EP3973342A1 - Monture de composant optique et système de commande de faisceau lumineux associé - Google Patents

Monture de composant optique et système de commande de faisceau lumineux associé

Info

Publication number
EP3973342A1
EP3973342A1 EP20726834.3A EP20726834A EP3973342A1 EP 3973342 A1 EP3973342 A1 EP 3973342A1 EP 20726834 A EP20726834 A EP 20726834A EP 3973342 A1 EP3973342 A1 EP 3973342A1
Authority
EP
European Patent Office
Prior art keywords
movable part
optical component
frame
articulation
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20726834.3A
Other languages
German (de)
English (en)
French (fr)
Inventor
François Baratange
Benoît TROPHEME
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amplitude SAS
Original Assignee
Amplitude SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amplitude SAS filed Critical Amplitude SAS
Publication of EP3973342A1 publication Critical patent/EP3973342A1/fr
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Definitions

  • the present invention relates generally to the field of devices or systems for controlling the intensity, color, phase, polarization and / or direction of high power light beams and / or high intensity.
  • the use of high power light beams can cause heating of various optical and / or mechanical components included in certain optical assemblies.
  • This heating can for example come from a phenomenon of absorption of the optical radiation emitted by a laser or from a phenomenon of light scattering on another optical or opto-mechanical component of the assembly.
  • the heating caused can then damage one or more components of the optical assembly and / or modify the alignment of a frame supporting an optical component.
  • cooling circuits can be fixed on fixed mounts.
  • the cooling circuit is in particular composed of pipes and connectors which make it possible to cool the frame supporting the optical components by circulating a heat transfer fluid.
  • Documents WO2004 / 057408, US4674848 and US4657358 describe, for example, optical components provided with such cooling circuits.
  • the present invention provides an adjustable optomechanical frame including a cooling circuit in order to homogenize and control the cooling of the optomechanical frame but also to provide cooling as close as possible to an optical component supported by this mount.
  • an optical component frame comprising a fixed part and a movable part, said frame being designed to support at least one optical component, said fixed part and said movable part being mechanically connected to the one to the other by a flexible articulation adapted to allow movement of the movable part relative to the fixed part.
  • the frame comprises a cooling circuit integrated into the fixed part, the mobile part and the articulation and adapted to allow the circulation of a fluid inside said frame, said cooling circuit comprising an orifice fluid inlet and a fluid outlet port, said fluid inlet port and said fluid outlet port being disposed on said fixed part.
  • flexible articulation is meant here a mechanical connection deformable by bending. This is for example a flexion blade.
  • the flexible articulation does not correspond here to an actuator capable of extending or contracting longitudinally.
  • the cooling circuit is directly integrated into the frame. It therefore does not require the use of connection pipes and connectors internal to the frame, which makes it possible to make the frame compact without risk of tensions on the movable part thereof.
  • the cooling circuit is directly adapted to allow the circulation of the fluid whatever the position of the movable part relative to the fixed part in the frame.
  • optical component frame [0011]
  • the mobile part comprises a support part of the optical component
  • the other articulation allows another rotational movement of the other movable part about another axis of rotation or another translational movement of the other movable part relative to the movable part along another axis of translation,
  • said other axis of rotation is orthogonal to said axis of rotation associated with the rotational movement of said movable part
  • said other movable part comprises another support part of the optical component
  • the fixed part and the movable part comprise a metallic material
  • the fluid circulating inside the cooling circuit comprises water, propylene glycol and / or a gas.
  • the invention also provides a system intended to control a light beam in intensity, wavelength, phase, polarization and / or direction, the system comprising an optical component mount as described according to any one of the modes. of achievement.
  • FIG. 1 is a perspective representation of a first example of an optical component frame according to the invention
  • FIG. 2 is a perspective representation of a second example of an optical component mount according to the invention
  • FIG. 3 is another representation in perspective and by transparency of the second example of the optical component mount according to the invention
  • FIG. 4 is a perspective representation of a third example of an optical component mount according to the invention.
  • FIG. 5 is another perspective representation of the third example of the optical component mount according to the invention.
  • FIG. 6 is another representation in perspective and by transparency of the third example of the optical component mount according to the invention.
  • FIG. 7 is a perspective representation of a fourth example of an optical component mount according to the invention.
  • FIG. 8 is another representation in perspective and by transparency of the fourth example of the optical component mount according to the invention.
  • the present invention relates to a frame 1, 100, 200, 300 of optical component
  • each optical component is mounted on an opto-mechanical mount in order in particular to allow precise arrangement and alignment of each optical component.
  • the optical component mount 1, 100, 200, 300 can be integrated into all types of systems using a light beam, for example for applications in the context of optical frequency conversion, beam shaping, beam transport, intensity, phase, polarization and / or modulation control.
  • the frame 1, 100, 200, 300 is designed to support at least one optical component.
  • the optical component is for example an optical lens or an optical mirror for an application for transporting a light beam or for controlling the direction, focusing or shaping of a light beam.
  • the mount according to the invention can also be used so as to approach the cooling as close as possible to an optical component such as an optical amplifier (for example of type neodymium-doped yttrium and aluminum garnet (Nd: YAG), yttrium and aluminum garnet doped ytterbium (Yb: YAG), neodymium-doped yttrium vanadate (NdYVC)) in the case of generation and amplification optical, or a non-linear optical component (for example a crystal of lithium triborate (UB 3 O 5 or LBO), barium beta-borate (BBO), RTP, KTP) in the case of optical frequency conversion, or an electro-optical component (for example barium beta-borate (B
  • FIG. 1 is a perspective representation of a first embodiment of the frame 1 of an optical component.
  • the frame 1 comprises a fixed part 10 and a movable part 20.
  • movable part is meant here a movable part in rotation or in translation.
  • This mobile part does not correspond to a deformable part, for example deformable longitudinally in extension or in contraction.
  • the articulation 15 is flexible.
  • the articulation 15 is designed to allow the movement of the movable part 20 relative to the fixed part 10.
  • the articulation 15 has the form of two loops not closed on themselves, corresponding to a flexion blade.
  • the loops are here in the form of a portion of a torus around an axis L parallel to the X axis in an orthonormal frame of reference XYZ.
  • the loops have a rectangular section in a plane comprising the L axis, with a height along the X axis greater than their width, taken radially with respect to the X axis.
  • each loop is connected to the fixed part 10 and the other end of each loop is connected to the movable part 320.
  • the loops 15 are deformed by bending or rotation around the axis L.
  • the loops have a higher rigidity and do not deform or only slightly by torsion. Consequently, the movable part 20 is guided in a rotational movement around the axis L.
  • the articulation 15 allows a rotational movement of the movable part 20 about an axis of rotation L (visible in Figure 1).
  • the mobile part 20 is set in motion and therefore performs a rotational movement around the axis of rotation L, for example by adjusting an adjustment screw between the fixed part 10 and the movable part 20.
  • the joint 15 is flexible in rotation around the axis L.
  • the articulation 15 is therefore designed to move the movable part 20 away from or closer to the fixed part 10 according to a rotational movement around the axis of rotation L. In other words, the articulation 15 allows movement allowing the movable part 20 to be inclined relative to the fixed part 10.
  • the frame 1 is therefore made adjustable by the presence of the articulation 15.
  • the movable part 20 comprises a fixing means (not shown in Figure 1)
  • the optical component intended to be fixed on the mobile part 20 is preferably a mirror.
  • the optical component is fixed by bonding to the flat outer face of the mobile part 20. This flat face of the mobile part 20 corresponds to the heat exchange surface with the optical component.
  • the frame 1 further comprises a cooling circuit (not visible in FIG. 1).
  • the cooling circuit is integrated in the frame 1.
  • the cooling circuit is integrated in the fixed part 10, in the mobile part 20 and in the articulation 15.
  • the cooling circuit is adapted to cool the frame 1 in order in particular to prevent heating of the latter and / or of the optical component which it supports. For this, the cooling circuit allows the circulation of a fluid inside the frame 1.
  • This fluid is a heat transfer fluid, for example water, propylene and / or glycol or a gas such as air or helium.
  • cooling comprises an inlet port 32 for fluid and an outlet port 34 for fluid.
  • the fluid inlet port 32 allows the introduction of fluid inside the cooling circuit, therefore inside the frame 1.
  • the fluid outlet port 34 allows the fluid to be extracted from the circuit. cooling, therefore of the frame 1.
  • the fluid inlet port 32 and the fluid outlet port 34 are arranged on the fixed part of the frame 1.
  • connectors 42, respectively 44 are arranged at the level of the fluid inlet 32 and respectively of the fluid outlet 34. These connectors 42, 44 allow for example the connection of the cooling circuit of the frame 1 to pipes allowing the supply and extraction of the fluid.
  • the fixed part 10, the movable part 20 and the joint 15 are made in one piece.
  • the frame 1 is made in one piece.
  • the cooling circuit is made in one piece with all the elements of the frame 1, that is to say it is made in one piece with the fixed part 10, the mobile part 20 intended to form the support of the optical component and the articulation 15.
  • the fluid is injected into the cooling circuit via the fluid inlet port 32.
  • the fluid propagates in the cooling circuit and passes successively through the fixed part 10, one loop of the flexible joint 15, the movable part 20, the other a loop of the flexible joint 15 and the fixed part 10 in direction of the outlet port 34.
  • the fluid is withdrawn from the cooling circuit through the outlet port 34.
  • the fluid circulates through the cooling circuit at a controlled rate.
  • the frame 1 is made from a metallic material.
  • the fixed part is made from a metallic material.
  • the movable part 20 and the joint 15 comprise a metallic material.
  • the metallic material includes, for example, aluminum, copper, titanium or stainless steel.
  • the frame 1 is manufactured by additive manufacturing (or "additive
  • the manufacture of the frame 1 by additive manufacturing makes it possible to produce the frame 1 directly in the desired shape while integrating the cooling circuit.
  • the metal powder used is not fused at any point of the frame. This local partial fusion makes it possible to define the cooling circuit.
  • the powder is then removed after manufacture by blown compressed air in order to create the empty space corresponding to the cooling circuit.
  • the cooling circuit is integrated into the frame 1, it is directly adapted to allow the circulation of the fluid whatever the position of the movable part 20 relative to the fixed part 10.
  • the cooling circuit does not therefore does not require the introduction of pipes in the frame 1 in order to allow the circulation of the fluid.
  • the opto-mechanical frame is therefore more compact.
  • the connection pipes are connected only to the fixed part of the frame, this makes it possible to avoid the application of stresses on the mobile part 20 of the frame 1, and therefore to avoid misalignment of the frame 1. .
  • the manufacture of a block of the frame 1 including the cooling circuit also makes it possible to increase its compactness. As the frame 1 is directly manufactured with the desired characteristics in one piece, this also allows the costs of manufacturing, assembly and storage to be reduced.
  • FIGS. 2 and 3 are perspective representations of a second embodiment of the frame 100 of optical component.
  • FIG. 3 is a perspective representation by transparency of the frame 100, making it possible to schematically represent the interior of the frame 100.
  • the frame 100 comprises the fixed part 110 and the movable part 120. As seen in Figures 2 and 3, the fixed part 110 and the movable part 120 are mechanically connected to each other by the articulation 115
  • the fixed part 110 comprises at least one assembly means 160 making it possible to fix the frame 100 on a support (not shown here). For example, all the elements of the light beam control system are attached to this support.
  • the fixed part 110 here comprises three assembly means 160.
