EP3715326A1 - Réacteur et procédé de production de trichlorosilane - Google Patents

Réacteur et procédé de production de trichlorosilane Download PDF

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Publication number
EP3715326A1
EP3715326A1 EP18878112.4A EP18878112A EP3715326A1 EP 3715326 A1 EP3715326 A1 EP 3715326A1 EP 18878112 A EP18878112 A EP 18878112A EP 3715326 A1 EP3715326 A1 EP 3715326A1
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EP
European Patent Office
Prior art keywords
reactor
header
heat transfer
transfer medium
corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18878112.4A
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German (de)
English (en)
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EP3715326A4 (fr
Inventor
Kenji Hirota
Katsuya OGIHARA
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Tokuyama Corp
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Tokuyama Corp
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Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Publication of EP3715326A1 publication Critical patent/EP3715326A1/fr
Publication of EP3715326A4 publication Critical patent/EP3715326A4/fr
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1836—Heating and cooling the reactor
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00389—Controlling the temperature using electric heating or cooling elements
    • B01J2208/00398—Controlling the temperature using electric heating or cooling elements inside the reactor bed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00796—Details of the reactor or of the particulate material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00796—Details of the reactor or of the particulate material
    • B01J2208/00991—Disengagement zone in fluidised-bed reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00076—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements inside the reactor
    • B01J2219/00081—Tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B01J2219/0286—Steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/025—Apparatus characterised by their chemically-resistant properties characterised by the construction materials of the reactor vessel proper
    • B01J2219/0277—Metal based
    • B01J2219/029—Non-ferrous metals

