EP4636251A3 - Scrollvakuumpumpe - Google Patents

Scrollvakuumpumpe

Info

Publication number
EP4636251A3
EP4636251A3 EP25201241.4A EP25201241A EP4636251A3 EP 4636251 A3 EP4636251 A3 EP 4636251A3 EP 25201241 A EP25201241 A EP 25201241A EP 4636251 A3 EP4636251 A3 EP 4636251A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
scroll vacuum
spiral component
scroll
movable spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25201241.4A
Other languages
English (en)
French (fr)
Other versions
EP4636251A2 (de
Inventor
Tobias Stoll
Jonas Becker
Jan Hofmann
Stefan Kallenborn
Heiko Schäfer
Wolfgang Söhngen
Philipp Nöh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25201241.4A priority Critical patent/EP4636251A3/de
Publication of EP4636251A2 publication Critical patent/EP4636251A2/de
Publication of EP4636251A3 publication Critical patent/EP4636251A3/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F01C19/005—Structure and composition of sealing elements such as sealing strips, sealing rings and the like; Coating of these elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0028—Internal leakage control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/602—Gap; Clearance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/811—Actuator for control, e.g. pneumatic, hydraulic, electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

Scrollvakuumpumpe mit einem Pumpsystem (11,13), das ein feststehendes Spiralbauteil (11) und ein mit diesem pumpwirksam zusammenwirkendes bewegliches Spiralbauteil (13) umfasst, und einer im Betrieb um eine Drehachse (15) rotierenden Antriebswelle (17) mit einem Exzenterabschnitt (19) zum Antreiben des beweglichen Spiralbauteils (13), sowie Verfahren zum Betreiben einer solchen Scrollvakuumpumpe.
EP25201241.4A 2025-09-09 2025-09-09 Scrollvakuumpumpe Pending EP4636251A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25201241.4A EP4636251A3 (de) 2025-09-09 2025-09-09 Scrollvakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP25201241.4A EP4636251A3 (de) 2025-09-09 2025-09-09 Scrollvakuumpumpe

Publications (2)

Publication Number Publication Date
EP4636251A2 EP4636251A2 (de) 2025-10-22
EP4636251A3 true EP4636251A3 (de) 2026-04-29

Family

ID=96946046

Family Applications (1)

Application Number Title Priority Date Filing Date
EP25201241.4A Pending EP4636251A3 (de) 2025-09-09 2025-09-09 Scrollvakuumpumpe

Country Status (1)

Country Link
EP (1) EP4636251A3 (de)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5082430A (en) * 1989-04-08 1992-01-21 Aginfor Ag Fur Industrielle Forschung Rotating spiral compressor with reinforced spiral ribs
US5458471A (en) * 1992-08-14 1995-10-17 Ni; Shimao Scroll-type fluid displacement device having high built-in volume ratio and semi-compliant biasing mechanism
US5527166A (en) * 1995-08-14 1996-06-18 Industrial Technology Research Institute Mechanism for locating a fixed volute of scroll compressor
US6022202A (en) * 1995-02-24 2000-02-08 S.B.P.V. (Societe Des Brevets P. Vulliez) Spiral vacuum pump having a toothed circular translation movement limiter device
KR20070023588A (ko) * 2005-08-24 2007-02-28 아네스토 이와타 가부시키가이샤 스크롤 유체 기계에서의 팁 시일
US20070071626A1 (en) * 2005-09-28 2007-03-29 Anest Iwata Corporation Seal in a scroll fluid machine
DE102013021249A1 (de) * 2013-12-14 2015-06-18 Daimler Ag Anordnung zum Lagern einer orbitierend beweglichen Exzenterscheibe
US20190309748A1 (en) * 2016-06-22 2019-10-10 Edwards Limited Vacuum scroll pump
US20230184251A1 (en) * 2020-05-21 2023-06-15 Edwards Limited Scroll pump
CN116557292A (zh) * 2023-06-30 2023-08-08 福州大学 一种无油涡旋空压机密封装置及工作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3508727B1 (de) 2015-10-06 2020-05-13 Pfeiffer Vacuum Gmbh Scrollpumpe und verfahren zum betreiben einer scrollpumpe
EP3754200B1 (de) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Scrollvakuumpumpe und montageverfahren
EP3617511B1 (de) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Scrollpumpen und herstellungsverfahren für solche
EP4174285B1 (de) 2022-12-22 2024-10-23 Pfeiffer Vacuum Technology AG Spiralvakuumpumpe
EP4506537B1 (de) 2023-08-08 2025-10-08 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe
EP4407183A1 (de) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Scrollvakuumpumpe und ihr betriebsverfahren

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5082430A (en) * 1989-04-08 1992-01-21 Aginfor Ag Fur Industrielle Forschung Rotating spiral compressor with reinforced spiral ribs
US5458471A (en) * 1992-08-14 1995-10-17 Ni; Shimao Scroll-type fluid displacement device having high built-in volume ratio and semi-compliant biasing mechanism
US6022202A (en) * 1995-02-24 2000-02-08 S.B.P.V. (Societe Des Brevets P. Vulliez) Spiral vacuum pump having a toothed circular translation movement limiter device
US5527166A (en) * 1995-08-14 1996-06-18 Industrial Technology Research Institute Mechanism for locating a fixed volute of scroll compressor
KR20070023588A (ko) * 2005-08-24 2007-02-28 아네스토 이와타 가부시키가이샤 스크롤 유체 기계에서의 팁 시일
US20070071626A1 (en) * 2005-09-28 2007-03-29 Anest Iwata Corporation Seal in a scroll fluid machine
DE102013021249A1 (de) * 2013-12-14 2015-06-18 Daimler Ag Anordnung zum Lagern einer orbitierend beweglichen Exzenterscheibe
US20190309748A1 (en) * 2016-06-22 2019-10-10 Edwards Limited Vacuum scroll pump
US20230184251A1 (en) * 2020-05-21 2023-06-15 Edwards Limited Scroll pump
CN116557292A (zh) * 2023-06-30 2023-08-08 福州大学 一种无油涡旋空压机密封装置及工作方法

Also Published As

Publication number Publication date
EP4636251A2 (de) 2025-10-22

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Inventor name: STOLL, TOBIAS

Inventor name: BECKER, JONAS

Inventor name: HOFMANN, JAN

Inventor name: KALLENBORN, STEFAN

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