EP3650703B1 - Pompe à vide et procédé de lubrification d'une telle pompe à vide - Google Patents

Pompe à vide et procédé de lubrification d'une telle pompe à vide Download PDF

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Publication number
EP3650703B1
EP3650703B1 EP19210279.6A EP19210279A EP3650703B1 EP 3650703 B1 EP3650703 B1 EP 3650703B1 EP 19210279 A EP19210279 A EP 19210279A EP 3650703 B1 EP3650703 B1 EP 3650703B1
Authority
EP
European Patent Office
Prior art keywords
lubricant
pump
motor
vacuum pump
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19210279.6A
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German (de)
English (en)
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EP3650703A1 (fr
Inventor
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Priority to EP19210279.6A priority Critical patent/EP3650703B1/fr
Publication of EP3650703A1 publication Critical patent/EP3650703A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor

Definitions

  • the present invention relates to a vacuum pump according to the preamble of claim 1 and a method according to the preamble of claim 14.
  • Such vacuum pumps and methods are in US Pat EP 0 451 708 A2 , DE 10 2014 106 315 A1 , U.S. 4,652,214 A and WO 2018/177249 A1 disclosed.
  • an oil supply for the purpose of lubrication leads from the oil tank via bores into the end shields, which delimit the pump chamber in the axial direction.
  • Plain bearings for a rotor shaft of a pump body are introduced into these end shields. These plain bearings are supplied with lubricant via bores due to the negative pressure that occurs in the pump chamber during pumping operation.
  • the shaft is sealed off from the motor with a radial shaft seal.
  • the disadvantage here is that such a radial shaft sealing ring wears out over time and loses its tightness. As a result, lubricating oil, for example, can be lost from a lubricant circuit. This endangers the reliable lubrication of the pump and means a not inconsiderable risk of pollution or contamination for the environment.
  • the invention is based on the idea that a radial shaft sealing ring and generally a seal of the motor against the lubricant can be dispensed with and that the motor is arranged in a space which is directly exposed to the lubricant, namely at least partially, in particular completely, with it during operation , is filled.
  • the wear problems associated with a seal for the motor or a radial shaft sealing ring are thus avoided. These problems are mostly based, in particular in the case of a radial shaft sealing ring, on a dynamic type of seal, namely on a sliding but wear-prone relative movement of a sealing element on a sealing surface.
  • a static seal is preferably provided between the engine compartment and the environment. Static seals typically show significantly less wear than dynamic seals.
  • installation space is also saved, namely at least installation space for the seal.
  • the engine compartment itself can act as a line for the lubricant and thus certain line sections can be dispensed with, which simplifies production and saves installation space.
  • the liquid lubrication can be provided, for example, for the pump body, for a bearing carrying the pump body and / or for a movable conveying element of the pump body, in particular a slide. It can generally preferably be provided that the lubricant is fed to the pump chamber.
  • the lubricant can preferably be oil.
  • the lubricant preferably starting from a supply device, in particular from a lubricant storage space, is guided through the engine compartment to an element to be lubricated.
  • the engine compartment acts like a kind Line between the supply device and the element to be lubricated.
  • the engine compartment can also have a distribution function.
  • the lubricant can, for example, also be guided through the engine compartment to a plurality of elements to be lubricated.
  • the supply device can preferably comprise a lubricant storage space and / or a return.
  • a return can in particular be designed in such a way that at least part of the returned lubricant can be guided through the engine compartment.
  • Elements to be lubricated are in particular the pump body and / or a bearing.
  • a bearing can be provided for the pump body, which is fed and / or supplied with lubricant from the engine compartment.
  • the bearing can preferably be fed directly from the engine compartment, so that preferably no additional lines from the engine compartment to the bearing are necessary.
  • the bearing can be lubricated, for example, in such a way that the lubricant is guided from the engine compartment, in particular directly, through the bearing and into the pump compartment.
  • the bearing can preferably be or comprise a bearing element and / or a sliding bearing. When lubricated, a plain bearing has a particularly high degree of vacuum tightness.
  • the pump body can for example have a rotor body and / or at least one rotary slide valve.
  • the rotor body can, for example, be connected to a rotor shaft and / or formed in one piece.
  • an inlet opening is provided through which a lubricant can enter the pump chamber, the inlet opening preferably being fed with lubricant from the engine compartment.
  • the inlet opening can be spaced from the bearing and / or arranged eccentrically to a rotor shaft.
  • a constriction in particular a nozzle, can be provided at the inlet opening.
  • An inlet opening can preferably be designed as a nozzle.
  • one or more inlet openings can be provided.
  • a first inlet opening can be provided which opens against the pump body, in particular against a rotor body.
  • a first inlet opening can be arranged in such a way that it opens against an end face of the pump body, in particular the rotor body.
  • a first inlet opening can, for example, temporarily open into a guide and / or a recess for a slide, in particular a vacuum pump designed as a rotary slide vacuum pump, during operation.
  • one, in particular a second, inlet opening can be provided which opens into a cavity of the pump chamber and / or into a, in particular closed, delivery volume.
  • One, in particular second, inlet opening can preferably open out on the outer circumference of a rotor or rotor body of the pump body.
  • Lubrication for a bearing and / or for the pump chamber via at least one inlet opening can for example be provided on a side of the pump chamber facing the motor and / or on a side of the pump chamber facing away from the motor.
  • the lubricant can preferably not be passed through the motor chamber, but preferably through a space connected to a bearing, which in particular supplies at least one inlet opening into the pump chamber and / or the bearing with lubricant.
  • a channel is provided which connects the pump chamber and / or the inlet opening to the engine chamber.
  • the channel and / or the inlet opening can be defined, for example, by one or more bores.
  • one or more paths for the lubricant can lead from the engine compartment into the pump compartment.
  • a first path for the lubricant into the pump chamber runs from the engine compartment through a bearing and that a second path for the lubricant from the motor compartment into the pump chamber, in particular through at least one inlet opening, is provided.
  • the second path can preferably have a lower flow resistance than the first path.
  • the second path can in particular have one or more inlet openings.
  • the vacuum pump is designed in such a way that at least essentially all of the air is initially removed from the engine compartment at the beginning of a pumping process.
  • another gas can also be present in the engine compartment and removed accordingly.
  • the air is removed, the engine compartment is filled with lubricant.
  • all of the air can be sucked out of the engine compartment via the pump chamber, in particular via a path via which the lubricant is guided into the pump chamber after the air has been removed. By removing the air, a so-called virtual leak is avoided.
  • a virtual leak refers to an amount of air present in the pump system that can get into the conveying path of the process gas during operation, in particular near the final pressure, and thus worsen the vacuum quality, at least for a short time. In contrast to a "normal" leak, no air penetrates from the environment.
  • a channel between the engine compartment and the pump compartment can, for example, have an upper end which is assigned to the engine compartment and / or which is at a highest Place of the engine compartment is arranged. This is an easy way to avoid a virtual leak. Since air is lighter than the liquid lubricant, this ensures that the air present in the engine compartment is initially discharged from this via the duct. In particular, the air enters the pump chamber and is conveyed to the outlet of the vacuum pump by the pump body.
  • an end of the channel assigned to the engine compartment can be arranged above a rotor shaft and / or above a bearing.
  • An inlet opening into the pump chamber can preferably be arranged below the end of the channel assigned to the motor, in particular at the level of a rotor shaft and / or a bearing.
  • the lubricant can be guided through the engine compartment up to the end of the channel associated with the engine compartment and down through the channel to the inlet opening into the pump chamber.
  • the end of the channel can be defined, for example, by a bore, which in particular runs transversely to a next channel section and / or parallel to a rotor axis.
  • the channel and / or the at least one inlet opening can preferably be defined in a component which carries a bearing element, is a bearing plate, delimits the pump chamber, in particular axially, is a housing component and / or is a structural component.
  • no seal is provided between the motor or the motor compartment and a bearing provided for the pump body.
  • the engine or engine compartment and bearing can preferably be arranged immediately adjacent.
  • a radial shaft sealing ring is provided between the motor and the bearing.
  • no radial shaft sealing ring can be provided between the motor or engine compartment and bearing and / or no radial shaft sealing ring at all.
  • the vacuum pump can be designed to convey the lubricant by negative pressure in the pump chamber relative to a pressure prevailing in a supply device and / or the engine room, in particular through the engine room. At least essentially atmospheric pressure preferably prevails in the engine compartment or in the provision device.
  • An access of the lubricant to the pump chamber is preferably dimensioned so small that the pressure of the engine chamber or the supply device is not communicated directly to the pump chamber, but rather that only an advantageous amount of Lubricant gets into the pump chamber.
  • the vacuum pump can advantageously be designed to circulate a lubricant supply at least twice and / or at most seven times per minute. In this case, only part, in particular approximately half, of the lubricant flow preferably runs through the engine compartment. In particular, another, in particular residual, part of the lubricant flow can be fed to the pump chamber on a side of the pump chamber opposite the motor. In general, on a side of the pump chamber opposite the motor, lubricant can also be supplied to the pump chamber, for example, also through a bearing and / or through at least one inlet opening, which can preferably be designed in accordance with the motor-side bearing or the motor-side inlet openings.
  • the motor forms a direct drive for the pump body.
  • a rotor of the motor can preferably be arranged on a rotor shaft of the vacuum pump which, in particular, is fixedly or integrally connected to the pump body.
  • the motor can be designed as an integrated motor.
  • a rotor of the motor can for example have at least one permanent magnet.
  • a permanent magnet rotor requires little installation space.
  • the engine compartment can be made relatively small as a result, and the vacuum pump is generally compact as a result.
  • the vacuum pump can generally preferably be designed as a rotary displacement vacuum pump, in particular as a rotary vane vacuum pump. Generally preferred, the vacuum pump can be designed in one or two stages.
  • the object of the invention is also achieved by a method for lubricating a vacuum pump with the features mentioned in the independent claim directed thereto. It is understood that the method according to the invention by the described here Features and embodiments of the vacuum pump according to the invention can be advantageously developed.
  • FIG. 1 to 9 show an embodiment of a vacuum pump 10 according to the invention in different views. They show Fig. 1 and 2 Side views and the Figures 3 to 9 Section views with section planes defined in the Fig. 1 , 2 and 3 are indicated.
  • Fig. 10 FIG. 11 shows a greatly simplified diagram of a lubricant supply system for the vacuum pump 10.
  • Fig. 1 shows the vacuum pump 10 in a side view.
  • the vacuum pump 10 is designed as a rotary vane vacuum pump.
  • an inlet 12 a pump housing 14 and a secondary housing 16 are visible.
  • the pump housing 14 includes the pump-active components of the vacuum pump 10.
  • the secondary housing 16 includes, inter alia, a separator 18 for a lubricant of the vacuum pump 10 and a lubricant storage space 20, which is, for example, in Fig. 3 are visible.
  • the pump housing 14 comprises several housing components, in this embodiment three housing components 22, 24 and 26.
  • the housing component 22 closes a pump chamber 28 which, for example, in Fig. 3 is visible, in the axial direction and carries a bearing element 30 for a rotor shaft 32, see e.g. Fig. 4 .
  • the housing component 18 can also be referred to as a pump cover or end shield.
  • the housing component 24 defines the pump chamber 28 and an inlet 12 as well as an outlet 34 of the vacuum pump 10, for example in FIG Fig. 3 is visible.
  • the housing component 24 can also be referred to as a pump chamber body.
  • the housing component 26 forms a housing for a motor 36 of the vacuum pump 10, which is shown in FIG Fig. 4 is visible and defines an engine compartment 38 in which the engine 36 is located.
  • the housing component 26 can also be referred to as a motor housing.
