EP4168762A4 - Messung der lichtwellenlänge - Google Patents

Messung der lichtwellenlänge Download PDF

Info

Publication number: EP4168762A4
Authority: EP; European Patent Office
Prior art keywords: measuring; light wavelength; wavelength; light
Prior art date: 2020-06-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP20941840.9A

Other languages

English (en)

French (fr)

Other versions

EP4168762B1 (de

EP4168762A1 (de

Inventor

James Keaveney

Geoffrey Gordon Gillett

Chang Liu

Jennifer Ann Joe Erskine

James P. Shaffer

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Quantum Valley Ideas Laboratories

Original Assignee

Quantum Valley Ideas Laboratories

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2020-06-22

Filing date

2020-12-18

Publication date

2023-12-06

2020-12-18 Application filed by Quantum Valley Ideas Laboratories filed Critical Quantum Valley Ideas Laboratories

2023-04-26 Publication of EP4168762A1 publication Critical patent/EP4168762A1/de

2023-12-06 Publication of EP4168762A4 publication Critical patent/EP4168762A4/de

2026-01-28 Application granted granted Critical

2026-01-28 Publication of EP4168762B1 publication Critical patent/EP4168762B1/de

Status Active legal-status Critical Current

2040-12-18 Anticipated expiration legal-status Critical

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0246—Measuring optical wavelength
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
- G01B9/0203—With imaging systems
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0257—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods multiple, e.g. Fabry Perot interferometer
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/028—Types
- G01J2009/0284—Michelson
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/028—Types
- G01J2009/0288—Machzehnder
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/028—Types
- G01J2009/0292—Fizeau; Wedge

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Spectrometry And Color Measurement (AREA)

EP20941840.9A 2020-06-22 2020-12-18 Messung der lichtwellenlänge Active EP4168762B1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US16/907,469 US10948356B1 (en)	2020-06-22	2020-06-22	Measuring wavelength of light
PCT/CA2020/051749 WO2021258184A1 (en)	2020-06-22	2020-12-18	Measuring wavelength of light

Publications (3)

Publication Number	Publication Date
EP4168762A1 EP4168762A1 (de)	2023-04-26
EP4168762A4 true EP4168762A4 (de)	2023-12-06
EP4168762B1 EP4168762B1 (de)	2026-01-28

Family

ID=74870523

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP20941840.9A Active EP4168762B1 (de)	2020-06-22	2020-12-18	Messung der lichtwellenlänge

Country Status (5)

Country	Link
US (1)	US10948356B1 (de)
EP (1)	EP4168762B1 (de)
JP (2)	JP2023524907A (de)
CA (1)	CA3181284C (de)
WO (1)	WO2021258184A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20210349213A1 (en) *	2020-05-05	2021-11-11	Ivan Grudinin	Arbitrary optical waveform generation utilizing frequency discriminators
CN114485962A (zh) *	2020-10-23	2022-05-13	Ii-Iv特拉华股份有限公司	波长参考装置
US11435234B1 (en)	2021-02-10	2022-09-06	Quantum Valley Ideas Laboratories	Increasing the measurement precision of optical instrumentation using Kalman-type filters
CN114323311A (zh) *	2021-08-10	2022-04-12	苏州联讯仪器有限公司	用于波长测量的干涉仪器
CN113503978A (zh) *	2021-08-16	2021-10-15	苏州联讯仪器有限公司	光通信用光波长测量系统
CN115655490B (zh) *	2022-10-13	2025-11-14	华南师范大学	一种大角度斐索干涉仪波长测量装置
CN115356281B (zh) *	2022-10-20	2023-02-07	中国科学院新疆理化技术研究所	一种基于红外宽带光源的混合气体多参量测量方法
CN118655711B (zh) *	2024-08-20	2024-11-05	华翊博奥(北京)量子科技有限公司	波长选择器及单色仪

Citations (5)

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Publication number	Priority date	Publication date	Assignee	Title
DE3730257A1 (de) *	1987-09-09	1989-03-23	Inst Fiz An Bssr	Messgeraet fuer spektralcharakteristiken einer laserstrahlung
EP0570243A1 (de) *	1992-05-15	1993-11-18	Mitsubishi Denki Kabushiki Kaisha	Wellenlängenmessvorrichtung und damit ausgestattete Laservorrichtung
FR2782383A1 (fr) *	1998-08-12	2000-02-18	Commissariat Energie Atomique	Appareil de mesure de la longueur d'onde d'un faisceau lumineux
US6151114A (en) *	1998-03-31	2000-11-21	The Boeing Company	Coherent laser warning system
US20030137672A1 (en) *	2002-01-21	2003-07-24	Masato Moriya	Wavelength detecting apparatus, laser apparatus, and wavelength detecting method

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US4173442A (en) *	1977-05-27	1979-11-06	The United States Of America As Represented By The Secretary Of Commerce	Apparatus and method for determination of wavelength
US4191473A (en) *	1978-01-09	1980-03-04	Hansch Theodor W	Method of and apparatus for measuring the absolute wavelength of a source of unknown frequency radiation
JP2614768B2 (ja) *	1989-08-11	1997-05-28	株式会社小松製作所	波長検出装置
DE4114407A1 (de)	1991-05-03	1992-11-05	Zeiss Carl Fa	Verfahren und anordnung zur bestimmung und fixierung der luftwellenlaenge einer lichtquelle
US5420877A (en)	1993-07-16	1995-05-30	Cymer Laser Technologies	Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby
US5543916A (en) *	1993-10-04	1996-08-06	Science Solutions, Inc.	Interferometer with alignment assembly and with processor for linearizing fringes for determining the wavelength of laser light
DE69907594T2 (de) *	1998-03-11	2003-11-20	Cymer, Inc.	Wellenlängensystem für einen excimerlaser
JP4041230B2 (ja) *	1998-11-02	2008-01-30	株式会社小松製作所	波長検出装置およびレーザ装置における波長検出装置
US6667804B1 (en)	1999-10-12	2003-12-23	Lambda Physik Ag	Temperature compensation method for wavemeters
JP2003254708A (ja) *	2002-03-06	2003-09-10	Mitsutoyo Corp	補正値測定方法
US7333210B2 (en) *	2003-09-26	2008-02-19	Fizeau Electro-Optic Systems, Llc	Method and apparatus for feedback control of tunable laser wavelength
WO2006058423A1 (en) *	2004-11-30	2006-06-08	Opsens Inc.	Birefringent optical temperature sensor and method
US7268887B2 (en) *	2004-12-23	2007-09-11	Corning Incorporated	Overlapping common-path interferometers for two-sided measurement
WO2008030580A2 (en) *	2006-09-07	2008-03-13	4D Technology Corporation	Synchronous frequency-shift mechanism in fizeau interferometer
JP5558768B2 (ja) *	2008-10-24	2014-07-23	キヤノン株式会社	測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法
WO2015123622A1 (en) *	2014-02-14	2015-08-20	Lumense, Inc.	System and method for continuous, real-time monitoring of chemical contaminants in carbon dioxide
US10128634B2 (en) *	2016-10-10	2018-11-13	Juniper Networks, Inc.	Integrated wavelength locker
JP2018169265A (ja) *	2017-03-29	2018-11-01	株式会社東京精密	距離測定装置及び距離測定方法
US10782120B2 (en) *	2018-07-03	2020-09-22	Kla Corporation	Dual-interferometry wafer thickness gauge
US11391969B2 (en) *	2018-12-07	2022-07-19	Freedom Photonics Llc	Systems and methods for wavelength monitoring

2020
- 2020-06-22 US US16/907,469 patent/US10948356B1/en active Active
- 2020-12-18 WO PCT/CA2020/051749 patent/WO2021258184A1/en not_active Ceased
- 2020-12-18 JP JP2022574161A patent/JP2023524907A/ja active Pending
- 2020-12-18 CA CA3181284A patent/CA3181284C/en active Active
- 2020-12-18 EP EP20941840.9A patent/EP4168762B1/de active Active
2024
- 2024-04-15 JP JP2024065550A patent/JP2024099614A/ja active Pending

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3730257A1 (de) *	1987-09-09	1989-03-23	Inst Fiz An Bssr	Messgeraet fuer spektralcharakteristiken einer laserstrahlung
EP0570243A1 (de) *	1992-05-15	1993-11-18	Mitsubishi Denki Kabushiki Kaisha	Wellenlängenmessvorrichtung und damit ausgestattete Laservorrichtung
US6151114A (en) *	1998-03-31	2000-11-21	The Boeing Company	Coherent laser warning system
FR2782383A1 (fr) *	1998-08-12	2000-02-18	Commissariat Energie Atomique	Appareil de mesure de la longueur d'onde d'un faisceau lumineux
US20030137672A1 (en) *	2002-01-21	2003-07-24	Masato Moriya	Wavelength detecting apparatus, laser apparatus, and wavelength detecting method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2021258184A1 *

Also Published As

Publication number	Publication date
CA3181284C (en)	2023-06-20
WO2021258184A1 (en)	2021-12-30
US10948356B1 (en)	2021-03-16
JP2023524907A (ja)	2023-06-13
CA3181284A1 (en)	2021-12-30
EP4168762B1 (de)	2026-01-28
EP4168762A1 (de)	2023-04-26
JP2024099614A (ja)	2024-07-25

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2023-04-26	17P	Request for examination filed	Effective date: 20221128
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2023-09-27	DAX	Request for extension of the european patent (deleted)
2023-12-06	A4	Supplementary search report drawn up and despatched	Effective date: 20231108
2023-12-06	RIC1	Information provided on ipc code assigned before grant	Ipc: G01J 9/02 20060101AFI20231102BHEP
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