EP3359937A1 - Dispositif et procédé pour mesurer une pression - Google Patents

Dispositif et procédé pour mesurer une pression

Info

Publication number
EP3359937A1
EP3359937A1 EP16779070.8A EP16779070A EP3359937A1 EP 3359937 A1 EP3359937 A1 EP 3359937A1 EP 16779070 A EP16779070 A EP 16779070A EP 3359937 A1 EP3359937 A1 EP 3359937A1
Authority
EP
European Patent Office
Prior art keywords
sensor
outer electrode
base body
internal electrodes
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP16779070.8A
Other languages
German (de)
English (en)
Inventor
Martin Galler
Harald Kastl
Markus Puff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Publication of EP3359937A1 publication Critical patent/EP3359937A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Definitions

  • the present invention relates to a sensor. It is a sensor that measures a pressure or a mechanical stress with the help of the piezoelectric effect. The pressure acting on the sensor is converted into an electric charge flow. This property can be applied to pressures
  • the present invention relates to a method for measuring a pressure.
  • Sensors based on piezoelectric materials such as
  • monolithic piezoelectric sensor 101 This has a monolithic body 102, which consists of a homogeneous layer of a pressure-sensitive material. On an upper side surface 109 and a lower side surface 110 of the main body 102, an outer electrode 105, 108 are arranged, so that the layer of pressure-sensitive material between the outer electrodes 105, 108 is located.
  • the outer electrodes 105, 108 are used for tapping at
  • the pressure to be measured acts directly on the external electrodes 105, 108.
  • the outer electrodes 105, 108 must be covered with insulating layers to prevent the formation of
  • the outer electrodes 105, 108 have a metallic material that can be manufactured with reasonable effort only with insufficient flatness. The unevenness on the surfaces 106, 107 can lead to measurement inaccuracies. In addition, the metallic outer electrodes 105, 108 are resistant
  • Object of the present invention is therefore to provide an improved sensor, which makes it possible to overcome at least one of the above-mentioned disadvantages. Another object is to provide an improved method for
  • a sensor according to the present claim 1 It is proposed a sensor having a base body, wherein the main body is a piezoelectric
  • the piezoelectric material and at least two arranged in the piezoelectric material internal electrodes.
  • the at least two internal electrodes are arranged in the piezoelectric material such that between the at least two
  • the sensor may in particular be a pressure sensor. Accordingly, the sensor may be configured to measure a pressure acting on the body.
  • the internal electrodes can be used as "in the
  • piezoelectric material arranged "when they are sandwiched between two layers of piezoelectric
  • each inner electrode To be covered by the piezoelectric material. A side
  • a surface that abuts an outer electrode may be free of the piezoelectric material.
  • a pressurization side surface of the body is a
  • the main body can also have a plurality of side surfaces provided for pressurizing.
  • the sensor can have any number of internal electrodes.
  • the sensor can have more than two
  • the inner electrodes may be divided into first inner electrodes contacted with a first outer electrode and second inner electrodes contacted with a second outer electrode, wherein the number of first and second inner electrodes need not be equal.
  • the sensor with internal electrodes arranged in the piezoelectric material allows the above
  • the for the Pressurized side surface provided may consist of the piezoelectric material.
  • the piezoelectric material can under constant pressure swing load have a much higher load capacity than a metallic material, so that the life of the sensor is increased. Furthermore, the piezoelectric material can be made with a large flatness, so that the for the
  • the output signal generated by the sensor can be influenced as desired by a variation in the number of internal electrodes.
  • the sensor may further include a first outer electrode and a second outer electrode. Each of the at least two internal electrodes may be connected to the first external electrode or the second external electrode.
  • Outer electrode may be on a first side surface of
  • the second outer electrode may be arranged on a second side surface of the main body. Neither the first side surface nor the second
  • Side surface can be provided for pressurization be. Accordingly, they differ from the side surface provided for the pressurization and are arranged in particular perpendicular to this side surface.
  • the first and second side surfaces may be one another
  • the first outer electrode may be arranged perpendicular to the at least two inner electrodes.
  • the second outer electrode may be perpendicular to the at least two inner electrodes
  • the provided for pressurizing side surface of the body can be parallel to the at least two
  • Internal electrodes may be arranged. Accordingly, the pressure preferably exerts a maximum force on this side surface.
  • the sensor may further include one with the at least two
  • Internal electrodes have associated evaluation unit, which is designed to determine the pressure acting on the base body pressure.
  • the at least two can
  • the evaluation unit is configured to one between the at least two
  • the evaluation unit can also be designed, one fitting between the at least two internal electrodes To measure tension and determine therefrom the pressure acting on the body.
  • the senor may be configured such that the current intensity or the
  • acting pressure of electrical signal is particularly high.
  • a high voltage results in a small number of internal electrodes.
  • a high current results in a large number of internal electrodes.
  • the piezoelectric body may comprise a lead zirconate titanate ceramic.
  • the piezoelectric body may comprise a lead zirconate titanate ceramic.
  • Piezoelectric bodies have a different piezoelectric material, such as a piezoelectric quartz.
  • the internal electrodes may comprise silver, silver-palladium or copper or one of these
  • the first and the second outer electrode may include or consist of a partially glass-containing Einbrandmetallmaschine of silver, silver-palladium or copper.
  • the first and second outer electrodes may further comprise a
  • Sputter layer of CuAg or CrNiAg have.
  • the senor may be a
  • the mechanical amplification system on the provided for pressurizing side surface of the Basic body is arranged.
  • the sensor may comprise a second mechanical amplification system disposed on the side surface corresponding to that for the
  • the mechanical reinforcement system may include a first portion attached to the base body and a second portion
  • the present invention relates
  • Invention a method for measuring a pressure.
  • a method for measuring a pressure with a sensor is proposed, wherein the sensor has a main body which comprises a piezoelectric material, at least two arranged in the piezoelectric material
  • Internal electrodes is connected to the first outer electrode or the second outer electrode, wherein the first
  • outside electrode disposed on a first side surface of the base body, wherein the second outer electrode is disposed on a second side surface of the base body, and wherein the base body further comprises a third side surface
  • the pressure to be measured is exerted on the third side surface.
  • the pressure to be measured is exerted on a side surface of the main body which is free of electrodes.
  • the third side surface provided for the pressurization may consist of the piezoelectric material.
  • the piezoelectric material can under constant pressure swing load have a much higher load capacity than a metallic material, so that the
  • Piezoelectric material are manufactured with a large flatness, so that provided for the pressurization side surface is free of bumps and no
  • the method may comprise the step of determining the pressure acting on the base body on the basis of a current intensity measured by the evaluation unit or on the basis of a voltage measured by the evaluation unit.
  • a mechanical amplification system On the side surface on which the pressure is exerted, a mechanical amplification system may be arranged.
  • the mechanical reinforcement system may be configured such that a pressure acting on the mechanical reinforcement system deforms it, transferring the deformation of the mechanical reinforcement system into a deformation of the base body. In particular, the body can thereby be pulled apart or compressed.
  • mechanical reinforcement system may be designed such that a pressure exerted on the reinforcing system pressure leads to a deformation of the base body, which is ten times greater than the deformation, which would undergo the body, if the same pressure directly on the
  • the mechanical amplification system can be any mechanical amplification system.
  • the mechanical reinforcement system may include a first portion attached to the base body and a second portion spaced apart from the base member
  • Basic body is arranged, have.
  • the second region can be moved relative to the main body.
  • Figure 1 shows one known in the art
  • Figure 2 shows a first embodiment of a sensor
  • Figure 3 shows a schematic representation of the
  • FIG. 4 shows a second exemplary embodiment of a
  • Figure 5 shows a third embodiment of a
  • FIG. 2 shows a sensor 1 according to a first embodiment
  • the sensor 1 has a main body 2, which has a piezoelectric material 13.
  • Internal electrodes 4 are arranged.
  • the internal electrodes 3, 4 are each between layers of the piezoelectric
  • the first internal electrodes 3 are provided with a first one
  • Outer electrode 5 is arranged on a first side surface 6 of the main body 2.
  • the first side surface 6 of the base body 2 and the first outer electrode 5 are perpendicular to the inner electrodes 3, 4. Furthermore, the first inner electrodes 3 with respect to a second outer surface 7, which is opposite to the first side surface 6, set back.
  • a second outer electrode 8 is arranged on the second side surface 7, .
  • the first internal electrodes 3 are not
  • the second internal electrodes 4 are connected to the second
  • External electrode 8 contacted electrically.
  • Internal electrodes 4 are set back from the first side surface 6 and accordingly are not electrically connected to the first outer electrode 5.
  • the main body 2 also has at least one side surface 9, 10, which is provided for pressurization.
  • the direction from which the pressure acts on the base body 2 is marked in FIG. 1 by two corresponding arrows.
  • the side surface 9, 10 provided for pressurizing extends parallel to the inner electrodes 3, 4.
  • an upper side surface 9 and a lower side surface 10 are provided for the pressurization.
  • D ⁇ 33 ⁇ E + d 33 (2)
  • s indicates the mechanical expansion of the main body 2
  • D indicates the shift density
  • E indicates the electrical
  • T is the on the
  • d indicates the piezoelectric constant of the piezoelectric material 13 of the
  • Dielectric constant and S33 indicates the compliance. It is further assumed in equations (1) and (2) that the print axis, the polarization axis and the
  • Detection axis respectively match and lie in the stacking direction S, which is also referred to here as the 33 direction. If now the electric field generated is measured, the pressure acting on the main body 2 can be calculated therefrom. To measure this field, either a voltage applied to the outer electrodes 5, 8 or a voltage
  • Polarization direction 12 of the piezoelectric material 13 under the action of a pressure changes.
  • Section i shows the polarization without pressure and section ii shows the polarization with applied pressure.
  • FIG. 4 shows a possible structure for pressure measurement with the aid of the sensor 1, wherein here a sensor 1 according to a second exemplary embodiment is used.
  • the sensor 1 according to the second embodiment differs from the sensor 1 according to the first embodiment in the number of the first and second internal electrodes 3, 4.
  • the sensor 1 is connected to an electronic evaluation unit 11. According to the embodiment shown in Figure 4, the first outer electrode 5 and the second outer electrode 8 via the electronic
  • Evaluation unit 11 contacted with each other electrically.
  • a pressure acts on the main body 2
  • a current flows from the first outer electrode 5 via the evaluation unit 11 to the second outer electrode 8.
  • the evaluation unit 11 is designed to measure the current intensity of this current. From this measurement, the pressure acting on the base body 2 pressure can be calculated.
  • the first outer electrode 5 and the second outer electrode 8 are not connected to one another via the electronic evaluation unit 11
  • the evaluation unit 11 can determine a voltage applied between the two outer electrodes 5, 8 and from this measured value to the
  • the sensors 1 described here with internal electrodes 3, 4 arranged in the basic body 2 have considerable advantages over the monolithic sensors 101 shown in FIG. In particular, the sensors 1 are such
  • Side surface 6, 7 acts, on which the outer electrodes 5, 8 are located.
  • the provided for pressurizing side surfaces 9, 10 consist of an electric
  • Be provided side surfaces, so a part of the surface would be used for electrical contacting of the outer electrodes.
  • the side surface provided for pressurizing is made of a piezoelectric material 13, it can be made with a high flatness, resulting in
  • a piezoelectric material 13 can give a high accuracy of measurement.
  • Surfaces of a piezoelectric material 13 can be manufactured with less effort in a greater flatness than would be possible for metallic surfaces. Further, the piezoelectric materials 13 prove to be very resistant to pressure swing loads, so that a side surface made of a piezoelectric material 13 can increase the life of the sensor 1.
  • Another advantage of the sensor described herein is its high design freedom. Since the number of internal electrodes can be changed as desired, the output charge dissipated via the internal electrodes or the voltage applied between the internal electrodes can be adjusted as desired. Of the
  • n indicates the number of piezoelectric layers.
  • Q n indicates the charge output of the sensor 1 with n on piezoelectric layers.
  • Qo gives the charge output of a monolithic sensor 101 without integrated
  • U n indicates the open-circuit voltage applied between the outer electrodes 5, 8 of the sensor 1 with n piezoelectric layers when the outer electrodes 5, 8 are not short-circuited with each other.
  • Uo gives the no-load voltage between the
  • External electrodes 105, 108 of the corresponding monolithic sensor 101 at. E n indicates the output energy of the sensor 1 with n piezoelectric layers which are proportional to the
  • Product is from open circuit voltage and charge output. Eo indicates the output energy of the monolithic sensor 101.
  • Amount of current to be made of the output current is therefore a sensor 1 with many internal electrodes 3, 4th
  • a sensor 1 with a small number of internal electrodes 3, 4 is advantageous, since in this way a maximum sensitivity can be achieved.
  • Figure 5 shows a third embodiment of a sensor 1.
  • the sensor 1 has, in contrast to the sensors 1 according to
  • a mechanical amplification system 14 is provided in the first and second embodiments.
  • the mechanical amplification system 14 is provided in the first and second embodiments.
  • Reinforcement system 14 makes it possible to amplify a pressure applied to the sensor 1.
  • the mechanical amplification system 14 has
  • the frusto-conical element 15 is glued to the upper side surface 9.
  • the frusto-conical member 15 has a first portion 16 secured to the upper side surface 9.
  • the first region 16 is an edge region of the frusto-conical element 15.
  • the frusto-conical element 15 further has a second region 17 which is spaced from the upper side surface.
  • the second area 17 may be to the
  • Base body 2 are moved towards or away from the main body 2. If a force is applied to the second area 17,
  • the first region 16 is stretched in a radial direction to the outside.
  • the main body 2 can be pulled apart.
  • the mechanical reinforcement system 14 is constructed so that a pressure acting on the reinforcement system 14 to a deformation of the mechanical
  • Reinforcement system 14 is attached to the upper side surface 9, causes the deformation of the reinforcing system 14, that the main body 2 is pulled apart or compressed.
  • the reinforcement system 14 may be the deformation of the Base body 2 increase by, for example, ten times over the deformation that the base body 2 would experience when the force acts directly on the base body 2.
  • Reinforcement system 14 attached to the upper side surface 9, i. on a side surface which is free of the outer electrodes 5, 8. In this way it can be ensured that the outer electrodes 5, 8 not by the mechanical
  • Reinforcement system 14 can be damaged.
  • a second mechanical amplification system 14 is further arranged, which in the