  • the assembly means comprises a fixing tab provided with an opening allowing the insertion of a screw.
  • the joint 115 is flexible.
  • the articulation 115 is designed to allow the angular orientation of the movable part 120 relative to the fixed part 110.
  • the articulation 115 forms a flexion blade.
  • the articulation 115 is here formed by a solid part delimited by two recesses 116, 117 between the fixed part 110 and the movable part 120.
  • the recess 116 is formed in a plane XZ between the fixed part 110 and the part. movable 120.
  • the recess 117 is formed in an XY plane between the fixed part 110 and the movable part 120.
  • the solid part between the fixed part 110 and the movable part 120 extends along the axis X.
  • the joint 115 When a mechanical stress is applied between the fixed part 110 and the movable part 120 , the joint 115 is deformed by bending around the axis Li parallel to the X axis. Around the transverse directions Y and / or Z, the joint 115 has a higher rigidity and does not deform or slightly by torsion . Therefore, the movable part 120 is guided in a rotational movement around the axis Li.
  • the articulation 115 allows a rotational movement of the movable part 120 about an axis of rotation Li (visible in Figures 2 and 3).
  • the movable part 120 is set in motion by applying an actuator between the movable part 120 and the fixed part 110, for example a manual or motorized adjustment screw preferably with a fine pitch, for example a micrometric screw.
  • the joint 115 is flexible.
  • the frame 100 is therefore made adjustable by the presence of the joint 115.
  • adjustment screws (not shown in Figures 2 and 3) can be used to exert a force on the joint 115 and therefore modify an angle. between the mobile part 120 and the fixed part 110.
  • the frame 100 further comprises another movable part 130.
  • This other movable part 130 is mechanically connected to the movable part 120 by another articulation 125.
  • This other articulation 125 is flexible.
  • the other articulation 125 is designed to allow the angular orientation of the other movable part 130 relative to the movable part 120.
  • the other articulation 125 is a flexion blade.
  • the other articulation 125 is here formed by a solid part delimited by a recess 121 between the movable part 120 and the other movable part 130.
  • the recess 121 is formed in a plane XZ between the movable part 120 and the 'other movable part 130.
  • the solid part between the movable part 120 and the other movable part 130 extends along the Z axis.
  • the other joint 125 is deformed by bending around the L axis parallel to the Z axis.
  • the other joint 125 Around the transverse directions X and / or Y, the other joint 125 has a higher rigidity and does not deform or bit by twist. Consequently, the other movable part 130 is guided in a rotational movement around the axis L.
  • the other articulation 125 allows a rotational movement of the other movable part 130 about another axis of rotation L shown in Figures 2 and 3.
  • the axis of rotation U and the other axis of rotation L are orthogonal.
  • the other movable part 130 is set in motion by applying an actuator between the other movable part 130 and the movable part 120, for example an adjustment screw. manual or motorized.
  • the other articulation 125 is also flexible.
  • adjustment screws (not shown in FIGS. 2 and 3) can be used to exert a force on the other joint 125 and therefore set the other mobile part 130 in motion.
  • the frame 100 supporting the optical component is adjustable according to two degrees of freedom in rotation about the axis of rotation Li and the other axis of rotation L.
  • the other mobile part 120 comprises another fixing means (not shown in Figures 2 and 3) for fixing the optical component on the frame 100.
  • the optical component is a mirror, for example fixed by gluing on the flat face 135 of the other mobile part 130.
  • the frame 100 further comprises a cooling circuit 180.
  • This cooling circuit 180 is shown in dotted lines in Figure 3.
  • the cooling circuit 180 is integrated in the frame 100
  • the cooling circuit 180 is integrated in the fixed part 110, in the movable part 120, in the articulation 115, in the other movable part 130 which serves as a support for the optical component and in the other articulation 125.
  • the cooling circuit 180 is adapted to cool the frame 100 in order in particular to prevent the latter from heating up and / or more particularly the optical component that it supports.
