EP4726764A1 - Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons - Google Patents

Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons

Info

Publication number
EP4726764A1
EP4726764A1 EP24206420.2A EP24206420A EP4726764A1 EP 4726764 A1 EP4726764 A1 EP 4726764A1 EP 24206420 A EP24206420 A EP 24206420A EP 4726764 A1 EP4726764 A1 EP 4726764A1
Authority
EP
European Patent Office
Prior art keywords
electron beam
aperture
ray
target
ray source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24206420.2A
Other languages
German (de)
English (en)
Inventor
Björn HANSSON
Robert Rosén
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excillum AB
Original Assignee
Excillum AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Excillum AB filed Critical Excillum AB
Priority to EP24206420.2A priority Critical patent/EP4726764A1/fr
Priority to PCT/EP2025/079067 priority patent/WO2026082535A1/fr
Publication of EP4726764A1 publication Critical patent/EP4726764A1/fr
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00X-ray tubes
    • H01J2235/16Vessels
    • H01J2235/165Shielding arrangements
    • H01J2235/166Shielding arrangements against electromagnetic radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/14Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147Spot size control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/16Vessels; Containers; Shields associated therewith
    • H01J35/18Windows
    • H01J35/186Windows used as targets or X-ray converters

Landscapes

  • X-Ray Techniques (AREA)
EP24206420.2A 2024-10-14 2024-10-14 Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons Pending EP4726764A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP24206420.2A EP4726764A1 (fr) 2024-10-14 2024-10-14 Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons
PCT/EP2025/079067 WO2026082535A1 (fr) 2024-10-14 2025-10-09 Atténuation de rayonnement secondaire dans des sources de rayons x à impact électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24206420.2A EP4726764A1 (fr) 2024-10-14 2024-10-14 Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons

Publications (1)

Publication Number Publication Date
EP4726764A1 true EP4726764A1 (fr) 2026-04-15

Family

ID=93119568

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24206420.2A Pending EP4726764A1 (fr) 2024-10-14 2024-10-14 Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons

Country Status (2)

Country Link
EP (1) EP4726764A1 (fr)
WO (1) WO2026082535A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB780682A (en) * 1954-07-14 1957-08-07 Gen Electric Improvements in and relating to x-ray microscopes
EP2092545B1 (fr) * 2006-11-10 2012-08-29 Philips Intellectual Property & Standards GmbH Tube à rayons x à multiples points focaux avec de multiples unités de manipulation du faisceau électronique
CN105140088A (zh) * 2015-07-24 2015-12-09 北京航空航天大学 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法
US9786465B2 (en) * 2012-12-27 2017-10-10 Tsinghua University Apparatuses and methods for generating distributed x-rays

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB780682A (en) * 1954-07-14 1957-08-07 Gen Electric Improvements in and relating to x-ray microscopes
EP2092545B1 (fr) * 2006-11-10 2012-08-29 Philips Intellectual Property & Standards GmbH Tube à rayons x à multiples points focaux avec de multiples unités de manipulation du faisceau électronique
US9786465B2 (en) * 2012-12-27 2017-10-10 Tsinghua University Apparatuses and methods for generating distributed x-rays
CN105140088A (zh) * 2015-07-24 2015-12-09 北京航空航天大学 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法

Also Published As

Publication number Publication date
WO2026082535A1 (fr) 2026-04-23

Similar Documents

Publication Publication Date Title
US7425701B2 (en) Electron-beam device and detector system
JP7336926B2 (ja) 性能が向上されたマルチ電子ビーム撮像装置
KR20070118964A (ko) 전자빔장치 및 수차보정광학장치
US7838830B2 (en) Charged particle beam apparatus and method for operating a charged particle beam apparatus
JP3806647B2 (ja) 帯電粒子装置
US20250125115A1 (en) Multi-beam system and multi-beam forming unit with reduced sensitivity to secondary radiation
EP4726764A1 (fr) Atténuation de rayonnement secondaire dans des sources de rayons x à impact d'électrons
JP7188910B2 (ja) 粒子ビームを生成するための粒子源及び粒子光学装置
JP4729403B2 (ja) 電子ビーム露光装置
EP4451308A1 (fr) Atténuation de rayonnement secondaire
WO2020235003A1 (fr) Canon à électrons et dispositif à faisceau de particules chargées équipé d'un canon à électrons
US11404260B2 (en) Input lens and electron spectrometer
US11094498B2 (en) Monochromator and charged particle beam system
EP4730386A1 (fr) Dispositif d'inspection par faisceau d'électrons
TW202614117A (zh) 電子顯微鏡

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR