EP4174901A3 - Flüssigkeitsgekühlte reflektierende röntgenquelle - Google Patents

Flüssigkeitsgekühlte reflektierende röntgenquelle Download PDF

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Publication number
EP4174901A3
EP4174901A3 EP22202571.0A EP22202571A EP4174901A3 EP 4174901 A3 EP4174901 A3 EP 4174901A3 EP 22202571 A EP22202571 A EP 22202571A EP 4174901 A3 EP4174901 A3 EP 4174901A3
Authority
EP
European Patent Office
Prior art keywords
target
ray source
rays
fluid cooled
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22202571.0A
Other languages
English (en)
French (fr)
Other versions
EP4174901A2 (de
Inventor
Claus Flachenecker
Bruce Borchers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss X Ray Microscopy Inc
Original Assignee
Carl Zeiss X Ray Microscopy Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss X Ray Microscopy Inc filed Critical Carl Zeiss X Ray Microscopy Inc
Publication of EP4174901A2 publication Critical patent/EP4174901A2/de
Publication of EP4174901A3 publication Critical patent/EP4174901A3/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1216—Cooling of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/122—Cooling of the window
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/167—Shielding arrangements against thermal (heat) energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H05G1/54—Protecting or lifetime prediction

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
EP22202571.0A 2021-11-01 2022-10-19 Flüssigkeitsgekühlte reflektierende röntgenquelle Pending EP4174901A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17/453,036 US11769647B2 (en) 2021-11-01 2021-11-01 Fluid cooled reflective x-ray source

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US17/453,036 Previously-Filed-Application US11769647B2 (en) 2021-11-01 2021-11-01 Fluid cooled reflective x-ray source

Publications (2)

Publication Number Publication Date
EP4174901A2 EP4174901A2 (de) 2023-05-03
EP4174901A3 true EP4174901A3 (de) 2023-08-02

Family

ID=84331898

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22202571.0A Pending EP4174901A3 (de) 2021-11-01 2022-10-19 Flüssigkeitsgekühlte reflektierende röntgenquelle

Country Status (4)

Country Link
US (1) US11769647B2 (de)
EP (1) EP4174901A3 (de)
JP (1) JP2023067807A (de)
CN (1) CN116072489A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12044701B2 (en) * 2021-02-22 2024-07-23 Kla Corporation Vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2329318A (en) * 1941-09-08 1943-09-14 Gen Electric X Ray Corp X-ray generator
US2356645A (en) * 1943-02-08 1944-08-22 Gen Electric X Ray Corp X-ray tube
US2559526A (en) * 1945-09-18 1951-07-03 Research Corp Anode target for high-voltage highvacuum uniform-field acceleration tube
CN1252618A (zh) * 1998-10-22 2000-05-10 沈阳师范学院 透射式阳极高效x线机
US6301332B1 (en) * 1998-12-10 2001-10-09 General Electric Company Thermal filter for an x-ray tube window
US20050100133A1 (en) * 2003-11-06 2005-05-12 Alfred Reinhold Microfocus x-ray apparatus
DE102006032606A1 (de) * 2006-07-11 2008-01-17 Carl Zeiss Industrielle Messtechnik Gmbh Erzeugung von elektromagnetischer Strahlung, insbesondere Röntgenstrahlung
US20120099700A1 (en) * 2010-10-26 2012-04-26 Carey Shawn Rogers Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube
US20120326031A1 (en) * 2011-05-02 2012-12-27 Uwe Wiedmann Method and device for applying dual energy imaging
US20200154553A1 (en) * 2017-06-08 2020-05-14 Koninklijke Philips N.V. Apparatus for generating x-rays

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55126948A (en) * 1979-03-23 1980-10-01 Fujitsu Ltd X-ray generator
JP2001319608A (ja) * 2000-05-10 2001-11-16 Shimadzu Corp マイクロフォーカスｘ線発生装置
CN104377103A (zh) * 2013-08-15 2015-02-25 朱健 一种具有冷却系统的工业x射线管阳极
US9748070B1 (en) * 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
JP6792519B2 (ja) * 2017-06-07 2020-11-25 浜松ホトニクス株式会社 Ｘ線発生装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2329318A (en) * 1941-09-08 1943-09-14 Gen Electric X Ray Corp X-ray generator
US2356645A (en) * 1943-02-08 1944-08-22 Gen Electric X Ray Corp X-ray tube
US2559526A (en) * 1945-09-18 1951-07-03 Research Corp Anode target for high-voltage highvacuum uniform-field acceleration tube
CN1252618A (zh) * 1998-10-22 2000-05-10 沈阳师范学院 透射式阳极高效x线机
US6301332B1 (en) * 1998-12-10 2001-10-09 General Electric Company Thermal filter for an x-ray tube window
US20050100133A1 (en) * 2003-11-06 2005-05-12 Alfred Reinhold Microfocus x-ray apparatus
DE102006032606A1 (de) * 2006-07-11 2008-01-17 Carl Zeiss Industrielle Messtechnik Gmbh Erzeugung von elektromagnetischer Strahlung, insbesondere Röntgenstrahlung
US20120099700A1 (en) * 2010-10-26 2012-04-26 Carey Shawn Rogers Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube
US20120326031A1 (en) * 2011-05-02 2012-12-27 Uwe Wiedmann Method and device for applying dual energy imaging
US20200154553A1 (en) * 2017-06-08 2020-05-14 Koninklijke Philips N.V. Apparatus for generating x-rays

Also Published As

Publication number Publication date
CN116072489A (zh) 2023-05-05
EP4174901A2 (de) 2023-05-03
JP2023067807A (ja) 2023-05-16
US20230135447A1 (en) 2023-05-04
US11769647B2 (en) 2023-09-26

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