the entirety of diagnostic data can be initiated, and a provision device, which is configured to collect the entirety of diagnostic data for To provide transmission as a whole to the remote analysis site as a whole.
  • the vacuum device now has the ability to provide all the diagnostic data necessary for a remote analysis at once, while also ensuring that the diagnostic data at the remote analysis site are available in an unadulterated manner.
  • a person on the ground as a "procurer” of the data and / or as a "transmission" of the data to the remote analysts is no longer necessary.
  • the provision of the diagnostic data can still be caused by a local person.
  • Special knowledge, special equipment or excessive care are not required.
  • a reliable comprehensive error analysis is possible by the invention at the remote location analysis.
  • the entirety of the diagnostic data should be divided into several individual units (eg optically coded display on multiple images to be transmitted or on output of multiple data streams), this still is provision and transmission of all diagnostic data suitable for the analysis "all at once" or “at one go” or “at one go” within the meaning of the invention.
  • provision and transmission of the diagnostic data occur even with such a division into several individual units not awkward and error prone “step by step” or in the form of a "man-machine” dialogue as in the prior art.
  • the diagnostic data is different from operating data of the vacuum device intended for normal operation in the field.
  • the diagnostic data may have a reduced or extended content-related and / or data-quantity-related scope compared to the normal operating data with regard to the respective diagnostic purpose. In principle, this is not mandatory.
  • the diagnostic data may also be identical to the normal operating data.
  • the provision of the entirety of diagnostic data can be on, in particular only once, request or automatically initiated.
  • the retrieval device initiates the provision only if a corresponding command is issued, for example, by a user by pressing a button or by another device by a control parameter.
  • the provision can also be triggered automatically, for example, each time the vacuum device is switched on.
  • the diagnostic data are displayed on a display until a predetermined period has expired, the user presses a specific or any key, or in any manner defined manner a normal operation of the Vacuum device begins.
  • An automatic provision of the diagnostic data can also be triggered by an occurring after switching on or off or during normal operation of the vacuum device error or a predetermined error state, ie the retrieval device initiated in this variant, the provision of diagnostic data automatically when due to an error Diagnosis could be required.
  • embodiments are possible in which the initiation of the provision of the diagnostic data, that is to say the initial act of the diagnostic start, is switched on or off of the vacuum device or its mains supply or, as it were, on the correct moment (eg when an error occurs) ) is reduced. For example, triggering a command or setting a parameter is no longer required.
  • such embodiments are possible in which no interaction with the vacuum device at all is necessary.
  • the invention can then also be used for such vacuum devices which have no keys or other input means or which are not accessible due to their installation situation.
  • a vacuum device in a contaminated or hermetically protected - and thus in a not easily accessible - area arranged and still allow a transfer of diagnostic data easily, for example, simply by photographing a display of the diagnostic data display of the vacuum device through a glass pane.
  • the diagnostic data - at least for a predetermined or predeterminable period of time - are provided permanently or alternately.
  • the diagnostic data may thus be e.g. be displayed permanently until a user stops the display by pressing a key or a control command.
  • the diagnostic data may be displayed in alternation with the normal operational data, and such an alternate indication may be terminated once the transmission of the diagnostic data is completed.
  • the vacuum device "jumps" from a normal display mode to a diagnostic data display mode upon the occurrence of an error for a predetermined period of time to the user to be able to record the diagnostic data "at the right time” for transmission without further interaction with the vacuum device.
  • the entirety of the diagnostic data can be provided in encoded form.
  • the entirety of the diagnostic data can be provided in compressed form.
  • the entirety of the diagnostic data can be provided in such a coded form that the entirety of the diagnostic data can be transmitted to the remote analysis location independently of local functionalities provided for normal operation on site, in particular independently of local character sets.
  • the vacuum device is already connected to another device of the user via an electronic user interface or user interface, so that the user has the option of obtaining an extended data stream, for example by means of a defined manual read-out command. not only gives a short response or acknowledgment to a command, but provides a multiple-sized data stream (e.g., "stream", "dump") and contains the entirety of the diagnostic data.
  • a multiple-sized data stream e.g., "stream", "dump”
  • the entirety of the diagnostic data can thus be output in the form of a data stream.
  • the data stream can be at the remote analysis location optionally after a corresponding decoding and / or decompression are processed.
  • a base64 encoding carrying a CRC checksum and / or the grouping of data by means of headers or einklammernden head and tail characters and / or features conceivable.
  • Base64 describes a method of encoding 8-bit binary data in a string consisting of readable codepage-independent ASCII characters only.
  • a checksum (CR-24) can still be appended, whereby this slightly modified method bears the name Radix-64.
  • other codings are conceivable.
  • the entirety of the diagnostic data can be provided in optically coded form.
  • the provisioning device comprises a display on which the diagnostic data can be displayed.
  • optically coded diagnostic data can be photographed or filmed for transmission to the remote analysis location of the display.
  • the entire set of diagnostic data can be collected with typically user-provided devices and transmitted via a communication link to the remote analysis location.
  • the display provided for reproducing the diagnostic data can be integrated in the vacuum device or placed remotely from the vacuum device and connected to the vacuum device via a local data connection.
  • the display provided for displaying the diagnostic data can also be associated, for example, with a plurality of vacuum devices.
  • Switching means may be provided, via which the display is optionally connectable to the various vacuum devices.
  • the respective connection can in particular be wired in each case and / or be produced by radio.
  • the entirety of the diagnostic data can be displayed on the display in a single image or else consecutively in several images.
  • the parts of the totality of the diagnostic data corresponding to the individual images each represent a consistent subset of the totality of diagnostic data provided for transmission to the remote analysis location.
  • each part of the entirety of the diagnostic data is coded and / or encrypted and / or compressed.
  • the whole set of diagnostic data can thus be stored in several successive steps in the form of data parts, e.g. Data sub-streams or images are transmitted over the relevant communication link to the remote analysis location.
  • the entirety of the diagnostic data can be divided into more or fewer images, for example, photographed manually or automatically filmed one after the other from the display.
  • Such a display can be triggered, for example, by a corresponding control parameter within a user interface or user interface, whereupon the display changes accordingly for the period of the presentation of the diagnostic data or a data subset and deviates from the normal function the corresponding diagnostic data for reading and / or mapping and / or or outputting.
  • the amount of data provided per diagnostic step or per individual unit of diagnostic data is e.g. by the number of representable information units, e.g. Pixels, grayscale, colors and / or the like limited.
  • a high-contrast dark-light bit pattern can be used, which can be safely coded by means of known algorithms.
  • Examples include the DataMatrix code and the PDF417 code, each of which is an opto-electronically readable 2D code consisting of different widths or points and intervening gaps with as high a contrast as possible.
  • the data are not only provided in one direction or one-dimensional, but in the form of an area over two dimensions.
  • the data subsets to be transmitted via the communication connection to the remote analysis location each represent a consistent subset of the total totality of diagnostic data to be transmitted.
  • the data received at the remote analysis location possible.
  • an analysis unit may be provided with programming having corresponding image recognition logic.
  • image recognition logic By means of a suitable image recognition system, display errors and distortions caused by the user can be compensated for and coded data at least substantially automatically extracted.
  • an optical coding for example in the form of a two-dimensional line or dot code provides for a maximum degree of system security and data consistency, since no direct data connection to the vacuum device is required for transmitting the data and no return channel is available, beyond the otherwise malicious attack could take place.
  • the integrity of a respective vacuum device is maintained to a much greater extent than in the hitherto known vacuum devices, e.g. via a cable or radio-bound coupling with, for example, a data carrier, such as e.g. a USB stick, an analysis system such as a handheld device or with any user device such. a tablet, mobile phone or PC, must be connected, as per se be pre-compromised and thus pose a threat to the vacuum device.
  • a data carrier such as e.g. a USB stick
  • an analysis system such as a handheld device or with any user device such. a tablet, mobile phone or PC
  • the invention can also be used for very data- and security-sensitive users who are forced to operate systems certified safely and without external influences.
  • the invention also relates to a method for the remote diagnosis of a vacuum device, in particular a vacuum pump.
  • the vacuum apparatus comprises means for generating an aggregate of diagnostic data of the vacuum apparatus suitable for analysis to be performed at a remote analysis site, polling means for initiating provision of the set of diagnostic data, and provisioning means adapted to collect the set of diagnostic data to provide for transmission as a whole to the remote analysis site as a whole.
  • the method provides that the diagnostic data is retrieved from the vacuum device by initiating the provision of the diagnostic data by means of the retrieval device, whereupon the diagnostic data is provided and transmitted to the remote analysis site as a whole, analyzing the diagnostic data at the remote analysis site, and that a diagnosis concerning the vacuum device is made.
  • the diagnostic data of operating data of the vacuum device intended for normal operation are different in terms of content and / or scope.
  • the method may provide that the provision of the entirety of diagnostic data is initiated on demand or automatically.
  • Fig. 1 1 shows a schematic representation of a conventional vacuum device 10 in the form of a vacuum pump according to the prior art, which is connected to a power supply 12 and comprises an interface 14 to which a display 16 is connected and to which an on-site analysis or for a diagnosis of the vacuum device 10 on site via a service adapter 18, a service unit 20, here in the form of a portable computer, can be connected.
  • a conventional vacuum device 10 of this type as explained in the introductory part - the diagnostic data displayed uncoded and must be queried individually and sequentially.
