EP3742151B1 - Microscope-sonde à balayage - Google Patents

Microscope-sonde à balayage

Info

Publication number
EP3742151B1
EP3742151B1 EP19741730.6A EP19741730A EP3742151B1 EP 3742151 B1 EP3742151 B1 EP 3742151B1 EP 19741730 A EP19741730 A EP 19741730A EP 3742151 B1 EP3742151 B1 EP 3742151B1
Authority
EP
European Patent Office
Prior art keywords
probe
light
pump light
emission
probe light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19741730.6A
Other languages
German (de)
English (en)
Other versions
EP3742151C0 (fr
EP3742151A4 (fr
EP3742151A1 (fr
Inventor
Hidemi Shigekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gtheranostics Co Ltd
Original Assignee
Gtheranostics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gtheranostics Co Ltd filed Critical Gtheranostics Co Ltd
Publication of EP3742151A1 publication Critical patent/EP3742151A1/fr
Publication of EP3742151A4 publication Critical patent/EP3742151A4/fr
Application granted granted Critical
Publication of EP3742151C0 publication Critical patent/EP3742151C0/fr
Publication of EP3742151B1 publication Critical patent/EP3742151B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/636—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Claims (3)

  1. Microscope-sonde à balayage (1 ; 1A), comprenant :
    une unité de sortie de lumière de pompage (2) qui émet une lumière de pompage (21) présentant une première phase spécifiée vers un échantillon (900) et effectue une émission de la lumière de pompage (21) une pluralité de fois pour exciter l'échantillon (900) ;
    une unité de sortie de lumière de sonde (3) qui émet une lumière de sonde (31) présentant une seconde phase spécifiée vers l'échantillon (900) une fois tandis que l'échantillon (900) est excité par une émission unique de la lumière de pompage (21) ; et
    une sonde de balayage (5) qui détecte, à partir de l'échantillon (900), un signal de sonde correspondant à chaque émission unique de la lumière de sonde (31),
    dans lequel l'unité de sortie de lumière de pompage (2) ou l'unité de sortie de lumière de sonde (3) inclut une unité d'ajustement de temps de retard (3A) qui ajuste un temps de retard à partir d'un début de l'émission de la lumière de pompage (21) jusqu'à un début de l'émission de la lumière de sonde (31),
    dans lequel l'unité de sortie de lumière de sonde (3) inclut une unité de modulation (3B) qui est configurée pour moduler la lumière de sonde en commandant la phase d'enveloppe de porteuse (CEP) de la lumière de sonde, et
    dans lequel le microscope-sonde de balayage (1 ; 1A) comprend en outre un détecteur de verrouillage (5A) qui extrait une composante synchronisée avec la lumière de sonde (31) modulée par l'unité de modulation de lumière de sonde (3B) à partir du signal de sonde.
  2. Microscope-sonde à balayage (1 ; 1A) selon la revendication 1,
    dans lequel la lumière de pompage (21) qui est émise en émission unique par l'unité de sortie de lumière de pompage (2) inclut moins d'un cycle d'ondes avec une intensité dominante.
  3. Microscope-sonde à balayage (1; 1A) selon l'une quelconque des revendications 1 à 2 ;
    dans lequel la lumière de sonde (31) qui est émise en émission unique par l'unité d'émission de lumière de sonde (3) inclut moins d'un cycle d'ondes à intensité dominante.
EP19741730.6A 2018-01-19 2019-01-18 Microscope-sonde à balayage Active EP3742151B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018007557 2018-01-19
PCT/JP2019/001480 WO2019142914A1 (fr) 2018-01-19 2019-01-18 Microscope-sonde à balayage

Publications (4)

Publication Number Publication Date
EP3742151A1 EP3742151A1 (fr) 2020-11-25
EP3742151A4 EP3742151A4 (fr) 2021-10-13
EP3742151C0 EP3742151C0 (fr) 2026-05-06
EP3742151B1 true EP3742151B1 (fr) 2026-05-06

Family

ID=67301096

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19741730.6A Active EP3742151B1 (fr) 2018-01-19 2019-01-18 Microscope-sonde à balayage

Country Status (5)

Country Link
US (1) US11320456B2 (fr)
EP (1) EP3742151B1 (fr)
JP (1) JP7129099B2 (fr)
CN (1) CN111656164A (fr)
WO (1) WO2019142914A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020121856A1 (fr) * 2018-12-13 2020-06-18 Ｇセラノスティックス株式会社 Système de sortie optique, système de mesure, système de microscope à effet tunnel à balayage de sonde de pompe optique, dispositif informatique, programme et procédé de calcul

