EP4150214C0 - Pompe à vide sèche - Google Patents

Pompe à vide sèche

Info

Publication number: EP4150214C0
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; dry vacuum; dry; pump; vacuum
Prior art date: 2020-05-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

EP21725142.0A

Other languages

German (de)

English (en)

Other versions

EP4150214B1 (fr

EP4150214A1 (fr

Inventor

Didier Müller

Théodore Iltchev

Artur Bachmann

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ateliers Busch SA

Original Assignee

Ateliers Busch SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2020-05-11

Filing date

2021-05-10

Publication date

2024-06-12

2021-05-10 Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA

2023-03-22 Publication of EP4150214A1 publication Critical patent/EP4150214A1/fr

2024-06-12 Application granted granted Critical

2024-06-12 Publication of EP4150214B1 publication Critical patent/EP4150214B1/fr

2024-06-12 Publication of EP4150214C0 publication Critical patent/EP4150214C0/fr

Status Active legal-status Critical Current

2041-05-10 Anticipated expiration legal-status Critical

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Applications Or Details Of Rotary Compressors (AREA)
Drying Of Solid Materials (AREA)
Non-Positive Displacement Air Blowers (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

EP21725142.0A 2020-05-11 2021-05-10 Pompe à vide sèche Active EP4150214B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
PCT/EP2020/063009 WO2021228355A1 (fr)	2020-05-11	2020-05-11	Pompe à vide sèche
PCT/EP2021/062383 WO2021228793A1 (fr)	2020-05-11	2021-05-10	Pompe à vide sèche

Publications (3)

Publication Number	Publication Date
EP4150214A1 EP4150214A1 (fr)	2023-03-22
EP4150214B1 EP4150214B1 (fr)	2024-06-12
EP4150214C0 true EP4150214C0 (fr)	2024-06-12

Family

ID=70779685

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP21725142.0A Active EP4150214B1 (fr)	2020-05-11	2021-05-10	Pompe à vide sèche

Country Status (8)

Country	Link
US (1)	US12066023B2 (fr)
EP (1)	EP4150214B1 (fr)
JP (1)	JP7712293B2 (fr)
AU (1)	AU2021269773A1 (fr)
ES (1)	ES2982565T3 (fr)
PL (1)	PL4150214T3 (fr)
TW (1)	TWI886275B (fr)
WO (2)	WO2021228355A1 (fr)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2527725B1 (fr) *	1982-05-26	1987-03-27	Bernard Moteurs	Dispositif d'entrainement synchronise de deux organes rotatifs, notamment des rotors d'un compresseur roots
DE3706588C2 (de) *	1987-02-26	1993-12-02	Mannesmann Ag	Antriebseinrichtung für Rotationskolbenverdichter
JPH05231366A (ja) *	1991-07-09	1993-09-07	Ebara Corp	多段式真空ポンプ装置
JP2000161277A (ja) *	1998-11-27	2000-06-13	Toyota Autom Loom Works Ltd	ポンプ装置
EP1061260A1 (fr)	1999-05-18	2000-12-20	Sterling Fluid Systems (Germany) GmbH	Machine à déplacement positif pour des fluides compressibles
DE10334481A1 (de) *	2003-07-29	2005-03-17	Steffens, Ralf, Dr.	Antrieb einer Spindelvakuumpumpe
US20060120890A1 (en) *	2004-11-30	2006-06-08	David Moorhouse	Drive system for fluid flow device
US7264452B2 (en) *	2004-12-29	2007-09-04	Sbarounis Joaseph A	Rotor position control for rotary machines
DE102006001733A1 (de) *	2006-01-13	2007-07-19	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
JP2008138549A (ja)	2006-11-30	2008-06-19	Anest Iwata Corp	２軸以上の回転軸を配した無給油流体機械本体を有する無給油流体機械
WO2011101064A2 (fr) *	2010-02-18	2011-08-25	Ralf Steffens	Entraînement pour un compresseur à broches
DE102010014218B4 (de) *	2010-04-08	2018-09-13	Netzsch Pumpen & Systeme Gmbh	Drehkolbenpumpe und Verfahren zum Betreiben einer Drehkolbenpumpe
DE202012008133U1 (de)	2012-08-25	2013-11-27	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
CN103277310B (zh)	2012-11-06	2015-11-25	浙江飞越机电有限公司	节能型旋片式真空泵机组
CN202914316U (zh) *	2012-11-29	2013-05-01	张一健	一种低噪声罗茨真空泵
CN103895703A (zh) *	2014-04-02	2014-07-02	广东亿纬赛恩斯新能源系统有限公司	转向与制动复合装置及其对车辆转向与制动的控制方法
JP2016075242A (ja)	2014-10-08	2016-05-12	オリオン機械株式会社	二軸回転ポンプ
DE202017003046U1 (de)	2017-06-09	2018-09-14	Leybold Gmbh	Trockenverdichtende Vakuumpumpe
CN208416927U (zh) *	2018-06-15	2019-01-22	沧州联海化工有限公司	一种便携式罗茨真空泵

2020
- 2020-05-11 WO PCT/EP2020/063009 patent/WO2021228355A1/fr not_active Ceased
2021
- 2021-05-10 JP JP2022562441A patent/JP7712293B2/ja active Active
- 2021-05-10 PL PL21725142.0T patent/PL4150214T3/pl unknown
- 2021-05-10 WO PCT/EP2021/062383 patent/WO2021228793A1/fr not_active Ceased
- 2021-05-10 US US17/914,533 patent/US12066023B2/en active Active
- 2021-05-10 EP EP21725142.0A patent/EP4150214B1/fr active Active
- 2021-05-10 ES ES21725142T patent/ES2982565T3/es active Active
- 2021-05-10 AU AU2021269773A patent/AU2021269773A1/en active Pending
- 2021-05-11 TW TW110116932A patent/TWI886275B/zh active

Also Published As

Publication number	Publication date
CA3173403A1 (fr)	2021-11-18
EP4150214B1 (fr)	2024-06-12
PL4150214T3 (pl)	2024-11-12
EP4150214A1 (fr)	2023-03-22
ES2982565T3 (es)	2024-10-16
JP7712293B2 (ja)	2025-07-23
KR20230005858A (ko)	2023-01-10
TWI886275B (zh)	2025-06-11
BR112022019444A2 (pt)	2022-12-13
JP2023525957A (ja)	2023-06-20
WO2021228355A1 (fr)	2021-11-18
US20230143219A1 (en)	2023-05-11
WO2021228793A1 (fr)	2021-11-18
AU2021269773A1 (en)	2022-10-20
CN115485477A (zh)	2022-12-16
US12066023B2 (en)	2024-08-20
TW202204770A (zh)	2022-02-01

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