  • the diagnostic data is provided on-site by a user e.g. read visually with the eyes, photographed or filmed and then usually have to be noted on a piece of paper or the like, so that they can then be discussed with the remote analyst sitting or transmitted to the analysts on the basis of the notes.
  • the problem here is in practice that the remote analyst not all available for a reasonable error analysis diagnostic data are present, for example, if the user locally only procures the diagnostic data incomplete because he is overwhelmed with the situation, for. because he is not familiar with data or functionalities of the vacuum device that are not intended solely for normal operation on site or with the acquisition of the data required in the respective situation.
  • FIG. 2 and 3 each show in a schematic partial representation of exemplary embodiments of a vacuum device 22 according to the invention, which may be, for example, a vacuum pump.
  • the vacuum device 22 in each case comprises a device for generating a set of diagnostic data of the vacuum device 22 which are suitable for an analysis to be carried out at a remote analysis location and different from operating data of the vacuum device 22 provided for normal operation on site. Furthermore, the vacuum device 22 each comprises a retrieval device, by means of which a provision of the entirety of diagnostic data can be initiated on a single request, and a provision device, which is designed to provide the entirety of diagnostic data for transmission to the remote analysis site.
  • the provision of the diagnostic data may e.g. be initiated by a user on site a provided on the vacuum device 22, here purely as an example integrated into a series of four control buttons integrated call button 34 or the vacuum device 22 via an interface with a polling signal applied, which is e.g. can be done via a local system or machine control, in which the vacuum device 22 is integrated.
  • the mentioned button 34 or interface then represents the retrieval device or at least a part of the retrieval device of the vacuum device 22 according to the invention.
  • a corresponding, to be actuated by a user call-off symbol on a then designed as a touch screen display of the vacuum device 22 may be provided.
  • the diagnostic data provided by a respective vacuum device 22 according to the invention is via a communication link 24 to the remote Transferable analysis site, where they can be evaluated, for example by means of an analysis unit 26 (see. Fig. 3 ).
  • the entirety of the diagnostic data is provided in each case in optically coded form, wherein the providing device in each case comprises a display 28 on which the diagnostic data are displayed in the form of a two-dimensional dot code.
  • the display 28 may be e.g. integrated into the vacuum device 22 or arranged offset and be connected via a local data connection to the vacuum device 22. If the vacuum device 22 is, for example, a vacuum pump, then the display provided anyway in the vacuum pump can be used to display the diagnostic data.
  • the optically coded diagnostic data displayed on the display 28 can be determined by means of an optoelectronic unit 30 (FIG. Fig. 3 ) are photographed or filmed by the display 28 and then transmitted via the communication link 24 to the remote analysis location or the analysis unit 26 provided there.
  • an optoelectronic unit 30 a conventional camera such as a digital camera integrated in a mobile phone can be used.
  • the image or the recorded film recorded with it can then be sent in a conventional manner, for example simply by electronic means via the Internet to the analysis location.
  • the remote analyst receives by e-mail one or more images, each showing the display 28 of the vacuum device 22 and the coded diagnostic data displayed on the display 28.
  • An encrypted transmission of the image or images is not necessary because each image already contains the diagnostic data in coded and thus in any secure encrypted form.
  • the entirety of the diagnostic data in a single image 32 (see FIG. Fig. 2 ) or successively in a plurality of images 32 1 - 32 n (cf. Fig. 3 ) can be displayed on the display 28.
  • the set of diagnostic data, as in Fig. 3 can be displayed on the display 28 successively in a plurality of images 32 1 - 32 n
  • the parts of the totality of the diagnostic data corresponding to the individual images 32 1 - 32 n can each have a consistent subset of the entirety of the totality of Represent diagnostic data.
  • the analysis unit 26 provided at the remote analysis location is provided with corresponding decoding and / or decompression means for decoding or decompressing the diagnostic data provided by the vacuum apparatus 22 and transmitted via the communication connection 24.
  • switching means can be provided, via which the display 28 can be selectively connected to the respectively desired vacuum device 22.
  • successive several images 32 1 - 32 n displayed on the display 28 and the individual images 32 1 - 32 n, for example, photographed manually or automatically can be filmed consecutively, so for example, by a corresponding control parameter of a user interface or user interface, a corresponding successive representation of the individual images 32 1 - 32 n triggered and then again the conversion to a normal playback function can be effected.
  • the display 28 automatically falls back after a predeterminable time, after a single off and on of the mains voltage or any user inputs such as a keystroke or the like in the simple user or normal mode of operation.
  • the communication connection 24 between the at least one vacuum device 22 and the remote analysis location or the analysis unit 26 may comprise, for example, a wireless connection, in particular a radio link, and / or an electrical line.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
EP15168485.9A 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide Active EP3096021B2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15168485.9A EP3096021B2 (fr) 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide
JP2016096837A JP2017002898A (ja) 2015-05-20 2016-05-13 真空装置の遠隔診断

