EP3523825A4 - 3d-halbleiterbauelement und struktur damit - Google Patents
3d-halbleiterbauelement und struktur damit Download PDFInfo
- Publication number
- EP3523825A4 EP3523825A4 EP17859869.4A EP17859869A EP3523825A4 EP 3523825 A4 EP3523825 A4 EP 3523825A4 EP 17859869 A EP17859869 A EP 17859869A EP 3523825 A4 EP3523825 A4 EP 3523825A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor component
- semiconductor
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
Applications Claiming Priority (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662406376P | 2016-10-10 | 2016-10-10 | |
| US201662432575P | 2016-12-11 | 2016-12-11 | |
| US201662440720P | 2016-12-30 | 2016-12-30 | |
| US201762457838P | 2017-02-11 | 2017-02-11 | |
| US201762460989P | 2017-02-20 | 2017-02-20 | |
| US201762471963P | 2017-03-16 | 2017-03-16 | |
| US201762480529P | 2017-04-02 | 2017-04-02 | |
| US201762484398P | 2017-04-12 | 2017-04-12 | |
| US201762488821P | 2017-04-23 | 2017-04-23 | |
| US201762517152P | 2017-06-08 | 2017-06-08 | |
| US201762530173P | 2017-07-08 | 2017-07-08 | |
| US201762535265P | 2017-07-21 | 2017-07-21 | |
| US201762549952P | 2017-08-24 | 2017-08-24 | |
| PCT/US2017/052359 WO2018071143A2 (en) | 2016-10-10 | 2017-09-19 | 3d semiconductor device and structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP3523825A2 EP3523825A2 (de) | 2019-08-14 |
| EP3523825A4 true EP3523825A4 (de) | 2020-09-09 |
Family
ID=61905833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP17859869.4A Pending EP3523825A4 (de) | 2016-10-10 | 2017-09-19 | 3d-halbleiterbauelement und struktur damit |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP3523825A4 (de) |
| CN (1) | CN109952643B (de) |
| WO (1) | WO2018071143A2 (de) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019060798A1 (en) * | 2017-09-24 | 2019-03-28 | Monolithic 3D Inc. | 3D SEMICONDUCTOR DEVICE, STRUCTURE AND METHODS |
| US10839872B2 (en) * | 2018-07-03 | 2020-11-17 | Ememory Technology Inc. | Random bit cell using an initial state of a latch to generate a random bit |
| US10847236B2 (en) * | 2018-10-17 | 2020-11-24 | Ememory Technology Inc. | Memory cell with a sensing control circuit |
| KR102683652B1 (ko) * | 2018-11-09 | 2024-07-11 | 에스케이하이닉스 주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
| US10861722B2 (en) * | 2018-11-13 | 2020-12-08 | Applied Materials, Inc. | Integrated semiconductor processing |
| US10741535B1 (en) | 2019-02-14 | 2020-08-11 | Sandisk Technologies Llc | Bonded assembly containing multiple memory dies sharing peripheral circuitry on a support die and methods for making the same |
| WO2020172799A1 (en) | 2019-02-26 | 2020-09-03 | Yangtze Memory Technologies Co., Ltd. | Three-dimensional memory device and method for forming the same |
| JP7328344B2 (ja) * | 2019-04-30 | 2023-08-16 | 長江存儲科技有限責任公司 | 三次元メモリデバイス |
| CN110530969B (zh) * | 2019-08-14 | 2021-05-25 | 江苏大学 | 一种基于掺杂金属原子的石墨烯谐振式气体传感器的制备工艺 |
| CN113451269B (zh) | 2020-03-25 | 2022-07-22 | 长鑫存储技术有限公司 | 字线结构和半导体存储器 |
| US11856781B2 (en) * | 2020-07-22 | 2023-12-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Three-dimensional memory device and method |
| US11704271B2 (en) * | 2020-08-20 | 2023-07-18 | Alibaba Group Holding Limited | Scalable system-in-package architectures |
| US11232824B1 (en) | 2020-12-11 | 2022-01-25 | International Business Machines Corporation | Non-volatile analog resistive memory cells implementing ferroelectric select transistors |
| CN112687522B (zh) * | 2020-12-24 | 2024-08-30 | 上海集成电路研发中心有限公司 | 一种非晶锗硅薄膜结构、集成结构以及制造方法 |
| US11545220B2 (en) * | 2020-12-29 | 2023-01-03 | Micron Technology, Inc. | Split-gate memory cells |
| EP4024222A1 (de) | 2021-01-04 | 2022-07-06 | Imec VZW | Integrierte schaltung mit 3d-partitionierung |
| CN112768366B (zh) * | 2021-01-22 | 2024-02-23 | 长江存储科技有限责任公司 | 半导体结构及其制备方法 |
| KR20220150552A (ko) * | 2021-05-04 | 2022-11-11 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치 및 이의 동작 방법 |
| CN113782461B (zh) * | 2021-08-20 | 2024-04-09 | 长江存储科技有限责任公司 | 半导体结构的测试方法以及测试样品 |
| JP2023041280A (ja) * | 2021-09-13 | 2023-03-24 | キオクシア株式会社 | 記憶装置 |
| KR20230085675A (ko) * | 2021-12-07 | 2023-06-14 | 삼성전자주식회사 | 반도체 메모리 장치 및 이의 제조 방법 |
| US12150310B2 (en) | 2022-08-16 | 2024-11-19 | International Business Machines Corporation | Ferroelectric random-access memory cell |
| WO2025050067A1 (en) * | 2023-08-31 | 2025-03-06 | Strong Force Vcn Portfolio 2019, Llc | Systems, methods, kits, and apparatuses for specialized chips for robotic intelligence layers |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120182801A1 (en) * | 2011-01-19 | 2012-07-19 | Macronix International Co., Ltd. | Memory Architecture of 3D NOR Array |
| US20150340366A1 (en) * | 2014-05-21 | 2015-11-26 | Joon-Sung LIM | Semiconductor devices including a peripheral circuit region and first and second memory regions, and related programming methods |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7291878B2 (en) * | 2003-06-03 | 2007-11-06 | Hitachi Global Storage Technologies Netherlands B.V. | Ultra low-cost solid-state memory |
| DE102007008530B4 (de) * | 2007-02-21 | 2015-11-12 | Infineon Technologies Ag | Verfahren zum Herstellen einer nichtflüchtigen Speichervorrichtung, nichtflüchtige Speichervorrichtung, Speicherkarte mit einer nichtflüchtigen Speichervorrichtung und elektrisches Gerät mit einer Speicherkarte |
| US7897431B2 (en) * | 2008-02-01 | 2011-03-01 | Promos Technologies, Inc. | Stacked semiconductor device and method |
| US7983065B2 (en) * | 2009-04-08 | 2011-07-19 | Sandisk 3D Llc | Three-dimensional array of re-programmable non-volatile memory elements having vertical bit lines |
| US8754533B2 (en) * | 2009-04-14 | 2014-06-17 | Monolithic 3D Inc. | Monolithic three-dimensional semiconductor device and structure |
| US8581349B1 (en) * | 2011-05-02 | 2013-11-12 | Monolithic 3D Inc. | 3D memory semiconductor device and structure |
| WO2012015550A2 (en) * | 2010-07-30 | 2012-02-02 | Monolithic 3D, Inc. | Semiconductor device and structure |
| US8724393B2 (en) * | 2011-05-02 | 2014-05-13 | Macronix International Co., Ltd. | Thermally assisted flash memory with diode strapping |
| US8574929B1 (en) * | 2012-11-16 | 2013-11-05 | Monolithic 3D Inc. | Method to form a 3D semiconductor device and structure |
| US9691760B2 (en) * | 2013-03-12 | 2017-06-27 | Monolithic 3D Inc | Semiconductor device and structure |
| US9023688B1 (en) * | 2013-06-09 | 2015-05-05 | Monolithic 3D Inc. | Method of processing a semiconductor device |
| US9099538B2 (en) * | 2013-09-17 | 2015-08-04 | Macronix International Co., Ltd. | Conductor with a plurality of vertical extensions for a 3D device |
| US9568940B2 (en) * | 2013-12-05 | 2017-02-14 | International Business Machines Corporation | Multiple active vertically aligned cores for three-dimensional chip stack |
| KR102275540B1 (ko) * | 2014-12-18 | 2021-07-13 | 삼성전자주식회사 | 가변 저항 메모리 소자 |
-
2017
- 2017-09-19 EP EP17859869.4A patent/EP3523825A4/de active Pending
- 2017-09-19 WO PCT/US2017/052359 patent/WO2018071143A2/en not_active Ceased
- 2017-09-19 CN CN201780061048.5A patent/CN109952643B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120182801A1 (en) * | 2011-01-19 | 2012-07-19 | Macronix International Co., Ltd. | Memory Architecture of 3D NOR Array |
| US20150340366A1 (en) * | 2014-05-21 | 2015-11-26 | Joon-Sung LIM | Semiconductor devices including a peripheral circuit region and first and second memory regions, and related programming methods |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109952643A (zh) | 2019-06-28 |
| CN109952643B (zh) | 2024-05-31 |
| WO2018071143A3 (en) | 2018-07-26 |
| WO2018071143A2 (en) | 2018-04-19 |
| EP3523825A2 (de) | 2019-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
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| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
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| 17P | Request for examination filed |
Effective date: 20190508 |
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| AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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| AX | Request for extension of the european patent |
Extension state: BA ME |
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| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) | ||
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20200812 |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 27/11 20060101ALI20200806BHEP Ipc: H01L 21/8238 20060101ALI20200806BHEP Ipc: H01L 27/108 20060101ALI20200806BHEP Ipc: H01L 27/06 20060101AFI20200806BHEP Ipc: H01L 27/11551 20170101ALI20200806BHEP |