EP3126068A4 - Hyperbarische verfahren und systeme zur oberflächenbehandlung, -reinigung und -trocknung: dünnflüssige h-cnx - Google Patents

Hyperbarische verfahren und systeme zur oberflächenbehandlung, -reinigung und -trocknung: dünnflüssige h-cnx Download PDF

Info

Publication number: EP3126068A4
Authority: EP; European Patent Office
Prior art keywords: cnx; cleaning; drying; systems; surface treatment
Prior art date: 2013-06-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP14814322.5A

Other languages

English (en)

French (fr)

Other versions

EP3126068A1 (de

Inventor

Richard W. Plavidal

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

CNX TECHNOLOGIES, INC.

Original Assignee

Se2quel Management GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-06-18

Filing date

2014-06-18

Publication date

2017-11-29

2014-06-18 Application filed by Se2quel Management GmbH filed Critical Se2quel Management GmbH

2017-02-08 Publication of EP3126068A1 publication Critical patent/EP3126068A1/de

2017-11-29 Publication of EP3126068A4 publication Critical patent/EP3126068A4/de

Status Withdrawn legal-status Critical Current

Links

238000004140 cleaning Methods 0.000 title 1
238000001035 drying Methods 0.000 title 1
239000007788 liquid Substances 0.000 title 1
238000000034 method Methods 0.000 title 1
238000004381 surface treatment Methods 0.000 title 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2230/00—Other cleaning aspects applicable to all B08B range
- B08B2230/01—Cleaning with steam

EP14814322.5A 2013-06-18 2014-06-18 Hyperbarische verfahren und systeme zur oberflächenbehandlung, -reinigung und -trocknung: dünnflüssige h-cnx Withdrawn EP3126068A4 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US201361836653P	2013-06-18	2013-06-18
PCT/US2014/043049 WO2014205143A1 (en)	2013-06-18	2014-06-18	Hyperbaric methods and systems for surface treatment, cleaning, and drying: thin liquid h-cnx

Publications (2)

Publication Number	Publication Date
EP3126068A1 EP3126068A1 (de)	2017-02-08
EP3126068A4 true EP3126068A4 (de)	2017-11-29

Family

ID=52105252

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP14814322.5A Withdrawn EP3126068A4 (de)	2013-06-18	2014-06-18	Hyperbarische verfahren und systeme zur oberflächenbehandlung, -reinigung und -trocknung: dünnflüssige h-cnx

Country Status (3)

Country	Link
EP (1)	EP3126068A4 (de)
TW (1)	TW201509553A (de)
WO (1)	WO2014205143A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP7337868B2 (ja) *	2021-03-23	2023-09-04	芝浦メカトロニクス株式会社	プラズマ処理装置、およびプラズマ処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5120370A (en) *	1991-04-01	1992-06-09	Shinichi Mori	Cleaning process
WO2012024131A2 (en) *	2010-08-16	2012-02-23	Rasirc, Inc.	Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufacturing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03184337A (ja) *	1989-11-13	1991-08-12	Applied Materials Inc	物品の指定表面から汚染粒子を除去する方法
JP2654874B2 (ja) *	1991-06-19	1997-09-17	日立造船株式会社	基板洗浄方法
US6692579B2 (en) *	2001-01-19	2004-02-17	Chartered Semiconductor Manufacturing Ltd.	Method for cleaning semiconductor structures using hydrocarbon and solvents in a repetitive vapor phase/liquid phase sequence
EP2108464A1 (de) *	2008-04-09	2009-10-14	Dow Global Technologies Inc.	Verfahren zur Reinigung von Gegenstände
DE102011051912B4 (de) *	2010-07-22	2019-07-18	Denso Corporation	Reinigungs- und Trocknungsverfahren und Reinigungs- und Trocknungsvorrichtung

2014
- 2014-06-18 EP EP14814322.5A patent/EP3126068A4/de not_active Withdrawn
- 2014-06-18 WO PCT/US2014/043049 patent/WO2014205143A1/en not_active Ceased
- 2014-06-18 TW TW103121120A patent/TW201509553A/zh unknown

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5120370A (en) *	1991-04-01	1992-06-09	Shinichi Mori	Cleaning process
WO2012024131A2 (en) *	2010-08-16	2012-02-23	Rasirc, Inc.	Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufacturing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2014205143A1 *

Also Published As

Publication number	Publication date
WO2014205143A1 (en)	2014-12-24
TW201509553A (zh)	2015-03-16
EP3126068A1 (de)	2017-02-08

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Legal Events

Date	Code	Title	Description
2017-01-06	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2017-02-08	17P	Request for examination filed	Effective date: 20160728
2017-02-08	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2017-02-08	AX	Request for extension of the european patent	Extension state: BA ME
2017-11-29	A4	Supplementary search report drawn up and despatched	Effective date: 20171026
2017-11-29	RIC1	Information provided on ipc code assigned before grant	Ipc: B08B 3/10 20060101ALI20171020BHEP Ipc: F26B 5/00 20060101ALI20171020BHEP Ipc: B08B 7/04 20060101ALI20171020BHEP Ipc: B08B 3/00 20060101AFI20171020BHEP
2018-02-21	RAP1	Party data changed (applicant data changed or rights of an application transferred)	Owner name: CNX TECHNOLOGIES, INC.
2019-11-06	DAX	Request for extension of the european patent (deleted)
2020-06-26	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2020-07-29	18D	Application deemed to be withdrawn	Effective date: 20200103