EP3735333A1 - Procédé et machine de traitement au laser pour la structuration superficielle de pièces à usiner transparentes au laser - Google Patents

Procédé et machine de traitement au laser pour la structuration superficielle de pièces à usiner transparentes au laser

Info

Publication number
EP3735333A1
EP3735333A1 EP18829785.7A EP18829785A EP3735333A1 EP 3735333 A1 EP3735333 A1 EP 3735333A1 EP 18829785 A EP18829785 A EP 18829785A EP 3735333 A1 EP3735333 A1 EP 3735333A1
Authority
EP
European Patent Office
Prior art keywords
laser
workpiece
ukp
pulse
modification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18829785.7A
Other languages
German (de)
English (en)
Inventor
Sören Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser und Systemtechnik GmbH
Original Assignee
Trumpf Laser und Systemtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser und Systemtechnik GmbH filed Critical Trumpf Laser und Systemtechnik GmbH
Publication of EP3735333A1 publication Critical patent/EP3735333A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz

Definitions

  • the invention relates to a method for producing surface structures on laser-transparent workpieces, in particular of glass or plastic.
  • Ultrashort pulsed (UKP) laser radiation with pulse durations less than 10 ps is increasingly used for material processing.
  • the peculiarity of the material processing with UKP laser radiation lies in the short interaction time of the Laser radiation with the workpiece.
  • the laser welding of laser-transparent glasses by means of ultrashort (UKP) laser pulses enables a stable connection without additional use of material, but is limited by laser-induced transient and permanent voltages.
  • the background is the local melting of the material by means of ultrashort laser pulses. If ultrashort laser pulses are focused into the volume of glass, eg quartz glass, the high intensity present in the focus leads to non-linear absorption processes, as a result of which different material modifications can be induced, depending on the laser parameters.
  • the temperature in the focus area increases from pulse to pulse (so-called heat accumulation) and can lead to local melting. Placing the modification in the interface of two glasses, the cooling melt generates a stable connection of both samples.
  • the present invention has as its object to produce laser-transparent workpieces reproducible stable surface structures, in particular in the form of spherical segments and their derivatives, with a height of a few pm and without additional substructures and specify a suitable machine for this purpose Laserbearbei.
  • This object is achieved by a method for generating surface structures on a laser-transparent workpiece, in particular of glass or plastic, by means of a pulsed laser beam in the form of UKP laser pulses, wherein at least one UKP laser pulse is focused through the workpiece surface into the laser-transparent workpiece in order to piece inside by heating the focus volume fürschmel zen a modification, and wherein the pulse parameters of the at least one UKP laser pulse and the depth of the laser focus in the workpiece are chosen such that the uppermost part of the molten modification just touches the workpiece surface and thermal expansion of the molten modification Workpiece surface is curved outward to a convex surface structure.
  • several UKP laser pulses are focused through the workpiece surface into the laser-transparent workpiece in order to melt a modification in the workpiece by gradually heating the focus volume, wherein the pulse parameters of the plurality of UKP laser pulses and the depth of the laser focus in the workpiece are selected such that the uppermost part of the molten modification just touches the workpiece surface and, by thermal expansion of the molten modification, the workpiece surface is arched outwards to a convex surface structure.
  • a plurality of ultrashort laser pulses with a small temporal pulse spacing are focused into the workpiece interior material; due to non-linear interaction and the heat accumulation of successive laser pulses, the focus volume is heated, and it forms a typically teardrop-shaped modification in the workpiece. If the deposited energy (given by pulse energy, pulse duration, pulse spacing, focusing, wavelength) is selected correctly and the modification is correctly placed, the uppermost part of the modification just touches the workpiece surface. The thermal expansion of the material then causes the surface to bulge outward.
  • the molten material solidifies again. Since the solidification process is significantly faster than the reflow process, the material is frozen at a higher fictitious temperature.
  • This "modification" (about 100 pm high and 10 pm wide, material and process parameter dependent) has slightly different properties than the original bulk material.
  • Within a molten modification there is a radial temperature distribution. Approximately inside very hot (> 2000 ° C) and outside near room temperature. Thus, the temperature also changes the viscosity of the material, that is, the cold outer material is quite tough, while the hot inner material is more fluid. There is also the thermal expansion of the glass with increasing temperature.
  • the volume modification is now placed close to the workpiece surface during the heating process (as described, the modification grows upwards during the process), the thermal expansion of the hot inner material causes the material to bulge outward.
  • the high viscosity prevents all hot material from leaking to the outside.