  • the Fig. 3 shows the vacuum pump 10 in a sectional view, the sectional plane in FIG Fig. 2 indicated as line AA.
  • the sectional plane runs perpendicular to the axis of rotation of the rotor shaft 32.
  • a rotor body 40 which is part of the rotor shaft 32, is visible.
  • the rotor body 40 is essentially circular-cylindrical and is arranged eccentrically in the likewise circular-cylindrical pump chamber 28.
  • a plurality of rotary slides 42 which are slidably mounted in corresponding recesses 44, are arranged on the rotor body 40.
  • the slides 42 are not pretensioned (no springs), but rather are only pressed against an inner wall 46 of the pump chamber 28 by centrifugal forces when the rotor rotates.
  • Alternative designs with resilient elements are possible.
  • a respective slide 42 can also be pretensioned against the inner wall 46 of the pump chamber 28.
  • the ejected process gas or the gas to be conveyed is guided into the secondary housing 16 from the outlet 34. There liquid lubricant comes back into the lubricant storage space 20. Lubricant, which is contained as steam in the process gas, is passed through the separator 18 together with the process gas, as a result of which the lubricant is separated and drips into a lubricant collecting space 49. This process is illustrated below using the Fig. 8 and 9 described in more detail.
  • the lubricant is sucked back into the pump chamber 28, which is under negative pressure.
  • the lubricant from the lubricant reservoir 20 first passes into a channel section 48 which is formed in the housing component 24, and from there is guided back through further channels into the pump chamber 28.
  • An inlet opening 50 for the lubricant, which is connected to the channel section 48, is shown in FIG Fig. 3 visible.
  • the other channels mentioned are in Fig. 3 not visible.
  • the channels and the entire lubricant supply system of the vacuum pump 10 are explained in detail below.
  • the Fig. 4 shows the vacuum pump 10 in a further sectional view.
  • the cutting plane is in Fig. 1 indicated as line BB. It runs through an axis of rotation of the rotor shaft 32.
  • the motor 36 of the vacuum pump 10 comprises a stator 52, which preferably has a plurality of windings, and a rotor 54, which preferably has a plurality of permanent magnets. There is a gap 56 between the stator 52 and the rotor 54.
  • the rotor 54 of the motor 36 is firmly connected to the rotor shaft 32, so that an electromagnetic force exerted by the stator 52 on the rotor 54 is transmitted directly to the rotor shaft 32 .
  • the rotor 54 of the motor 36 rotates in an engine compartment 38 during operation.
  • the motor compartment 38 is at least partially filled with lubricant when the vacuum pump 10 is in operation.
  • the rotor 54 rotates in the lubricant and the gap 56 is filled with lubricant.
  • the rotor shaft 32 On the side of the pump chamber 28 facing the motor 36, the rotor shaft 32 is supported by a bearing element 58 which is designed as a slide bearing. On the side of the pump chamber 28 facing away from the motor 36, the rotor shaft 32 is supported by the bearing element 30, which is also designed as a slide bearing.
  • the bearing element 58 is arranged directly adjacent to the rotor 54 of the motor 36 and adjoins the motor compartment 38 with one axial end. This axial end is therefore exposed to the lubricant in the engine compartment 38. As a result of the negative pressure present in the pump chamber 28, lubricant is sucked from the motor chamber 38 through the bearing element 58 into the pump chamber 28. In this way, in particular, continuous lubrication of the bearing element 58 but also of the pump chamber 28, in particular of the rotor body 40, is ensured.
  • Fig. 4 one end of the channel section 48 is visible, which in its entire length in Fig. 3 is visible.
  • the channel section 48 is connected to a further channel section 60 which divides a flow of lubricant arriving through the channel section 48. Part of the lubricant flow, in particular about half, passes through the channel section 60, in Fig. 4 to the right, into the engine compartment 38. The remainder of the lubricant flow goes into Fig. 4 to the left, to a side of the pump chamber 28 facing away from the motor 36. There, the lubricant is guided through a further channel section 62 into a chamber 64, from where, in a manner similar to that described with reference to the bearing element 58, it passes through the bearing element 30 is sucked through into the pump chamber 28.
  • the Fig. 5 shows a further sectional view of the vacuum pump 10, here with a sectional plane along the line CC of FIG Fig. 1 .
  • This sectional plane also runs through the axis of rotation of the rotor shaft 32.
  • a duct section 66 is visible, which is connected to the engine compartment 38 via a path to be explained in more detail.
  • a first inlet opening 68 and a second inlet opening 70 are connected to the channel section 66, through which the lubricant passes from the channel section 66 into the pump chamber 28 and to the rotor body 40 or the rotary valve 42.
  • the channel section 66 is formed by a bore in the housing component 24, which is closed and sealed by a screw 72.
  • the inlet openings 68 and 70 are also formed by bores. These run transversely to the channel section 66.
  • the channel section 66 is formed in a wall 73 of the housing component 24 which axially delimits the pump chamber 28 and which carries the bearing element 58 and the rotor shaft 32.
  • the wall 73 is formed in one piece with the housing component 24 or with a section of the housing component 24 delimiting the pump chamber 28 in the radial direction.
  • a separate design that is to say a separate motor-side bearing plate, would also be possible.
  • the first inlet opening 68 is arranged in such a way that it opens against an end face of the rotor body 40. It thus supplies the area between the end face of the rotor body 40 and an opposite inner wall of the housing component 24 or the pump chamber 28 with lubricant. On the one hand, this ensures good lubrication. On the other hand, the lubricant forms a thin lubricating film between the end face and the opposite inner wall, which forms a seal against leakage of the process gas. A lubricating film in the bearing element 58 has a similar effect.
  • a recess 44 of the rotor body 40 or a slide 42 is repeatedly arranged opposite the first inlet opening 68.
  • the first inlet opening 68 thus opens into the recess 44, which forms a guide for the rotary slide valve 42.
  • the guide or the recess is also advantageously continuously supplied with lubricant.
  • a second inlet opening 70 is arranged at the radial height of the circumference of the rotor body 40 and opens into a cavity of the pump chamber 28.
  • the second inlet opening 70 is used in particular to lubricate the frictional contact between the rotary valve 42 and the inner wall 46 of the pump chamber 28.
  • the second inlet opening 70 is preferably dimensioned in such a way that the lubricant is distributed through them spraying in the pump chamber 28 and over the rotary slide valve 42. In this way, lubrication can be ensured essentially over the entire axial length of the respective rotary valve 42.
  • a channel section 74 is provided in the housing component 22, which has a function similar to that of the channel section 66.
  • the channel section 74 is formed by a bore in the housing component 22 which is closed and sealed by a screw 78.
  • the inlet openings 50 and 76 are also formed by bores, which here run transversely to the channel section 74 or its bore.
  • the channel section 74 is connected to the space 64.
  • one end of the channel section 62 can be seen as it opens into the space 64.
  • Lubricant located in the space 64 is via the channel section 74 and the inlet openings 50, 76 led into the pump chamber 28.
  • the space 64 is supplied with lubricant from the lubricant reservoir 20 via the channel section 62.
  • FIG. 6 A further sectional view of the vacuum pump 10 is shown, the sectional plane along the line in FIG Fig. 2 indicated line DD runs.
  • the cutting plane also runs perpendicular to the axis of rotation of the rotor shaft 32 and in the axial area of the channel section 66, so that it is visible in the longitudinal section.
  • the bores of the inlet openings 68 and 70 extending from the channel section 66 as well as the screw 72 are visible.
  • a further channel section 80 is also visible, which is also designed here as a bore and is closed by a screw 82.
  • the duct section 80 is connected to the duct section 66 and connects it to the engine compartment 38.
  • the duct section 80 is connected to the engine compartment 38 via a further duct section 84.
  • Fig. 7 illustrates, which is a sectional view with the cutting plane according to line EE in Fig. 1 shows.
  • FIG. 8 shows a sectional view of the vacuum pump 10 along the sectional plane FF, which in FIG Fig. 2 is indicated.
