EP4423452A1 - Capteur et procédé de mesure d'une variable physique d'un milieu plan - Google Patents

Capteur et procédé de mesure d'une variable physique d'un milieu plan

Info

Publication number
EP4423452A1
EP4423452A1 EP23853731.0A EP23853731A EP4423452A1 EP 4423452 A1 EP4423452 A1 EP 4423452A1 EP 23853731 A EP23853731 A EP 23853731A EP 4423452 A1 EP4423452 A1 EP 4423452A1
Authority
EP
European Patent Office
Prior art keywords
measuring
sensor
measuring device
carrier
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23853731.0A
Other languages
German (de)
English (en)
Inventor
Michael Kuran
Norbert Reindl
Thomas Haslinger
Thomas Wisspeintner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
Original Assignee
Micro Epsilon Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Messtechnik GmbH and Co KG filed Critical Micro Epsilon Messtechnik GmbH and Co KG
Publication of EP4423452A1 publication Critical patent/EP4423452A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/085—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving

Definitions

  • the invention relates to a sensor for measuring a physical quantity of a planar medium on a carrier, wherein the sensor has two different measuring devices for carrying out measurements based on at least two different physical measuring principles, wherein the first measuring device has an inductive or eddy current sensor and the second measuring device has a capacitive or optical sensor, wherein the first measuring device is influenced predominantly or exclusively due to an electromagnetic effect that can be induced or arise in the carrier of the planar medium during the measurement, and the second measuring device is influenced predominantly or exclusively by the planar medium, wherein the measuring signal of the second measuring device in relation to the measuring signal of the first measuring device results in the measuring signal of the physical quantity of the planar medium.
  • the invention relates to a method for measuring a physical quantity of a planar medium on a carrier with such a sensor, wherein the sensor has two different measuring devices for carrying out measurements based on at least two different physical measuring principles, wherein the first measuring device has an inductive or eddy current sensor and the second measuring device has a capacitive or optical sensor, wherein the first measuring device is influenced predominantly or exclusively due to an electromagnetic effect that can be induced or arise in the carrier of the planar medium during the measurement, and the second measuring device is influenced predominantly or exclusively by the planar medium, wherein the measuring signal of the second measuring device in relation to the measuring signal of the first measuring device results in the measuring signal of the physical quantity of the planar medium.
  • the electromagnetic effect that predominantly or exclusively influences the first measuring device is a desired useful effect or measuring effect on which on the basis of which the inductive or eddy current sensor works and from which a measurement signal such as a distance value is obtained.
  • undesirable interference effects can occur during a measurement, in particular undesirable electromagnetic interference effects.
  • an electromagnetic effect perceived by the sensor can have both a desired and an undesirable component.
  • Such materials can often also be coated, for example conductive, semiconductive or insulating, as is often the case in the field of battery production.
  • optical, inductive or capacitive sensors can be used, for example, which could be mounted on a bracket or frame and measure the films to be checked from both sides.
  • the sensors are used either rigidly or traversing.
  • the one-sided measurement is used to determine various physical quantities such as thickness or density. Radioactive surface emitters are often used for such applications, which provide the basis for calculating the thickness via the surface weight.
  • the films are usually non-transparent and thus further limit the choice of possible sensors
  • optical measuring sensors can only be used to a limited extent.
  • a combination sensor consisting of, for example, inductive and capacitive or optical sensors has been used successfully in industry for many years.
  • the films to be measured usually run on a metal roller, such as aluminum or steel. These rollers require a very long service life. This means that in the case of abrasive media, steel rollers are usually used, which are very often coated with resistant layers in order to ensure a long service life despite these abrasive media, for example. Measurement with inductive sensors often leads to incorrect measurements, as these steel rollers are ferromagnetic and result in incorrect measurements by the sensors. This is known as the run-out effect, which is based on Weiss' domains and is described in more detail below.
  • the present invention is concerned with the run-out To eliminate or at least reduce the effect when measuring the properties of, for example, strip materials that are guided over rollers, such as thickness, density, basis weight, conductivity, etc.
  • a run-out effect occurs when, due to the rotational movement of, for example, a roller, disturbances in the measurement signal occur that are either repeatable - reproducible with the speed of the roller (repeatable run-out) - or non-repeatable (non-repeatable run-out).
  • a run-out effect is a disturbance effect that has a detrimental effect on a desired useful effect, namely a measurement effect.
  • rollers for example, have a certain radial run-out, also known as concentricity or mechanical run-out. This results from inaccuracies in the diameter of the roller, from tolerances in the bearings or other mechanical causes. These lead to the distance changing reproducibly or not reproducibly when the roller is rotating.
  • the reproducible run-out results from systematic errors in the bearings, on the surface, etc. that repeat with each revolution.
  • the non-reproducible run-out is due to random errors that usually result from too much play in the bearing, which usually occurs rather rarely.
  • electrical run-out can occur. This does not depend on the mechanical (geometric) properties of the roller runout, but on the electrical or magnetic properties of the roller material.
  • An electrical property is, for example, the conductivity o or its reciprocal, the specific resistance p.
  • a magnetic property is, for example, the magnetic permeability p r .
  • the cause of this type of run-out effect in ferromagnetic materials is, for example, the Weiss domains, which have an influence on inductive or magnetic measurements in that the magnetization and thus p r changes in magnitude and/or direction within the material, meaning that the material is not homogeneous.
  • Another cause can be microcracks in the roller surface, which locally influence the conductivity and thus mainly affect the eddy currents. These effects overlap in ferromagnetic materials and occur in different forms depending on the sensor type. Often the causes cannot be clearly separated when measuring with sensors that contain a coil - inductive, eddy current. Only in the signal can a change be seen that does not come from the change in distance, but is superimposed on the distance signal due to the electrical run-out.
  • a first sensor records the properties of the measuring object
  • a second sensor which is ideally not influenced by the measuring object itself, records the surface of the roller.
  • the thickness of the strip material can be determined from the difference between the two signals, for example. But other measured variables such as the density, the so-called basis weight or the conductivity of the strip material can also be determined with suitable sensors.
  • an inductive or eddy current sensor is used as the first sensor. This is not influenced by the measuring object and detects the roller's radial runout by detecting the roller's surface through the measuring object.
  • a second sensor with a capacitive or optical measuring principle detects the measuring object, for example its surface, or the surface density.
  • the sensors used are arranged concentrically so that the measurement location is the same for both and no additional errors, such as tilting errors, occur due to any offset. The thickness can then be determined very precisely from the difference, with the mechanical run-out effect being effectively compensated for by using the two different measuring principles.
  • Conductive materials can also be measured with inductive or eddy current sensors if the material is sufficiently thin or the conductivity is very low. In this case, a superimposed signal is obtained from the measuring object and the roller. If different operating frequencies are used for the first sensor and the second sensor, the measuring signals from the roller and the measuring object can be separated, which makes it possible to measure the properties of the measuring object.
  • the inductive or eddy current sensor - the first sensor - can be influenced by the roller material, which leads to electrical run-out and thus to errors in the thickness measurement.
  • an inductive or eddy current sensor does not provide ideal detection of just the surface of the roller, but has a certain volume effect. This is where the penetration depth ö comes into play, which depends, among other things, on the material in question (er, jUr) and the operating frequency (oscillator frequency) of the sensor: S « — .
  • the penetration depth indicates the depth within which the current density induced in a conductor due to an electromagnetic wave has dropped to the value 1/e. Three times the value of the penetration depth is usually used as the depth where the effects of the current density on measurements are negligible.
  • the present invention is therefore based on the object of specifying a sensor and a method of the type mentioned at the outset, according to which a particularly reliable measurement of the physical size of a flat material is possible using structurally simple means.
  • the above object is achieved by a sensor with the features of claim 1.
  • the sensor is then designed in such a way that designed and developed such that the first measuring device is selected and/or operable in such a way that the electromagnetic effect can be induced or created exclusively or predominantly in a layer that is as thin as possible and can be defined on a surface of the carrier.
  • the first measuring device is selected and/or operated in such a way that interference with a measuring signal from greater depths in the volume of the carrier is largely reduced or completely avoided.
  • the first measuring device is specifically selected and/or operated in such a way that the electromagnetic effect - the desired component of the electromagnetic effect - can be induced or created exclusively or predominantly in a layer that can be defined as thinly as possible on a surface of the carrier.
  • an operating frequency of the first measuring device can be selected in such a way that the desired electromagnetic effect can be induced or created exclusively or predominantly in the thinnest possible definable layer on the surface of the carrier.
  • the selectability of the operating frequency is structurally simple to implement.
  • the layer can be formed by a coating of the carrier in which the desired electromagnetic effect can be induced or created.