  • the position of the modification is crucial. If too hot material strikes the workpiece surface, the viscosity (and therefore surface tension) is no longer sufficient to prevent an uncontrolled expansion / explosion of the hot material to the outside. In the uncontrolled explosion, micro-threads form and many different solidification forms. Due to the surface tension, the defined bulge of the material forms a very homogeneous spherical surface with minimal roughness. When solidifying, the condition of the material is frozen.
  • the introduced laser energy is controlled and the depth (z-position) of the laser focus in the material is set so that the uncontrolled expansion / explosion (as in a volcano) does not hit. Rather, the size of the bulge on the surface can be defined very precisely by the z-position of the laser focus for a given number of pulses and pulse energy.
  • the method according to the invention is a transformation of the workpiece material from the volume to a surface structure without additional material is deposited or removed.
  • the solidification process of the molten material leads due to the surface tension to smooth or homogeneous surface structures.
  • the beam cross section of the laser beam focused in the workpiece is shaped according to the desired cross section of the surface structure.
  • a lens with high numerical aperture (NA> 0.1) is used to achieve the necessary high energy densities so that nonlinear absorption mechanisms (multiphoton absorption, feidedionization or tunnel ionization) occur.
  • NA> 0.1 numerical aperture
  • beam shaping elements such as e.g. Cylindrical lenses, a SLM (spatial light modulator) modulator or diffractive optical elements, use to create other modifications in the material and thus other structures on the surface.
  • the laser focus is point or Gaussian or runs linearly perpendicular to the beam axis to melt in the workpiece interior a teardrop-shaped in longitudinal section modification with a spherical top.
  • the plurality of UKP laser pulses may have a constant pulse spacing of, for example, at most 100 ns, preferably at most 50 ns, particularly preferably at most 20 ns, or be focused in the workpiece in the form of laser bursts.
  • each of the laser burst forming UKP laser pulses on a pulse interval (ns range), which is less than the burst spacing (a few ms) between two laser bursts.
  • the molten modification can be stretched and thus surface structure pulled a little further out of the workpiece surface in comparison to constant pulse intervals.
  • a laser burst has at most 10 UKP laser pulses, in particular at most 5 UKP laser pulses, with a pulse spacing of at most 100 ns, preferably at most 50 ns, particularly preferably at most 20 ns.
  • the burst dissipation rate must be high enough to allow heat accumulation in the workpiece.
  • the or the UKP laser pulses have a pulse energy between 0.1 pJ and 100 pJ, preferably between 1 pJ and 20 pJ, more preferably about 10 pJ, on.
  • the laser beam is preferably moved over the workpiece and thereby the laser focus is moved through the workpiece interior.
  • the modifications never be uniform, so for example, a registered line never be equal. Uniform modifications can only be achieved with very homogenous materials such as borosilicate glasses and suitable process monitoring.
  • the workpiece surface is measured between the several UKP laser pulses and the laser beam is switched off or moved on when a bulge height corresponding to the desired surface structure is achieved. Without corresponding sensors, it must first be experimentally determined how much energy is needed for which surface structure.
  • the UKP laser pulses preferably have a pulse duration of less than 50 ps, preferably less than 1 ps, particularly preferably about 500 fs or less.
  • the invention also relates to a laser processing machine for producing surface structures on a laser-transparent workpiece, in particular made of glass or plastic, with a UKP laser for generating a pulsed laser beam in the form of UKP laser pulses, with a focusing unit which detects the laser beam the workpiece is focused, and with a machine control, which is programmed to control the UKP laser and the focusing unit such that in the workpiece interior by stepwise heating of the focus volume, a modification is melted, the upper part of which just touches the workpiece surface.
  • a beam shaping unit for spatial pulse and beam shaping of the UKP laser pulses is arranged, as e.g. a high numerical aperture lens (NA> 0.1), a cylindrical lens, diffractive optical elements or an SLM modulator.
  • NA> 0.1 numerical aperture lens
  • a cylindrical lens diffractive optical elements
  • SLM modulator SLM modulator
  • the laser processing machine has a sensor system connected to the machine control for measuring the workpiece surface, for example, in the form of a distance sensor arranged on a laser processing head, which measures optically or capacitively the distance to the workpiece surface. If one of the desired surface structure corresponding bulge height is reached, the laser beam is switched off or moved on.
  • the laser processing machine may include a scanner for deflecting the laser beam over the workpiece or a moving unit for moving a laser processing head from which the laser beam exits and / or for moving the workpiece.
  • Fig. 1 shows schematically a laser processing machine for generating
  • FIG. 2 shows a longitudinal section through the workpiece with a plurality of surface structures generated along the feed direction of the pulsed laser beam.
  • the laser processing machine 1 shown in FIG. 1 is used to produce surface structures 10 on a laser-transparent workpiece 2
  • the laser processing machine 1 comprises a UKP laser 4 for generating the Laser beam 3 in the form of UKP laser pulses 5 with pulse durations less than 10 ps and preferably in the femtosecond range, a Z-direction vertically movable laser processing head 6 with a lens 7 high numerical aperture (NA> 0.1), from which the laser beam 3 focused in Direction of the workpiece 2 emerges, a movable in the XY direction workpiece table 8, on which the workpiece rests 2, and a machine control 9, which the laser parameters of the UKP laser 4, the Z position of the laser processing head 6 and the XY Movement of the workpiece table 8 controls.
  • a UKP laser 4 for generating the Laser beam 3 in the form of UKP laser pulses 5 with pulse durations less than 10 ps and preferably in the femtosecond range
  • a Z-direction vertically movable laser processing head 6 with a lens 7 high numerical aperture (NA> 0.1) from which the laser beam 3 focused in Direction of the workpiece 2 emerges
  • a plurality of UKP laser pulses 5 are focused through the workpiece surface 11 into the workpiece 2 in order to melt a convex, teardrop-shaped modification 12 having a spherical top side in the workpiece interior by stepwise heating of the focus volume.
  • the pulse parameters (given by pulse energy, number of pulses, pulse duration, time pulse spacing, wavelength, focus) of the plurality of UKP laser pulses 5 and the depth of the laser focus in the workpiece 2 are selected such that the uppermost part of the molten modification 12 just the workpiece surface 11 touched (Fig. 2).
  • the Z position of the laser focus determines how large the diameter of the spherical surface structure 10 is on the workpiece surface 11.
  • the plurality of UKP laser pulses 5 may have a constant pulse spacing or a constant repetition rate or, as the detail B of FIG. 1 shows, grouped into a plurality of laser bursts 13, the one each Laserburst 13 forming UKP laser pulses 5 have a ns-pulse distance, which is thus significantly lower than the ms Burstabstand between two laser bursts 13th
  • the doctrine of laser burst 13 the since such laser burst 13, the prepared the specified 12 can stretch in the Z direction and thereby the surface structure 10 slightly further from the workpiece surface 11 pull out compared to the constant pulse intervals shown in detail A.
  • the burst dissipation rate must be high enough to allow heat accumulation in the workpiece 2. possible.
  • a pulse energy of 10 pJ is required for a burst propagation rate of ⁇ 100 kHz, whereas for a burst propagation rate of 1 MHz, a pulse energy of 1 m ⁇ already suffices. More average power produces a larger melt volume in the workpiece 2.
  • other beamforming units can be arranged for spatial pulse and beam shaping of the UKP laser pulses 5 in the beam path of the laser beam 3, e.g. Cylindrical lenses, diffractive optical elements or an SML modulator to produce other modifications in the material 12 and thus other surface structures 10.
  • the laser beam 3 in the feed direction v is moved continuously over the workpiece 2 and thereby the laser focus is continuously moved through the workpiece interior.
  • the same surface structures 10 can be generated with the same fixed pulse parameters.
  • the workpiece surface 11 may be formed by means of e.g. Sensor system 14 mounted on the laser processing head 6 are measured so that the machine control unit 9 switches off or moves on the laser beam 3 as soon as a bulge height h corresponding to the desired surface structure 10 has been reached.
  • the Oberflä chen Geben 10 can thus be generated in a controlled manner, either via a sequential approach or via an automatic process monitoring.
  • the material could be modified by the area of the intended bulge in such a way that internal stresses are generated which cause the bulge.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un procédé destiné à produire des structures superficielles (10) sur une pièce à usiner (2) transparente au laser, en particulier en verre ou en plastique, selon lequel une ou plusieurs impulsions (5) de laser à impulsions ultracourtes à travers la surface (11) de la pièce à usiner sont concentrées dans la pièce à usiner (2) transparente au laser, pour faire fondre une modification (12) à l'intérieur de la pièce à usiner en chauffant le volume focal, les paramètres d'impulsion de l'impulsion ou des impulsions (5) de laser à impulsions ultracourtes et la profondeur du foyer laser dans la pièce à usiner (2) étant sélectionnés de telle sorte que la partie supérieure de la modification (12) fondue touche justement la surface (11) de la pièce à usiner et que la surface (11) de la pièce à usiner est bombée vers l'extérieur en une structure superficielle (10) convexe par expansion matérielle thermique de la modification (12) fondue.
EP18829785.7A 2018-01-03 2018-12-14 Procédé et machine de traitement au laser pour la structuration superficielle de pièces à usiner transparentes au laser Withdrawn EP3735333A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018200029.8A DE102018200029A1 (de) 2018-01-03 2018-01-03 Verfahren und Laserbearbeitungsmaschine zur Oberflächenstrukturierung lasertransparenter Werkstücke
PCT/EP2018/085007 WO2019134807A1 (fr) 2018-01-03 2018-12-14 Procédé et machine de traitement au laser pour la structuration superficielle de pièces à usiner transparentes au laser

