EP3447299C0 - Rondelle de calage - Google Patents

Rondelle de calage

Info

Publication number
EP3447299C0
EP3447299C0 EP17187569.3A EP17187569A EP3447299C0 EP 3447299 C0 EP3447299 C0 EP 3447299C0 EP 17187569 A EP17187569 A EP 17187569A EP 3447299 C0 EP3447299 C0 EP 3447299C0
Authority
EP
European Patent Office
Prior art keywords
adjusting ring
adjusting
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17187569.3A
Other languages
German (de)
English (en)
Other versions
EP3447299A1 (fr
EP3447299B1 (fr
Inventor
Lothar Brückmann
Peter Vorwerk
Michael Schweighöfer
Martin Lohse
Robert Walz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17187569.3A priority Critical patent/EP3447299B1/fr
Priority to JP2018155742A priority patent/JP6709259B2/ja
Publication of EP3447299A1 publication Critical patent/EP3447299A1/fr
Application granted granted Critical
Publication of EP3447299C0 publication Critical patent/EP3447299C0/fr
Publication of EP3447299B1 publication Critical patent/EP3447299B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/50—Bearings
    • F05D2240/51—Magnetic
    • F05D2240/511—Magnetic with permanent magnets

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
EP17187569.3A 2017-08-23 2017-08-23 Rondelle de calage Active EP3447299B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17187569.3A EP3447299B1 (fr) 2017-08-23 2017-08-23 Rondelle de calage
JP2018155742A JP6709259B2 (ja) 2017-08-23 2018-08-22 調整リング

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17187569.3A EP3447299B1 (fr) 2017-08-23 2017-08-23 Rondelle de calage

Publications (3)

Publication Number Publication Date
EP3447299A1 EP3447299A1 (fr) 2019-02-27
EP3447299C0 true EP3447299C0 (fr) 2025-08-13
EP3447299B1 EP3447299B1 (fr) 2025-08-13

Family

ID=59686889

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17187569.3A Active EP3447299B1 (fr) 2017-08-23 2017-08-23 Rondelle de calage

Country Status (2)

Country Link
EP (1) EP3447299B1 (fr)
JP (1) JP6709259B2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202020101545U1 (de) * 2020-03-23 2021-06-30 Leybold Gmbh Vakuumpumpe
JP7566540B2 (ja) * 2020-09-10 2024-10-15 エドワーズ株式会社 真空ポンプ
GB2601320B (en) * 2020-11-25 2023-04-26 Edwards S R O Rotor assembly for a turbomolecular pump
EP4239200B1 (fr) * 2022-02-09 2026-04-01 Shimadzu Corporation Pompe à vide avec palier magnétique ajustable dans la direction axiale

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4712659A (en) * 1986-12-11 1987-12-15 Dana Corporation Adjustable clutch brake apparatus
JP2509468Y2 (ja) * 1987-09-14 1996-09-04 セイコー精機株式会社 回転体軸受装置
US4997191A (en) * 1989-10-17 1991-03-05 Gits Bros. Mfg. Co. Adjustable shaft seal and method of adjustment
AU2006230684B2 (en) * 2005-10-24 2011-12-22 Mbp Australia Pty Ltd Tank outlet fitting
DE202009013629U1 (de) * 2009-10-09 2011-02-24 Oerlikon Leybold Vacuum Gmbh Vakuum-Wälzlageranordnung sowie Vakuumpumpe
DE102013218220A1 (de) * 2013-09-11 2015-03-12 Pfeiffer Vacuum Gmbh Anordnung zur magnetischen Kopplung zweier Komponenten
DE102014116241B4 (de) * 2014-11-07 2020-05-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3106668B1 (fr) * 2015-06-17 2020-08-12 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP3447299A1 (fr) 2019-02-27
JP2019039431A (ja) 2019-03-14
EP3447299B1 (fr) 2025-08-13
JP6709259B2 (ja) 2020-06-10

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