  • an operating frequency of the first measuring device can be selected in a simple manner such that the desired electromagnetic effect can be induced or created exclusively or predominantly in the coating of the carrier. This takes advantage of the fact that, depending on the frequency selected, the electromagnetic effect is induced to different depths in a substance, for example in the carrier. The higher the frequency, the less deeply the induction effect reaches into the coating or into the carrier. Since the coating material is selected in such a way that the undesirable magnetic effect cannot be induced or created in the coating or to a lesser extent than in an uncoated carrier. With this embodiment of the method - with a skilful choice of frequency - the result is an avoidance, strong reduction or compensation of the undesirable magnetic effect.
  • a particularly simple way to use a conductive but non-ferromagnetic material, chromium or tungsten carbide, as a coating or coating component is to use them.
  • These are common coating materials that are very robust on the one hand and in which the magnetic effect is not present or is less strong than with conventional carrier materials on the other.
  • a measuring device in the form of a temperature measuring device can also be used.
  • a temperature value determined with such a measuring device can be used in a simple manner to increase the accuracy of a measured value when measuring a physical quantity of the flat medium.
  • the senor can be designed to detect a revolution or part of a revolution of a rotatable carrier for the medium by means of at least two of the measuring devices implemented. Such detection can be carried out in an automated manner in a particularly advantageous manner.
  • a recurring profile of the rotatable carrier for example a roller, can be used for this purpose.
  • the sensor can be arranged in a constant axial position, i.e. without a traversing movement relative to the carrier. This makes it possible to characterize the carrier, for example a roller, without using an encoder.
  • the flat medium can comprise a strip material or a film.
  • Such a medium is used in various areas, particularly industrial ones, and its precise properties, especially geometric properties such as thickness or density, are of great importance.
  • the physical quantity can be the thickness or density of the medium. These quantities are of great importance in film production, for example, in order to ensure a uniform thickness or density of a medium in the form of a film.
  • the above object is achieved by a method with the features of claim 11, wherein the method of the type mentioned at the outset is designed and developed in such a way that the first measuring device is selected and/or operated in such a way that the electromagnetic effect can be induced or created exclusively or predominantly in a layer that is as thin as possible on a surface of the carrier.
  • the advantages achieved with the method reference may be made to the advantages previously described for the associated sensor in order to avoid repetition and for the sake of simplicity.
  • the senor and/or the at least two different measuring devices of the sensor can be designed in such a way that the measurement of the physical quantity can be carried out from just one side of the flat medium.
  • Such a one-sided measurement is particularly advantageous in confined spaces, since a measurement setup usually does not require as much space as with a two-sided measurement.
  • At least a portion of the carrier can be measured with regard to the magnetic effect using suitable measuring means before measuring the physical size of the medium, and a The measurement result recorded by the measuring device before, after and/or during a measurement of the physical quantity of the medium can be used to compensate for or reduce the influence on the measurement caused by the magnetic effect.
  • This enables a particularly reliable measurement of the physical quantity.
  • an entire surface of the carrier is measured, or at least that part of the surface which carries the medium or on which the medium is arranged during a measurement.
  • the measurement result recorded in this way or the measured values determined in this way, a compensation for or reduction of the influence on the measurement caused by the magnetic effect can be carried out, whereby the measurement result or the measured values can be used before, after and/or during a measurement of the physical quantity of the medium. This enables a particularly reliable and simple measurement of the physical quantity.
  • the measuring devices can use a capacitive and an inductive measurement from a measuring position to determine a distance between the measuring devices or a definable starting point and the carrier along the partial area or along an entire surface of the carrier, whereby a difference between a distance value recorded with the capacitive measurement and a distance value recorded with the inductive measurement can be determined at at least one defined or at all measuring locations in the partial area or on the surface.
  • a location-dependent difference signal is therefore obtained between the capacitive and the inductive measurement.
  • This difference or this difference signal can be determined for the entire surface of the carrier or for a relevant partial area of the surface.
  • a relevant partial area of the surface can be a partial area that carries the medium or on which the medium is arranged. As a result, the magnetic effect can be reduced or compensated.
  • the measurement of the partial area or the entire surface of the carrier can be carried out at different temperatures. This can compensate for or reduce any temperature dependence of the measurement result.
