EP4390144A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP4390144A3
EP4390144A3 EP24166455.6A EP24166455A EP4390144A3 EP 4390144 A3 EP4390144 A3 EP 4390144A3 EP 24166455 A EP24166455 A EP 24166455A EP 4390144 A3 EP4390144 A3 EP 4390144A3
Authority
EP
European Patent Office
Prior art keywords
rotor
component
holweck
collar
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24166455.6A
Other languages
English (en)
French (fr)
Other versions
EP4390144A2 (de
Inventor
Sönke Gilbrich
Jan Hofmann
Bernd Koci
Mirko Mekota
Thilo Wille
Michael Schweighöfer
Tobias Stoll
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24166455.6A priority Critical patent/EP4390144A3/de
Publication of EP4390144A2 publication Critical patent/EP4390144A2/de
Publication of EP4390144A3 publication Critical patent/EP4390144A3/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit einer während des Betriebs um eine Drehachse rotierenden Rotorwelle und mit wenigstens einem auf der Rotorwelle befestigten Rotorbauteil, wobei das Rotorbauteil eine Rotorscheibe ist, die einen radial innen liegenden Bund, über den die Rotorscheibe auf der Rotorwelle befestigt ist, und mehrere Rotorschaufeln umfasst, die jeweils integral mit dem Bund verbunden sind und die sich jeweils ausgehend von einem Schaufelgrund am Bund radial nach außen erstrecken und radial außen ein freies Schaufelende aufweisen, oder wobei das Rotorbauteil ein Holweckbauteil ist, insbesondere eine Holwecknabe oder eine Holweckhülse, und wobei die Rotorscheibe und/oder das Holweckbauteil aus einer Aluminiumlegierung gefertigt sind bzw. ist, die folgende Elemente in Gewichts-% aufweist: Cu: 3,6-4,4; Mg: 1,2-1,4; Mn : 0,5-0,8; Zr: < 0,16; Ti : 0,01-0,05; Si < 0,21; Fe < 0,21; Zn < 0,26; andere Elemente < 0,06; Rest Aluminium.
EP24166455.6A 2022-12-22 2022-12-22 Vakuumpumpe Pending EP4390144A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP24166455.6A EP4390144A3 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP24166455.6A EP4390144A3 (de) 2022-12-22 2022-12-22 Vakuumpumpe
EP22216232.3A EP4151860B1 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP22216232.3A Division EP4151860B1 (de) 2022-12-22 2022-12-22 Vakuumpumpe
EP22216232.3A Division-Into EP4151860B1 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP4390144A2 EP4390144A2 (de) 2024-06-26
EP4390144A3 true EP4390144A3 (de) 2024-07-10

Family

ID=84569606

Family Applications (3)

Application Number Title Priority Date Filing Date
EP24166459.8A Pending EP4390145A3 (de) 2022-12-22 2022-12-22 Vakuumpumpe
EP24166455.6A Pending EP4390144A3 (de) 2022-12-22 2022-12-22 Vakuumpumpe
EP22216232.3A Active EP4151860B1 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP24166459.8A Pending EP4390145A3 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP22216232.3A Active EP4151860B1 (de) 2022-12-22 2022-12-22 Vakuumpumpe

Country Status (2)

Country Link
EP (3) EP4390145A3 (de)
JP (1) JP2024091224A (de)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
EP1408237A1 (de) * 2002-10-11 2004-04-14 Alcatel Turbomolekularpumpe
EP3002459A1 (de) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Verfahren zur herstellung einer rotor- oder statorscheibe für eine vakuumpumpe sowie rotor- oder statorscheibe für eine vakuumpumpe
KR101758033B1 (ko) * 2013-11-30 2017-07-14 라이볼트 게엠베하 진공 펌프를 위한 로터 디스크 및 로터

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
DE10354204B4 (de) * 2003-11-20 2016-03-10 Leybold Vakuum Gmbh Molekularpumpe
DE102006031965A1 (de) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotoren einer Turbomolekularpumpe
EP3091235B1 (de) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotorscheibe
EP3650702B1 (de) 2018-11-12 2020-09-16 Pfeiffer Vacuum Gmbh Verwendung eines synthetischen öls in einer vakuumpumpe und vakuumpumpe
JP7192660B2 (ja) * 2019-05-30 2022-12-20 株式会社島津製作所 真空ポンプおよびリークディテクタ
JP7377640B2 (ja) * 2019-07-22 2023-11-10 エドワーズ株式会社 真空ポンプ、及び、真空ポンプに用いられるロータ並びに回転翼
EP3683449B1 (de) * 2019-12-18 2022-02-09 Pfeiffer Vacuum GmbH Magnetlager und vakuumgerät
FR3111143B1 (fr) * 2020-06-04 2022-11-18 Constellium Issoire Produits en alliage aluminium cuivre magnésium performants à haute température

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
EP1408237A1 (de) * 2002-10-11 2004-04-14 Alcatel Turbomolekularpumpe
KR101758033B1 (ko) * 2013-11-30 2017-07-14 라이볼트 게엠베하 진공 펌프를 위한 로터 디스크 및 로터
EP3002459A1 (de) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Verfahren zur herstellung einer rotor- oder statorscheibe für eine vakuumpumpe sowie rotor- oder statorscheibe für eine vakuumpumpe

Also Published As

Publication number Publication date
JP2024091224A (ja) 2024-07-04
EP4151860A2 (de) 2023-03-22
EP4390145A2 (de) 2024-06-26
EP4390144A2 (de) 2024-06-26
EP4151860A3 (de) 2023-04-05
EP4390145A3 (de) 2024-09-18
EP4151860B1 (de) 2024-12-04

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