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242615A (ja) * 2005-03-01 2006-09-14 Tokyo Univ Of Agriculture & Technology ポンプ−プローブ測光装置および測光方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5748318A (en) 1996-01-23 1998-05-05 Brown University Research Foundation Optical stress generator and detector
WO2002054046A1 (fr) * 2000-12-28 2002-07-11 Dmitri Olegovich Lapotko Procede et dispositif d'examen phototermique d'irregularites microscopique
JP3796585B2 (ja) * 2001-11-26 2006-07-12 独立行政法人科学技術振興機構 遅延時間変調型フェムト秒時間分解走査プローブ顕微鏡装置
JP3830461B2 (ja) * 2003-05-23 2006-10-04 独立行政法人物質・材料研究機構 固体中の欠陥測定方法および欠陥測定装置
JP4839481B2 (ja) 2006-11-29 2011-12-21 独立行政法人科学技術振興機構 ポンププローブ測定装置及びそれを用いた走査プローブ顕微鏡装置
US7847937B1 (en) * 2007-04-04 2010-12-07 Kla-Tencor Technologies Corporation Optical measurment systems and methods
CN101109703B (zh) * 2007-08-06 2010-04-07 苏州大学 基于4f相位相干成像的泵浦探测方法
CN101952706B (zh) * 2008-01-24 2012-08-29 株式会社岛津制作所 扫描探针显微镜
JP2012007962A (ja) * 2010-06-24 2012-01-12 Nippon Hoso Kyokai <Nhk> 磁気光学特性測定装置および磁気光学特性測定方法
JP5610399B2 (ja) * 2011-08-02 2014-10-22 独立行政法人科学技術振興機構 ポンププローブ測定装置
WO2013145020A1 (fr) 2012-03-30 2013-10-03 株式会社日立製作所 Dispositif spectroscopique dans le domaine temporel et système d'analyse spectroscopique dans le domaine temporel
JP2014006450A (ja) * 2012-06-26 2014-01-16 Olympus Corp 超解像顕微鏡及び顕微鏡観察法
CN107036721B (zh) * 2016-11-11 2019-05-31 中国人民解放军国防科学技术大学 太赫兹脉冲时域波形探测方法及系统

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242615A (ja) * 2005-03-01 2006-09-14 Tokyo Univ Of Agriculture & Technology ポンプ−プローブ測光装置および測光方法

Also Published As

Publication number Publication date
EP3742151C0 (fr) 2026-05-06
JP7129099B2 (ja) 2022-09-01
US11320456B2 (en) 2022-05-03
WO2019142914A1 (fr) 2019-07-25
CN111656164A (zh) 2020-09-11
US20210011052A1 (en) 2021-01-14
JPWO2019142914A1 (ja) 2021-03-25
EP3742151A4 (fr) 2021-10-13
EP3742151A1 (fr) 2020-11-25

Similar Documents

Publication Publication Date Title
CN101595379B (zh) 泵浦探针测量装置、扫描探针显微镜装置以及测量装置
US8982451B2 (en) Pump probe measuring device
CN110050193B (zh) 用于化学成像的原子力显微镜的红外光谱方法及装置
JP5270280B2 (ja) 近接場光学顕微鏡の信号光測定システム
JP4631704B2 (ja) 半導体デバイスの電界分布測定方法と装置
JP3796585B2 (ja) 遅延時間変調型フェムト秒時間分解走査プローブ顕微鏡装置
US11320456B2 (en) Scanning probe microscope
JP2020027091A (ja) 測定装置、近接場の測定方法
JP2025173350A (ja) 測定システム、測定方法
JP6243322B2 (ja) 機械振動子測定装置および機械振動子制御装置
WO2022215638A1 (fr) Microscope et procédé d&#39;observation
JP2021193380A (ja) 光出力システム、測定システム、光学的ポンプ・プローブ走査トンネル顕微鏡システム、演算器、プログラム、演算方法
JP2005083849A (ja) 光学装置及び試料測定方法

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20200814

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20210913

RIC1 Information provided on ipc code assigned before grant

Ipc: G01Q 60/12 20100101ALI20210907BHEP

Ipc: G01N 21/17 20060101AFI20210907BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20231222

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20251201

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: CH

Ref legal event code: F10

Free format text: ST27 STATUS EVENT CODE: U-0-0-F10-F00 (AS PROVIDED BY THE NATIONAL OFFICE)

Effective date: 20260506

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602019084542

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

U01 Request for unitary effect filed

Effective date: 20260515

U07 Unitary effect registered

Designated state(s): AT BE BG DE DK EE FI FR IT LT LU LV MT NL PT RO SE SI

Effective date: 20260522