EP4195504A4 - ACOUSTIC RESONATOR ARRANGEMENT AND FILTER - Google Patents

ACOUSTIC RESONATOR ARRANGEMENT AND FILTER Download PDF

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Publication number
EP4195504A4
EP4195504A4 EP20953801.6A EP20953801A EP4195504A4 EP 4195504 A4 EP4195504 A4 EP 4195504A4 EP 20953801 A EP20953801 A EP 20953801A EP 4195504 A4 EP4195504 A4 EP 4195504A4
Authority
EP
European Patent Office
Prior art keywords
filter
acoustic resonator
resonator arrangement
arrangement
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20953801.6A
Other languages
German (de)
French (fr)
Other versions
EP4195504A1 (en
Inventor
Linping Li
Jinghao SHENG
Zhou JIANG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Xinghe Technology Co Ltd
Original Assignee
Hangzhou Xinghe Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hangzhou Xinghe Technology Co Ltd filed Critical Hangzhou Xinghe Technology Co Ltd
Publication of EP4195504A1 publication Critical patent/EP4195504A1/en
Publication of EP4195504A4 publication Critical patent/EP4195504A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/52—Electric coupling means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0566—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
    • H03H9/0571—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including bulk acoustic wave [BAW] devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/643—Means for obtaining a particular transfer characteristic the transfer characteristic being determined by reflective or coupling array characteristics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP20953801.6A 2020-09-18 2020-09-22 ACOUSTIC RESONATOR ARRANGEMENT AND FILTER Withdrawn EP4195504A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010990291.9A CN112187212B (en) 2020-09-18 2020-09-18 Acoustic resonator assembly and filter
PCT/CN2020/116909 WO2022056943A1 (en) 2020-09-18 2020-09-22 Acoustic resonator assembly and filter

Publications (2)

Publication Number Publication Date
EP4195504A1 EP4195504A1 (en) 2023-06-14
EP4195504A4 true EP4195504A4 (en) 2023-12-20

Family

ID=73955926

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20953801.6A Withdrawn EP4195504A4 (en) 2020-09-18 2020-09-22 ACOUSTIC RESONATOR ARRANGEMENT AND FILTER

Country Status (6)

Country Link
US (1) US11881839B2 (en)
EP (1) EP4195504A4 (en)
JP (1) JP7539101B2 (en)
KR (1) KR102641176B1 (en)
CN (1) CN112187212B (en)
WO (1) WO2022056943A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112886940B (en) * 2021-01-13 2022-06-17 宁波华彰企业管理合伙企业(有限合伙) FBAR filter easy to integrate
CN112994654A (en) * 2021-02-08 2021-06-18 中芯集成电路制造(绍兴)有限公司 Duplexer and forming method thereof
CN114157269B (en) * 2021-11-30 2025-08-26 苏州汉天下电子有限公司 Resonator components and flexible filters
CN114884483B (en) * 2022-05-09 2024-01-30 上海芯波电子科技有限公司 Mixed laminated filter chip of SAW and BAW and manufacturing process thereof
CN114866065A (en) * 2022-05-09 2022-08-05 上海芯波电子科技有限公司 Mixed stacked filter chip and manufacturing process thereof
CN114978100A (en) * 2022-05-16 2022-08-30 上海芯波电子科技有限公司 A filter chip based on parallel stacking of SAW and BAW and its manufacturing process
CN116155226A (en) * 2022-11-25 2023-05-23 见闻录(浙江)半导体有限公司 Bulk acoustic wave resonator, related equipment and preparation method of bulk acoustic wave resonator
CN116828375B (en) * 2023-08-08 2025-09-23 安徽奥飞声学科技有限公司 MEMS structure and preparation method thereof, MEMS piezoelectric microphone
KR102655050B1 (en) * 2023-12-06 2024-04-04 한국세라믹기술원 Vertical type bulk acoustic wave micofluidic filtering module having sandwich structure and method of manufacturing the same
WO2025263132A1 (en) * 2024-06-20 2025-12-26 株式会社村田製作所 Elastic wave device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070115079A1 (en) * 2004-07-20 2007-05-24 Murata Manufacturing Co., Ltd. Piezoelectric filter
US20070170565A1 (en) * 2006-01-25 2007-07-26 Samsung Electronics Co., Ltd. RF module, multi RF module including the RF module, and method of manufacturing the RF module
JP2008066792A (en) * 2006-09-04 2008-03-21 Matsushita Electric Ind Co Ltd Piezoelectric thin film resonator and piezoelectric filter device
DE102017117870B3 (en) * 2017-08-07 2018-12-27 RF360 Europe GmbH BAW resonator with reduced spurious modes and increased quality factor
CN110911785A (en) * 2019-11-15 2020-03-24 天津大学 Duplexer
US20200099365A1 (en) * 2018-09-24 2020-03-26 Avago Technologies International Sales Pte. Limite ELECTRONIC PACKAGES COMPRISING STACKED BULK ACOUSTIC WAVE (BAW) RESONATOR and BAW RESONATOR FILTERS

Family Cites Families (16)

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TW488044B (en) * 2001-02-09 2002-05-21 Asia Pacific Microsystems Inc Bulk acoustic filter and its package
KR101323447B1 (en) * 2003-10-06 2013-10-29 트리퀸트 세미컨덕터 인코퍼레이티드 Ladder-type thin-film bulk acoustic wave filter
US7038559B2 (en) * 2004-02-23 2006-05-02 Ruby Richard C Vertically separated acoustic filters and resonators
JP2007036829A (en) * 2005-07-28 2007-02-08 Toshiba Corp Thin film piezoelectric resonator, filter, and method of manufacturing thin film piezoelectric resonator
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
JP5226409B2 (en) * 2008-07-17 2013-07-03 太陽誘電株式会社 RESONANT DEVICE, COMMUNICATION MODULE, COMMUNICATION DEVICE, AND RESONANT DEVICE MANUFACTURING METHOD
US9520856B2 (en) * 2009-06-24 2016-12-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8836449B2 (en) * 2010-08-27 2014-09-16 Wei Pang Vertically integrated module in a wafer level package
US9154112B2 (en) * 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
CN103490743B (en) 2013-09-22 2017-01-11 中国电子科技集团公司第十三研究所 Film BAW resonator and BAW filter
WO2017075354A1 (en) * 2015-10-30 2017-05-04 Qorvo Us, Inc. Fluidic device including baw resonators along opposing channel surfaces
CN107181470B (en) * 2016-03-10 2020-10-02 中芯国际集成电路制造(上海)有限公司 Film bulk acoustic resonator, semiconductor device and method of manufacturing the same
JP6534366B2 (en) * 2016-06-07 2019-06-26 太陽誘電株式会社 Elastic wave device
WO2019132921A1 (en) * 2017-12-28 2019-07-04 Intel Corporation Hybrid filter architecture with integrated passives, acoustic wave resonators and hermetically sealed cavities between two resonator dies
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070115079A1 (en) * 2004-07-20 2007-05-24 Murata Manufacturing Co., Ltd. Piezoelectric filter
US20070170565A1 (en) * 2006-01-25 2007-07-26 Samsung Electronics Co., Ltd. RF module, multi RF module including the RF module, and method of manufacturing the RF module
JP2008066792A (en) * 2006-09-04 2008-03-21 Matsushita Electric Ind Co Ltd Piezoelectric thin film resonator and piezoelectric filter device
DE102017117870B3 (en) * 2017-08-07 2018-12-27 RF360 Europe GmbH BAW resonator with reduced spurious modes and increased quality factor
US20200099365A1 (en) * 2018-09-24 2020-03-26 Avago Technologies International Sales Pte. Limite ELECTRONIC PACKAGES COMPRISING STACKED BULK ACOUSTIC WAVE (BAW) RESONATOR and BAW RESONATOR FILTERS
CN110911785A (en) * 2019-11-15 2020-03-24 天津大学 Duplexer

Non-Patent Citations (1)

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Title
See also references of WO2022056943A1 *

Also Published As

Publication number Publication date
KR20230058518A (en) 2023-05-03
KR102641176B1 (en) 2024-02-28
JP7539101B2 (en) 2024-08-23
EP4195504A1 (en) 2023-06-14
CN112187212A (en) 2021-01-05
US20230327643A1 (en) 2023-10-12
WO2022056943A1 (en) 2022-03-24
CN112187212B (en) 2021-12-07
US11881839B2 (en) 2024-01-23
JP2023539944A (en) 2023-09-20

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