  • FIG. 9 shows a sectional view along the cutting plane GG, which in FIG Fig. 3 is indicated.
  • a path of the process gas from the outlet 34 through the secondary housing 16 to the separator 18 is indicated by an arrow 86.
  • the process gas first enters the lubricant storage space 20.
  • Liquid lubricant exiting through the outlet 34 collects directly in the lubricant storage space 20.
  • the lubricant storage space 20 is connected to the engine compartment 38 and the space 64 via the channel section 48.
  • a channel section 88 is visible, which leads to the channel section 48 and, for example, also in FIG Fig. 3 is visible.
  • the process gas is then fed into the separator 18.
  • the separator 18 is designed here as a filter cartridge which, in particular, is exchangeable.
  • The, in particular warm, lubricant mist rises with the process gas into the interior of the separator 18 and condenses there to form drops 90 which penetrate the separator 18. These drip into the lubricant collecting space 49, which in particular is not connected to the lubricant storage space 20 and forms an independent return.
  • a float 92 of a float valve 94 is arranged in the lubricant collecting space 49.
  • the float valve 94 is connected to the pump chamber 28 via a channel section 96.
  • the channel section 96 opens into an inlet area of the pump chamber 28.
  • the channel section 88 and the channel section 48 could also lie in one plane.
  • the pump can in principle also comprise further channel sections, for example for similar or other purposes, which are formed, for example, in at least one of the housing components 22, 24, 26 are.
  • the pump 10 on which the drawings are based has further channel sections which are hidden in the figures for the sake of clarity.
  • FIG. 10 An overview of the lubricant circuit that runs through the lubricant reservoir 20 is provided by the simplified diagram of FIG Fig. 10 , on the basis of which the path of the lubricant through the pump is shown below in a coherent manner.
  • FIG. 10 Reference symbols used correspond to the features as they are in the Figures 1 to 9 were used.
  • a lubricant flow and a circulation of the lubricant is driven by a constantly generated negative pressure in the pump chamber 28 and thus by the pump-active components of the vacuum pump 10.
  • the use of a separate lubricant pump is also possible.
  • the lubricant is guided through a channel section 48 into a channel section 60 in which the lubricant flow is divided.
  • a part, in particular half, of the flow of lubricant is guided into the engine compartment 38 in which the rotor 54 of the engine 36 rotates.
  • the remaining part of the lubricant flow is guided into the space 64 which adjoins the slide bearing 30 on the side of the pump chamber 28 facing away from the motor 36.
  • the engine compartment 38 is therefore filled with lubricant when the vacuum pump 10 is in operation. From the engine compartment 38, the lubricant is guided on the one hand through the bearing element 58 into the pump compartment 28. On the other hand, the lubricant is guided into the pump chamber 28 via channel sections 84, 80, 66 and inlet openings 68 and 70 opening into the pump chamber 28.
  • an end of the channel 84, 80, 66 assigned to the engine compartment 38 is arranged at a highest point of the engine compartment 38. This avoids a virtual leak.
  • the channel section 80 leads down to the channel section 66 or to the inlet openings 68, 70.
  • the engine compartment 38 is in particular not or at least not completely filled with lubricant.
  • a negative pressure is gradually generated in the pump chamber 28.
  • the lubricant is sucked from the lubricant reservoir 20 through the engine compartment 38 into the pump chamber 28.
  • the air is sucked out of the engine compartment 38 and the engine compartment 38 begins to fill with lubricant until this completely fills the engine compartment 38.
  • the flow resistances in the channel 84, 80, 66 on the one hand and the slide bearing 58 on the other hand must be dimensioned accordingly.
  • the flow resistance in the plain bearing 58 is significantly greater than that of the channel 84, 80, 66.
  • the lubricant is guided from the chamber 64 through the bearing element 30 on the one hand and through the channel 74 with its inlet openings 50 and 76 on the other hand into the pump chamber 28.
  • a negative pressure in the pump chamber 28 causes the lubricant to be conveyed by suction.
