EP4123182C0 - Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe - Google Patents

Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe

Info

Publication number: EP4123182C0
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; stator; manufacturing; component; stator component
Prior art date: 2022-12-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

EP22210842.5A

Other languages

English (en)

French (fr)

Other versions

EP4123182A1 (de

EP4123182B1 (de

Inventor

Mirko Mekota

Peter Vorwerk

Maximilian Birkenfeld

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum Technology AG

Original Assignee

Pfeiffer Vacuum Technology AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2022-12-01

Filing date

2022-12-01

Publication date

2025-11-05

2022-12-01 Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG

2022-12-01 Priority to EP22210842.5A priority Critical patent/EP4123182B1/de

2023-01-25 Publication of EP4123182A1 publication Critical patent/EP4123182A1/de

2023-09-21 Priority to JP2023154198A priority patent/JP7804628B2/ja

2025-11-05 Application granted granted Critical

2025-11-05 Publication of EP4123182C0 publication Critical patent/EP4123182C0/de

2025-11-05 Publication of EP4123182B1 publication Critical patent/EP4123182B1/de

Status Active legal-status Critical Current

2042-12-01 Anticipated expiration legal-status Critical

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/30—Manufacture with deposition of material

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Thermal Sciences (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP22210842.5A 2022-12-01 2022-12-01 Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe Active EP4123182B1 (de)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
EP22210842.5A EP4123182B1 (de)	2022-12-01	2022-12-01	Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe
JP2023154198A JP7804628B2 (ja)	2022-12-01	2023-09-21	真空ポンプ及び真空ポンプのステータ用のステータ部分を製造する方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP22210842.5A EP4123182B1 (de)	2022-12-01	2022-12-01	Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe

Publications (3)

Publication Number	Publication Date
EP4123182A1 EP4123182A1 (de)	2023-01-25
EP4123182C0 true EP4123182C0 (de)	2025-11-05
EP4123182B1 EP4123182B1 (de)	2025-11-05

Family

ID=84370158

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP22210842.5A Active EP4123182B1 (de)	2022-12-01	2022-12-01	Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe

Country Status (2)

Country	Link
EP (1)	EP4123182B1 (de)
JP (1)	JP7804628B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20250142708A1 (en) *	2023-10-26	2025-05-01	Applied Materials, Inc.	Vacuum Sealed RF Resonator Cavity for LINAC

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0754638Y2 (ja) *	1990-04-24	1995-12-18	三菱重工業株式会社	真空ポンプ
US6095754A (en) *	1998-05-06	2000-08-01	Applied Materials, Inc.	Turbo-Molecular pump with metal matrix composite rotor and stator
FR2845737B1 (fr) *	2002-10-11	2005-01-14	Cit Alcatel	Pompe turbomoleculaire a jupe composite
WO2013065440A1 (ja)	2011-10-31	2013-05-10	エドワーズ株式会社	固定部材及び真空ポンプ
JP6398337B2 (ja) *	2014-06-04	2018-10-03	株式会社島津製作所	ターボ分子ポンプ
DE102015119111A1 (de) *	2015-11-06	2017-05-11	Agilent Technologies, Inc. - A Delaware Corporation -	Turbomolekularpumpe mit einer gegenüber einer Trennoberfläche glatteren Kanaloberfläche
GB2557679A (en) *	2016-12-15	2018-06-27	Edwards Ltd	Stator blade unit for a turbomolecular pump
EP3557073A1 (de) *	2019-03-07	2019-10-23	Pfeiffer Vacuum Gmbh	Vakuumpumpe
GB2588434B (en) *	2019-10-24	2022-08-10	Edwards Ltd	Bearing support and pump

2022
- 2022-12-01 EP EP22210842.5A patent/EP4123182B1/de active Active
2023
- 2023-09-21 JP JP2023154198A patent/JP7804628B2/ja active Active

Also Published As

Publication number	Publication date
JP2024080600A (ja)	2024-06-13
JP7804628B2 (ja)	2026-01-22
EP4123182A1 (de)	2023-01-25
EP4123182B1 (de)	2025-11-05

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2023-04-05	RIN1	Information on inventor provided before grant (corrected)	Inventor name: BIRKENFELD, MAXIMILIAN Inventor name: VORWERK, PETER Inventor name: MEKOTA, MIRKO
2023-05-03	17P	Request for examination filed	Effective date: 20230330
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