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention concerne un capteur (1) comportant un corps de base qui comprend un matériau piézoélectrique (13) et au moins deux électrodes intérieures (3, 4) qui sont situées dans ledit matériau piézoélectrique (13) et agencées de sorte qu'il se produit une tension entre lesdites électrodes intérieures (3, 4) lorsqu'une pression agit sur une surface latérale (9, 10) du corps de base (2) pour une application de pression. Ledit capteur peut comporter un système de renfort mécanique (14).
EP16779070.8A 2015-10-08 2016-10-07 Dispositif et procédé pour mesurer une pression Ceased EP3359937A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015117203.8A DE102015117203A1 (de) 2015-10-08 2015-10-08 Drucksensor
PCT/EP2016/074082 WO2017060478A1 (fr) 2015-10-08 2016-10-07 Dispositif et procédé pour mesurer une pression

Publications (1)

Publication Number Publication Date
EP3359937A1 true EP3359937A1 (fr) 2018-08-15

Family

ID=56851621

Family Applications (2)

Application Number Title Priority Date Filing Date
EP16758220.4A Withdrawn EP3359936A1 (fr) 2015-10-08 2016-09-01 Dispositif et procédé pour mesurer une pression
EP16779070.8A Ceased EP3359937A1 (fr) 2015-10-08 2016-10-07 Dispositif et procédé pour mesurer une pression

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP16758220.4A Withdrawn EP3359936A1 (fr) 2015-10-08 2016-09-01 Dispositif et procédé pour mesurer une pression

Country Status (7)

Country Link
US (2) US10677668B2 (fr)
EP (2) EP3359936A1 (fr)
JP (2) JP6622400B2 (fr)
KR (1) KR102046270B1 (fr)
CN (2) CN108139281A (fr)
DE (2) DE102015117203A1 (fr)
WO (2) WO2017060012A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109141710A (zh) * 2018-07-05 2019-01-04 西安电子科技大学 一种压电陶瓷片应力测量方法及测量装置
AT523510B1 (de) * 2020-01-29 2021-10-15 Piezocryst Advanced Sensorics Strukturiertes, piezoelektrisches Sensorelement
KR102573040B1 (ko) * 2021-08-20 2023-08-31 에이티아이 주식회사 시료 표면의 범프 결합 강도 측정 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69635870T2 (de) * 1995-12-15 2006-11-02 The Penn State Research Foundation Wandler aus elektroaktivem metall-keramik-komposit
DE102006001134A1 (de) * 2006-01-09 2007-07-12 Robert Bosch Gmbh Piezoaktor
EP2124268A1 (fr) * 2006-11-29 2009-11-25 Kyocera Corporation Elément piézoélectrique laminé, dispositif de projection fourni avec l'élément piézoélectrique laminé et système de projection de carburant