  • the vacuum pump 10 described here which in particular has an integrated motor 36, dispenses with a radial shaft sealing ring, in particular between motor compartment 38 and pump compartment 28 or bearing element 58.
  • the channel for guiding the lubricant, in particular oil initially leads into the pump compartment body or the housing component 24 and branches from there directly to the lower one Area of the engine compartment 38 and in the direction of the opposite pump cover or bearing plate 22.
  • the motor 36 or the motor compartment 38 is evacuated via this end when the rotor shaft 32 of the pump 10 rotates and lubricant is thus sucked into the motor compartment 38.
  • the lubricant rises in the engine compartment 38 up to the shaft 32 and the slide bearing 58, as a result of which it is supplied with lubricant from the engine side.
  • the lubricant continues to rise to the upper bore or the channel section 84 and from there passes via channel sections 80, 66 or their bores and two inlet openings 68, 70, in particular nozzles, into the pump chamber 28, around the rotor body 40 and the slides 42 there to lubricate.
  • the lubricant comes from the distributor bore, namely the channel section 66, also due to the pressure that is established, via a riser line, namely the channel section 62, to a space 64 upstream of the bearing element 30, which is designed in particular as a slide bearing. From this space 64 leads a similar bore, namely the channel section 74 with two inlet openings 50, 76, in particular nozzles, as on the engine side to the pump chamber 28 the bearing element 30 has passed to reach the pump chamber 28. From there the lubricant is conveyed back by the rotor and slide movement via the outlet 34, namely an exhaust duct, together with the pumped-out process gas via a filter 18 located in the secondary housing 16, which forms a lubricant tank.
  • the size of the channels, bores and inlet openings or nozzles is preferably designed, depending on the size of the pump chamber, so that the lubricant in the lubricant supply is circulated at least 2x and / or not more than 7x per minute at the appropriate speed and the pump is at operating temperature.
  • the motor 36 is designed as a permanent magnet motor and as a result has a relatively small installation space required for a desired output.
  • the engine compartment 38 can be made correspondingly small. This has the advantage that the filling of the engine compartment 38 with lubricant only takes a relatively short time after the pump 10 has been started. This means that complete lubrication of the components to be lubricated is guaranteed particularly early after the start.
  • the gap 56 is completely filled with lubricant during operation.
  • the windings of the stator 52 of the motor 36 are generally preferably separated from the lubricant by a casting compound, in particular epoxy resin.
  • the lubricant is divided by channel sections 48 and 60, which form a distributor for the lubricant, on both axial sides of the pump chamber 28 or between the chamber 64 and the motor chamber 68.
  • the channel sections 48 and 60 or the distributor are arranged in the housing component 24.
  • the lubricant can for example also be guided directly from the lubricant reservoir 20 to the spaces 38 and 64 and in particular not through the housing component 24 or the pump chamber body.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (14)

  1. Pompe à vide (10), en particulier pompe à vide à palettes rotatives, comprenant :
    un compartiment de pompage (28), dans lequel un gaz à transporter peut être transporté depuis une entrée (12) jusqu'à une sortie (34) au moyen d'un corps de pompe (40, 42) ;
    un moteur (36) pour entraîner le corps de pompe (40, 42), le moteur (36) étant disposé dans un compartiment moteur (38) ; et
    un moyen de lubrification par liquide ;
    le moyen de lubrification par liquide étant réalisé de telle sorte que le compartiment moteur (38) est au moins partiellement rempli de lubrifiant pendant le fonctionnement de la pompe à vide (10),
    caractérisée en ce que
    la pompe à vide (10) est réalisée de telle sorte qu'au début d'une opération de pompage, au moins sensiblement la totalité de l'air ou d'un autre gaz est tout d'abord enlevée hors du compartiment moteur (38), et le compartiment moteur (38) est rempli de lubrifiant.
  2. Pompe à vide (10) selon la revendication 1,
    dans laquelle le lubrifiant est mené à partir d'un moyen d'alimentation (20) à travers le compartiment moteur (38) jusqu'à un élément (40, 42, 58) à lubrifier.
