EP3435745A1 - Électrode pour le traitement de surfaces - Google Patents

Électrode pour le traitement de surfaces Download PDF

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Publication number
EP3435745A1
EP3435745A1 EP17183543.2A EP17183543A EP3435745A1 EP 3435745 A1 EP3435745 A1 EP 3435745A1 EP 17183543 A EP17183543 A EP 17183543A EP 3435745 A1 EP3435745 A1 EP 3435745A1
Authority
EP
European Patent Office
Prior art keywords
electrode
tips
electrode tips
treated
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17183543.2A
Other languages
German (de)
English (en)
Inventor
Lüder Herrgen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fgm Fritz Gradert Maschinenbau GmbH and Co KG
Original Assignee
Fgm Fritz Gradert Maschinenbau GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fgm Fritz Gradert Maschinenbau GmbH and Co KG filed Critical Fgm Fritz Gradert Maschinenbau GmbH and Co KG
Priority to EP17183543.2A priority Critical patent/EP3435745A1/fr
Priority to EP18185670.9A priority patent/EP3435746A1/fr
Publication of EP3435745A1 publication Critical patent/EP3435745A1/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/04—Devices providing for corona discharge having pointed electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H05H1/471—Pointed electrodes

Definitions

  • the invention relates to an electrode for the treatment of surfaces, in particular of plastic, and a device for the treatment of surfaces comprising a corresponding electrode.
  • a device for the surface treatment of plastic films in which by means of a corona electrode, a plasma-generating corona discharge is generated, which is exposed to the film to be treated.
  • the film runs over a grounded metal roller to the parallel and at a short distance an elongated corona electrode is arranged so that there is a distance of only a few millimeters between the guided over the roller foil and the corona electrode.
  • a dielectric for electrical isolation and electrical insulation is arranged, wherein the dielectric of the electrode or the metal roller, for example.
  • the corona electrode is generated connected AC voltage source.
  • a disadvantage of this prior art is that a short circuit may occur due to wear, mechanical injury or puncture with hole formation in case of damage to the dielectric, for example, and the device must be stopped until the fault causing the short circuit. This can result in significant downtime. Furthermore, it is known that with corresponding devices for the surface treatment of plastic films as a by-product ozone is produced, the proportion of which in the exhaust gas of the corona discharge is well above the occupational safety approved maximum workplace concentration (MAK value) and which is also particularly corrosive. As a result, suitable extraction devices and, where appropriate, exhaust gas cleaning devices for surface treatment with corona discharge should be provided.
  • MAK value occupational safety approved maximum workplace concentration
  • Object of the present invention is to provide an electrode for the treatment of surfaces and a device for the treatment of surfaces, in which the disadvantages known from the prior art no longer occur or only to a lesser extent.
  • the invention relates to an electrode for the treatment of surfaces with a width dimension parallel to the surface to be treated, are arranged in the direction of the width extension a plurality of perpendicular to the surface to be treated aligned electrode tips on a common carrier, the electrode tips from each other are electrically isolated and each have their own upstream voltage-resistant capacitor for power supply
  • the invention further relates to a device for the treatment of surfaces comprising at least one of an AC voltage source supplied with AC voltage inventive electrode and at least one counter electrode as a mass, wherein the electrode and counter electrode are spaced from each other so that the object with the surface to be treated are arranged between them can.
  • the invention is based on the finding that the treatment of surfaces, in particular of plastic, but also of paper and aluminum surfaces, by spark discharge over the known from the prior art corona treatment is advantageous.
  • the isothermal plasma generated during the spark discharge has not only highly energized electrons but also a large number of positive, hot ions whose energy is sufficient not only to split molecular chains on the surface to be treated, but also resulting or for other reasons evaporate existing short-chain substances that would otherwise limit the adhesion.
  • Increasingly strong adhesive, stable chemical bonds remain on the treated surface. The adhesion of surfaces treated with spark discharge is so much improved over a corona-treated surface that even aqueous glue is inseparably adhered to a recently treated surface.
  • the decrease in the surface tension determining the adhesion properties in surfaces treated with spark discharge is significantly lower and may, for example, in a plastic film from oriented polypropylene, in which the decrease in surface tension after corona treatment at two months storage time is about 4 mN / m, in a treatment with spark discharge, the decrease in surface tension over two months storage time can be reduced to only about 1 mN / m.
  • the electrode has a large number of electrode tips, each of which has its own current-limiting and thus arc-discharge-preventing capacitor.
  • upstream in this context means that the voltage supply of the electrode tips is mandatory via the respective capacitor of an electrode tip.
  • the electrode tips are distributed over the width of the electrode arranged on a support and electrically insulated from each other.
  • the electrode tips are arranged substantially perpendicular to the surface to be treated.
  • the surface to be treated is not part of the electrode, it defines the shape of the electrode for the intended use.
  • the electrode tips of the electrode can each be arranged parallel to one another. Is the surface to be treated curved, for example because it is guided over a roller, the electrode tips are each arranged in the radial direction to an axis which coincides - in said embodiment - with the axis of the roller.
  • spark discharges occur locally at each electrode tip. Due to the current limitation by the capacitors of each electrode tip, can be completely dispensed with a arranged in the spark gap dielectric.
  • the spark gap is therefore preferably free of dielectrics.
  • the component of the clear distance of two offset adjacent electrode tips parallel to the direction of the width extension is smaller than the amount of the clear distance of the two electrode tips, wherein the distance component parallel to The direction of the width extension is preferably less than or equal to the distance component perpendicular to the direction of the width extension, more preferably less than or equal to the diameter of the electrode tips, particularly preferably equal to zero. If the surface to be treated is moved in the direction perpendicular to the width extension relative to the electrode, a surface treatment over the entire width of the electrode is ensured by the corresponding arrangement of the electrode tips.
  • the electrode tips are arranged in at least one row parallel to the direction of the width extension, wherein the electrode tips of a row are preferably arranged at constant intervals.
  • a corresponding arrangement serves the uniform surface treatment over the entire width of the electrode. There may be provided from 2 to 20, preferably 4 to 12 rows of electrode tips. In Combination with the staggered arrangement described above can be ensured by suitable choice of spacings and number of rows, that a relatively moving surface relative to the electrode over the entire width of the electrode is completely and uniformly surface-treated.
  • the electrode tips may be formed as pins or tubes.
  • the design as tubes has the advantage that the electrode tips are gas-permeable, which on the one hand achieve cooling of the electrode tips and the surface to be treated and an elimination of unwanted, stationary spark channels, on the other hand creates a protective atmosphere in the field of spark discharge on the other.
  • the electrode tips are formed as tubes, it is preferred if the electrode and / or its carrier are designed to pass gas to the tubes.
  • the carrier may be formed as a gas-tight and fluid-connected to the tubes profile so that gas introduced into the carrier flows through the electrode tips formed as tubes.
  • the electrode tips are individually or in groups in the direction perpendicular to the surface to be treated height adjustable attached to the support, so that the distance of the free end of the electrode tips to be treated surface and / or a counter electrode can be adjusted.
  • the spark discharge can be turned off individually at an electrode tip or a group thereof so as to variably set the effective width of the electrode for surface treatment.
  • the electrode tips individually or in groups by at least one Switching elements are electrically switchable. This also makes it possible to selectively deactivate individual or groups of electrode tips. It should be noted that even with the provision of a switching element for switching a group of electrode tips, the electrode tips further each have their own capacitor. In order to achieve this, the capacitors may, for example, be arranged between the respective electrode tip and the switching element.
  • the electrode preferably has a width of 100 to 1000 mm. It is of course also possible to arrange several electrodes next to each other, so as to achieve a greater overall width. The individual electrodes in such an arrangement can then be vertically adjustable in each case as a whole in the direction perpendicular to the surface to be treated and / or switchable via a switching element in order to jointly deactivate the electrode tips of an electrode.
  • the distance between two adjacent electrode tips of the same row and / or two adjacent rows can be 7.5 to 12.5 mm, preferably 10 mm.
  • the diameter of the electrode tips is preferably 2 to 3 mm, more preferably 2.5 mm.
  • the electrode tips may be made of stainless steel or nickel, and / or the carrier of high-voltage resistant, arc-resistant ceramic.
  • the inventive device for the treatment of surfaces comprises at least one supplied via an AC voltage source with AC voltage, formed in accordance with the above explanations electrode and at least one counter electrode as a mass, the electrode and counter electrode are spaced from each other so that the object with the surface to be treated can be arranged between them.
  • the device is accordingly designed to generate the spark discharge provided according to the invention for the surface treatment of an article, for example a film.
  • the counterelectrode may be a bare metal roller with a corrosion-resistant surface, ie not provided with an insulating coating. If the surface to be treated does not extend over the entire area of the counterelectrode covered by the electrode, intensive discharges between the electrode tips and the counterelectrode may occur in the areas where the object to be treated is not located in the case of a metal roller , what among others can lead to uneven surface treatment of the article. To avoid this, the affected electrode tips, as described above, can be switched off by height adjustment and / or switching devices. Alternatively or additionally, it is possible to design the counter electrode as a partially electrically conductive, resistant CFRP roller.
  • Partially electrically conductive and resistive in this context means at least 30% lower conductivity of the CFRP roller compared to a bare metal roller. By a roller with a correspondingly lower conductivity, the effects described can be reduced. It has been found that with a corresponding CFRP roller, the surface treatment for plastic films up to a thickness of 200 microns across the entire width of the electrode is practically constant, even if no foil is arranged between a part of the spark discharging electrodes and the roller.
  • a separate alternating voltage source with frequency monitoring is preferably provided for each electrode.
  • a separate AC source is a monitoring of the individual electrodes possible.
  • the frequency may be monitored, with a deviation from a desired frequency indicative of a problem or damage, whereupon the affected electrode may be turned off to avoid further damage to the electrode and / or the device.
  • the at least one alternating voltage source is preferably adjustable in frequency in a range of 10 to 100 kHz at voltages between 5 and 50 kV, more preferably from 15 to 30 kHz at voltages between 10 and 15 kV.
  • the device when the electrode tips of the electrode are formed as tubes, the device preferably has a gas supply for blowing gas through the tubular electrode tips of the at least one electrode.
  • the electrode or its carrier is preferably designed for the corresponding gas feedthrough.
  • the gas supply may be the one for providing and / or blowing air, oxygen, hydrogen, nitrogen, carbon dioxide, or mixtures thereof, preferably with admixture of organic gases or vapors, preferably ethylene, acetylene, ammonia, silanes, siloxanes.
  • the surface properties can be influenced after the treatment.
  • FIG. 1 is a schematic sectional view provided by a device 10 according to the invention with an electrode 1 according to the invention.
  • the cutting guide too FIG. 1 results from this FIG. 2 (Section II), whose incision again in FIG. 1 is indicated (section line II-II).
  • the device 10 comprises an electrode 1, which is supplied with an AC voltage with adjustable amplitude voltages between 10 and 15 kV via a variable in the range of 15 to 30 kHz AC voltage source.
  • the AC voltage source 11 has a frequency monitor (not shown), with which any problems or malfunctions of the device 1 can be detected.
  • a grounded counter electrode 12 Spaced from the electrode 1 is a grounded counter electrode 12 made of bare metal, so that between the two electrodes 1, 12, a plastic film 20 whose surface 21 is to be treated, can be passed in the direction indicated by arrow 90 direction.
  • the electrode 1 comprises a carrier 3, on which a plurality of electrode tips 2, which are oriented perpendicular to the counterelectrode 12 and thus perpendicular to the surface 21 to be treated, are electrically insulated from each other. Since the counter electrode 12 is flat, the electrode tips 2 are arranged parallel to each other.
