EP4660458A3 - Mikromembranpumpeinrichtung - Google Patents

Mikromembranpumpeinrichtung

Info

Publication number
EP4660458A3
EP4660458A3 EP25210136.5A EP25210136A EP4660458A3 EP 4660458 A3 EP4660458 A3 EP 4660458A3 EP 25210136 A EP25210136 A EP 25210136A EP 4660458 A3 EP4660458 A3 EP 4660458A3
Authority
EP
European Patent Office
Prior art keywords
plate
pump chamber
membrane
shaped
shaped actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25210136.5A
Other languages
English (en)
French (fr)
Other versions
EP4660458A2 (de
Inventor
Agnes Bussmann
Lorenz GRÜNERBEL
Christian Wald
Sebastian Kibler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to EP25210136.5A priority Critical patent/EP4660458A3/de
Publication of EP4660458A2 publication Critical patent/EP4660458A2/de
Publication of EP4660458A3 publication Critical patent/EP4660458A3/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/12—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by varying the length of stroke of the working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0206—Length of piston stroke
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)

Abstract

Vorgeschlagen wird eine Mikromembranpumpeinrichtung zum Pumpen eines Fluids. Die Mikromembranpumpeinrichtung weist auf:eine Pumpkammer, welcher ein Einlassventil zum Einlassen des Fluids in die Pumpkammer, ein Auslassventil zum Auslassen des Fluids aus der Pumpkammer und eine Membraneinrichtung zum Variieren eines Volumens der Pump-kammer zugeordnet ist, wobei die Membraneinrichtung einen plattenförmigen Aktor zum Verformen der Membraneinrichtung aufweist; undeine Beeinflussungseinrichtung zum Beeinflussen des plattenförmigen Aktors, um so das Volumen der Pumpkammer zu beeinflussen;wobei die Membraneinrichtung einen die Pumpkammer begrenzenden platten-förmigen Membrankörper aufweist;wobei der plattenförmige Aktor auf einer der Pumpkammer abgewandten Seite des plattenförmigen Membrankörpers angeordnet ist;wobei der plattenförmige Aktor mittels einer elektrisch isolierenden Kleberschicht an dem plattenförmigen Membrankörper befestigt ist, so dass der plattenförmige Aktor elektrisch isoliert gegenüber dem Membrankörper ist;wobei innerhalb der elektrisch isolierenden Kleberschicht zumindest ein eingebetteter Abschnitt eines Trägerkörpers angeordnet ist, an welchem oder in welchem ein Verformungssensor zur Erfassung einer Verformung der Membraneinrichtung angeordnet ist, um so das Volumen der Pumpkammer zu erfassen;wobei die Beeinflussungseinrichtung, der plattenförmige Aktor und der Verformungssensor einen geschlossenen Regelkreis zur Regelung eines Volumen-stroms der Mikromembranpumpeinrichtung bilden.
EP25210136.5A 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung Pending EP4660458A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25210136.5A EP4660458A3 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PCT/EP2020/066821 WO2021254611A1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP24197698.4A EP4446587B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP20735496.0A EP4168676B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP25210136.5A EP4660458A3 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
EP24197698.4A Division-Into EP4446587B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP24197698.4A Division EP4446587B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP20735496.0A Division EP4168676B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung

Publications (2)

Publication Number Publication Date
EP4660458A2 EP4660458A2 (de) 2025-12-10
EP4660458A3 true EP4660458A3 (de) 2025-12-24

Family

ID=71409361

Family Applications (3)

Application Number Title Priority Date Filing Date
EP25210136.5A Pending EP4660458A3 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP24197698.4A Active EP4446587B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP20735496.0A Active EP4168676B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP24197698.4A Active EP4446587B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung
EP20735496.0A Active EP4168676B1 (de) 2020-06-17 2020-06-17 Mikromembranpumpeinrichtung

Country Status (5)

