EP3465732B1 - Génération non magnétique d'impulsions d'ions - Google Patents

Génération non magnétique d'impulsions d'ions Download PDF

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Publication number
EP3465732B1
EP3465732B1 EP17726938.8A EP17726938A EP3465732B1 EP 3465732 B1 EP3465732 B1 EP 3465732B1 EP 17726938 A EP17726938 A EP 17726938A EP 3465732 B1 EP3465732 B1 EP 3465732B1
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Prior art keywords
ions
anode
potential
ion
electrons
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German (de)
English (en)
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EP3465732A1 (fr
EP3465732C0 (fr
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Mihail Granovskiy
Juraj Bdzoch
Sergej Uchatsch
Anton Zimare
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Vacom Vakuum Komponenten und Messtechnik GmbH
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Vacom Vakuum Komponenten und Messtechnik GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Definitions

  • the invention relates to a device for generating, storing and releasing ions from a residual gas atmosphere with the features of claim 1 and a method therefor with the features of claim 10.
  • EBIT electron beam ion trap
  • EBIT electron beam ion trap
  • an electron beam is used to generate ions.
  • High-energy electrons are used, with acceleration voltages in the range of more than 15 kV and electron currents of more than 20 mA.
  • complex magnetic fields with the corresponding coil devices are required, which must ensure a magnetic field strength in the range of more than 200 mT.
  • the ions are generated from the neutral gas particles in the electron beam by the well-known process of impact ionization.
  • the ions generated are stored in a cylindrically symmetrical structure, with the ions being enclosed in the radial direction via space charge forces and in the axial direction via additional electrodes.
  • the EBIT process has a number of disadvantages.
  • a first disadvantage is the considerable equipment required to generate and focus the electron beam, which is particularly evident in the magnetic field device. EBIT devices therefore take up a relatively large amount of space and, due to the high magnetic field strengths, cannot easily be combined with devices in the vicinity of the system that are sensitive to ambient magnetic fields. Accordingly, appropriate Shielding or a minimum structural distance is required, which further increases the space required by the device.
  • the EBIT process mainly produces multiply ionized ions due to the high-energy electrons, and the molecules present in the residual gas atmosphere are also broken down into smaller fragments to a considerable extent.
  • multiply charged ions and molecular fragments are a significant problem for downstream analytical processes, particularly for the purpose of residual gas analysis. This is because the ionized molecular fragments are in an excited, multiply ionized state. Their properties cannot therefore be easily compared with the data stored in relevant databases.
  • the original compounds in the residual gas are broken down, the original molecular aggregates present there are destroyed, so that they can no longer be detected directly, but only indirectly. This causes a certain analytical detection uncertainty.
  • Another disadvantage is the high emission current required of >20mA. The high heating power required to generate this emission current results in a high power and heat input into the entire arrangement and the adjacent vacuum chamber.
  • an electron beam is also used for ionization.
  • the electron beam is focused there via an arrangement of repeller electrodes.
  • an additional electrode arrangement is used which generates a potential that is attractive for ions by means of an additional storage electrode within the ionization volume and in particular within the ion storage space.
  • the method disclosed there has the disadvantage that the ions generated can only have a short lifespan because they are attracted to the storage electrode and neutralized.
  • the ion currents that can be generated, i.e. ultimately the number of stored ions, are therefore proportional to the pressure of the residual gas atmosphere.
  • the arrangement disclosed there is free of magnetic fields, the arrangement shown there is also characterized by a complicated storage electrode structure, with the acceleration voltages required at the electron source being in the range of 500 to 1000 V.
  • the energy distribution of the ions produced is also significantly higher than the thermal distribution in the residual gas atmosphere. This is particularly disadvantageous with regard to subsequent residual gas analysis, for example by measuring the time of flight of the ion packet, since the individual mass-separated ion packets diverge greatly in space during the flight, which generally reduces the resolution of the apparatus and requires longer flight distances.
  • EP 0 676 792 A2 discloses a device for generating, storing and releasing ions from a residual gas atmosphere, comprising an electron source for releasing electrons and an ion storage space which, solely as a result of the negative space charge distribution generated by the electrons, has a spatial potential distribution that is attractive for the ions generated by ionization of the residual gas atmosphere, wherein the particles of the residual gas can be ionized by the negative space charge and an attractive potential can be formed for the positive ions formed.
  • the ions are extracted by an electrode after a predetermined time.
  • This method is not always sufficiently sensitive for small partial prints.
  • a method and a device for generating, storing and releasing ions from a residual gas atmosphere are to be specified, in which the number of ions generated is essentially independent of the pressure of the residual gas atmosphere.
  • the method should also be able to be carried out at a low pressure in the residual gas and should deliver the largest possible quantity of ions for reliable ion detection.
  • the arrangement for carrying out the method should have a simple structure and be able to be carried out without the additional influence of magnetic fields.
  • the process should ensure that the energy distribution within the quantity of ions produced is as thermal as possible. The energy distribution of the ions should therefore not be given a falsifying or additional signature by the process of ion production itself.
  • the process of ion production and the device used should leave the molecules within the residual gas atmosphere as intact as possible even during ionization, and only singly charged ions should be produced.
  • the device claimed according to the invention for generating, storing and releasing ions from a residual gas atmosphere comprises an electron source for releasing electrons, an anode which is permeable to the electrons released by the electron source and has a negative space charge distribution formed by the electrons within an ion storage space at least partially surrounded by the anode, and a pulse electrode which is electrically insulated from the anode for extracting the ions from the storage space.
  • anode and the pulse electrode are at the same potential during the storage process.
  • the particles of the residual gas can be ionized by the negative space charge and an attractive potential is created for the positive ions formed, whereby the negative space charge forms a storage area for the ions generated.
  • a means for regulating the time interval between successive switching operations of the pulse electrode to a fixed predetermined strength of the measured released ion packet is also provided.
  • the device for generating, storing and releasing ions from a residual gas atmosphere thus comprises an electron source for releasing electrons and an anode permeable to the electrons released by the electron source with a negative space charge formed by the electrons within an ion storage space at least partially surrounded by the anode.
  • the ion storage space for the ions generated by ionization of the residual gas atmosphere has an attractive spatial potential distribution due to the negative space charge. Furthermore, a junction that closes the ion storage space in the emission direction and is based on an electrical Potential switchable and perforated pulse electrode provided for releasing an ion packet from the ion storage space.
  • the device according to the invention is based on the idea of ionizing and storing the particles of the residual gas in the attractive potential of a negative space charge cloud.
  • the negative space charge cloud or electron density is formed without further bundling or collimation and without the increase of additional electrodes in the axial direction.
  • the anode which is permeable to the emitted electrons, serves to form the negative space charge cloud.
  • the emitted electrons collect in the area of the permeable anode and form the space charge cloud, particularly in its interior.
  • the negative space charge cloud has a dual function: firstly, it ionizes the particles of the residual gas and secondly, it creates an attractive potential for the positive ions formed in it.
  • the positive ions accumulate in this attractive potential, so that the negative space charge cloud forms a storage area for the ions produced.
  • the anode and the pulse electrode are at the same potential during the storage process.
  • the electron source is designed as a hot cathode in the form of a ring filament that surrounds the electron-permeable anode. This means that the electron-permeable anode is exposed from all sides to the electrons emitted from the ring filament.
  • Other designs of the electron source are also conceivable in which the electrons are emitted from one or more sources and impact the anode at the appropriate points.
  • the decisive factor is the negative space charge distribution generated within the anode.
  • the acceleration voltage for the electrons can be significantly reduced.
  • the acceleration voltage applied to the hot cathode that is effective for the emitted electrons is a maximum of 200 volts.
  • the electron current can be significantly reduced.
  • the electron current emerging from the hot cathode is no more than 10mA; in particular, 2mA is sufficient for typical applications. This significantly reduces the power consumption and heat input in the sensor.
  • an electrostatic arrangement of focusing electrodes and/or a repeller surrounding the electron source is provided for additional alignment and shaping of the electron emission.
  • the focusing electrodes and/or the repeller serve in particular to direct the electrons not emitted in the direction of the electron-permeable anode in the direction of the electron-permeable anode, thus supporting the formation of the negative space charge.
  • the negative space charge distribution forms a potential well with respect to the anode and pulse electrode potential, which, if the negative space charge distribution is not compensated with ions, acts attractively on ions in the ionization volume and forms an electrostatic exit barrier for ions acting in all directions, thus enabling storage of ions until the negative space charge is compensated.
  • the pulse electrode can be switched to a negative potential compared to the anode, whereby the collected ions can be extracted in the direction of the pulse electrode.
  • the frequency for switching the pulse electrode is preferably a minimum of 0.1 Hz and a maximum of 1 MHz, in particular a minimum of 1 Hz and a maximum of 100 kHz.
  • the electron current generated by the electron source is a minimum of 1 ⁇ A and a maximum of 15 mA, in particular a minimum of 5 ⁇ A and a maximum of 2mA.
  • the acceleration voltage effective for the electrons generated at the electron source (1) due to the potential difference between the electron source (1) and the anode (2) is a minimum of 30V and a maximum of 400V, in particular a minimum of 70V and a maximum of 150V.
  • the anode that is permeable to the emitted electrons has a cylindrically symmetrical structure.
  • the outer surface of the cylinder can be designed parallel to the circumferential ring filament of the electron source, while the pulse electrode forms one of the two cover surfaces of the cylindrically symmetrical anode.
  • the cylindrically symmetrical structure promotes the multiple passage of the electrons through the ionization space, which increases the electron yield compared to directed beam paths and increases the storable charge with the same emission current due to the increased space charge in the storage space.
  • a detector arranged in the direction of flight of the ions can be provided to measure the ion current.
  • Electrons are emitted from an electron source and accelerated towards the ionization space through the permeable anode arrangement.
  • a negative space charge cloud is generated within the ionization space due to the electrons moving through the ionization space
  • the anode arrangement and a pulse electrode are connected to the same potential during the storage process.
  • Impact ionization of gas molecules and/or gas atoms occurs within the ionization space and the generated positively charged ions are stored in the attractive potential of the negatively charged space charge cloud as a positively charged ion reserve.
  • the pulse electrode is then switched to a potential relative to the anode potential and the ion supply located in the potential of the space charge cloud is accelerated out of the ionization space.
  • a determination of a total pressure is carried out in connection with this.
  • the time interval between successive switching operations of the pulse electrode is regulated to a fixed predetermined strength of the measured released ion packet, wherein the time interval between successive switching operations of the pulse electrode is a measure of the total pressure to be measured.
  • the basic idea of the process is to use a negative space charge cloud formed from released electrons for the impact ionization of neutral gas particles and to use the negative potential of the Space charge cloud is used simultaneously to collect and store the ions generated.
  • This negative potential is gradually filled with the positive ions generated until this potential is essentially balanced. Because the depth of the negative potential is essentially not dependent on the pressure of the surrounding gas atmosphere and this potential is constantly filled during the ionization of the gas particles, the number of ionized gas particles in the negative potential is largely independent of the pressure of the gas atmosphere, so that a pressure-independent ion packet can also be released.
  • the energy distribution of the ions within the storage potential is essentially thermal, the ions themselves are usually only positively charged due to the weak, low kinetic electron energy, with larger molecules essentially not being split into smaller fragments.
  • the process does not require complex magnetic focusing of an electron beam and can be operated at relatively low electron energies compared to the state of the art.
  • Complex storage electrodes for collecting the ions generated are also not required.
  • the electrons are emitted from the electron source from a hot cathode that surrounds the transmissive anode arrangement in a ring, whereby the electrons are accelerated in the field of the transmissive anode arrangement and form the negative space charge cloud.
  • the transmissive anode arrangement therefore only serves the purpose of concentrating the emitted electrons in a certain spatial region and thereby generating the ionizing and simultaneously storing space charge cloud.
  • the strength of the released ion pulse is adjusted over a time interval between successive switching operations of the pulse electrode, so that the strength of the ion pulse is proportional to the length of the time interval.
  • a determination of a total pressure can also be carried out.
  • the strength of the released ion current is determined at a fixed time interval between successive switching operations of the pulse electrode. measured, using the strength of the ion current as a measure of the total pressure to be measured.
  • a total pressure is also determined.
  • the time interval between successive switching operations of the pulse electrode is regulated to a fixed predetermined strength of the measured released ion packet, whereby the time interval between successive switching operations of the pulse electrode is a measure of the total pressure to be measured. Due to the strength of the ion packet being independent of the pressure, the ion source can be operated in a very wide pressure range from 1e-12 mbar to 2e-2 mbar.
  • Fig.1 shows an overall view of the device for ion generation, storage and release in section.
  • the device contains an electron source 1, which in the example presented here is designed as a hot cathode in the form of a ring filament.
  • the ring filament surrounds an anode 2 that is permeable to electrons.
  • a negative ionizing space charge 3 is generated by the emitted electrons, which is shown in the figure presented here by a dashed line. line.
  • the negative space charge extends in particular into an ion storage space 4, which is located inside the anode 2.
  • the anode 2 is electrically insulated from the pulse electrode 5.
  • the arrangement is additionally surrounded by focusing electrodes 6 and shielded from the outside.
  • the focusing electrodes in particular align the electrons emitted by the electron source in the direction of the anode 2, which is permeable to the electrons.
  • Fig.2 shows the Fig.1 shown arrangement in a perspective view.
  • the anode 2 which is permeable to electrons, is constructed here with cylindrical symmetry. It contains a surface area 7, which is designed as a sufficiently fine-meshed grid, sieve or conductive fabric.
  • the entire anode arrangement including the outer surface 7 and the pulse electrode 8, is gas-permeable and at the same time partially transparent to electrons.
  • the electron source is a ring filament 9 in the form of a ring-shaped hot cathode running parallel to the lateral surface 7 at a certain distance, which emits electrons at high temperature by means of thermal emission.
  • the electrons emitted from the hot cathode are emitted from all sides, including towards the outer surface 7 of the anode, and accelerated and penetrate the outer surface 7, penetrating the interior of the anode and ionizing the gas particles present there via the process of impact ionization.
  • the electrons form a negative space charge cloud, which represents an attractive potential for the positively charged ions.
  • the ions are thus collected in this attractive potential within the ion storage space 4 of the anode.
  • the pulse electrode 8 By switching the pulse electrode 8 to a negative potential, the ions can now be released from the ion storage space to the outside through the are accelerated through a pulse grid.
  • An ion packet is extracted.
  • the extraction direction of the ion packet is indicated by an arrow.
  • the pulse electrode can be switched to a potential that is positive compared to the anode in order to accelerate the collected ions in the opposite direction to the pulse electrode. If in this case the part of the anode that is in the direction of flight of the ions is also designed to be permeable to the ions, the collected ions can be extracted from the ion storage space in the opposite direction to the pulse electrode by a repulsive electrostatic interaction. In such a case, the pulse electrode can be designed to be impermeable to the ions and drives the positive ions out through the body of the anode.
  • Fig.3 shows the process of ion generation and storage in a series of process steps A to D.
  • the electron source 1 is inactive.
  • the anode 2 is at a positive potential V AN , which is essentially location-independent and constant over the cross section of the anode in its interior ion storage space 4.
  • state B the electron source 1 is activated.
  • the emitted electrons penetrate the anode and form a negative space charge cloud 3, particularly in the ion storage space 4.
  • the potential within the anode takes on a location-dependent value.
  • a potential well with a local potential minimum V min is formed in the central area of the space charge cloud and thus also of the ion storage space.
  • State C takes into account the impact ionization of the gas particles present in the ion storage space 4 due to the influence of the emitted electrons.
  • the positively charged ions are moved to the local minimum of the potential in the ion storage space and accumulate within the negative space charge cloud. Due to the attractive potential well, the ions are kept within the ionization volume, cannot collide with the electrodes surrounding the ionization space and are neutralized.
  • the potential is equalized over time, the depth of the local potential minimum within the ion storage space decreases and the potential minimum becomes increasingly flatter.
  • state D the potential minimum is filled by the positive ions.
  • the negative space charge of the electrons is completely compensated by the positive accumulated ions.
  • a relationship is now established as was the case in state A: an essentially location-independent constant electrostatic potential inside the anode.
  • the ions stored there can now be accelerated towards the pulse electrode under the attractive influence of the now activated pulse electrode 8 and released to the outside as an ion packet.
  • the pulse electrode is switched from the anode potential V AN to a more negative potential, whereby the generated ions are withdrawn from the ion storage space.
  • state B is again assumed, in which there is an empty, unfilled potential minimum within the ion storage space and which can be filled again and emptied of the ions stored there by passing through states C and D again.
  • This cyclic operation thus makes it possible to generate ion packets or ion pulses, i.e. spatially limited ion accumulations.
  • the time from state B to complete space charge compensation in state D is referred to below as the filling time.
  • the storage capacity of the ion source results from the positive ion charge stored in state D.
  • FIGS. 4a and 4b show a representation of the pulse electrode 8 with a pulse grid 5 incorporated therein.
  • a sheet metal disk serves as the basis for the pulse electrode 8.
  • a hexagonal honeycomb structure 10 is incorporated into the inner surface of the sheet metal disk, in particular cut into it by means of laser radiation, which has a diameter D PG . This increases the permeability of the pulse grid and ensures sufficient shielding from external fields.
  • the pulse electrode can be electrically contacted via metallic leads.
  • the pulse electrode can thus be activated via an external circuit
  • V Puls of a pulse generator (not shown here), which are required to extract the accumulated ions, are also transmitted to the pulse electrode.
  • Fig. 4b shows a detailed view of an example of a grid structure of the pulse grid 5.
  • the grid structure 10 consists of hexagonal openings 11 arranged in a honeycomb pattern, which are separated from one another by webs 12.
  • the geometric dimensions of the grid structure of the pulse grid are chosen in such a way that the extraction of the ions from the anode space is as loss-free as possible, with optimal shielding from external fields.
  • Corresponding transmission losses, which arise because ions neutralize themselves at the grid webs, can be minimized by appropriate dimensioning of the web width S and the mesh width G of the hexagonal openings 11.
  • the schematic structure of the cylindrically symmetrical arrangement of the ion source and the time-of-flight spectroscopic device shown essentially consists of three components. These components are the ion source, consisting of the electron source 1, the anode 2 and the pulse electrode 8. A repeller 13 is also provided and, as a second component, a time-of-flight (TOF) mass separator 14 connected to the ion source with a detector unit as the third component, which is designed here as a Faraday cup 15.
  • TOF time-of-flight
  • Electrons are released from the ring-shaped filament of the electron source by thermal emission, which are guided into the anode chamber inside due to the attractive potential of the anode. Then, collisions between the electrons and the neutral residual gas particles create positive Ions which, as mentioned, can be accumulated in the anode to a certain extent.
  • the pulse electrode By switching the pulse electrode to a potential V Pulse that is attractive to the ions, the accumulated ions are drawn out of the anode. This creates a potential that is attractive to the positive ions, which extracts and accelerates the collected ions into the time-of-flight mass separator. In this, the ions are separated from one another according to their mass using the principle of TOF mass spectroscopy.
  • temporally separated signals can be detected at the detector, which here is designed in the form of a Faraday cup 15.
  • time-of-flight mass separation is that it makes it possible to record an entire mass spectrum with one and the same detector using a single ion pulse.
  • the time t TOF required for the ions to travel a given distance S TOF between the release of the ion pulse and their impact on the detector is measured. Because all ions have the same charge and the accelerating potential is the same for all ions, it can be assumed that all ions have the same kinetic energy. More massive ions will travel at a lower speed than less massive ions and will therefore arrive at the detector later, i.e. after the less massive ions. After time-resolved detection on the Faraday cup, a mass is assigned to the respective flight times and a conclusion is drawn about the residual gas composition prevailing in the vacuum chamber.
  • the time-of-flight mass separator separates light ions from heavier ones. Since light ions are accelerated more strongly, they reach the Faraday cup at an earlier point in time. Individual peaks become visible at the Faraday cup depending on the time of detection. If individual masses differ sufficiently, the corresponding signals are shown separately in time in the spectrum, otherwise they will partially overlap.
  • the sum of the entire temporal signal of an ion pulse at the detector provides information about the total pressure within the chamber, while the analysis of the individual signal peaks allows a conclusion about the respective partial pressure.
  • the following section will provide a theoretical characterization of the ion source. To this end, the next sections will provide a computational estimate of selected characteristic variables, such as the field distribution within the anode, the storage capacity or the ion current and the resulting pressure-dependent filling time.
  • the electrons are, as already explained, directed into the anode due to the potential that is attractive to them. Here they cause a potential minimum due to negative space charge effects, which distorts the initially constant potential.
  • the negative space charge is simplified below as an electron density with a given radius r 0.
  • the field distribution in the presence of the electron density is divided into two areas.
  • the first area is formed by the space within the electron density with the radius r ⁇ r 0
  • the potential distribution V (r) for these two areas can be described as Dependence on r. For a given distance r AN the potential can be calculated in Fig.6 shown graphically.
  • the potential which depends on the radius r, can be approximately represented by the following curve:
  • V r V AT ⁇ V e ⁇ 2 ln r AT r + 1 ⁇ r 2 r 0 2
  • V r V AT ⁇ 2 V e ⁇ ln r AT r
  • the depth of the potential minimum is strongly dependent on the radius of the electron density.
  • the focusing electrodes 6 are indicated schematically. If the focusing electrode 6 is placed at a potential less than or equal to the potential of the electron source 1, the electrons emerging from the electron source 1 are focused in the direction of the anode.
  • N e m e 2 e 3 ⁇ ⁇ L ⁇ I e V e
  • the storage capacity N+ of the storage ion sources depends on the emission current I e .
  • the space charge density increases, which means that more ions can be stored in the negative space charge potential.
  • the electron current generated by the electron source 1 is a minimum of 1 ⁇ A and a maximum of 15 mA, in particular a minimum of 5 ⁇ A and a maximum of 2mA.
  • the heating power required to generate these emission currents is sufficiently low to cause only a small input of power and heat into the entire arrangement and the adjacent vacuum chamber.
  • the generated charge quantities of Q + ⁇ 2.0 ⁇ 10 -12 C are sufficiently high to be detected by simple detectors (e.g. Faraday cup type) with sufficient signal-to-noise ratio.
  • Fig.8 that when the acceleration voltage is increased from 70 V to 130 V, the storage capacity is reduced because the faster electrons generate a smaller negative space charge.
  • a charge of approx. 10 -14 C to 10 -11 C can be stored.
  • the filling time ie the time in which the negative electron space charge is completely compensated by stored ions, depends on the prevailing total pressure in the vacuum chamber. If the collection time t collection is varied, ie the time in which the ion collection process takes place unhindered, a signal dependent on this collection time will be generated, which will increase accordingly with the progress of t collection until the filling time t fill is reached, as in Fig.10 shown.
  • the filling time t fill also depends on the prevailing pressure p, since at higher pressures there are correspondingly more neutral gas particles which can fill the potential minimum more quickly after ionization.
  • p 1 > p 2 a decreasing filling time t fill , 1 ⁇ t fill , 2 can be observed, whereby the qualitative course of these curves will be similar.
  • the maximum number of ions released during a pulse depends only very weakly on the pressure. This is because the storage capacity of the ion source is determined exclusively by the depth of the potential formed by the negative space charge. As shown in the experimental data from Fig. 13 As can be seen, the maximum storable charge changes by about half while the pressure is varied by about 3 decades from about 5E-6 mbar to about 5E-9 mbar. Furthermore, the change in the storable charge decreases with decreasing pressure. This enables the ion source to be used over a very wide pressure range without a significant loss of measurement sensitivity.
  • the pulse electrode By switching the pulse electrode from the anode potential to a negative extraction potential, for example, the electric field within the anode is manipulated in such a way that the collected ions are accelerated out of the ionization volume and detected at the Faraday cup. If the pulse electrode is switched back to the anode potential, the original state is restored: electrons create a potential minimum in which ions are generated and The length of time that ions are collected until they are extracted by switching the pulse electrode is the collection time.
  • Fig. 13 It can be seen that the required collection time to generate e.g. 25 nVs signal at the detector is less than 1 ms for pressures p ⁇ 1E-7 mbar This device is therefore suitable for use as a "fast" total pressure sensor for detecting rapid pressure changes with response times ⁇ 1 ms.
  • Fig. 14 As shown, it is possible to separate the helium signal from the other residual gas components in time. Therefore, it is possible to use the total pressure sensor simultaneously as a helium detector, which also enables a helium leak test.
  • the measured values in Fig. 14 The underlying flight distance is only 2 cm, so that the sensor is very compact.
  • the device discussed here is highly compact, provides reliable total pressure determination and helium mass separation.
  • the dimensions of the sensor correspond to those of a conventional ionization vacuum gauge.

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Claims (14)

  1. Dispositif de génération, de stockage et de libération d'ions à partir d'une atmosphère de gaz résiduel,
    comprenant
    une source d'électrons (1) destinée à libérer des électrons,
    une anode (2) perméable aux électrons libérés par la source d'électrons (1), avec une distribution de charge d'espace négative (3) formée par les électrons à l'intérieur d'un espace de stockage d'ions (4) entouré au moins partiellement par l'anode (2), et
    une électrode à impulsions (8) isolée électriquement de l'anode (2) pour extraire les ions de l'espace de stockage,
    dans lequel
    aucune autre électrode ne se trouve à l'intérieur de l'espace de stockage d'ions (4), et
    exclusivement en raison de la distribution de charge d'espace négative, générée par les électrons, l'espace de stockage d'ions (4) présente une distribution spatiale du potentiel, attractive pour les ions générés par l'ionisation de l'atmosphère de gaz résiduel, et stocke des ions, et
    l'anode (2) et l'électrode à impulsions (8) sont à un même potentiel pendant l'opération de stockage,
    grâce à la charge d'espace négative, les particules de gaz résiduel peuvent être ionisées en permettant de former un potentiel attractif pour les ions positifs formés, la charge d'espace négative formant une zone de stockage pour les ions générés,
    comprenant un moyen pour réguler l'intervalle de temps, défini entre des opérations de commutation successives de l'électrode à impulsions, à une intensité prédéterminée fixe du paquet d'ions libéré mesuré.
  2. Dispositif selon la revendication 1,
    caractérisé en ce que
    pendant l'opération de stockage, la distribution de charge d'espace négative forme un puits de potentiel par rapport au potentiel de l'anode et de l'électrode à impulsions, qui, lorsque la distribution de charge d'espace négative n'est pas compensée par des ions, a un effet attractif sur les ions dans le volume d'ionisation, et forme une barrière de sortie électrostatique pour les ions dans toutes les directions, permettant ainsi le stockage des ions jusqu'à la compensation de la charge d'espace négative.
  3. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    pour l'extraction des ions, l'électrode à impulsions (8) peut être commutée à un potentiel négatif par rapport à l'anode, ce qui permet d'extraire les ions collectés au moins partiellement en direction de l'électrode à impulsions.
  4. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    la fréquence de commutation de l'électrode à impulsions (8) est au minimum de 0,1 Hz et au maximum de 1 MHz, en particulier au minimum de 1 Hz et au maximum de 100 kHz.
  5. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    le flux d'électrons généré par la source d'électrons (1) est au minimum de 1 µA et au maximum de 15 mA, en particulier au minimum de 5 µA et au maximum de 2 mA.
  6. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    la source d'électrons (1) est conçue comme une cathode incandescente, entourant l'anode (2) perméable aux électrons, sous la forme d'un filament annulaire (9).
  7. Dispositif selon la revendication 1,
    caractérisé en ce que
    il est prévu un agencement électrostatique qui entoure la source d'électrons (1) et qui est constitué d'électrodes de focalisation (6) et/ou d'un élément répulsif (13) pour une orientation et une mise en forme supplémentaires de l'émission d'électrons.
  8. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    l'anode (2) perméable aux électrons émis présente une structure à symétrie cylindrique.
  9. Dispositif selon l'une des revendications précédentes,
    caractérisé en ce que
    il est prévu un détecteur disposé dans la direction de vol des ions pour mesurer le flux ionique.
  10. Procédé de génération, de stockage et de libération pulsée d'ions à partir d'une atmosphère de gaz résiduel, comprenant les étapes de procédé consistant à :
    - émettre des électrons à partir d'une source d'électrons (1) et les accélérer en direction de l'espace d'ionisation (4) à travers l'ensemble anodique perméable (2),
    - générer un nuage de charge d'espace négatif à l'intérieur de l'espace d'ionisation en raison des électrons se déplaçant à travers l'espace d'ionisation (4),
    - appliquer l'ensemble anodique (2) et une électrode à impulsions (8) à un même potentiel pendant l'opération de stockage,
    - ioniser par impact des molécules de gaz et/ou des atomes de gaz à l'intérieur de l'espace d'ionisation (4) et stocker les ions générés chargés positivement dans le potentiel attractif du nuage de charge d'espace chargé négativement, à titre de réserve d'ions chargée positivement,
    - commuter l'électrode à impulsions (8) à un potentiel par rapport au potentiel de l'anode et accélérer la réserve d'ions, se trouvant au potentiel du nuage de charge d'espace, hors de l'espace d'ionisation,
    - extraire au moins une partie de la réserve d'ions stockée sous la forme d'un paquet d'ions,
    dans lequel on procède à une détermination d'une pression totale, où l'intervalle de temps entre des opérations de commutation successives de l'électrode à impulsions est régulé sur une intensité prédéterminée fixe du paquet d'ions libéré mesuré, l'intervalle de temps entre des opérations de commutation successives de l'électrode à impulsions étant une mesure de la pression totale à mesurer.
  11. Procédé selon la revendication 10,
    caractérisé en ce que
    l'émission des électrons de la source d'électrons s'effectue à partir d'une cathode incandescente qui entoure de manière annulaire l'ensemble anodique transmissif,
    les électrons dans le champ de l'ensemble anodique transmissif sont accélérés, passent plusieurs fois par l'anode et formant le nuage de charge d'espace négatif dans l'espace d'ionisation (4).
  12. Procédé selon l'une des revendications 10 ou 11,
    caractérisé en ce que
    la charge électrique du paquet d'ions libéré est ajustée sur un intervalle de temps entre des opérations de commutation successives de l'électrode à impulsions, la charge électrique du paquet d'ions étant proportionnelle à la longueur de l'intervalle de temps.
  13. Utilisation d'un dispositif de génération, de stockage et de libération d'ions à partir d'une atmosphère de gaz résiduel selon la revendication 1 et d'un procédé selon la revendication 10 pour déterminer une pression totale.
  14. Utilisation d'un dispositif selon la revendication 13 à titre de détecteur d'hélium, où un signal d'hélium est séparé des autres composants du gaz résiduel et est détecté.
EP17726938.8A 2016-06-07 2017-05-31 Génération non magnétique d'impulsions d'ions Active EP3465732B1 (fr)

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DE102016110495.7A DE102016110495B4 (de) 2016-06-07 2016-06-07 Vorrichtung und Verfahren zum Erzeugen, Speichern und Freisetzen von Ionen aus einer umgebenden Restgasatmosphäre
PCT/EP2017/063084 WO2017211627A1 (fr) 2016-06-07 2017-05-31 Génération non magnétique d'impulsions d'ions

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US10928265B2 (en) 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
RU2717352C1 (ru) * 2019-07-30 2020-03-23 федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский ядерный университет "МИФИ" (НИЯУ МИФИ) Способ охлаждения ионов
US10948456B1 (en) 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source

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WO2017211627A1 (fr) 2017-12-14
DE102016110495A1 (de) 2017-12-07
EP3465732A1 (fr) 2019-04-10
EP3465732C0 (fr) 2024-06-05
PL3465732T3 (pl) 2024-10-07

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