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1231033B (de) * 1963-09-13 1966-12-22 Siemens Ag Druckempfindliches Halbleiterbauelement mit drei Zonen abwechselnd entgegengesetztenLeitungstyps und einem Stempel auf einer Zone
US4346041A (en) 1980-02-28 1982-08-24 The Upjohn Company Composition and process
JPS57142530A (en) 1981-02-27 1982-09-03 Yazaki Corp Load detector
US4545254A (en) * 1984-06-01 1985-10-08 Ceramphysics, Inc. Materials and methods for pressure and temperature sensors at cryogenic temperatures
JPH04346041A (ja) * 1991-05-23 1992-12-01 Fuji Electric Co Ltd 圧電式荷重センサとその応用装置および回路
US6411491B2 (en) * 1997-06-05 2002-06-25 Ceramphysics, Inc. Capacitive energy storage device and method of producing the same
US6614143B2 (en) * 2000-08-30 2003-09-02 The Penn State Research Foundation Class V flextensional transducer with directional beam patterns
JP4693999B2 (ja) 2001-01-19 2011-06-01 株式会社エー・アンド・デイ 秤の緩衝機構
JP3694740B2 (ja) 2001-03-08 2005-09-14 独立行政法人産業技術総合研究所 薄型圧力センサ及びそれを用いた人体情報計測装置
US6823739B2 (en) 2001-12-20 2004-11-30 National Institute Of Advanced Industrial Science And Technology Thin pressure sensor and biological information measuring device using same, and biological information measuring method
WO2004015789A2 (fr) * 2002-07-31 2004-02-19 Siemens Aktiengesellschaft Actionneur piezoelectrique et procede de fabrication de cet actionneur piezoelectrique
US6690567B1 (en) * 2002-09-26 2004-02-10 Ceramphysics, Inc. Capacitive energy storage device
EP1453114B1 (fr) * 2003-02-26 2009-10-21 Kyocera Corporation Composant électronique laminé
EP2365553A1 (fr) * 2003-07-28 2011-09-14 Kyocera Corporation Élément piézoélectrique à multicouches
JP4808915B2 (ja) 2003-09-24 2011-11-02 京セラ株式会社 積層型圧電素子及び噴射装置
DE102004001696A1 (de) * 2004-01-12 2005-10-27 Siemens Ag Verfahren zum Herstellen einer Korrelation zwischen einem ersten Zustand eines piezoelektrischen Bauteils und einem zweiten Zustand des Bauteils sowie Verwendung der Korrelation
JP4359535B2 (ja) * 2004-02-06 2009-11-04 アルプス電気株式会社 弾性表面波素子
WO2005093866A1 (fr) * 2004-03-29 2005-10-06 Kyocera Corporation Élément piézoélectrique multicouche et son procédé de fabrication
JP2006303044A (ja) * 2005-04-18 2006-11-02 Denso Corp 積層型圧電体素子
JP4279271B2 (ja) * 2005-06-01 2009-06-17 アルプス電気株式会社 弾性表面波素子及びその製造方法
CN1885584A (zh) * 2005-06-22 2006-12-27 昆明凯旋利科技有限公司 压力感知型无触点开关
JP4864899B2 (ja) * 2005-10-28 2012-02-01 京セラ株式会社 積層型圧電素子およびこれを用いた噴射装置
CN101563795B (zh) * 2006-10-20 2011-03-23 京瓷株式会社 压电致动器装置及其制造方法
CN101529538A (zh) * 2006-10-24 2009-09-09 京瓷株式会社 叠层电容器
KR101102184B1 (ko) * 2007-11-22 2012-01-02 가부시키가이샤 무라타 세이사쿠쇼 적층 세라믹 전자부품
CN101878549B (zh) * 2007-11-28 2013-06-19 京瓷株式会社 层叠型压电元件、具备其的喷射装置及燃料喷射系统
FI20096034L (fi) * 2009-10-08 2011-04-09 Vti Technologies Oy Menetelmä ja järjestelmä energian keräämiseksi
JP5584066B2 (ja) * 2010-09-14 2014-09-03 太陽誘電株式会社 積層型圧電構造体
JP2012112824A (ja) * 2010-11-25 2012-06-14 Kyocera Corp 圧力センサ素子およびこれを備えた圧力センサ