  • the cooling circuit 180 allows the circulation of a fluid inside the frame 100 as far as the other movable part 130 whose planar face 135 supports the optical component.
  • This fluid is a heat transfer fluid, for example water.
  • the flat face 135 of the other mobile part 130 corresponds to the heat exchange surface with the optical component.
  • the cooling circuit 180 comprises an inlet port 132 for fluid and an outlet port 134 for fluid.
  • the fluid inlet orifice 132 allows the introduction of fluid inside the cooling circuit 180 and therefore inside the frame 100.
  • the orifice of fluid outlet 134 allows the extraction of the fluid from the cooling circuit 180 and therefore from the mount 100.
  • the fluid inlet 132 and the fluid outlet 134 are arranged on the fixed part 110 of the frame 100.
  • the fluid is injected into the cooling circuit 180 via the fluid inlet port 132.
  • the fluid propagates in the cooling circuit 180 and passes successively through the fixed part 110, the articulation 115, the mobile part 120, the other articulation 125, the other mobile part 130, then again through the another articulation 125, the movable part 120, the articulation 115 and the fixed part 110 in the direction of the outlet port 134.
  • the fluid is extracted from the cooling circuit via the outlet port 134.
  • the fluid circulates through the cooling circuit with controlled flow. Of course, the direction of flow of the fluid can be reversed.
  • the fixed part 110, the movable part 120, the articulation 115, the other movable part 130 and the other articulation 125 are made in one piece.
  • the frame 100 is made in one piece.
  • the cooling circuit 180 is made in one piece with all the elements of the frame 100, that is to say it is made in one piece with the fixed part 110, the mobile part 120, the articulation 115, the other movable part 130 and the other articulation 125.
  • the frame 100 is made from a metallic material.
  • the fixed part 110, the movable part 120, the articulation 115, the other movable part 130 and the other articulation 125 comprise a metallic material.
  • the metallic material includes, for example, aluminum, copper or stainless steel.
  • the frame 100 is manufactured by additive manufacturing.
  • FIG. 4 to 6 are perspective representations of a third embodiment of the frame 200 of optical component.
  • FIG. 4 represents a first perspective view of the frame 200.
  • FIG. 5 represents a second perspective view of the frame 200.
  • FIG. 6 is a perspective representation by transparency of the frame 200, making it possible to represent the circuit diagram schematically. cooling inside the frame 200.
  • the frame 200 comprises the fixed part 210 and the movable part 220. As visible in Figures 4 and 5, the fixed part 210 and the movable part 220 are mechanically connected to each other by the articulation 215 .
  • the fixed part 210 is fixed on a base 250 comprising at least one means
  • the base 250 here comprises three assembly means 260.
  • the assembly means 260 for example comprises legs provided with an opening allowing the insertion of a fixing screw.
  • the joint 215 is flexible.
  • the articulation 215 is designed to allow movement of the movable part 220 relative to the fixed part 210.
  • the articulation 215 comprises two loops corresponding to a flexion blade, in a manner analogous to the articulation 15 described in link with figure 1.
  • the articulation 215 allows a rotational movement of the movable part 220 about an axis of rotation L 3 (visible in Figures 4 to 6).
  • the movable part 220 is oriented angularly by applying for example an actuator between the movable part 220 and the fixed part 210, for example a manual or motorized adjustment screw.
  • the joint 215 is flexible.
  • an adjustment screw 218 is used to exert a force on the joint 215 and therefore to orient the movable part 220 angularly.
  • a return system formed by the joint 215 itself makes it possible to hold the adjustment screw 218. in support.
  • the frame 200 is therefore made adjustable by the presence of the articulation 215.
  • the frame 200 further comprises another movable part 230.
  • This other movable part 230 is mechanically connected to the movable part 220 by another articulation 225.
  • This other articulation 225 is flexible.
  • the other articulation 225 is designed to allow the movement of the other movable part 230 relative to the movable part 220.
  • the other articulation 225 comprises two loops corresponding to a flexion blade.
  • the other articulation 225 allows a rotational movement of the other movable part 230 about another axis of rotation L 4 shown in Figures 4 to 6.
  • the rotational movement of each articulation 215, 225 has here a maximum amplitude of the order of 3 degrees.
  • the axis of rotation L 3 and the other axis of rotation L 4 are orthogonal.
  • the other part mobile 230 is angularly oriented by application of an actuator between the other mobile part 230 and the mobile part 220, for example a manual or motorized adjustment screw.
  • the other articulation 225 is also flexible.
  • another adjustment screw 228 is used to exert a force on the other articulation 225 and therefore to orient the other movable part 230 angularly.
  • Another return system constituted by the other articulation 225 makes it possible to maintain the other screw. adjustment 228 pressing.
  • the frame 200 supporting the optical component is adjustable according to two degrees of freedom in rotation, around the axis of rotation L3 and the other axis rotation L4.
  • the other mobile part 230 comprises an optical component support part
  • the support part is adapted to fix the optical component on the frame 200.
  • the optical component comprises an optical lens which is disposed or fixed in the support part comprising the opening 235 in order to be held in the frame 200.
  • the heat exchange surface is of annular or cylindrical shape with a circular section.
  • the optical component comprises an optical lens system.
  • the opening 235 has a through hole to allow the passage of a light beam by transmission through the optical component held on the movable part 230 of the frame.
  • the frame 200 further comprises a cooling circuit 280.
  • This cooling circuit 280 is shown in Figure 6.
  • the cooling circuit 280 is integrated in the frame 200 In other words, and as can be seen in FIG. 6, the cooling circuit 280 is integrated in the fixed part 210, in the movable part 220, in the joint 215, in the other movable part 230 comprising the support part of the optical component and in the other articulation 225.
  • the cooling circuit 280 is adapted to cool the frame 200 in order in particular to prevent heating of the latter and of the optical component that it supports.
  • the cooling circuit 280 allows the circulation of a fluid 290 inside the frame 200 as far as the support part of the optical component.
  • This fluid 290 is a heat transfer fluid, for example water.
  • the cooling circuit has a total length of the order of 400
  • the section of the cooling circuit around the optical component is oblong in shape with dimensions of the order of 6 mm x 2 mm or 5 mm x 2.5 mm.
  • the cooling circuit 280 comprises a fluid inlet port 232 and a fluid outlet port 234.
  • the fluid inlet 232 allows the introduction of fluid 290 inside the cooling circuit 280 (therefore inside the frame 200).
  • the fluid outlet 234 allows the extraction of the fluid from the cooling circuit 280 and therefore from the frame 200.
  • the fluid inlet 232 and the fluid outlet 234 are arranged on the fixed part 210 of the frame 200.
  • the fluid is injected into the cooling circuit 280 via the orifice d 'fluid inlet 232.
  • the fluid propagates in the cooling circuit 280 and passes successively through the fixed part 210, a loop of the joint 215, the movable part 220, a loop of the other joint 225, the other movable part 230, then through another loop of the other articulation 225, the movable part 220, another loop of the articulation 215 and the fixed part 210 in the direction of the outlet orifice 234.
  • the fluid is extracted from the cooling circuit via the The outlet port 134.
  • the fluid circulates through the cooling circuit at a controlled rate.
  • the flow rate of the fluid 290 in the cooling circuit 280 is in practice limited by the internal circuit.
  • the water flow rate is here for example of the order of 1 L / min. Of course, the direction of flow of the fluid can be reversed
  • the fixed part 210, the movable part 220, the articulation 215, the other movable part 230 and the other articulation 225 are made in one piece.
  • the cooling circuit 280 is made in one piece with all the elements of the frame 200, that is to say it is made in one piece with the fixed part 210, the movable part 220, the articulation 215, the other movable part 230 serving as a support for the optical component and the other articulation 225.
