EP3342900A1 - Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution - Google Patents

Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution Download PDF

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Publication number
EP3342900A1
EP3342900A1 EP16206963.7A EP16206963A EP3342900A1 EP 3342900 A1 EP3342900 A1 EP 3342900A1 EP 16206963 A EP16206963 A EP 16206963A EP 3342900 A1 EP3342900 A1 EP 3342900A1
Authority
EP
European Patent Office
Prior art keywords
metal
alkoxides
combinations
acetylacetone
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16206963.7A
Other languages
German (de)
English (en)
Inventor
Dennis Weber
Alexey Merkulov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Evonik Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa GmbH filed Critical Evonik Degussa GmbH
Priority to EP16206963.7A priority Critical patent/EP3342900A1/fr
Priority to PCT/EP2017/084174 priority patent/WO2018122110A1/fr
Priority to TW106145268A priority patent/TW201842177A/zh
Publication of EP3342900A1 publication Critical patent/EP3342900A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1254—Sol or sol-gel processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2401/00—Form of the coating product, e.g. solution, water dispersion, powders or the like
    • B05D2401/10—Organic solvent

Definitions

  • the present invention relates to a nozzle coating method for depositing metal alkoxides and / or metal oxo alkoxides, wherein the nozzle is immersed in a solvent before and / or after the coating process.
  • the present invention also relates to the use of a solvent for the prevention of deposits by metal alkoxides and / or metal oxo alkoxides in coating nozzles. It also relates to the use of a solvent for the dissolution of deposits by metal alkoxides and / or metal oxo alkoxides in coating nozzles.
  • Slot die coating is a coating technique used to apply thin layers of liquid to web-like substrates (paper, foil, fabrics, etc.) or piece goods (glass, metal plates, etc.).
  • substrates in the coating industry especially for those with functional layers (photovoltaics, medical products, wafers, lithium-ion batteries, fuel cells, etc.)
  • the accuracy of the layer thicknesses to be applied is of essential importance. Uncontrollable layer thickness variations due to changes in production conditions or changes in fluid properties are not acceptable for a variety of coatings.
  • defect-free coatings of substrates not only require reliable and easy-to-use processes and application tools, such as the nozzles, but also make special demands on the coating fluids used, eg. B. their freedom from bubbles.
  • controlled stirring processes are required to ensure consistent properties of the applied coating fluids for defect-free layers on substrates.
  • the fluid supply to the coating tools used must be pulsation-free in order to produce flawless films on substrates. It is thus the reproducible, controlled interaction of all the products and peripheral processes of a coating process that must be mastered to achieve film layers on high quality substrates, as in US Pat FIG. 1 shown.
  • Coating fluids are solutions of one or more solids in a solvent. Between the individual coating operations, the nozzle is immersed in a trough with a solvent to prevent drying of the solid contained in the coating fluid.
  • the composition of the solvent in the tub corresponds to the composition of the solvent in the coating fluid, or only the component is involved in the tub submitted the highest volume fraction in the solvent of the coating fluid.
  • the process of this process is schematic in FIG. 2 shown.
  • Coating fluids containing metal oxide precursors may tend to sol-gel reaction. It is mainly in the interior of the nozzle, which is usually made of stainless steel, deposits of the solid on the die lips. The deposits do not re-dissolve during the coating process and can not be removed by rinsing with the solvent of the coating fluid.
  • Metal oxide precursors which tend to sol-gel in solution are organometallic compounds such as metal alkoxides and metal oxo alkoxides.
  • the object of the present invention was therefore to provide a nozzle coating method for depositing metal alkoxides and / or metal oxo alkoxides, which overcomes the disadvantages of the prior art.
  • a nozzle coating method for the deposition of metal alkoxides and / or metal oxo-alkoxides characterized in that the nozzle before and / or after the coating process in a solvent containing at least 25 wt .-% acetylacetone is immersed ,
  • acetylacetone prevents the sol-gel reaction by chelating the organometallic precursor, or makes deposits that have become soluble again by complexation.
  • the inventive method is not limited to a particular nozzle shape, but is suitable for all geometries and types of slot dies, such as slot dies.
  • the solvent contains at least 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90 or 95 wt .-% acetylacetone.
  • the solvent contains 100% by weight of acetylacetone, i. the solvent consists of acetylacetone.
  • the metal is selected from the group consisting of indium, zinc, tin, gallium, aluminum, titanium, hafnium, yttrium or combinations thereof.
  • the inventive method z.
  • metal alkoxides titanium (IV) ethoxide, aluminum (III) isopropoxide, hafnium (IV) ethoxide, yttrium (III) isopropoxide or combinations thereof.
  • the deposited metal alkoxide and / or metal oxo alkoxide, as described above, is dissolved in a solvent selected from the group consisting of glycol ethers having a, such as. For example, 1-methoxy-2-propanol, or more ether groups, such as.
  • a solvent selected from the group consisting of glycol ethers having a, such as. For example, 1-methoxy-2-propanol, or more ether groups, such as.
  • ether groups such as.
  • triethylene glycol monomethyl ether alcohols, such as. For example, ethanol, tetrahydrofurfuryl alcohol, esters, such as.
  • lactates or acetates in particular ethyl lactate, butyl acetate, aromatics, such as. Toluene, or combinations thereof.
  • the present invention also relates to the use of a solvent containing at least 25 wt .-% acetylacetone for the prevention of deposits by metal alkoxides and / or metal oxo alkoxides in coating nozzles. It also relates to the use of a solvent containing at least 25 wt .-% acetylacetone for the dissolution of deposits by metal alkoxides and / or metal oxo alkoxides in coating nozzles.
  • the metal alkoxides and / or metal oxo alkoxides in the two uses of the invention metals selected from the group consisting of indium, zinc, tin, gallium, aluminum, titanium, hafnium, yttrium or combinations thereof, on.
  • the two uses according to the invention as metal alkoxides preferably comprise titanium (IV) ethoxide, aluminum (III) isopropoxide, hafnium (IV) ethoxide, yttrium (III) isopropoxide or combinations thereof.
  • the present invention is further illustrated by the following example.
  • the commercially available product iXsenic S ® from Evonik Industries AG is a metal-organic precursor for use in a nozzle coating process, which can undergo a sol-gel reaction. With air humidity, the product reacts irreversibly, thus changing chemically. The material crystallizes out in the nozzle. There it accumulates until it comes to a blockage of the nozzle.
  • nozzle If the nozzle is immersed before and / or after the coating process in a solvent containing at least 25 wt .-% acetylacetone, no clogging of the nozzle is observed. Existing deposits dissolve again.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemically Coating (AREA)
  • Paints Or Removers (AREA)
EP16206963.7A 2016-12-27 2016-12-27 Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution Withdrawn EP3342900A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP16206963.7A EP3342900A1 (fr) 2016-12-27 2016-12-27 Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution
PCT/EP2017/084174 WO2018122110A1 (fr) 2016-12-27 2017-12-21 Composition de nettoyage et d'inhibition d'accumulation de précurseurs d'oxydes métalliques aptes à la dissolution dans des filières plates pour enduction
TW106145268A TW201842177A (zh) 2016-12-27 2017-12-22 用於清潔並防止可溶性金屬氧化物前驅物之塗佈噴嘴中的沉積物的組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP16206963.7A EP3342900A1 (fr) 2016-12-27 2016-12-27 Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution

Publications (1)

Publication Number Publication Date
EP3342900A1 true EP3342900A1 (fr) 2018-07-04

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EP16206963.7A Withdrawn EP3342900A1 (fr) 2016-12-27 2016-12-27 Composition destinée à nettoyer et à empêcher des dépôts dans des filières d'enduction pour des précurseurs d'oxyde métallique pouvant être traités en solution

Country Status (3)

Country Link
EP (1) EP3342900A1 (fr)
TW (1) TW201842177A (fr)
WO (1) WO2018122110A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109576089A (zh) * 2018-12-31 2019-04-05 广东新球清洗科技股份有限公司 Pcb板超声碳氢清洗剂及其使用方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07282653A (ja) * 1994-04-04 1995-10-27 Mitsubishi Materials Corp 透明導電膜の製造方法
JP2011083695A (ja) * 2009-10-15 2011-04-28 Ricoh Co Ltd インクジェット式画像形成装置
WO2013186082A2 (fr) * 2012-06-13 2013-12-19 Evonik Industries Ag Procédé de fabrication de couches contenant de l'oxyde d'indium
US20160052013A1 (en) * 2013-03-29 2016-02-25 Ricoh Company, Ltd Curtain coating machine and curtain coating method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07282653A (ja) * 1994-04-04 1995-10-27 Mitsubishi Materials Corp 透明導電膜の製造方法
JP2011083695A (ja) * 2009-10-15 2011-04-28 Ricoh Co Ltd インクジェット式画像形成装置
WO2013186082A2 (fr) * 2012-06-13 2013-12-19 Evonik Industries Ag Procédé de fabrication de couches contenant de l'oxyde d'indium
US20160052013A1 (en) * 2013-03-29 2016-02-25 Ricoh Company, Ltd Curtain coating machine and curtain coating method

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Publication number Publication date
WO2018122110A1 (fr) 2018-07-05
TW201842177A (zh) 2018-12-01

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