Publications (1)

Publication Number Publication Date
EP3735333A1 true EP3735333A1 (fr) 2020-11-11

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Application Number Title Priority Date Filing Date
EP18829785.7A Withdrawn EP3735333A1 (fr) 2018-01-03 2018-12-14 Procédé et machine de traitement au laser pour la structuration superficielle de pièces à usiner transparentes au laser

Country Status (6)

Country Link
US (1) US20200331100A1 (fr)
EP (1) EP3735333A1 (fr)
KR (1) KR20200103044A (fr)
CN (1) CN111565883B (fr)
DE (1) DE102018200029A1 (fr)
WO (1) WO2019134807A1 (fr)

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US20210024411A1 (en) * 2019-07-26 2021-01-28 Laser Engineering Applications Method for structuring a transparent substrate with a laser in a burst mode
DE102020107944B4 (de) * 2020-03-23 2024-12-19 Rheinische Friedrich-Wilhelms-Universität Bonn Körperschaft des öffentlichen Rechts Verfahren zur Herstellung eines kontinuierlichen diffraktiven optischen Elementes und kontinuierliches diffraktives optisches Element
DE102020119306A1 (de) * 2020-07-22 2022-01-27 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zum Härten eines transparenten Materials
DE102020125679A1 (de) 2020-10-01 2022-04-07 Homag Gmbh Vorrichtung und Verfahren zur Bearbeitung, insbesondere zur Veredelung, von Oberflächen
CN115464258B (zh) * 2022-10-28 2026-02-03 西安工业大学 一种一步制备具有耐久性可修复的超疏水表面方法
DE102022131436A1 (de) 2022-11-28 2024-05-29 TRUMPF Hüttinger GmbH + Co. KG Vorrichtung zur Erzeugung eines Plasmas, Hochtemperaturprozessanlage mit einer solchen Vorrichtung und Verfahren zum Betreiben einer solchen Vorrichtung oder Anlage
DE102023102332A1 (de) * 2023-01-31 2024-08-01 Rheinische Friedrich-Wilhelms-Universität Bonn, Körperschaft des öffentlichen Rechts Verfahren zum Herstellen eines diffraktiven optischen Elementes
WO2024249043A2 (fr) * 2023-06-01 2024-12-05 Corning Incorporated Procédé de modification d'un cte d'un corps en verre à ultra-faible expansion
DE102023114554A1 (de) 2023-06-02 2024-12-05 Lpkf Laser & Electronics Se Verfahren zum Laserschweißen von zumindest zwei Werkstücken mittels eines gepulsten Laserstrahls

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DE102018200029A1 (de) 2019-07-04
US20200331100A1 (en) 2020-10-22

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