  • the inclusion of the cooling circuit 280 inside the frame 200 therefore allows the efficient cooling of the optical component. through the support part of the optical component inside which the cooling circuit 280 passes.
  • the frame 200 is made from a metallic material.
  • the fixed part 210, the movable part 220, the articulation 215, the other movable part 230 and the other hinge 225 include a metallic material.
  • the metallic material includes, for example, aluminum, titanium, copper or stainless steel.
  • the frame 200 is manufactured by additive manufacturing.
  • FIG. 7 and 8 are perspective representations of a fourth embodiment of the optical component frame 300.
  • FIG. 8 is a perspective view by transparency of the frame 300, making it possible to schematically represent the interior of the frame 300.
  • the frame 300 comprises the fixed part 310 and the movable part 320. As seen in Figures 7 and 8, the fixed part 310 and the movable part 320 are mechanically connected to each other by a flexible articulation.
  • the frame 300 includes four branches 311,
  • each of the branches 311, 312, 313, 314 of the joint is connected to the movable part 320 and to the fixed part 310.
  • the four branches 311, 312, 313, 314 are of elongated shape in the X direction in an orthonormal frame. X Y Z.
  • the branches 311, 312, 313, 314 have a rectangular section, narrower in the Y direction than in the Z direction.
  • each branch 311, 312, 313 , 314 of the joint forms a flexion blade.
  • each branch 313, 314 is connected to the fixed part and the other end of each branch is connected to the moving part 320.
  • the branches 311, 312, 313, 314 are deformed by bending. along the Y axis.
  • the branches In the other X and / or Y directions, the branches have a higher rigidity and do not or little deform. Consequently, the mobile part 320 is guided in a translational movement along the Y axis.
  • the use of the four branches 311, 312, 313, 314 makes it possible to obtain a movement. of pure translation.
  • the flexible joint has two flexion blades, for example the
  • branches 311, 314. The use of these two branches then allows a translational movement along the Y axis and a residual movement along the X axis.
  • the flexible articulation here allows a translational movement of the movable part 320 along a translation axis L 5 (visible in Figures 7 and 8) parallel to the Y axis.
  • the movable part 320 is put in motion by applying an actuator between the movable part 320 and the fixed part 310, for example a manual or motorized adjustment screw, preferably with fine pitch or a micrometric screw.
  • the orifice 360 has a thread, an adjustment screw is screwed into the orifice 360 and bears against a flat face of the mobile part 320.
  • the frame 300 is therefore made adjustable in translation by the presence of the joint.
  • adjustment screws (not shown in FIGS. 7 and 8) can be used to exert a force on the joint and therefore to modify the position of the movable part 320 relative to the fixed part 310 (in translation).
  • the mobile part 320 is here intended to form the support for the optical component.
  • the movable part 320 comprises an opening 325 having a bore with shoulders.
  • the opening 325 is adapted to receive an optical component of mirror, lens or other type.
  • the opening 325 comprises a through hole to allow the passage of a light beam by transmission through the optical component held on the movable part 320 of the frame.
  • the frame 300 As in the embodiments described above, the frame 300
  • cooling circuit 380 further comprises a cooling circuit 380.
  • This cooling circuit 380 is shown in dotted lines in FIG. 8.
  • the cooling circuit 380 is integrated into the frame 300. In other words, and as can be seen in FIG. 8 , the cooling circuit 380 is integrated in the fixed part 310, in the movable part 320 and in each branch 311, 312, 313, 314 of the joint.
  • the cooling circuit 380 is adapted to cool the frame 300 in order in particular to prevent the latter from heating up and more particularly the optical component that it supports.
  • the cooling circuit 380 allows the circulation of a fluid inside the frame 300.
  • This fluid is a heat transfer fluid, for example water.
  • the cooling circuit 380 comprises an inlet port 332 for fluid and an outlet port 334 for fluid.
