EP4726764A1 - Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons - Google Patents
Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électronsInfo
- Publication number
- EP4726764A1 EP4726764A1 EP24206420.2A EP24206420A EP4726764A1 EP 4726764 A1 EP4726764 A1 EP 4726764A1 EP 24206420 A EP24206420 A EP 24206420A EP 4726764 A1 EP4726764 A1 EP 4726764A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electron beam
- aperture
- ray
- target
- ray source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/165—Shielding arrangements
- H01J2235/166—Shielding arrangements against electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
Landscapes
- X-Ray Techniques (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP24206420.2A EP4726764A1 (fr) | 2024-10-14 | 2024-10-14 | Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons |
| PCT/EP2025/079067 WO2026082535A1 (fr) | 2024-10-14 | 2025-10-09 | Atténuation de rayonnement secondaire dans des sources de rayons x à impact électronique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP24206420.2A EP4726764A1 (fr) | 2024-10-14 | 2024-10-14 | Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP4726764A1 true EP4726764A1 (fr) | 2026-04-15 |
Family
ID=93119568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP24206420.2A Pending EP4726764A1 (fr) | 2024-10-14 | 2024-10-14 | Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP4726764A1 (fr) |
| WO (1) | WO2026082535A1 (fr) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB780682A (en) * | 1954-07-14 | 1957-08-07 | Gen Electric | Improvements in and relating to x-ray microscopes |
| EP2092545B1 (fr) * | 2006-11-10 | 2012-08-29 | Philips Intellectual Property & Standards GmbH | Tube à rayons x à multiples points focaux avec de multiples unités de manipulation du faisceau électronique |
| CN105140088A (zh) * | 2015-07-24 | 2015-12-09 | 北京航空航天大学 | 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法 |
| US9786465B2 (en) * | 2012-12-27 | 2017-10-10 | Tsinghua University | Apparatuses and methods for generating distributed x-rays |
-
2024
- 2024-10-14 EP EP24206420.2A patent/EP4726764A1/fr active Pending
-
2025
- 2025-10-09 WO PCT/EP2025/079067 patent/WO2026082535A1/fr active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB780682A (en) * | 1954-07-14 | 1957-08-07 | Gen Electric | Improvements in and relating to x-ray microscopes |
| EP2092545B1 (fr) * | 2006-11-10 | 2012-08-29 | Philips Intellectual Property & Standards GmbH | Tube à rayons x à multiples points focaux avec de multiples unités de manipulation du faisceau électronique |
| US9786465B2 (en) * | 2012-12-27 | 2017-10-10 | Tsinghua University | Apparatuses and methods for generating distributed x-rays |
| CN105140088A (zh) * | 2015-07-24 | 2015-12-09 | 北京航空航天大学 | 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2026082535A1 (fr) | 2026-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7425701B2 (en) | Electron-beam device and detector system | |
| JP7336926B2 (ja) | 性能が向上されたマルチ電子ビーム撮像装置 | |
| KR20070118964A (ko) | 전자빔장치 및 수차보정광학장치 | |
| US7838830B2 (en) | Charged particle beam apparatus and method for operating a charged particle beam apparatus | |
| JP3806647B2 (ja) | 帯電粒子装置 | |
| US20250125115A1 (en) | Multi-beam system and multi-beam forming unit with reduced sensitivity to secondary radiation | |
| EP4726764A1 (fr) | Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons | |
| JP7188910B2 (ja) | 粒子ビームを生成するための粒子源及び粒子光学装置 | |
| JP4729403B2 (ja) | 電子ビーム露光装置 | |
| EP4451308A1 (fr) | Atténuation de rayonnement secondaire | |
| WO2020235003A1 (fr) | Canon à électrons et dispositif à faisceau de particules chargées équipé d'un canon à électrons | |
| US11404260B2 (en) | Input lens and electron spectrometer | |
| US11094498B2 (en) | Monochromator and charged particle beam system | |
| EP4730386A1 (fr) | Dispositif d'inspection par faisceau d'électrons | |
| TW202614117A (zh) | 電子顯微鏡 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR |