EP3280915A1 - Système de pompes à vide - Google Patents

Système de pompes à vide

Info

Publication number
EP3280915A1
EP3280915A1 EP16730389.0A EP16730389A EP3280915A1 EP 3280915 A1 EP3280915 A1 EP 3280915A1 EP 16730389 A EP16730389 A EP 16730389A EP 3280915 A1 EP3280915 A1 EP 3280915A1
Authority
EP
European Patent Office
Prior art keywords
pumps
pump
vacuum
vacuum pumps
during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16730389.0A
Other languages
German (de)
English (en)
Inventor
Thomas Dreifert
Roland Müller
Max PELIKAN
Dirk Schiller
Daniel SCHNEIDENBACH
Dirk STRATMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3280915A1 publication Critical patent/EP3280915A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/70—Use of multiplicity of similar components; Modular construction

Definitions

  • the present invention relates to a vacuum pump system for evacuating a chamber, in particular a process or lock chamber.
  • Vacuum pump systems for the regular evacuation of large chambers are known from the prior art, Figure 1.
  • vacuum pumps which operate dry-compressing used.
  • backing pumps such as screw pumps, claw pumps or multi-stage roots pumps, and Roots pumps arranged in series with them.
  • Roots pumps arranged in series with them.
  • large pump systems several pumps and several Roots pumps are connected in parallel.
  • z. B. used in coating equipment.
  • a vacuum pump is separated from the chamber to be evacuated by a valve on the inlet side and runs in end pressure mode for some time, typically one to ten times the pumping time.
  • typical pump down times are 2 to 30 minutes.
  • a low gas flow must continue to be pumped, which, however, is much smaller than the gas flow necessary to realize the Abpumpzeit.
  • a typical holding time for this operating pressure is two to ten times the pumping time.
  • the vacuum pump system must be very large to realize the short Abpumpzeit. During an idle time or during a hold time, however, large pumping system pumping speeds are not necessary. As a result, unnecessarily high energy expenditure of the pump is required during the idling period, during the holding time.
  • a further solution which is known from the prior art, is that a small number of further large backing pumps can be arranged as large auxiliary pumps on the outlet side of the backing pumps, FIG. 2. These are connected in series via a pipeline system to the backing pumps. In this case as well, at least one valve with a sufficient cross-section usually has to be arranged parallel to the auxiliary pump in order to avoid excessively high pressures between the pre- and auxiliary pumps during the pump-down time.
  • a disadvantage of this solution is the additional acquisition and operating costs and the space required for the auxiliary pumps.
  • the object of the present invention is to provide an improved pump system which receives less power, especially during idle and hold times.
  • a pump system having a plurality of vacuum pumps connected in parallel with each other and each connected to an inlet side of a chamber, FIG. 4.
  • the pump system also has an outlet conduit connected to the outlet side of the vacuum pumps , Furthermore, the pump system has an intermediate line connecting the inlet side of at least one of the vacuum pumps with the outlet side.
  • all the vacuum pumps are connected in parallel, and during one idle and / or hold period, at least one of the vacuum pumps is connected as a backing pump in series with the other vacuum pumps.
  • the vacuum pump system also has switching means both in connections between the inlet sides to the chambers and in an intermediate line. These switching means may include valves, for example.
  • one of the vacuum pumps can thus be connected as a backing pump in series with the other vacuum pumps.
  • This is realized by appropriate switching of the switching means by blocking or releasing the connection in such a way that the vacuum pumps are arranged correspondingly differently to one another in series or in parallel.
  • the outlet pressure of the vacuum pumps is lowered quickly and the power consumption is significantly reduced.
  • the pumps continue to run so that they can be used for the next pump down cycle without any loss of time.
  • the pumps Due to the reduced energy consumption of the pump system, the pumps are operated relatively cold, so that the life of conventional wear parts is significantly increased, such as oil, bearings, seals, power electronics in the drive. Furthermore, this reduced energy consumption due to reduced waste heat also reduces the costs for the air conditioning of the installation site and the cooling of the pumps.
  • the reduced pressure in the outlet during operation further avoids the condensation of vapors in the pumps, which can reduce corrosion damage.
  • the pump system according to the invention allows a high degree of redundancy, because the failure of individual pumps in such a composite enables a continuation of the process. All pumps can therefore do their job without auxiliary pumps. Furthermore, several pumps can be integrated so that they can be used as an auxiliary pump. In addition to a reduction in power consumption and thus reduced operating costs, the CO 2 balance for such an application according to the invention is also improved.
  • the vacuum pumps which are to be connected in series as backing pumps, meet certain technical requirements. It is particularly preferred that these vacuum pumps are sealed so that they can work safely with greatly reduced outlet pressures without gas or oil leakage. In this case, outlet pressures of the backing pumps during idling or holding operation in a range from 10 mbar to 500 mbar are particularly preferred. In addition, it is particularly preferred that the thermal behavior of the pumps allows safe operation at a greatly reduced outlet pressure. This aspect particularly concerns the gap heights, oil viscosity and bearing lubrication.
  • oil-lubricated spaces are sealed from a working space so that even with very fast cycles no strong ⁇ lverschleppung takes place.
  • shaft seals should preferably be designed so that they do not wear prematurely due to the rapidly changing pressure differences.
  • One possibility in this regard is the use of compensating pipes between oil-lubricated spaces and the working space, which have an oil separator.