Definitions

  • the present invention relates to a reactor and a method for producing trichlorosilane.
  • Trichlorosilane is produced by means such as, for example, a fluidized-bed reactor.
  • metal silicon powder and a hydrogen chloride gas which are raw materials for trichlorosilane, are caused to react with each other to produce trichlorosilane.
  • the fluidized-bed reactor is provided with a member for reducing a temperature in the fluidized-bed reactor during a trichlorosilane production reaction.
  • the metal silicon powder is a very hard substance, a portion of the member which portion is in contact with the fluid bed may wear away.
  • Patent Literature 1 discloses a technique of providing a wear preventing means on a surface of the portion that is in contact with the metal silicon powder (in other words, the fluid bed).
  • Patent Literature 1 Japanese Patent Application Publication Tokukai No. 2011-184243
  • stress-corrosion cracking resulting from stress
  • the inventors of the present invention conducted diligent research, and found that the stress-corrosion cracking is preventable by employing a corrosion-resistant material as a material for the header which is not in contact with the metal silicon powder.
  • the present invention includes the following configurations.
  • a reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other including a cooler, the cooler including a plurality of heat transfer medium pipes and a header connected to the plurality of heat transfer medium pipes, the plurality of heat transfer medium pipes being provided in a fluid bed inside the reactor, the header being provided in a freeboard section inside the reactor, the header being comprised of a corrosion-resistant material.
  • the present invention makes it possible to prevent stress-corrosion cracking of a header of a reactor.
  • Fig. 1 is a view schematically illustrating an internal structure of a fluidized-bed reactor in accordance with an embodiment of the present invention.
  • any numerical range expressed as "A to B”, in this specification, means “not less than A and not more than B (between A and B inclusive)", unless otherwise specified.
  • a raw material gas (a hydrogen chloride gas) supplied from a lower part of the reactor causes metal silicon powder to flow, so that a fluid bed is formed.
  • the reactor includes a cooler including (i) a plurality of heat transfer medium pipes and (ii) a header connected to the heat transfer medium pipes.
  • the heat transfer medium pipes of the cooler provided in the reactor are present inside the fluid bed, and the metal silicon powder is in contact with surfaces of the heat transfer medium pipes.
  • those skilled in the art are especially concerned about wearing of a portion of the heat transfer medium pipes which portion is in contact with the fluid bed.
  • the inventors of the present invention found, through their own diligent study, that the following problems may occur inside the fluidized-bed reactor, in addition to wear of the heat transfer medium pipes resulting from being in contact with the metal silicon powder in the fluid bed. That is, the inventors of the present invention obtained the following knowledge: (i) when the fluidized-bed reactor is opened for regular inspection or the like, a hydrochloric acid environment is formed due to moisture in the air; (ii) the hydrochloric acid environment accelerates corrosion of a portion (especially, the header) that is not in contact with the metal silicon powder, not of a portion that is in contact with the metal silicon powder in the fluid bed; and (iii) in a case where production of trichlorosilane is continued in a state where the corrosion of the header has progressed, the corroded portion undergoes stress-corrosion cracking due to thermal stress applied to the corroded portion when a trichlorosilane production reaction increases the temperature in the reactor.
  • the inventors of the present invention found that the stress-corrosion cracking of the header, which occurs as a result of the above-described phenomenon, is preventable by employing a corrosion-resistant material as a material for the header.
  • a reactor in accordance with an embodiment of the present invention is a reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other, including a cooler, the cooler including a plurality of heat transfer medium pipes and a header connected to the plurality of heat transfer medium pipes, the plurality of heat transfer medium pipes being provided in a fluid bed inside the reactor, the header being provided in a freeboard section inside the reactor, the header being comprised of a corrosion-resistant material.
  • a method for producing trichlorosilane in accordance with an embodiment of the present invention is a method for producing trichlorosilane, including the step of producing trichlorosilane with use of the above reactor.
  • Trichlorosilane (SiHCl 3 ) can be produced by causing metal silicon powder and a hydrogen chloride gas (HCI) to react with each other. Trichlorosilane can be produced with use of a fluidized-bed reactor 1.
  • Fig. 1 is a view schematically illustrating an internal structure of the fluidized-bed reactor 1.
  • the fluidized-bed reactor 1 includes a reaction vessel 10, a distributor plate 20, and a cooler 70.
  • the fluidized-bed reactor 1 is configured such that metal silicon powder is supplied into the reaction vessel 10 and that a hydrogen chloride gas, which is to react with the metal silicon powder, is supplied into the reaction vessel 10 through a gas feed opening 101 provided at a bottom part of the reaction vessel 10.
  • the distributor plate 20 is provided within the reaction vessel 10 so as to reside above the gas feed opening 101, and serves to disperse the hydrogen chloride gas supplied into the reaction vessel 10.
  • the fluidized-bed reactor 1 allows the metal silicon powder inside the reaction vessel 10 to react with the hydrogen chloride gas, while allowing the metal silicon powder to flow by the hydrogen chloride gas (an area where this reaction is taking place is hereinafter referred to as "fluid bed 60").
  • Trichlorosilane produced by the reaction between the metal silicon powder and the hydrogen chloride gas is taken out through an outlet 102 of the reaction vessel 10.
  • the cooler 70 includes a plurality of heat transfer medium pipes 30 and a header 40.
  • the plurality of heat transfer medium pipes 30 are provided in parallel to a vertical direction (direction of gravitational force).
  • the header 40 is located in a freeboard section 50, which is an upper space of the reaction vessel 10.
  • the plurality of heat transfer medium pipes 30 are pipes through each of which a heating medium passes.
  • the header 40 is a pipe (that is, a pipe branching into the plurality of heat transfer medium pipes 30) connected to the plurality of heat transfer medium pipes 30.
  • the header 40 distributes a heating medium to the plurality of heat transfer medium pipes 30 so as to let the heating medium circulate in the plurality of heat transfer medium pipes 30.
  • the header 40 communicates with an outside of the reaction vessel 10, and thus is capable of supplying the heating medium to the plurality of heat transfer medium pipes 30 in the reaction vessel 10.
  • the heat transfer medium is passed through an inside of the cooler 70, so that reaction heat resulting from the reaction between the metal silicon powder and the hydrogen chloride gas in the fluid bed 60 is removed.
  • metal silicon powder refers to a solid substance that contains elemental silicon in metal form, such as metallurgical grade silicon, ferrosilicon, or polysilicon. Any of known such materials may be used without any limitation. These kinds of metal silicon powder may contain some impurity(impurities) such as an iron compound. The constituents and amounts of such impurities are not particularly limited. Usually, the metal silicon powder is used in the form of fine powder having an average particle diameter of about 150 ⁇ m to 350 ⁇ m.
  • the hydrogen chloride for use in the foregoing reaction can be any of various kinds of industrially available hydrogen chloride.
  • any of known fluidized-bed reactors can be used without any particular limitation.
  • the use of a fluidized-bed reactor makes it possible to continuously supply metal silicon powder and hydrogen chloride and thereby produce trichlorosilane.
  • the amount of supply of the metal silicon powder and the hydrogen chloride is not particularly limited, provided that the metal silicon powder and the hydrogen chloride can be supplied at a speed that achieves a flow rate at which a fluid bed can form.
  • the shape of the reaction vessel 10 is not particularly limited.
  • a portion, which surrounds the fluid bed 60, of the side wall of the reaction vessel 10 may be (i) shaped such that its cross section perpendicular to a height direction of the reaction vessel 10 is uniform in area (not illustrated) or (ii) may be tapered such that its cross section perpendicular to the height direction of the reaction vessel 10 increases in area in an upward direction ( Fig. 1 ).
  • the side wall may be tapered such that the tapered portion, whose cross section perpendicular to the height direction of the reaction vessel increases in area in the upward direction, occupies at least 80% of a distance from the gas feed opening to a top face of the fluid bed.
  • the side wall surrounding the fluid bed 60 has a shape which is preferably a tapered shape, because this makes it possible to reduce the risk of erosion and to prevent local temperature increases.
  • the temperature at which the foregoing reaction is carried out is selected appropriately in consideration of the material or capacity of the reactor, and the like. Generally, the temperature at which the reaction is carried out is set to fall within the range of from 200°C to 500°C, particularly within the range of from 250°C to 400°C.
  • the cooler 70 includes the plurality of heat transfer medium pipes 30 and the header 40. The following description will further discuss the cooler 70.
  • the plurality of heat transfer medium pipes 30 may be provided so as to be parallel to each other.
  • the number of the plurality of heat transfer medium pipes 30 may be determined as appropriate in accordance with the size of the reaction vessel, and may be 20 to 60, for example.
  • the plurality of heat transfer medium pipes 30 may each be a double pipe.
  • the heat transfer medium is not particularly limited, provided that it is capable of cooling the foregoing reaction heat at a desired cooling rate.
  • the heat transfer medium include nitrogen gas, water, air, and the like.
  • a boiling point of the heat transfer medium is preferably not lower than 300°C, from the viewpoint of reducing a diameter of each of the plurality of heat transfer medium pipes 30.
  • the header 40 is comprised of a corrosion-resistant material. With such a configuration, it is possible to prevent stress-corrosion cracking of the header 40. It is thus possible to provide a method for producing trichlorosilane which method allows continuously conducting a trichlorosilane production reaction without having to consider the risk of stress-corrosion cracking of the header of the cooler 70.
  • corrosion-resistant material refers to a material that has been verified by JIS G0576 "stress corrosion cracking test for stainless steels" or JIS Z 2291 "method for high-temperature gaseous corrosion test of metallic materials” to be less prone to stress-corrosion cracking than stainless steel or to be very highly resistant to oxidation at high temperature.
  • (a member is) comprised of a corrosion-resistant material includes, for example, (i) the member coated with a corrosion-resistant material and (ii) the member produced from a corrosion-resistant material by forging or casting.
  • the corrosion-resistant material preferably contains at least nickel, more preferably contains at least chromium, nickel, and iron. With such a configuration, the cooler 70 (in other words, the header 40) exhibits more excellent corrosion resistance.
  • the amount of each element in 100 wt.% of the corrosion-resistant material are given below.
  • the amount of chromium is preferably 10 wt.% to 25 wt.%, more preferably 14 wt.% to 23 wt.%.
  • the amount of nickel is preferably 50 wt.% to 80 wt.%, more preferably 55 wt.% to 76 wt.%.
  • the amount of iron is preferably 2 wt.% to 10 wt.%, more preferably 3 wt.% to 8 wt.%. Chromium, nickel, and iron may each be an industrially available one.
  • the corrosion-resistant material may be made of chromium, nickel and iron, or may contain an element other than the foregoing elements.
  • the element other than the foregoing elements include molybdenum and tungsten.
  • the amount of molybdenum in 100 wt.% of the corrosion-resistant material is preferably 0 wt.% to 20 wt.%, more preferably 5 wt.% to 17 wt.%.
  • the amount of tungsten is preferably 0 wt.% to 5 wt.%, more preferably 0 wt.% to 4 wt.%.
  • examples of the element other than the foregoing elements include vanadium, carbon, cobalt, niobium, tantalum, copper, and the like.
  • the elements may be mixed in any ratio that allows the header 40 to exhibit excellent corrosion resistance. These elements may each be an industrially available one.
  • the corrosion-resistant material is preferably Hastelloy C22 from the viewpoint of corrosion resistance.
  • Hastelloy C276 contains approximately 57 wt.% of nickel, approximately 16 wt.% of chromium, approximately 16 wt.% of molybdenum, approximately 2.5 wt.% of cobalt, approximately 5.0 wt.% of iron, approximately 4.0 wt.% of tungsten, and approximately 0.01 wt.% of carbon.
  • Hastelloy C22 contains approximately 56 wt.% of nickel, approximately 22 wt.% of chromium, approximately 13 wt.% of molybdenum, approximately 2.5 wt.% of cobalt, approximately 3.0 wt.% of iron, approximately 3.0 wt.% of tungsten, and approximately 0.01 wt.% of carbon.
  • Inconel 625 contains approximately 61 wt.% of nickel, approximately 22 wt.% of chromium, approximately 9 wt.% of molybdenum, approximately 4.2 wt.% of iron, and approximately 0.01 wt.% of carbon.
  • Inconel 600 contains approximately 76 wt.% of nickel, approximately 15 wt.% of chromium, approximately 7.6 wt.% of iron, approximately 0.2 wt.% of copper, and approximately 0.02 wt.% of carbon.
  • each of the plurality of heat transfer medium pipes 30 is not particularly limited, but in consideration of a casting step, it is preferable that each of the plurality of heat transfer medium pipes 30 be made of a material (in other words, a corrosion-resistant material) similar to that of the header 40. With such a configuration, the cooler 70 is obtained through a simple step.
  • the present invention is not limited to the embodiments, but can be altered by a skilled person in the art within the scope of the claims.
  • the present invention also encompasses, in its technical scope, any embodiment derived by combining technical means disclosed in differing embodiments.
  • Example 2 In accordance with a procedure similar to Example 1, except for using heat transfer medium pipes and a header each comprised of stainless steel in place of the heat transfer medium pipes and the header each comprised of Hastelloy C276, whether or not the heat transfer medium pipes and the header had damage was inspected by visual observation.
  • Example 1 no damage (a pattern indicative of permeation) was found on the heat transfer medium pipes and the header. In Comparative Example 1, damage (a pattern indicative of permeation) was observed on the heat transfer medium pipes and the header.
  • the present invention is applicable to production of trichlorosilane in a fluidized-bed reactor.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
EP18878112.4A 2017-11-20 2018-11-16 Réacteur et procédé de production de trichlorosilane Pending EP3715326A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017223142 2017-11-20
PCT/JP2018/042559 WO2019098347A1 (fr) 2017-11-20 2018-11-16 Réacteur et procédé de production de trichlorosilane

