EP4198315A1 - Vakuumpumpenvorrichtung und verfahren zum betrieb davon - Google Patents

Vakuumpumpenvorrichtung und verfahren zum betrieb davon Download PDF

Info

Publication number
EP4198315A1
EP4198315A1 EP22213282.1A EP22213282A EP4198315A1 EP 4198315 A1 EP4198315 A1 EP 4198315A1 EP 22213282 A EP22213282 A EP 22213282A EP 4198315 A1 EP4198315 A1 EP 4198315A1
Authority
EP
European Patent Office
Prior art keywords
pump
heater
side cover
side wall
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP22213282.1A
Other languages
English (en)
French (fr)
Other versions
EP4198315B1 (de
Inventor
Masami Nagayama
Hideo Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2022178142A external-priority patent/JP2023089930A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP4198315A1 publication Critical patent/EP4198315A1/de
Application granted granted Critical
Publication of EP4198315B1 publication Critical patent/EP4198315B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4226—Fan casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F04D29/703—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps specially for fans, e.g. fan guards
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F04C2270/195—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties
    • F05C2251/042—Expansivity
    • F05C2251/046—Expansivity dissimilar

Definitions

  • the present invention relates to a vacuum pump apparatus and a method of operating the same, and more particularly to a vacuum pump apparatus and a method of operating such a vacuum pump apparatus suitable for use in exhausting a process gas used in manufacturing of semiconductor devices, liquid crystals, LEDs, solar cells, or the like.
  • a process gas is introduced into a process chamber to perform a certain type of process, such as etching process or CVD process.
  • the process gas that has been introduced into the process chamber is exhausted by a vacuum pump apparatus.
  • the vacuum pump apparatus used in these manufacturing processes that require high cleanliness is so-called dry vacuum pump apparatus that does not use oil in gas flow passages.
  • dry vacuum pump apparatus is a positive-displacement vacuum pump apparatus having a pair of pump rotors in a pump chamber which are rotated in opposite directions to deliver the gas.
  • the process gas introduced into the process chamber may form solidified by-product through reaction within the chamber as a temperature of the process gas is decreased or increased.
  • the solidified by-product may impede the rotation of the pump rotors and may cause the vacuum pump apparatus to suddenly stop. Such an unexpected operation stop of the vacuum pump apparatus can damage products, such as semiconductor devices, which are being manufactured.
  • the above-described by-product is also deposited in a pipe coupling the process chamber and the vacuum pump apparatus, and in a pipe coupling the vacuum pump apparatus and an abatement device disposed downstream of the vacuum pump apparatus. For this reason, pipe maintenance is conducted regularly. During the pipe maintenance, the vacuum pump apparatus is stopped, and after the pipe maintenance is completed, the vacuum pump apparatus is restarted. However, if a large amount of by-product accumulates in the pump chamber, a resistance to the rotation of the pump rotor is so large that the vacuum pump apparatus cannot restart.
  • Patent document 1 Japanese laid-open patent publication No. 2009-097349
  • this pump-stop method takes a long time (for example, about three hours) to complete and lowers a throughput of manufacturing products, such as semiconductor devices. For this reason, this method may not be accepted by users.
  • the present invention provides a vacuum pump that can reduce deposition of by-product in a pump chamber caused by a process gas, can prevent an unintended stop of a vacuum pump apparatus, and can ensure restarting of the vacuum pump apparatus.
  • the present invention further provides a method of operating such a vacuum pump.
  • a vacuum pump apparatus comprising: a pump casing having a pump chamber therein; a pump rotor arranged in the pump chamber; a rotation shaft to which the pump rotor is secured; an electric motor coupled to the rotation shaft; a bearing that rotatably supports the rotation shaft; a side cover coupled to the pump casing, the bearing being coupled to the side cover; a heater attached to the side cover; and a heater controller configured to instruct the heater to generate heat intermittently when the pump rotor is rotating.
  • the side cover forms an end surface of the pump chamber.
  • the pump casing forms an end surface of the pump chamber.
  • the vacuum pump apparatus further includes a bearing housing that holds the bearing, and the bearing housing is held by the side cover.
  • the side cover comprises: a side wall forming the end surface of the pump chamber; and a spacer made of the same material as the side wall or made of a material having a larger coefficient of linear expansion than that of the side wall, the heater being arranged in the spacer.
  • the side cover comprises: a side wall forming the end surface of the pump chamber, the side wall being made of the same material as the rotation shaft or made of a material having a larger coefficient of linear expansion than that of the rotation shaft; and a spacer holding the bearing, the heater being arranged in the side wall.
  • the side cover comprises: a side wall coupled to the pump casing; and a spacer made of the same material as the side wall or made of a material having a larger coefficient of linear expansion than that of the side wall, the heater being arranged in the spacer.
  • the side cover comprises: a side wall coupled to the pump casing, the side wall being made of the same material as the rotation shaft or made of a material having a larger coefficient of linear expansion than that of the rotation shaft; and a spacer that holds the bearing, the heater being arranged in the side wall.
  • the vacuum pump apparatus further comprises: a first temperature sensor configured to measure a temperature of the pump casing; and a second temperature sensor configured to measure a temperature of the side cover, wherein the heater controller is configured to determine a target temperature based on the temperature of the pump casing, and control the heater such that the temperature of the side cover reaches the target temperature.
  • the heater controller is configured to instruct the heater to stop the heat generation or lower the temperature of the heat generation of the heater after the temperature of the side cover reaches the target temperature.
  • the vacuum pump apparatus further comprises a displacement sensor configured to measure an axial displacement of the bearing, wherein the heater controller is configured to instruct the heater to stop the heat generation when the axial displacement of the bearing reaches a threshold value.
  • the vacuum pump apparatus further comprises a second heater attached to the pump casing.
  • the vacuum pump apparatus further comprises a cooler attached to the pump casing.
  • a method of operating a vacuum pump apparatus comprising: intermittently generating heat by a heater when evacuating a process gas by rotating a pump rotor arranged in a pump chamber of a pump casing, the pump rotor being secured to a rotation shaft which is rotatably supported by a bearing, the bearing being coupled to a side cover which is coupled to the pump casing, the heater being attached to the side cover.
  • the side cover forms an end surface of the pump chamber.
  • the pump casing forms an end surface of the pump chamber.
  • the bearing is held by a bearing housing, and the bearing housing is held by the side cover.
  • the side cover comprises: a side wall forming the end surface of the pump chamber; and a spacer made of the same material as the side wall or made of a material having a larger coefficient of linear expansion than that of the side wall, the heater being arranged in the spacer.
  • the side cover comprises: a side wall forming the end surface of the pump chamber, the side wall being made of the same material as the rotation shaft or made of a material having a larger coefficient of linear expansion than that of the rotation shaft; and a spacer holding the bearing, the heater being arranged in the side wall.
  • the side cover comprises: a side wall coupled to the pump casing; and a spacer made of the same material as the side wall or made of a material having a larger coefficient of linear expansion than that of the side wall, the heater being arranged in the spacer.
  • the side cover comprises: a side wall coupled to the pump casing, the side wall being made of the same material as the rotation shaft or made of a material having a larger coefficient of linear expansion than that of the rotation shaft; and a spacer that holds the bearing, the heater being arranged in the side wall.
  • the method of operating the vacuum pump apparatus further comprises: determining a target temperature based on a temperature of the pump casing; and controlling the heater such that a temperature of the side cover reaches the target temperature.
  • the method of operating the vacuum pump apparatus further comprises stopping the heat generation of the heater or lowering a temperature the heat generation of the heater after the temperature of the side cover reaches the target temperature.
  • the method of operating the vacuum pump apparatus further comprises stopping the heat generation of the heater when an axial displacement of the bearing reaches a threshold value.
  • the method of operating the vacuum pump apparatus further comprises heating the pump casing by a second heater attached to the pump casing.
  • the method of operating the vacuum pump apparatus further comprises cooling the pump casing by a cooler attached to the pump casing.
  • the side cover repeats thermal expansion and contraction, which cause the rotation shaft to reciprocate in an axial direction via the bearing coupled to the side cover.
  • the pump rotor also reciprocates in the axial direction, so that the rotating pump rotor can scrape off by-product deposited in the pump chamber. As a result, the pump rotor can rotate smoothly.
  • FIG. 1 is a cross-sectional view showing an embodiment of a vacuum pump apparatus.
  • the vacuum pump apparatus of the embodiment described below is a positive-displacement vacuum pump apparatus.
  • the vacuum pump apparatus shown in FIG. 1 is a so-called dry vacuum pump apparatus that does not use oil in its flow passages for a gas. Since a vaporized oil does not flow to an upstream side, the dry vacuum pump apparatus can be suitably used for a semiconductor-device manufacturing apparatus that requires high cleanliness.
  • the vacuum pump apparatus includes a pump casing 2 having a pump chamber 1 therein, pump rotors 5A to 5E arranged in the pump chamber 1, rotation shafts 7 to which the pump rotors 5A to 5E are secured, and electric motor 8 coupled to the rotation shaft 7.
  • the pump rotors 5A to 5E and each rotation shaft 7 may be an integral structure. Although only one set of pump rotors 5A to 5E and only one rotation shaft 7 are depicted in FIG. 1 , a pair of pump rotors 5A to 5E are arranged in the pump chamber 1, and are secured to a pair of rotation shafts 7, respectively.
  • the electric motor 8 is coupled to one of the pair of rotation shafts 7. In one embodiment, a pair of electric motors 8 may be coupled to the pair of rotation shafts 7, respectively.
  • the pump rotors 5A to 5E of the present embodiment are Roots-type pump rotors, while in one embodiment the pump rotors 5A to 5E may be claw-type pump rotors. Further, the pump rotors 5A to 5E may be a combination of Roots-type and claw-type pump rotors. Although the pump rotors 5A to 5E of the present embodiment are multi-stage pump rotors, in one embodiment the pump rotors may be single-stage pump rotors.
  • the vacuum pump apparatus further includes side covers 10A and 10B located outwardly of the pump casing 2 in an axial direction of the rotation shafts 7.
  • the side covers 10A and 10B are provided on both sides of the pump casing 2 and are coupled to the pump casing 2.
  • the side covers 10A and 10B are fixed to end surfaces of the pump casing 2 by not-shown screws.
  • the pump chamber 1 is formed by an inner surface of the pump casing 2 and inner surfaces of the side covers 10A and 10B.
  • the pump casing 2 has an intake port 2a and an exhaust port 2b.
  • the intake port 2a is coupled to a chamber (not shown) filled with gas to be delivered.
  • the intake port 2a may be coupled to a process chamber of a semiconductor-device manufacturing apparatus, and the vacuum pump apparatus may be used for evacuating a process gas from the process chamber.
  • the vacuum pump apparatus further includes a motor housing 14 and a gear housing 16 which are housing structures located outwardly of the side covers 10A and 10B in the axial direction of the rotation shafts 7.
  • the side cover 10A is located between the pump casing 2 and the motor housing 14, and the side cover 10B is located between the pump casing 2 and the gear housing 16.
  • the motor housing 14 accommodates a motor rotor 8A and a motor stator 8B of the electric motor 8 therein. Inside the gear housing 16, a pair of gears 20 that mesh with each other are arranged. In FIG. 1 , only one gear 20 is depicted.
  • the electric motor 8 is rotated by a not-shown motor driver, and one rotation shaft 7 to which the electric motor 8 is coupled rotates the other rotation shaft 7 to which the electric motor 8 is not coupled in an opposite direction via the gears 20.
  • a pair of electric motors 8, which are coupled to the pair of rotation shafts 7, respectively, may be provided.
  • the pair of electric motors 8 are synchronously rotated in opposite directions by a not-shown motor driver, so that the pair of rotation shafts 7 and the pair of pump rotors 5A to 5E are synchronously rotated in opposite directions.
  • the role of the gears 20 is to prevent loss of the synchronous rotation of the pump rotors 5 due to a sudden external cause.
  • the motor housing 14 is arranged outwardly of the side cover 10A, and the gear housing 16 is arranged outwardly of the side cover 10B, while configurations of the vacuum pump apparatus are not limited to this embodiment.
  • the gear housing 16 may be arranged outwardly of the side cover 10A, and the motor housing 14 may be arranged outwardly of the side cover 10B.
  • both the motor housing 14 and the gear housing 16 may be located outwardly of either the side cover 10A or the side cover 10B.
  • Each rotation shaft 7 is rotatably supported by bearings 17 and 18 .
  • the bearing 17 is held by a bearing housing 24, and the bearing 18 is supported by the side cover 10B.
  • the bearing 17 is coupled to the side cover 10A via the bearing housing 24. More specifically, the bearing housing 24 is held by the side cover 10A, and positions of the bearing housing 24 and the bearing 17 are fixed by the side cover 10A. Since an inner race of the bearing 17 is fixed to the rotation shaft 7, an axial position of a portion of the rotation shaft 7 held by the bearing 17 is fixed.
  • a bearing housing holding the bearing 18 may be disposed between the side cover 10B and the bearing 18.
  • the bearing housing is fixed to the side cover 10B, but the outer race of the bearing 18 is not fixed to the bearing housing, and is simply supported by the bearing housing, so that the bearing 18 can move axially together with the rotation shaft 7.
  • the gas is compressed by the pump rotors 5A to 5E while the gas is being transferred from the intake port 2a to the exhaust port 2b. Therefore, the rotation shaft 7 located in the pump chamber 1 thermally expands due to compression heat of the gas.
  • the axial position of the bearing 17 is fixed, whereas the bearing 18 is movable in the axial direction. Accordingly, the rotation shaft 7 thermally expands in the axial direction beginning from the bearing 17, and the bearing 18 moves in the axial direction as the rotation shaft 7 thermally expands.
  • FIG. 2 is an enlarged sectional view showing the side cover 10A, the bearing housing 24, and the bearing 17 at the exhaust side.
  • the pump casing 2 has a partition wall 36 therein, and the pump rotor 5E is arranged between the partition wall 36 and the side cover 10A.
  • the side cover 10A includes a side wall 31 forming an end surface of the pump chamber 1 and a spacer 32 made of the same material as the side wall 31 or made of a material having a larger coefficient of linear expansion than that of the side wall 31.
  • the spacer 32 is located between the side wall 31 and the bearing housing 24.
  • the bearing housing 24 is held by the spacer 32, and the bearing housing 24 is coupled to the side wall 31 via the spacer 32.
  • the vacuum pump apparatus has a heater 35 attached to the side cover 10A.
  • the heater 35 is arranged in the spacer 32 of the side cover 10A.
  • the spacer 32 is made of the same material as the side wall 31 and the pump casing 2, or made of metal having a coefficient of linear expansion larger than that of the side wall 31.
  • the spacer 32 is made of cast iron, or stainless steel, aluminum, aluminum alloy, or copper having a larger coefficient of linear expansion than that of cast iron.
  • the heater 35 generates heat, the spacer 32 thermally expands, and the bearing housing 24 held by the spacer 32 moves in the axial direction.
  • the spacer 32 has a shape that surrounds the bearing housing 24 and is prone to the thermal expansion in the axial direction.
  • FIG. 3 is a cross-sectional view showing a state in which the pump rotor 5E is moved in the axial direction due to the thermal expansion of the rotation shaft 7. As described above, the high-temperature rotation shaft 7 thermally expands in the axial direction, and as a result, the pump rotor 5E is moved in a direction away from the side cover 10A forming the end surface of the pump chamber 1.
  • By-product 100 is gradually deposited in a gap between the pump rotor 5E and the side cover 10A. Such by-product 100 impedes the rotation of the pump rotor 5E, and may cause an unintended operation stop of the vacuum pump apparatus, or may prevent the vacuum pump apparatus from restarting.
  • the heat generation of the heater 35 is stopped when the pump rotor 5E reaches an initial position shown in FIG. 2 .
  • the initial position of the pump rotor 5E is a position of the pump rotor 5E when the entire vacuum pump apparatus has a room temperature.
  • the temperature of the spacer 32 gradually decreases and the spacer 32 gradually contracts.
  • the pump rotor 5E is moved in a direction away from the side cover 10A, and the gap between the pump rotor 5E and the side cover 10A increases as shown in FIG. 3 . Since the by-product 100 gradually accumulates in this gap, the heater 35 generates heat again to thermally expand the spacer 32. As shown in FIG.
  • the rotating pump rotor 5E moves toward the side cover 10A (i.e., toward the end surface of the pump chamber 1), the rotating pump rotor 5E gradually scrapes off the by-product 100 deposited in the gap between the pump rotor 5E and the side cover 10A.
  • the heat generation and stoppage of the heat generation of the heater 35 are repeated to cause the rotating pump rotor 5E to reciprocate in the axial direction, so that the rotating pump rotor 5E can scrape off the by-product deposited in the pump chamber 1.
  • the rotating pump rotors 5A to 5D can also scrape off by-product deposited in the pump chamber 1.
  • the by-product is removed from the pump chamber 1, and the pump rotors 5A to 5E can rotate smoothly.
  • pump rotors do not reciprocate during operation as described above.
  • a large amount of by-product may be deposited near the pump rotors during operation, and the pump rotors bite the large amount of by-product at a certain moment, causing sudden stop of the pump.
  • the pump rotors 5A to 5E constantly repeat the reciprocating motion, which makes it possible to create a condition in which almost no by-product is accumulated in the pump chamber 1, particularly near the pump rotors 5A to 5E. As a result, sudden stop of the pump can be prevented.
  • the vacuum pump apparatus includes a heater controller 40 configured to control the heat generation of the heater 35.
  • the heater controller 40 is configured to intermittently instruct the heater 35 to generate the heat (i.e., periodically repeat heat generation and stop of the heat generation of the heater 35) while the pump rotors 5A to 5E are rotating.
  • the heater controller 40 includes a memory 40a storing programs therein, an arithmetic device 40b configured to perform arithmetic operations according to instructions included in the programs, and a power source 40c configured to supply electric power to the heater 35.
  • the heater controller 40 includes at least one computer.
  • the memory 40a includes a main memory, such as a random access memory (RAM), and an auxiliary memory, such as a hard disk drive (HDD) or solid state drive (SSD).
  • a main memory such as a random access memory (RAM)
  • auxiliary memory such as a hard disk drive (HDD) or solid state drive (SSD).
  • Examples of the arithmetic device 40b include a CPU (central processing unit) and a GPU (graphic processing unit).
  • the specific configurations of the heater controller 40 are not limited to these examples.
  • the vacuum pump apparatus further includes a first temperature sensor 45 configured to measure a temperature of the pump casing 2 and a second temperature sensor 46 configured to measure a temperature of the side cover 10A.
  • the first temperature sensor 45 is fixed to the pump casing 2.
  • the first temperature sensor 45 may be fixed to an outer surface of the pump casing 2 or may be embedded in the pump casing 2.
  • This first temperature sensor 45 is provided to indirectly measure the temperature of the rotation shaft 7. Specifically, the temperature of the rotation shaft 7 arranged in the pump casing 2 can be estimated from the temperature of the pump casing 2 measured by the first temperature sensor 45.
  • the second temperature sensor 46 is fixed to the side cover 10A.
  • the second temperature sensor 46 may be fixed to an outer surface of the side cover 10A or may be embedded in the side cover 10A. In the embodiment shown in FIGS. 2 to 4 , the second temperature sensor 46 is fixed to the spacer 32 of the side cover 10A. Therefore, the second temperature sensor 46 can measure the temperature of the side cover 10A (more specifically, the temperature of the spacer 32). The second temperature sensor 46 may be embedded in the spacer 32.
  • the heater controller 40 is configured to determine a target temperature of the spacer 32, i.e., a target temperature of the side cover 10A, based on the temperature of the pump casing 2 measured by the first temperature sensor 45. Since the temperature of the pump casing 2 indirectly indicates the temperature of the rotation shaft 7, a degree of thermal expansion of the rotation shaft 7 (i.e., an axial movement distance of the pump rotor 5E from its initial position) can be estimated from the temperature of the pump casing 2. Therefore, the heater controller 40 can determine the target temperature of the spacer 32 required to return the pump rotor 5E, which has been moved by the thermal expansion of the rotation shaft 7, to the initial position.
  • the heater controller 40 determines the target temperature of the spacer 32 required to return the pump rotor 5E to its initial position based on the temperature of the pump casing 2, an axial thickness of the spacer 32, and the coefficient of linear expansion of the spacer 32.
  • a relationship between a movement distance of the pump rotor 5E and the temperature of the spacer 32 may be obtained by experiment or simulation, and the target temperature of the spacer 32 may be determined from the relationship obtained.
  • the heater controller 40 is configured to control the heater 35 such that the temperature of the spacer 32 reaches the determined target temperature.
  • the temperature of the spacer 32 is measured by the second temperature sensor 46, and the spacer 32 is heated to the target temperature.
  • the bearing housing 24, the bearing 17, the rotation shaft 7, and the pump rotor 5E are moved axially.
  • the pump rotor 5E returns to its initial position shown in FIG. 4 .
  • the heater controller 40 instructs the heater 35 to stop its heat generation.
  • the heater controller 40 may instruct the heater 35 to lower the temperature of its heat generation after the spacer 32 is heated to the target temperature.
  • the heater controller 40 may instruct the heater 35 to stop the heat generation after instructing the heater 35 to lower the temperature of the heat generation of the heater 35.
  • the heater controller 40 instructs the heater 35 to generate heat intermittently, thereby causing the pump rotor 5E to reciprocate between the initial position shown in FIG. 4 and the thermal expansion position shown in FIG. 3 .
  • the other pump rotors 5A to 5D also reciprocate in the axial direction in the same manner. Since the pump rotors 5A to 5E reciprocate in the pump chamber 1 in the axial direction while the pump rotors 5A to 5E are rotating, the pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1.
  • the vacuum pump apparatus includes a displacement sensor 49 configured to measure an axial displacement of the bearing 17.
  • the displacement sensor 49 is attached to the side wall 31 of the side cover 10A and arranged so as to face the bearing housing 24 holding the bearing 17. Therefore, the displacement sensor 49 measures the axial displacement of the bearing 17 by measuring an axial displacement of the bearing housing 24.
  • the displacement sensor 49 may be arranged to directly measure the axial displacement of the bearing 17.
  • the displacement sensor 49 is electrically coupled to the heater controller 40.