  3. Pompe à vide (10) selon la revendication 1 ou 2,
    dans laquelle est prévu un palier (58) pour le corps de pompe (40, 42), qui est alimenté en lubrifiant à partir du compartiment moteur (38).
  4. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle est prévu un orifice d'entrée (68, 70) à travers lequel un lubrifiant peut entrer dans le compartiment de pompage (28), l'orifice d'entrée (68, 70) étant alimenté en lubrifiant à partir du compartiment moteur (38).
  5. Pompe à vide (10) selon la revendication 4,
    dans laquelle est prévu un canal (66, 80, 84) qui relie l'orifice d'entrée (68, 70) au compartiment moteur (38).
  6. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle un premier chemin pour le lubrifiant s'étend depuis le compartiment moteur (38) à travers un palier (58) jusque dans le compartiment de pompage (28), et il est prévu un second chemin (66, 80, 84) pour le lubrifiant depuis le compartiment moteur (38) jusque dans le compartiment de pompage (28), de préférence le second chemin ayant une résistance à l'écoulement inférieure à celle du premier chemin.
  7. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle un canal (66, 80, 84) entre le compartiment moteur (38) et le compartiment de pompage (28) présente une extrémité associée au compartiment moteur (38), qui est située à l'emplacement le plus élevé du compartiment moteur (38).
  8. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle aucun joint d'étanchéité n'est prévu entre le moteur (36) ou le compartiment moteur (38) et un palier (58) prévu pour le corps de pompe.
  9. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la pompe à vide (10) est réalisée pour transporter le lubrifiant par dépression régnant dans le compartiment de pompage (28) par rapport à une pression régnant dans un moyen d'alimentation (20) et/ou dans le compartiment moteur (38).
  10. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la pompe à vide (10) est réalisée pour faire circuler une réserve de lubrifiant au moins deux fois et/ou au plus sept fois par minute.
  11. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle le moteur (36) constitue un entraînement direct pour le corps de pompe (40, 42).
  12. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle un rotor (54) du moteur (36) comprend au moins un aimant permanent.
  13. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la pompe à vide (10) est de conception à un seul étage ou à deux étages.
  14. Procédé de lubrification d'une pompe à vide (10) qui comprend un compartiment de pompage (28) dans lequel un gaz à transporter peut être transporté depuis une entrée (12) jusqu'à une sortie (34) au moyen d'un corps de pompe (40, 42), et un moteur (36) pour entraîner le corps de pompe (40, 42), le moteur (36) étant disposé dans un compartiment moteur (38), dans lequel un lubrifiant liquide est fourni, et
    le compartiment moteur (38) est au moins partiellement rempli de lubrifiant,
    caractérisé en ce que
    au début d'une opération de pompage, au moins sensiblement la totalité de l'air ou d'un autre gaz est tout d'abord enlevée hors du compartiment moteur (38), et le compartiment moteur (38) est rempli de lubrifiant.
EP19210279.6A 2019-11-20 2019-11-20 Pompe à vide et procédé de lubrification d'une telle pompe à vide Active EP3650703B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19210279.6A EP3650703B1 (fr) 2019-11-20 2019-11-20 Pompe à vide et procédé de lubrification d'une telle pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210279.6A EP3650703B1 (fr) 2019-11-20 2019-11-20 Pompe à vide et procédé de lubrification d'une telle pompe à vide

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EP3650703A1 EP3650703A1 (fr) 2020-05-13
EP3650703B1 true EP3650703B1 (fr) 2021-09-22

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3420190A1 (de) * 1984-05-30 1985-12-05 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Oelgedichtete rotationsvakuumpumpe
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
US20140363319A1 (en) * 2013-06-07 2014-12-11 Agilent Technologies, Inc Rotary vane vacuum pump
CN109869312B (zh) * 2017-03-29 2020-11-17 王鸿 抽真空装置及真空设备

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