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15168485.9A EP3096021B2 (fr) 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide

Publications (3)

Publication Number Publication Date
EP3096021A1 true EP3096021A1 (fr) 2016-11-23
EP3096021B1 EP3096021B1 (fr) 2022-07-20
EP3096021B2 EP3096021B2 (fr) 2025-08-06

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EP3647600A1 (fr) * 2019-10-08 2020-05-06 Pfeiffer Vacuum Gmbh Identification d'un périphérique connecté électriquement
EP4586231A3 (fr) * 2025-04-29 2025-11-05 Pfeiffer Vacuum Technology AG Procédé d'aide au fonctionnement d'un composant sous vide et système d'aide

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US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
EP1936198A2 (fr) * 2006-12-13 2008-06-25 Pfeiffer Vacuum Gmbh Pompe à vide
DE202014005481U1 (de) * 2014-07-04 2014-07-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpvorrichtung mit mindestens einem Pumpenmodul

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3396172A1 (fr) * 2017-04-27 2018-10-31 ebm-papst Mulfingen GmbH & Co. KG Dispositif de lecture et d'affichage des paramètres de configuration à partir d'une unité de stockage de données d'un ventilateur
EP3427906A1 (fr) * 2017-07-14 2019-01-16 Vorwerk & Co. Interholding GmbH Procédé de fonctionnement d'un robot en mouvement automatique
EP3647600A1 (fr) * 2019-10-08 2020-05-06 Pfeiffer Vacuum Gmbh Identification d'un périphérique connecté électriquement
EP4586231A3 (fr) * 2025-04-29 2025-11-05 Pfeiffer Vacuum Technology AG Procédé d'aide au fonctionnement d'un composant sous vide et système d'aide

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EP3096021B2 (fr) 2025-08-06
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