  • FIG. 1 shows a vacuum pump system 1 with a lock chamber 10 and parallel-connected pumps PI-P5, which are each connected to the lock chamber on their inlet side. Furthermore, the vacuum pump system 1 has valves VI - V5, whereby the connection can be separated from the pump inlets of the pumps PI - P5 to the lock chamber 10.
  • the illustrated vacuum pumping system is known in the art. During a pump down time, valves VI - V5 are open. The pumps PI - P5 take a lot of power during the pump down time and run at full speed. The pressure in the lock chamber drops continuously.
  • valves VI-V5 are closed and the pumps PI-P5 run at full speed, the current consumption substantially equaling that of the operation at a final pressure, and still relatively is high.
  • the pressure in the lock chamber is equal to a transfer pressure.
  • valves VI - V5 are open and pumps PI - P5 operate at a low working pressure.
  • the vacuum pump system shown in FIG. 2 is known from the prior art.
  • the pump system is extended by a relatively large sized auxiliary pump P26 and the check valves CV1 - CV5 (Check Valve: Check Valve, CV).
  • the parallel-connected pumps P21 - P25 are connected to a chamber 20. During a pump down time both the valves V21 - V25 and the check valves CV21 - CV25 are open. The inlet pressure of the additional auxiliary pump P26 is approximately equal to the outlet pressure of the auxiliary pump.
  • valves V21 - V25 are closed.
  • the check valves CV21 - CV25 close.
  • the inlet pressure of the auxiliary pump P26 in this operation is substantially smaller than the outlet pressure of the auxiliary pump P26.
  • FIG. 3 shows a configuration known from the prior art of a vacuum pump system for a lock chamber 30 with small auxiliary pumps P33 and P34.
  • an ejector pump can be selected for the auxiliary pumps.
  • valves V31 and V32 and the check valves CV31 and CV32 are opened.
  • the inlet pressures of the auxiliary pumps P33 and P34 are approximately equal to the outlet pressures of the auxiliary pumps P33 and P34.
  • the valves V31 and V32 are closed.
  • the check valves CV31 and CV32 are also closed during an idle time.
  • the discharge pressures of the auxiliary pumps P33 and P34 during the idling time are substantially greater than the inlet pressures of these auxiliary pumps P33 and P34.
  • FIGS. 4 to 6 show embodiments of the vacuum pump system according to the invention.
  • the vacuum pump system shown in FIG. 4 has five parallel-connected vacuum pumps P41, P42, P43, P44, P45.
  • the inlets of the vacuum pumps P41, P42, P43, P44, P45 are connected to a vacuum chamber 40.
  • a valve V41, V42, V43, V44, V45 is provided between the respective vacuum pump P41, P42, P43, P44, P45 .
  • the outlet sides of pumps P41, P42, P43, P44, P45 are connected to a common outlet 41 via check valves CV41, CV42, CV43, CV44, CV45.
  • the pump P41 can be connected in series with the pumps P42, P43, P44, P45.
  • FIG. 4 shows a vacuum pump system in which the valves V41-V45 are open during a pump-down time and the valve V46 is closed. Furthermore, the check valves CV41 - CV45 are open during the pump down time. During the idle time, valves V41 - V45 are closed, V46 is open. The CV41 check valve may be open in this mode as long as the pump system is evacuated by the P41 pump. After that it will be closed. The check valves C42 - C45 are closed in idling mode.
  • the reduction of power consumption during idling is up to 40% in some embodiments.
  • the described series connection of the vacuum pump can also be used as a backing pump to improve the production of light gases.
  • this pump circuit can also be used to control the chamber pressure or the process flow.
  • the auxiliary pump ensures that the working pressure range is safely reached.
  • the backing pumps can then be safely controlled in a very wide speed range.
  • FIG. 5 shows a minimal configuration for lock chambers.
  • a pump system is selected with only two vacuum pumps P51, P52. These have a common inlet line, which is connected via a valve V52 with a vacuum chamber 50. Only the outlet of the vacuum pump P52 is connected to the common outlet 51 via a check valve CV51. The outlet of the pump P51 is directly connected to the common outlet 51. Through an additional line 52, in which a valve V51 is arranged, which leads from the outlet of the pump P52 to the inlet of the pump P51, in the idling time the pump P51 can evacuate the other pump 52 from both sides.
  • the pumps P51 and P52 can not be connected in series.
  • FIG. 6 shows, analogously to FIG. 5, a minimal configuration for process chambers.
  • V61 is open so that P62 and P61 are evacuated from both sides.
  • V61 is closed so that the process chamber can be evacuated in a short time.
  • both embodiments of the vacuum pump systems 5 and 6 could parallel to the Pumps P52 and P62 other pumps are arranged and operated accordingly.
  • the solutions described here could be realized for combinations with two and more forepumps.
  • the number and size of the pumps can each be freely adapted to the application.
  • the Roots pumps in series with the backing pumps do not affect the solutions in principle. Therefore, they were not shown in the examples.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne un système de pompes à vide (4, 5, 6) comportant une pluralité de pompes à vide (P41, P42, P43, P44, P45, P51, P52, P61, P62) qui sont reliées entre elles dans un montage en parallèle et qui sont raccordées chacune à un côté d'entrée d'une chambre (40, 0, 60), un conduit de sortie (41) qui est raccordé au côté sortie des pompes à vide (P41, P42, P43, P44, P45, P51, P52, P61, P62) et un conduit intermédiaire (42) qui relie le côté d'entrée d'au moins une pompe à vide (P41, P42, P43, P44, P45, P51, P52, P61, P62) au conduit de sortie (41). L'invention est caractérisée en ce que pendant un temps de pompage toutes les pompes à vide (P41, P42, P43, P44, P45, P51, P52, P61, P62) sont montées en parallèle et, pendant un temps de marche à vide, au moins une des pompes à vide (P41, P42, P43, P44, P45, P51, P52, P61, P62) est utilisée comme pompe à vide préliminaire et est montée en série avec les autres pompes à vide.
EP16730389.0A 2015-06-26 2016-06-20 Système de pompes à vide Withdrawn EP3280915A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202015004596.0U DE202015004596U1 (de) 2015-06-26 2015-06-26 Vakuumpumpensystem
PCT/EP2016/064163 WO2016207106A1 (fr) 2015-06-26 2016-06-20 Système de pompes à vide