  • the electrode tips 2 are arranged in several, more precisely four rows 5 parallel to the direction indicated by the double arrow 91 direction of the width extension of the electrode 1 at constant intervals of 10 mm.
  • the distance between the rows 5 with each other corresponds to the distance of the electrode tips 2 in the rows 5, ie also 10 mm.
  • the electrode tips 2 in two adjacent rows 5 are offset from each other in such a way that the clear distance 92 between two offset adjacent electrode tips 2 parallel to the direction 91 of the width dimension of the electrode is zero and thus smaller than the amount 93 of the clear distance.
  • the electrode tips 2 are each connected via a separate upstream capacitor 4 to the AC voltage source 11.
  • the capacitors 4 serve as elektrodenspitzenindividuelle current limiters and are designed in accordance with voltage with respect to the expected voltages.
  • the capacitors 4 serve to ensure that for the treatment of the surface 21 only spark discharge, but not unwanted corona discharge arises.
  • the electrode tip 2 are designed to be height adjustable. By thus enlarging the distance between the electrode tips 2 and counter electrode 12, a spark discharge can be deliberately prevented in the case of individual electrode tips 2.
  • any spark discharge in width regions 94 in which, for example, no surface 21 to be treated is arranged between the electrodes 1, 12, can be prevented, while in the width region 95, in which the film 20 is actually arranged between the electrodes 1, 12 in a correspondingly small distance to the counter electrode 2, the desired spark discharge is achieved.
  • the electrode tips 2 are each formed as tubes. Above the carrier 4, a space 6, which is fluid-connected to the tubular electrode tips 2, but otherwise is generally pressure-tight, is provided. When the space 6 is supplied with gas, the introduced gas passes through the electrode tips 2 formed as tubes and exits at their free ends in the area of the final spark discharge. By means of the gas, on the one hand, the electrode tips 2 as well as the surface 21 can be cooled, on the other hand, by suitable choice of the gas, the final surface treatment can be influenced.
  • the device 1 has a gas supply 13 for supplying gas into the space 6. If the gas to be supplied is air, the device 13 may be a blower.
  • the electrode 1 in the first embodiment has a width of 300 mm and a length in the direction 90 of 100 mm. In order to achieve a larger overall width, a plurality of electrodes 1 can be arranged next to each other. The diameter of the individual electrode tips 2 is 2.5 mm.
  • the electrode tips 2 are made of stainless steel, the carrier is made of high-voltage resistant, arc-resistant ceramic.
  • FIG. 3 a second embodiment of a device 10 according to the invention is shown, which in large parts with the one out FIGS. 1 and 2 matches. In the following, therefore, only the differences between the two embodiments will be discussed.
  • the counterelectrode 12 is designed as a partially electrically conductive, resistant CFRP roller over which the foil 20 to be treated is guided in the direction 90.
  • the electrode tips 2 are no longer parallel to each other, but rather arranged in the radial direction to the axis of the counter electrode 12, so that it is further ensured that the electrode tips 2 are perpendicular to the surface 21 to be treated.
  • switching elements 7 are furthermore provided, with which groups of electrode tips 2 can be switched.
  • the spark discharge can be selectively switched on and off in the respective groups.
  • the switching elements 7 are arranged between the alternating voltage source 11 and the capacitors 4 of the individual electrode tips 2, so that furthermore a direct assignment of a capacitor 4 to one electrode tip 2 is ensured.
  • an additional switching element 14 between the electrode 1 and AC voltage source 11 is provided, with which the electrode tips 2 of the electrode 1 can be deactivated together if necessary.
  • the actual surface treatment width can be roughly adjusted, with fine adjustment by deactivating individual electrode tips 2 or groups of electrode tips 2 via the switching elements 7 active electrodes 1 is maintained.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
EP17183543.2A 2017-07-27 2017-07-27 Électrode pour le traitement de surfaces Withdrawn EP3435745A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17183543.2A EP3435745A1 (fr) 2017-07-27 2017-07-27 Électrode pour le traitement de surfaces
EP18185670.9A EP3435746A1 (fr) 2017-07-27 2018-07-26 Électrode pour le traitement de surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17183543.2A EP3435745A1 (fr) 2017-07-27 2017-07-27 Électrode pour le traitement de surfaces