DE102010055621A1 (de) * 2010-12-22 2012-06-28 Epcos Ag Aktor, Aktorsystem und Ansteuerung eines Aktors
DE102010055934B4 (de) 2010-12-23 2018-09-06 Epcos Ag Aktuator und Verfahren zu dessen Herstellung
WO2012115230A1 (fr) * 2011-02-24 2012-08-30 京セラ株式会社 Élément piézoélectrique stratifié, appareil d'injection pourvu dudit élément et système d'injection de carburant pourvu dudit élément
JP5836754B2 (ja) * 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及びその製造方法
FR2989485B1 (fr) * 2012-04-11 2016-02-05 Commissariat Energie Atomique Capteur tactile et procede de fabrication d'un tel capteur
CN104254895B (zh) * 2012-05-02 2018-05-04 株式会社村田制作所 电子元器件
JP6186354B2 (ja) * 2012-06-05 2017-08-23 三井化学株式会社 圧電デバイス、および圧電デバイスの製造方法
US9183710B2 (en) * 2012-08-03 2015-11-10 Novasentis, Inc. Localized multimodal electromechanical polymer transducers
CN102790168A (zh) 2012-08-09 2012-11-21 昆山攀特电陶科技有限公司 具有柔性电极的压电陶瓷执行器
CN104350624B (zh) * 2012-10-29 2017-04-05 京瓷株式会社 层叠型压电元件及具备其的压电致动器、喷射装置以及燃料喷射系统
JP2015175811A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 力検出装置、およびロボット
EP3090427B1 (fr) * 2013-12-30 2022-11-02 Photosonix Medical, Inc. Transducteur flextentionnel et procédé associé
CN105939983A (zh) * 2014-01-29 2016-09-14 佳能株式会社 压电陶瓷、压电陶瓷的制造方法、压电元件、多层压电元件、液体喷出头、液体喷出装置、超声马达、光学设备、振动装置、尘埃去除装置、成像装置和电子设备
EP3174112B1 (fr) * 2014-07-22 2019-11-06 Kyocera Corporation Élément piézoélectrique multi-couche, et dispositif d'injection et système d'injection de carburant pourvu de l'élément piézoélectrique multi-couche
WO2016121278A1 (fr) * 2015-01-28 2016-08-04 京セラ株式会社 Élément piézoélectrique stratifié, dispositif d'injection le comprenant et système d'injection de combustible
US10018521B2 (en) * 2015-07-16 2018-07-10 Silicon Audio, Inc. Solid-state shear-stress sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69635870T2 (de) * 1995-12-15 2006-11-02 The Penn State Research Foundation Wandler aus elektroaktivem metall-keramik-komposit
DE102006001134A1 (de) * 2006-01-09 2007-07-12 Robert Bosch Gmbh Piezoaktor
EP2124268A1 (fr) * 2006-11-29 2009-11-25 Kyocera Corporation Elément piézoélectrique laminé, dispositif de projection fourni avec l'élément piézoélectrique laminé et système de projection de carburant

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2017060478A1 *

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US20180299334A1 (en) 2018-10-18
JP2018529971A (ja) 2018-10-11
CN116046223A (zh) 2023-05-02
WO2017060478A1 (fr) 2017-04-13
US20180292272A1 (en) 2018-10-11
DE202016008592U1 (de) 2018-08-23
WO2017060012A1 (fr) 2017-04-13
JP2018529974A (ja) 2018-10-11
CN108139281A (zh) 2018-06-08
US10677668B2 (en) 2020-06-09
JP6619512B2 (ja) 2019-12-11
US10928257B2 (en) 2021-02-23
KR102046270B1 (ko) 2019-11-18
KR20180102050A (ko) 2018-09-14
DE102015117203A1 (de) 2017-04-13
EP3359936A1 (fr) 2018-08-15

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