Publications (1)

Publication Number Publication Date
EP3280915A1 true EP3280915A1 (fr) 2018-02-14

Family

ID=54262130

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16730389.0A Withdrawn EP3280915A1 (fr) 2015-06-26 2016-06-20 Système de pompes à vide

Country Status (7)

Country Link
US (1) US20180112666A1 (fr)
EP (1) EP3280915A1 (fr)
JP (1) JP6775527B2 (fr)
KR (1) KR20180026369A (fr)
CN (1) CN107850062A (fr)
DE (1) DE202015004596U1 (fr)
WO (1) WO2016207106A1 (fr)

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US12215691B2 (en) 2016-02-23 2025-02-04 Atlas Copco Airpower, Naamloze Vennootschap Method for operating a vacuum pump system and vacuum pump system applying such method
WO2017143410A1 (fr) * 2016-02-23 2017-08-31 Atlas Copco Airpower, Naamloze Vennootschap Procédé de fonctionnement d'un système de pompe à vide et système de pompe à vide appliquant un tel procédé
BE1024411B1 (nl) 2016-02-23 2018-02-12 Atlas Copco Airpower Naamloze Vennootschap Werkwijze voor het bedienen van een vacuümpompsysteem en vacuümpompsysteem dat een dergelijke werkwijze toepast.
GB201620225D0 (en) * 2016-11-29 2017-01-11 Edwards Ltd Vacuum pumping arrangement
EP3489516B1 (fr) * 2017-11-24 2021-09-01 Pfeiffer Vacuum Gmbh Pompe à vide
TWI684707B (zh) * 2019-02-27 2020-02-11 亞台富士精機股份有限公司 尾氣真空節能幫浦系統
KR102657038B1 (ko) * 2019-07-02 2024-04-12 임팩코리아(주) 열전 모듈을 구비한 약물 주입 장치
CN110469484B (zh) * 2019-09-15 2025-04-18 芜湖聚创新材料有限责任公司 一种工业用大型真空机系统
PL4069976T3 (pl) * 2019-12-04 2024-10-14 Ateliers Busch S.A. Redundantny system pompowania i sposób pompowania za pomocą tego systemu pompowania
DE202020104945U1 (de) * 2020-08-26 2021-11-29 Leybold Gmbh Vakuumpumpe
CN112696340A (zh) * 2020-12-30 2021-04-23 广州亚俊氏电器有限公司 一种抽真空系统及包括其的真空包装机
CN115263719A (zh) * 2022-07-29 2022-11-01 西安奕斯伟材料科技有限公司 一种用于调节拉晶炉内真空状态的系统和方法
KR102497090B1 (ko) 2022-08-18 2023-02-07 주식회사 세미안 오스뮴 유해가스 노출방지 기능을 갖는 오스뮴 코팅 장치
JP7645848B2 (ja) * 2022-09-22 2025-03-14 株式会社Kokusai Electric 基板処理装置、基板処理方法、半導体装置の製造方法およびプログラム

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DE202004001051U1 (de) * 2004-01-27 2004-04-15 BSW Verfahrenstechnik GmbH Ingenieur- und Beratungsbüro Mehrköpfige Pumpe zur Erzeugung eines Vakuums
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Also Published As

Publication number Publication date
CN107850062A (zh) 2018-03-27
DE202015004596U1 (de) 2015-09-21
WO2016207106A1 (fr) 2016-12-29
JP6775527B2 (ja) 2020-10-28
JP2018518623A (ja) 2018-07-12
KR20180026369A (ko) 2018-03-12
US20180112666A1 (en) 2018-04-26

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