Publications (1)

Publication Number Publication Date
EP3435745A1 true EP3435745A1 (fr) 2019-01-30

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EP17183543.2A Withdrawn EP3435745A1 (fr) 2017-07-27 2017-07-27 Électrode pour le traitement de surfaces
EP18185670.9A Withdrawn EP3435746A1 (fr) 2017-07-27 2018-07-26 Électrode pour le traitement de surfaces

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Application Number Title Priority Date Filing Date
EP18185670.9A Withdrawn EP3435746A1 (fr) 2017-07-27 2018-07-26 Électrode pour le traitement de surfaces

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024126801B3 (de) * 2024-09-17 2025-10-23 Arcotec Gmbh Vorrichtung und Verfahren zur Hochfrequenz-Coronavorbehandlung von Substratoberflächen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149731A (ja) * 1985-12-25 1987-07-03 Nippon Paint Co Ltd コロナ放電処理装置
DE3700232A1 (de) * 1987-01-07 1988-07-21 Ahlbrandt System Gmbh Vorrichtung zur behandlung von oberflaechen
EP2384096A2 (fr) * 2010-04-30 2011-11-02 tantec Oberflächenbehandlung GmbH Tête rotative pour un dispositif de traitement par décharge corona de surfaces
DE102015109635A1 (de) 2015-06-16 2016-12-22 Windmöller & Hölscher Kg Verfahren zum elektrischen Behandeln einer Folie sowie Vorrichtung hierzu

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825942B1 (fr) * 1969-11-08 1973-08-02
CH638071A5 (de) * 1979-02-21 1983-08-31 Walter Spengler Hochspannungselektrodenanordnung mit einer anzahl einzeln ein- und ausschaltbarer spitzenelektroden.
DE3347600A1 (de) * 1983-12-30 1985-07-11 Dimitrijević, Milorad, Dipl.-Ing., 8901 Affing Vorbehandlungs-elektrode
JP3175894B2 (ja) * 1994-03-25 2001-06-11 株式会社半導体エネルギー研究所 プラズマ処理装置及びプラズマ処理方法
US6632323B2 (en) * 2001-01-31 2003-10-14 Plasmion Corporation Method and apparatus having pin electrode for surface treatment using capillary discharge plasma
JP2004363321A (ja) * 2003-06-04 2004-12-24 Sekisui Chem Co Ltd プラズマ処理装置
JP4555262B2 (ja) * 2006-07-13 2010-09-29 春日電機株式会社 コロナ表面処理装置
CA2621749A1 (fr) * 2008-02-19 2009-08-19 Atlantic Hydrogen Inc. Decomposition du gaz naturel ou du methane par decharge en arc a froid

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149731A (ja) * 1985-12-25 1987-07-03 Nippon Paint Co Ltd コロナ放電処理装置
DE3700232A1 (de) * 1987-01-07 1988-07-21 Ahlbrandt System Gmbh Vorrichtung zur behandlung von oberflaechen
EP2384096A2 (fr) * 2010-04-30 2011-11-02 tantec Oberflächenbehandlung GmbH Tête rotative pour un dispositif de traitement par décharge corona de surfaces
DE102015109635A1 (de) 2015-06-16 2016-12-22 Windmöller & Hölscher Kg Verfahren zum elektrischen Behandeln einer Folie sowie Vorrichtung hierzu

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024126801B3 (de) * 2024-09-17 2025-10-23 Arcotec Gmbh Vorrichtung und Verfahren zur Hochfrequenz-Coronavorbehandlung von Substratoberflächen

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Publication number Publication date
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