  • the heater controller 40 is configured to instruct the heater 35 to stop the heat generation when the axial displacement of the bearing 17 reaches a threshold value. Such controlling of the heat generation of the heater 35 based on the axial displacement of the bearing 17 can prevent the pump rotor 5E from contacting the inner surface of the side cover 10A (i.e., the end surface of the pump chamber 1).
  • the side cover 10A may be constructed from a single material. More specifically, a part of the side cover 10A forms the end surface of the pump chamber 1, and other part of the side cover 10A holds the bearing housing 24.
  • the side cover 10A is made of the same material as the pump casing 2 or made of a material having a larger coefficient of linear expansion than that of the pump casing 2.
  • the entire side cover 10A is made of cast iron, or made of stainless steel, aluminum, aluminum alloy, or copper having a larger coefficient of linear expansion than that of the pump casing 2.
  • the rotating pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1 by repeating the heat generation and stop of the heat generation of the heater 35 as well as the previous embodiments.
  • the bearing housing 24 may be omitted, as shown in FIG. 7 .
  • the bearing 17 is held directly on the side cover 10A. More specifically, the bearing 17 is directly held by the spacer 32 of the side cover 10A.
  • the side cover 10A may be constructed from a single piece of material and the bearing housing 24 may not be provided.
  • the embodiment shown in FIG. 8 is a combination of the embodiment shown in FIG. 6 and the embodiment shown in FIG. 7 .
  • the bearing 17 is directly held by the side cover 10A.
  • the rotating pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1 by repeating the heat generation and stop of the heat generation of the heater 35 as well as the previous embodiments.
  • the vacuum pump apparatus may further include a second heater 50 attached to the pump casing 2 in order to prevent deposition of the by-product in the pump chamber 1 due to a decrease in temperature of the process gas.
  • a certain type of process gas may form by-product as a temperature of the process gas rises.
  • the vacuum pump apparatus may further include a cooler 51 attached to the pump casing 2, as shown in FIG. 10 .
  • the cooler 51 may be a water-cooled cooler.
  • the second heater 50 shown in FIG. 9 and the cooler 51 shown in FIG. 10 may be attached to the outer surface of the pump casing 2 or may be embedded in the pump casing 2.
  • the combination of the axial reciprocation of the pump rotors 5A to 5E by the intermittent operation of the heater 35 and the second heater 50 or the cooler 51 can reliably prevent the deposition of the by-product.
  • FIG. 11 is a cross-sectional view showing another embodiment of the vacuum pump apparatus.
  • lubricating oil 110 for lubricating and cooling the bearing 17 is stored at a bottom of the motor housing 14.
  • Configurations and operations of this embodiment, which will not be particularly described, are the same as those of the embodiments described with reference to FIGS. 1 to 4 , and redundant descriptions thereof are omitted.
  • the vacuum pump apparatus of this embodiment includes rotary disks 60 configured to supply the lubricating oil 110 to the bearing 17 and a partition wall 62 arranged between the electric motor 8 and the bearing housing 24.
  • Each rotary disk 60 is coupled to each of the pair of rotation shafts 7 and rotates together with each rotation shaft 7.
  • a rotary disk 60 may be coupled to one of the pair of rotation shafts 7 and may rotate together with that rotation shaft 7 coupled to the rotary disk 60. The rotation of the rotary disk 60 splashes up the lubricating oil 110 onto the bearing 17.
  • the partition wall 62 is fixed to the inner surface of the motor housing 14 and has through-holes (not shown) through which the rotation shafts 7 extend.
  • the partition wall 62 is configured to separate a space in which the lubricating oil 110 is stored from a space in which the electric motor 8 is disposed, and is provided to prevent the lubricating oil 110 from contacting the electric motor 8.
  • the lubricating oil 110 in the motor housing 14 is always in contact with the spacer 32 of the side cover 10A. If the heater 35 is arranged in the spacer 32, the temperature of the lubricating oil 110 rises due to the heat generated by the heater 35, and a sufficient cooling effect for the bearing 17 may not be obtained. Therefore, in the embodiment shown in FIG. 11 , the heater 35 is arranged in the side wall 31 of the side cover 10A.
  • the side cover 10A has the side wall 31 forming the end surface of the pump chamber 1 and the spacer 32 holding the bearing 17.
  • the spacer 32 is coupled to the side wall 31 and is located between the side wall 31 and the bearing housing 24.
  • the bearing housing 24 is held by the spacer 32, and the bearing housing 24 is coupled to the side wall 31 via the spacer 32.
  • the bearing 17 is coupled to the spacer 32 via the bearing housing 24.
  • the spacer 32 holds the bearing 17 via the bearing housing 24.
  • the side wall 31 is made of the same material as a material of the rotation shaft 7 or made of metal having a larger coefficient of linear expansion than that of the rotation shaft 7.
  • the side wall 31 is made of cast iron, or stainless steel, aluminum, aluminum alloy, or copper having a larger coefficient of linear expansion than that of cast iron.
  • the side wall 31 may be made of the same material as the material of the pump casing 2 and/or the spacer 32, or may be made of metal having a larger coefficient of linear expansion than that of the pump casing 2 and/or the spacer 32.
  • the side wall 31 thermally expands, and the spacer 32 coupled to the side wall 31 moves axially.
  • the bearing housing 24 and the bearing 17 held by the spacer 32 move axially, and the pump rotor 5E moves toward the side cover 10A.
  • the rotating pump rotor 5E moves toward the side cover 10A (i.e., toward the end surface of the pump chamber 1), the rotating pump rotor 5E can gradually scrape off the by-product deposited in the gap between the pump rotor 5E and the side cover 10A.
  • the temperature of the side wall 31 gradually decreases and the side wall 31 gradually contracts.
  • the pump rotor 5E moves in a direction away from the side cover 10A, and the gap between the pump rotor 5E and the side cover 10A increases.
  • the rotating pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1 by repeating the heat generation and stop of the heat generation of the heater 35, as well as the embodiments described with reference to FIGS. 3 and 4 .
  • FIG. 12 is a cross-sectional view showing still another embodiment of the vacuum pump apparatus. Configurations and operations of this embodiment, which will not be particularly described, are the same as those of the embodiments described with reference to FIGS. 1 to 4 , and redundant descriptions thereof are omitted.
  • the pump casing 2 of this embodiment has casing side walls 70A and 70B that form end surfaces of the pump chamber 1.
  • the pump casing 2 covers the entire pump chamber 1.
  • the pump chamber 1 is formed by the inner surface of the pump casing 2.
  • the side covers 10A, 10B are provided on both sides of the pump casing 2 and coupled to the pump casing 2.
  • the side wall 31 of the side cover 10A is coupled to the casing side wall 70A of the pump casing 2
  • the side cover 10B is coupled to the casing side wall 70B of the pump casing 2.
  • the rotation shafts 7 extend through the casing side walls 70A and 70B of the pump casing 2.
  • the side cover 10A includes the side wall 31 coupled to the casing side wall 70A of the pump casing 2, and further includes the spacer 32 made of the same material as the side wall 31 or made of a material having a larger coefficient of linear expansion than that of the side wall 31.
  • the spacer 32 is located between the side wall 31 and the bearing housing 24.
  • the bearing housing 24 is held by the spacer 32, and the bearing housing 24 is coupled to the side wall 31 via the spacer 32.
  • the heater 35 is arranged in the spacer 32 of the side cover 10A.
  • the rotating pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1 by repeating the heat generation and stop of the heat generation of the heater 35, as well as the previous embodiments.
  • FIG. 13 is a cross-sectional view showing still another embodiment of the vacuum pump apparatus.
  • lubricating oil 110 for lubricating and cooling the bearings 17 is stored at the bottom of the motor housing 14, as in the embodiment described with reference to FIG. 11 .
  • Configurations and operations of this embodiment, which will not be particularly described, are the same as those of the embodiment described with reference to FIG. 11 , and redundant descriptions thereof will be omitted.
  • the pump casing 2 of this embodiment has casing side walls 70A and 70B that form end surfaces of the pump chamber 1.
  • the pump casing 2 covers the entire pump chamber 1.
  • the pump chamber 1 is formed by the inner surface of the pump casing 2.
  • the side covers 10A, 10B are provided on both sides of the pump casing 2 and coupled to the pump casing 2. More specifically, the side wall 31 of the side cover 10A is coupled to the casing side wall 70A of the pump casing 2, and the side cover 10B is coupled to the casing side wall 70B of the pump casing 2.
  • the rotation shafts 7 extend through the casing side walls 70A and 70B of the pump casing 2.
  • the side cover 10A includes the side wall 31 coupled to the casing side wall 70A of the pump casing 2, and further includes the spacer 32 holding the bearing 17.
  • the side wall 31 is made of the same material as a material of the rotation shaft 7 or made of metal having a larger coefficient of linear expansion than that of the rotation shaft 7.
  • the heater 35 is arranged in the side wall 31 of the side cover 10A.
  • the rotating pump rotors 5A to 5E can scrape off the by-product deposited in the pump chamber 1 by repeating the heat generation and stop of the heat generation of the heater 35, as well as the previous embodiments.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP22213282.1A 2021-12-16 2022-12-13 Vakuumpumpenvorrichtung und verfahren zum betreiben derselben Active EP4198315B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021203889 2021-12-16
JP2022178142A JP2023089930A (ja) 2021-12-16 2022-11-07 真空ポンプ装置およびその運転方法

Publications (2)

Publication Number Publication Date
EP4198315A1 true EP4198315A1 (de) 2023-06-21
EP4198315B1 EP4198315B1 (de) 2025-06-04

Family

ID=85175917

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22213282.1A Active EP4198315B1 (de) 2021-12-16 2022-12-13 Vakuumpumpenvorrichtung und verfahren zum betreiben derselben

Country Status (4)

Country Link
EP (1) EP4198315B1 (de)
KR (1) KR20230092765A (de)
CN (1) CN116265753A (de)
TW (1) TW202336347A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2641280A (en) * 2024-05-24 2025-11-26 Edwards Ltd Vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097349A (ja) 2007-10-12 2009-05-07 Ebara Corp 真空ポンプの運転制御装置及び運転停止方法
FR2964163A1 (fr) * 2010-10-12 2012-03-02 Alcatel Lucent Pompe a vide de type seche
GB2570349A (en) * 2018-01-23 2019-07-24 Edwards Ltd Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings
EP3808983A1 (de) * 2019-10-15 2021-04-21 Ebara Corporation Vakuumpumpenvorrichtung
KR20210134772A (ko) * 2019-06-19 2021-11-10 가시야마고교가부시끼가이샤 진공펌프

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097349A (ja) 2007-10-12 2009-05-07 Ebara Corp 真空ポンプの運転制御装置及び運転停止方法
FR2964163A1 (fr) * 2010-10-12 2012-03-02 Alcatel Lucent Pompe a vide de type seche
GB2570349A (en) * 2018-01-23 2019-07-24 Edwards Ltd Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings
KR20210134772A (ko) * 2019-06-19 2021-11-10 가시야마고교가부시끼가이샤 진공펌프
EP3808983A1 (de) * 2019-10-15 2021-04-21 Ebara Corporation Vakuumpumpenvorrichtung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2641280A (en) * 2024-05-24 2025-11-26 Edwards Ltd Vacuum pump

Also Published As

Publication number Publication date
TW202336347A (zh) 2023-09-16
KR20230092765A (ko) 2023-06-26
EP4198315B1 (de) 2025-06-04
CN116265753A (zh) 2023-06-20

Similar Documents

Publication Publication Date Title
KR101227033B1 (ko) 다단식 드라이 펌프
EP3808982B1 (de) Vakuumpumpe mit thermischer isolierung
JP4702236B2 (ja) 真空ポンプの運転停止制御方法及び運転停止制御装置
EP4198315A1 (de) Vakuumpumpenvorrichtung und verfahren zum betrieb davon
JP2021063503A (ja) 真空ポンプ装置
US10221863B2 (en) Vacuum pump
CN101166902B (zh) 泵抽系统及运行方法
JP2023089930A (ja) 真空ポンプ装置およびその運転方法
EP4067658A2 (de) Vakuumpumpengerät
JP2022505202A (ja) 真空ポンプの温度制御方法、並びに関連する真空ポンプおよびその設備
JP2006520873A (ja) 容積型真空ポンプ
EP3808983B1 (de) Vakuumpumpe mit heizung im seitendeckel
US20090214368A1 (en) Vacuum Pump
JPH0932766A (ja) スクリュ−流体機械及びねじ歯車
KR101487021B1 (ko) 펌핑 유닛 및 대응하는 가열 장치
JP2019113064A5 (de)
JP5133224B2 (ja) 真空ポンプユニット
JP2022176649A (ja) 真空ポンプシステム、及び、真空ポンプ
EP4177465B1 (de) Vakuumpumpenvorrichtung
EP4424974A2 (de) Vakuumpumpe und verfahren zur bestimmung der form eines roots-rotors
JP2009052429A (ja) スクロール圧縮機
JP2009092040A (ja) ２段真空ポンプ
JP2010127157A5 (de)
JP2007198239A (ja) 真空ポンプ
JP6025458B2 (ja) 真空ポンプ

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: EBARA CORPORATION

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20231220

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: F01C 21/10 20060101ALI20241202BHEP

Ipc: F04C 29/04 20060101ALI20241202BHEP

Ipc: F04C 23/00 20060101ALI20241202BHEP

Ipc: F04C 18/12 20060101ALI20241202BHEP

Ipc: F04C 25/02 20060101AFI20241202BHEP

INTG Intention to grant announced

Effective date: 20250102

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602022015445

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

P01 Opt-out of the competence of the unified patent court (upc) registered

Free format text: CASE NUMBER: APP_341202/2023

Effective date: 20250604

P02 Opt-out of the competence of the unified patent court (upc) changed

Free format text: CASE NUMBER: APP_26619/2025

Effective date: 20250604

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250905

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250904

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250904

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20251006

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1800560

Country of ref document: AT

Kind code of ref document: T

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20251004

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20251229

Year of fee payment: 4

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20251024

Year of fee payment: 4

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602022015445

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20250604

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20251230

Year of fee payment: 4

REG Reference to a national code

Ref country code: CH

Ref legal event code: L10

Free format text: ST27 STATUS EVENT CODE: U-0-0-L10-L00 (AS PROVIDED BY THE NATIONAL OFFICE)

Effective date: 20260416