EP4702584A1 - Kapazitiver rf mikroschalter für hochleistungsanwendungen - Google Patents

Kapazitiver rf mikroschalter für hochleistungsanwendungen

Info

Publication number
EP4702584A1
EP4702584A1 EP24720544.6A EP24720544A EP4702584A1 EP 4702584 A1 EP4702584 A1 EP 4702584A1 EP 24720544 A EP24720544 A EP 24720544A EP 4702584 A1 EP4702584 A1 EP 4702584A1
Authority
EP
European Patent Office
Prior art keywords
membrane
dielectric material
line
capacitive
radiofrequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24720544.6A
Other languages
English (en)
French (fr)
Inventor
José-Paolo MARTINS
Matthieu Le Baillif
Etienne EUSTACHE
Shailendra Bansropun
Afshin Ziaei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Publication of EP4702584A1 publication Critical patent/EP4702584A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0027—Movable electrode connected to ground in the open position, for improving isolation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
EP24720544.6A 2023-04-27 2024-04-25 Kapazitiver rf mikroschalter für hochleistungsanwendungen Pending EP4702584A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2304266A FR3148318B1 (fr) 2023-04-27 2023-04-27 Micro-commutateur RF capacitif pour des applications fortes puissances
PCT/EP2024/061480 WO2024223788A1 (fr) 2023-04-27 2024-04-25 Micro-commutateur rf capacitif pour des applications fortes puissances

Publications (1)

Publication Number Publication Date
EP4702584A1 true EP4702584A1 (de) 2026-03-04

Family

ID=88504774

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24720544.6A Pending EP4702584A1 (de) 2023-04-27 2024-04-25 Kapazitiver rf mikroschalter für hochleistungsanwendungen

Country Status (3)

Country Link
EP (1) EP4702584A1 (de)
FR (1) FR3148318B1 (de)
WO (1) WO2024223788A1 (de)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1343190A3 (de) * 2002-03-08 2005-04-20 Murata Manufacturing Co., Ltd. Element mit veränderlicher Kapazität
US6998946B2 (en) * 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
FR2901917B1 (fr) * 2006-05-31 2008-12-19 Thales Sa Circulateur radiofrequence ou hyperfrequence

Also Published As

Publication number Publication date
FR3148318A1 (fr) 2024-11-01
FR3148318B1 (fr) 2025-04-11
WO2024223788A1 (fr) 2024-10-31

Similar Documents

Publication Publication Date Title
EP1639613B1 (de) Bistabiler mikroschalter mit geringer stromaufnahme
EP1636130B1 (de) Integrierte schaltung auf hochleistungschip
EP3032598B1 (de) Kondensator mit variabler kapazität, der eine materialschicht mit zustandsveränderung umfasst, und verfahren zur variation der kapazität eines kondensators
CN101213631B (zh) 电容性射频微机电系统器件及其制造方法
EP2507160B1 (de) Elektromechanische systeme, wellenleiter und herstellungsverfahren mit dichteveränderten opferschichten
EP1543535B1 (de) Herstellungsverfahren eines elektrostatisch betriebenen mikroschalters mit kurzer antwortzeit und leistungsumschaltung
WO2018142052A1 (fr) Structure pour application radiofréquence
EP2772943A1 (de) Herstellungsverfahren einer mikroelektronischen Vorrichtung und entsprechende Vorrichtung
EP2024986B1 (de) Hochfrequenz- oder hyperfrequenz-mikroschalterstruktur und verfahren zur herstellung einer solchen struktur
FR3093255A1 (fr) Amplificateur paramétrique à onde progressive à basse impédance caractéristique et son procédé de fabrication
US20090135541A1 (en) Actuator and electronic circuit based thereon
EP1438728A2 (de) Mikroeinstellbarer kondensator (mems) mit weitem variationsbereich und niedriger betätigungsspannung
WO2024223788A1 (fr) Micro-commutateur rf capacitif pour des applications fortes puissances
FR3066854B1 (fr) Dispositif magnetique integre a inductance variable et procede de realisation d'un tel dispositif
FR2815774A1 (fr) Resonateur electrique
EP2517354A1 (de) Auf mineralischem elektret basierende elektrochemische vorrichtung und verfahren zu ihrer herstellung
EP4079680B1 (de) Vorrichtung zur elektromechanischen umwandlung und system, das eine solche vorrichtung verwendet
Zhao et al. Performance comparison of high resistivity silicon, silicon with grounding plane and glass as substrate of ion trap for quantum information processing
EP2735009B1 (de) Rf-mems-bauelement mit ferroelektrischem material
FR3037187B1 (fr) Composant inductif magnetoelectrique accorde de maniere electrostatique
FR3122415A1 (fr) Micro-commutateur RF à capacité structurée
JP2009118627A (ja) アクチュエータ
FR3022691A1 (fr) Dispositif capacitif commandable integre
FR2930370A1 (fr) Composants microsystemes comportant une membrane comprenant des nanotubes.
Ding et al. Nanocomposite Contact Material for MEMS Switches

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20251027

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR