EP3648144A1 - Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv - Google Patents

Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv Download PDF

Info

Publication number
EP3648144A1
EP3648144A1 EP18204298.6A EP18204298A EP3648144A1 EP 3648144 A1 EP3648144 A1 EP 3648144A1 EP 18204298 A EP18204298 A EP 18204298A EP 3648144 A1 EP3648144 A1 EP 3648144A1
Authority
EP
European Patent Office
Prior art keywords
excimer lamp
electrode
vuv
fluorescent coating
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18204298.6A
Other languages
German (de)
English (en)
Inventor
Manfred Salvermoser
Nicole Brüggemann
Reiner FIETZEK
Ralf Fiekens
Uwe KANIGOWSKI
André WOJCIECHOWSKI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xylem Europe GmbH
Original Assignee
Xylem Europe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xylem Europe GmbH filed Critical Xylem Europe GmbH
Priority to EP18204298.6A priority Critical patent/EP3648144A1/fr
Priority to PCT/EP2019/080269 priority patent/WO2020094658A1/fr
Publication of EP3648144A1 publication Critical patent/EP3648144A1/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/42—Devices for influencing the colour or wavelength of the light by transforming the wavelength of the light by luminescence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2261/00—Gas- or vapour-discharge lamps
    • H01J2261/02—Details
    • H01J2261/38—Devices for influencing the colour or wavelength of the light
    • H01J2261/385—Non-chemical aspects of luminescent layers, e.g. thickness profile, shape and distribution of luminescent coatings

Definitions

  • the present invention relates to a VUV excimer lamp according to the preamble of claim 1 and to an excimer lamp system and a photochemical unit comprising such a VUV excimer lamp.
  • Excimer lamps are used for generating high-energy ultraviolet (VUV) radiation.
  • the excimer emission is generated by means of silent electrical discharge in a discharge chamber filled with an excimer-forming gas.
  • the discharge chamber has walls formed from a material transparent to ultraviolet (UV) light.
  • a first electrode is disposed within the chamber.
  • a second electrode is arranged outside of the chamber. Due to the electric field generated between the electrodes a discharge occurs, generating excimer molecules. When these excited molecules return to ground state, high-energy ultraviolet light is emitted.
  • CN 103972040 discloses an excimer lamp for sterilization in a refrigerator.
  • a phosphor layer converts the wavelength of light emitted by the discharge medium into a longer wavelength. By altering the materials of the phosphor layer, light with various wavelengths can be obtained.
  • the phosphor layer being located on the inside of the discharge chamber is subject to the discharge plasma which has a negative effect on the lamps lifetime.
  • Multiple phosphor layers for light conversion are known from prior art, e.g. US 6,734,631 B2 and US 2005/0073239 A1 .
  • VUV excimer lamp with the features listed in claim 1 and by an excimer lamp system and a photochemical unit comprising such a VUV excimer lamp.
  • a VUV excimer lamp comprising a dielectric tube for holding an excimer-forming gas, a first central electrode disposed within said tube and a second electrode arranged outside of said tube, said dielectric tube having a UV fluorescent coating on the outside.
  • VUV Vacuum Ultra-Violet
  • UV-C Ultraviolet C
  • UV-C Ultraviolet C
  • a short wavelength (100-280 nm) radiation which is primarily used for disinfection, inactivating microorganisms by destroying nucleic acids and disrupting their DNA, leaving them unable to perform vital cellular functions.
  • said dielectric tube is made of quartz glass, which is transparent to VUV radiation. It is even more preferred that said dielectric tube is made of synthetic quartz glass, in particular without metal doping.
  • UV fluorescent coating is arranged between the dielectric and the second electrode.
  • said gas consists essentially of Xe.
  • said gas should contain less than about 10 ppm of impurities.
  • the UV fluorescent coating has phosphorus compounds.
  • said UV fluorescent coating is a UV-C fluorescent coating.
  • Photochemical units can be for example UV disinfection units, UV bleaching units, UV curing units, UV enhanced chemical vapor deposition units and the like.
  • Figure 1 shows a side view of an excimer lamp 1 with a first high voltage central electrode (inner electrode) 2 arranged in a discharge chamber formed by a dielectric tube 3.
  • Said first electrode 2 includes an elongated thin wire with an outer diameter of less than 0.5 mm. It was found that the efficiency of the lamp improved with a thin wire electrode.
  • the thin wire electrode 2 shields and absorbs the VUV radiation to a much lower proportion than conventional wider electrodes, which leads to efficiency improvement.
  • said elongated thin wire is substantially straight and defines a straight axis of elongation.
  • the tube has an elongated wall with cylindrical shape and it extends linearly along the axial direction of the lamp body.
  • the wire has preferably a circular cross section.
  • said elongated thin wire has an outer diameter between 0.02 mm and 0.4 mm.
  • the inner electrode has a thickness according to the following equation: (R/ro)/ln(R/ro)> 10, wherein 2*R is the inner diameter of the dielectric tube 3 and 2*ro the outer diameter of the inner electrode 2.
  • Said elongated thin wire inner electrode 2 is tensioned and centered with a spring arranged on one side of the elongated thin wire. This allows to avoid shadow over the length of the lamp compared to an inner electrode helically wound over the full length around a rod and to ensure tensioning of the electrode at high temperature, which allows to keep the coaxial symmetry.
  • the inner electrode 2 is physically connected to each end of the dielectric tube.
  • the dielectric tube 3 is made of a dielectric, which is transparent for UV radiation.
  • the space within the dielectric tube 3, between the high voltage electrode 2 and the dielectric 3 is filled with high purity Xenon gas 5.
  • the water content is smaller than 10 ppm for performance reasons.
  • a second electrode (outer electrode) 4 surrounds the dielectric tube 3.
  • This ground electrode 4 can be formed in different ways.
  • the second electrode 4 is made of a conductive material. For instance, to form the second electrode 4, a tape or a conductive wire made of a metal (e.g., aluminum, copper) may be used.
  • the second electrode 4 is in contact with the outer surface of the dielectric tube 3.
  • the second electrode 4 can include linear electrodes 40,41.
  • the linear electrodes 40,41 are arranged substantially in parallel with each other and they extend along the longitudinal axis of the dielectric tube.
  • the electrodes 4 can be formed in a spiral form on the outer surface of the dielectric tube 3. This configuration allows discharge to be generated uniformly in a circumferential direction of the dielectric tube 3, making it possible to obtain emission with more uniform distribution of brightness.
  • the ground electrode 4 is a mesh or formed by water, which can act with minimal conductivity as electrode with a vessel being grounded.
  • the first and second electrodes 2 and 4 are connected to a driving circuit (not shown).
  • the VUV excimer lamp 1 is used for generation of UV-C radiation for disinfection purpose.
  • glow discharge occurs inside the dielectric tube 3, which excites the discharge medium xenon 5.
  • the discharge medium emits ultraviolet light with a wavelength of 172 nm.
  • the dielectric 3 is coated on the outer surface, with a UV-C fluorescent material 6, e.g. a layer of phosphorus compounds like YP04: Bi.
  • a UV-C fluorescent material 6 e.g. a layer of phosphorus compounds like YP04: Bi.
  • the ultraviolet light passes the dielectric tube 3 and excites a phosphor of the phosphor layer 6.
  • the excited phosphor reemits light in the UV-C range (Stokes shift).
  • the wavelength of the emitted radiation depends on the composition of the phosphorus layer. It can be adapted to the application.
  • the advantage of such an external coating is that the phosphor layer 6 has no contact with the plasma and can't be destroyed by the discharge.
  • a special dielectric sleeve 3 is necessary which is able to resist as well as transmit the VUV radiation to the phosphor.
  • Applicable is for example synthetic quartz, e.g. Suprasil 310, product and trademark of Heraeus Quarzglas GmbH & Co. KG. It is preferred to use a synthetic quartz which has no metal doping.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
EP18204298.6A 2018-11-05 2018-11-05 Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv Withdrawn EP3648144A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18204298.6A EP3648144A1 (fr) 2018-11-05 2018-11-05 Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv
PCT/EP2019/080269 WO2020094658A1 (fr) 2018-11-05 2019-11-05 Lampe à excimère en ultraviolet sous vide avec revêtement fluorescent uv

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18204298.6A EP3648144A1 (fr) 2018-11-05 2018-11-05 Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv

Publications (1)

Publication Number Publication Date
EP3648144A1 true EP3648144A1 (fr) 2020-05-06

Family

ID=64183868

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18204298.6A Withdrawn EP3648144A1 (fr) 2018-11-05 2018-11-05 Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv

Country Status (2)

Country Link
EP (1) EP3648144A1 (fr)
WO (1) WO2020094658A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19942443A1 (de) * 1998-09-07 2000-03-09 Tosoh Corp Für ultraviolette Strahlen durchlässiges, optisches Glasmaterial und Verfahren zu seiner Herstellung
US6343089B1 (en) * 1999-08-25 2002-01-29 College Of William & Mary Microwave-driven ultraviolet light sources
US6734631B2 (en) 2001-06-20 2004-05-11 Koninklijke Philips Electronics N.V. Low-pressure gas discharge lamp with phosphor coating
US20050073239A1 (en) 2003-10-01 2005-04-07 General Electric Company Light sources with nanometer-sized VUV radiation-absorbing phosphors
US20140125217A1 (en) * 2012-11-05 2014-05-08 Industrial Technology Research Institute Dielectric barrier discharge lamp and fabrication method thereof
CN103972040A (zh) 2013-02-06 2014-08-06 优志旺电机株式会社 准分子灯
JP2014182916A (ja) * 2013-03-19 2014-09-29 Ushio Inc 蛍光エキシマランプおよび流体処理装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19942443A1 (de) * 1998-09-07 2000-03-09 Tosoh Corp Für ultraviolette Strahlen durchlässiges, optisches Glasmaterial und Verfahren zu seiner Herstellung
US6343089B1 (en) * 1999-08-25 2002-01-29 College Of William & Mary Microwave-driven ultraviolet light sources
US6734631B2 (en) 2001-06-20 2004-05-11 Koninklijke Philips Electronics N.V. Low-pressure gas discharge lamp with phosphor coating
US20050073239A1 (en) 2003-10-01 2005-04-07 General Electric Company Light sources with nanometer-sized VUV radiation-absorbing phosphors
US20140125217A1 (en) * 2012-11-05 2014-05-08 Industrial Technology Research Institute Dielectric barrier discharge lamp and fabrication method thereof
CN103972040A (zh) 2013-02-06 2014-08-06 优志旺电机株式会社 准分子灯
JP5888256B2 (ja) * 2013-02-06 2016-03-16 ウシオ電機株式会社 エキシマランプ
JP2014182916A (ja) * 2013-03-19 2014-09-29 Ushio Inc 蛍光エキシマランプおよび流体処理装置

Also Published As

Publication number Publication date
WO2020094658A1 (fr) 2020-05-14

Similar Documents

Publication Publication Date Title
US6398970B1 (en) Device for disinfecting water comprising a UV-C gas discharge lamp
CN103959431B (zh) 准分子灯
WO2003075314A1 (fr) Dispositif de production de rayonnement uv
KR102106293B1 (ko) 엑시머 광원
US10453669B2 (en) Electrodeless gas discharge lamps and methods of making the same
US20220076938A1 (en) Vacuum ultraviolet excimer lamp with a thin wire inner electrode
EP3648144A1 (fr) Lampe à excimère ultraviolet à vide avec revêtement fluorescent uv
EP3648145B1 (fr) Lampe à excimère ultraviolette à vide comportant un fil électrode intérieur axialement symétrique
CN101930895A (zh) 带有放电室的介电阻挡放电灯
US20080284335A1 (en) Discharge lamp
KR20190056838A (ko) 자외선 살균 램프 및 자외선 살균 모듈
US10593536B2 (en) UV mercury low-pressure lamp with amalgam deposit
CN1773665A (zh) 闪光放电灯以及光能照射装置
RU2529014C2 (ru) Лампа вакуумная ультрафиолетового диапазона спектра
KR100522331B1 (ko) 자기장 효과를 이용한 무전극 자외선 램프
JP2003040608A (ja) 無声放電式オゾン発生装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20201107