  • the recorded measurement results, the recorded distance values and/or the specific difference or differences can be stored in a characteristic map. This allows the carrier to be characterized using a multi-dimensional characteristic map, which enables active compensation or reduction of the magnetic effect during measurement, even at different temperatures.
  • the senor according to the invention and the method according to the invention provide a sensor and method according to which a particularly reliable measurement of the physical size of a flat material is possible using structurally simple means.
  • An embodiment of the sensor according to the invention can be realized as a combination sensor with a high frequency eddy current sensor - combination system for conductive media.
  • a runout effect based on Weiss domains can be taken into account.
  • the operating frequency - oscillator frequency - of the sensor is increased so that the penetration depth into the roller material or carrier material becomes so small that the inductive or eddy current effect only occurs in a thin layer directly on the surface. Interference with the measurement signal from greater depths can therefore no longer occur or can only be greatly suppressed.
  • the carrier or roller which - for reasons of strength - is usually made of (ferromagnetic) steel, is coated with a homogeneous surface layer made of another, electrically conductive material.
  • the measurement signal is then essentially influenced by the properties of the layer and not by the underlying roller material. It is particularly advantageous if the surface layer is made of conductive but not ferromagnetic material, because this excludes the magnetic effects (white areas!) in the surface layer. If the oscillator frequency of the sensor is selected appropriately, the electromagnetic effect or measurement effect occurs predominantly or exclusively in the surface layer.
  • a first sensor is usually an inductive or eddy current sensor and a second sensor can be a capacitive sensor, or an optical distance sensor (triangulation, also laser triangulation, laser profile sensor, confocal chromatic sensor, interferometer, etc.), or a profile sensor that detects the height of the strip material on the carrier or roller by shadowing.
  • a second sensor can be a capacitive sensor, or an optical distance sensor (triangulation, also laser triangulation, laser profile sensor, confocal chromatic sensor, interferometer, etc.), or a profile sensor that detects the height of the strip material on the carrier or roller by shadowing.
  • Interference effects which include not only the magnetic effects already discussed due to the white areas but also electrical effects due to (micro) cracks that affect the eddy currents, initially occur in the material of the carrier or, for example, a roller and have a negative effect on the measurement.
  • the aim is to suppress these interference effects. This is done by increasing the operating frequency of the eddy current sensor. This means that the measurement effects only occur in a thin layer on the surface of the carrier or roller (reduced penetration depth). However, this also means that interference effects are reduced because the influence from the depth of the material is reduced. It is also advantageous if a non-ferromagnetic coating is applied to the carrier or roller.
  • the frequency is adapted to the coating or vice versa, so that the measuring effect occurs predominantly or exclusively in the coating. Then - with a non-ferromagnetic coating - magnetic interference effects are eliminated, and interference caused by microcracks is also reduced if the material of the coating is selected appropriately.
  • Fig. 1 shows a perspective view, schematically, of an embodiment of a measuring setup with a sensor according to the invention as well as a diagram of generated difference signals and
  • Fig. 2 in a perspective view, schematically, an embodiment of a measuring setup with a sensor according to the invention and a diagram of a skin depth as a function of the operating frequency of an inductive sensor.
  • a sensor is shown with a sensor head 1, which has an inductive measuring device 2, a capacitive measuring device 3 and a temperature measuring device 4.
  • a medium to be measured can be arranged on a carrier 5 in the form of a roller 5. In the embodiments shown here, no medium is arranged on the carrier 5 or the roller 5 for the sake of clarity.
  • the functional principle is extended so that the thickness of a semiconducting film, for example, can be measured reliably.
  • the process temperature can also be recorded and output via a temperature sensor integrated in the combination sensor.
  • the physical measuring principles capacitive and inductive or eddy current principle and additionally a temperature measurement by means of the temperature measuring device 4 are used.
  • the integrated temperature sensor or the integrated temperature measuring device 4 as a third measuring element can provide the decisive data for a corresponding compensation or reduction in ambient conditions that vary with regard to temperature.
  • the Weiss domains and thus the runout effect are distributed inhomogeneously across the material of the roller 5 and also change with the temperature. This results in two independent variables influencing the measurement result of the sensor. This makes compensation very complicated.
  • the integrated temperature sensor or the integrated temperature measuring device 4 can eliminate one of the two interference variables as best as possible. To do this, the inductive sensor must be calibrated within the expected temperature range. The properties that change with temperature are recorded at different intervals that remain constant during the temperature change and stored in the controller as a characteristic curve for the compensation calculation. This type of temperature compensation is already common in many inductive sensors.
  • the entire roller can be measured without any strip material resting on it using encoders or similar measuring devices.
  • the capacitive sensor 3 detects the distance to the roller surface
  • the inductive sensor 2 measures a distance value influenced by undesirable electromagnetic effects.
  • the magnetic see Effects cause deviations that enable characterization of roller 5 and represent the second influencing variable.
  • a difference signal is produced between the capacitive and inductive sensor, see Fig. 1. This difference can be recorded over the entire roller surface and stored as a characteristic map for later compensation calculations in a controller unit. The only important thing is that the position of roller 5 can be recorded reproducibly and that the local compensation can therefore be calculated live.
  • the compensation of the two influencing variables can also be combined, i.e. the roller 5 can be characterized at different temperatures and a multi-dimensional characteristic map can be generated that can be used for active compensation during operation.
  • the new combination sensor system In addition to recording the roller revolutions using an encoder or similar, the new combination sensor system also makes it possible to record a so-called fingerprint via the automatic detection of a revolution - recurring profile/characteristic curve observation - in an axial position of the sensor that is constant during a revolution - i.e. not traversing - and to calculate a compensation characteristic curve based on this.
  • an intelligent evaluation can detect significant recurring singularities and use them for automatic revolution detection. The singularities and their distances from one another enable the characterization of roller 5 without the use of an encoder.
  • the runout effect of the carrier roller 5 is avoided from the outset by the inductive sensor of the combination system being matched and calibrated to a coated roller 5 in such a way that the eddy currents resulting from the measuring principle flow exclusively in a defined layer or coating with a reduced runout effect.
  • a combination of homogeneous coating and matching operating frequencies f of the inductive sensor ensures that the magnetic effect or the eddy currents flow or are formed exclusively or essentially in the coating, taking the skin effect into account.
  • the skin effect means that eddy currents only flow in the coating and are little or not at all influenced by interference.
  • Fig. 2 shows a diagram showing the dependence of the skin depth on the oscillator frequency or operating frequency of the inductive sensor.
  • the thickness of media can be measured stably in both cold and high-temperature processes.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne un capteur pour mesurer une variable physique d'un milieu plan sur un support (5), le capteur comprenant deux dispositifs de mesure (2, 3) différents pour effectuer des mesures sur la base d'au moins deux principes de mesure physiques différents, le premier dispositif de mesure (2) comprenant un capteur inductif ou de courant de Foucault et le second dispositif de mesure (3) comprenant un capteur capacitif ou optique, le premier dispositif de mesure (2) étant influencé principalement ou exclusivement par un effet électromagnétique, qui peut être induit ou peut se produire dans le support (5) du milieu plan pendant la mesure, et le second dispositif de mesure (3) étant influencé principalement ou exclusivement par le support plan, le signal de mesure du second dispositif de mesure (3) par rapport au signal de mesure du premier dispositif de mesure (2) ayant pour résultat le signal de mesure de la variable physique du milieu plan. Afin d'obtenir une mesure particulièrement fiable de la variable physique d'un matériau plan avec un moyen structurellement simple, ledit capteur est conçu et développé de telle sorte que le premier dispositif de mesure (2) est sélectionné et/ou peut être actionné de telle sorte que l'effet électromagnétique peut être induit ou peut se produire exclusivement ou principalement dans une couche définissable, qui est aussi mince que possible, sur une surface du support (5). L'invention concerne également un procédé correspondant.
EP23853731.0A 2022-12-30 2023-12-27 Capteur et procédé de mesure d'une variable physique d'un milieu plan Pending EP4423452A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102022214457.0A DE102022214457A1 (de) 2022-12-30 2022-12-30 Sensor und Verfahren zur Messung einer physikalischen Größe eines flächigen Mediums
PCT/DE2023/200268 WO2024141139A1 (fr) 2022-12-30 2023-12-27 Capteur et procédé de mesure d'une variable physique d'un milieu plan

Publications (1)

Publication Number Publication Date
EP4423452A1 true EP4423452A1 (fr) 2024-09-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP23853731.0A Pending EP4423452A1 (fr) 2022-12-30 2023-12-27 Capteur et procédé de mesure d'une variable physique d'un milieu plan

Country Status (6)

Country Link
EP (1) EP4423452A1 (fr)
JP (1) JP2025541495A (fr)
KR (1) KR20250139297A (fr)
CN (1) CN120418605A (fr)
DE (1) DE102022214457A1 (fr)
WO (1) WO2024141139A1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5355083A (en) * 1988-11-16 1994-10-11 Measurex Corporation Non-contact sensor and method using inductance and laser distance measurements for measuring the thickness of a layer of material overlaying a substrate
US6593738B2 (en) * 2001-09-17 2003-07-15 Boris Kesil Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors

Also Published As

Publication number Publication date
DE102022214457A1 (de) 2024-07-11
WO2024141139A1 (fr) 2024-07-04
JP2025541495A (ja) 2025-12-18
CN120418605A (zh) 2025-08-01
KR20250139297A (ko) 2025-09-23

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