Publications (2)

Publication Number Publication Date
EP3715326A1 true EP3715326A1 (fr) 2020-09-30
EP3715326A4 EP3715326A4 (fr) 2021-07-28

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EP18878112.4A Pending EP3715326A4 (fr) 2017-11-20 2018-11-16 Réacteur et procédé de production de trichlorosilane

Country Status (7)

Country Link
US (1) US11241666B2 (fr)
EP (1) EP3715326A4 (fr)
JP (1) JP7179011B2 (fr)
KR (1) KR102597332B1 (fr)
CN (1) CN111225873A (fr)
TW (1) TWI820056B (fr)
WO (1) WO2019098347A1 (fr)

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JP7500378B2 (ja) * 2020-09-30 2024-06-17 高純度シリコン株式会社 トリクロロシランの製造方法
CN115215344B (zh) * 2021-04-15 2023-10-27 新疆硅基新材料创新中心有限公司 一种三氯氢硅的制备方法及制备装置

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JP6287081B2 (ja) 2013-11-06 2018-03-07 三菱マテリアル株式会社 テトラクロロシラン回収方法及び多結晶シリコン製造方法

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US20200306714A1 (en) 2020-10-01
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EP3715326A4 (fr) 2021-07-28
KR20200088286A (ko) 2020-07-22
TWI820056B (zh) 2023-11-01
US11241666B2 (en) 2022-02-08
JPWO2019098347A1 (ja) 2020-12-03
TW201922344A (zh) 2019-06-16
WO2019098347A1 (fr) 2019-05-23

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