Country Link
US (2) US12404849B2 (de)
EP (3) EP4660458A3 (de)
JP (1) JP7583069B2 (de)
DE (1) DE112020007326A5 (de)
WO (1) WO2021254611A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4660458A3 (de) * 2020-06-17 2025-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromembranpumpeinrichtung
US12497286B2 (en) 2021-07-09 2025-12-16 Frore Systems Inc. Anchor and cavity configuration for MEMS-based cooling systems
WO2023283448A2 (en) * 2021-07-09 2023-01-12 Frore Systems Inc. Anchor and cavity configuration for mems-based cooling systems
US12581620B2 (en) 2021-07-12 2026-03-17 Frore Systems Inc. Exit channel configuration for MEMS-based actuator systems
WO2025027318A1 (en) * 2023-07-31 2025-02-06 Cambridge Mechatronics Limited Fluid delivery device
US20250177182A1 (en) * 2023-12-04 2025-06-05 Boston Scientific Scimed, Inc. Formation of a chamber for a fluidic device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19706513A1 (de) * 1997-02-19 1998-08-20 Inst Mikro Und Informationstec Mikrodosiervorrichtung und Verfahren zum Betreiben derselben
DE19918694A1 (de) * 1998-04-27 1999-11-04 Matsushita Electric Works Ltd Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens
EP1128075A2 (de) * 2000-02-24 2001-08-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung
DE102005058080A1 (de) * 2005-12-06 2007-06-14 Albert-Ludwigs-Universität Freiburg Überwachungseinheit zur Fluiddosierung und Mikrodosieranordnung
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

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US5224843A (en) * 1989-06-14 1993-07-06 Westonbridge International Ltd. Two valve micropump with improved outlet
JP2890601B2 (ja) * 1990-02-08 1999-05-17 株式会社デンソー 半導体センサ
US6543110B1 (en) * 1997-02-07 2003-04-08 Sri International Electroactive polymer fabrication
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
JP3740673B2 (ja) 1999-11-10 2006-02-01 株式会社日立製作所 ダイヤフラムポンプ
US6856073B2 (en) * 2002-03-15 2005-02-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electro-active device using radial electric field piezo-diaphragm for control of fluid movement
EP2352534B1 (de) 2008-10-22 2021-05-05 Debiotech S.A. Mems fluidpumpe mit integriertem drucksensor zur detektion von fehlfunktionen
AU2009325699B2 (en) * 2008-12-09 2013-08-22 Bridgestone Corporation Device for acquiring information regarding the inside of a tire
FR2939482B1 (fr) * 2008-12-10 2011-01-14 Rowenta Werke Gmbh Pompe piezoelectrique pour appareil electromenager
FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
BR112012022433B1 (pt) * 2010-03-05 2021-06-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Método para fabricação de um transdutor de dobra, uma microbomba e uma microválvula, microbomba e microválvula
US20130000758A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator
US9279421B2 (en) * 2012-02-10 2016-03-08 Kci Licensing, Inc. Systems and methods for electrochemical detection in a disc pump
EP2812577B1 (de) * 2012-02-10 2017-09-06 KCI Licensing, Inc. Systeme und verfahren zur überwachung eines scheibenpumpensystem mittels rfid
AU2013216967A1 (en) * 2012-02-10 2014-08-28 Kci Licensing, Inc. Systems and methods for monitoring reduced pressure supplied by a disc pump system
EP3185931A1 (de) 2014-08-26 2017-07-05 Debiotech S.A. Erkennung einer infusionsanomalie
US20180010589A1 (en) 2016-04-04 2018-01-11 Innovative Micro Technology Microfabricated fluid pump
JP6809866B2 (ja) 2016-10-17 2021-01-06 京セラ株式会社 マイクロポンプおよび流体移送装置
DE102018207858B4 (de) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
US20210190065A1 (en) * 2019-12-20 2021-06-24 Ingersoll-Rand Industrial U.S., Inc. Fluid pumping systems incorporating diaphragm pumps and strain measurement devices
EP4660458A3 (de) * 2020-06-17 2025-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromembranpumpeinrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19706513A1 (de) * 1997-02-19 1998-08-20 Inst Mikro Und Informationstec Mikrodosiervorrichtung und Verfahren zum Betreiben derselben
DE19918694A1 (de) * 1998-04-27 1999-11-04 Matsushita Electric Works Ltd Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens
EP1128075A2 (de) * 2000-02-24 2001-08-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung
DE102005058080A1 (de) * 2005-12-06 2007-06-14 Albert-Ludwigs-Universität Freiburg Überwachungseinheit zur Fluiddosierung und Mikrodosieranordnung
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

Also Published As

Publication number Publication date
EP4446587B1 (de) 2026-03-25
EP4446587A3 (de) 2024-12-18
WO2021254611A1 (de) 2021-12-23
EP4168676A1 (de) 2023-04-26
EP4446587A2 (de) 2024-10-16
US12404849B2 (en) 2025-09-02
US20230121697A1 (en) 2023-04-20
DE112020007326A5 (de) 2023-04-06
EP4168676B1 (de) 2024-09-11
US20250369433A1 (en) 2025-12-04
JP2023529992A (ja) 2023-07-12
EP4660458A2 (de) 2025-12-10
JP7583069B2 (ja) 2024-11-13

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