  • the fluid inlet orifice 332 allows the introduction of fluid inside the cooling circuit 380 and therefore inside the frame 300.
  • the orifice of fluid outlet 334 allows the extraction of the fluid from the cooling circuit 380 and therefore from the mount 300.
  • the fluid inlet port 332 and the fluid outlet port 334 are arranged on the fixed part 310 of the frame 300.
  • the fluid is injected into the cooling circuit 380 via the inlet port 332 fluid.
  • the fluid propagates in the circuit
  • cooling 380 passes successively through the fixed part 310, the first branch 311 of the joint, the movable part 320, the second branch 312 of the joint, the fixed part 310, the third branch 313 of the joint, the movable part 320, the fourth branch 314 of the joint and the fixed part 310 in the direction of the outlet orifice 334.
  • the fluid is extracted from the cooling circuit via the outlet orifice 334.
  • the fluid circulates through the circuit cooling with a controlled flow. Of course, the direction of flow of the fluid can be reversed.
  • the fixed part 310 the mobile part 320 and all the branches 311, 312,
  • the mount 300 is made in one piece.
  • the cooling circuit 380 is made in one piece with all the elements of the frame 300, that is to say that it is made in one piece with the fixed part 310, the mobile part 320 and each joint 315.
  • the frame 300 is made from a metallic material.
  • the fixed part 310, the movable part 320 and each articulation 315 comprise a metallic material.
  • the metallic material includes, for example, aluminum, copper or stainless steel.
  • the frame 300 is manufactured by additive manufacturing.
  • the frame 300 illustrated in Figures 7 and 8 is flexible in translation along a translation axis L 5 .
  • this other articulation is also a flexible articulation allowing another translational movement along another translational axis between the movable part 320 and the other movable part.
  • the other axis of translation is transverse with respect to the axis of translation L 5 .
  • a frame comprising a flexible articulation in rotation, another flexible articulation in translation, the two flexible articulations being arranged in series, and the cooling circuit integrated into the frame.
  • the cooling circuit passes in series via the fluid inlet port 332 inside the fixed part of the frame, the first articulation, the second articulation, the movable part of the frame, then passes back through the second articulation, the first articulation then the fixed part of the frame in the direction of the fluid outlet orifice.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
EP20726834.3A 2019-05-22 2020-05-20 Monture de composant optique et système de commande de faisceau lumineux associé Pending EP3973342A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1905378A FR3096511B1 (fr) 2019-05-22 2019-05-22 Monture de composant optique et système de commande de faisceau lumineux associé
PCT/EP2020/064158 WO2020234402A1 (fr) 2019-05-22 2020-05-20 Monture de composant optique et système de commande de faisceau lumineux associé

Publications (1)

Publication Number Publication Date
EP3973342A1 true EP3973342A1 (fr) 2022-03-30

Family

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Application Number Title Priority Date Filing Date
EP20726834.3A Pending EP3973342A1 (fr) 2019-05-22 2020-05-20 Monture de composant optique et système de commande de faisceau lumineux associé

Country Status (7)

Country Link
US (1) US12204171B2 (ja)
EP (1) EP3973342A1 (ja)
JP (1) JP7543316B2 (ja)
KR (1) KR20220021467A (ja)
CN (1) CN114174882B (ja)
FR (1) FR3096511B1 (ja)
WO (1) WO2020234402A1 (ja)

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Also Published As

Publication number Publication date
CN114174882B (zh) 2024-07-23
KR20220021467A (ko) 2022-02-22
JP2022534002A (ja) 2022-07-27
FR3096511A1 (fr) 2020-11-27
WO2020234402A1 (fr) 2020-11-26
US12204171B2 (en) 2025-01-21
CN114174882A (zh) 2022-03-11
FR3096511B1 (fr) 2021-07-02
JP7543316B2 (ja) 2024-09-02
US20220244489A1 (en) 2022-08-04

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