EP4731396A2 - Substrattransportvorrichtung - Google Patents

Substrattransportvorrichtung

Info

Publication number
EP4731396A2
EP4731396A2 EP24826681.9A EP24826681A EP4731396A2 EP 4731396 A2 EP4731396 A2 EP 4731396A2 EP 24826681 A EP24826681 A EP 24826681A EP 4731396 A2 EP4731396 A2 EP 4731396A2
Authority
EP
European Patent Office
Prior art keywords
substrate
end effector
center
transport apparatus
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24826681.9A
Other languages
English (en)
French (fr)
Inventor
Brian D. MAXWELL
Jairo T. Moura
Roumen Botev
Florence YIP
Robert T. Caveney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Automation US LLC
Original Assignee
Brooks Automation US LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation US LLC filed Critical Brooks Automation US LLC
Publication of EP4731396A2 publication Critical patent/EP4731396A2/de
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Human Computer Interaction (AREA)
EP24826681.9A 2023-06-22 2024-06-21 Substrattransportvorrichtung Pending EP4731396A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202363509553P 2023-06-22 2023-06-22
PCT/US2024/034894 WO2024263830A2 (en) 2023-06-22 2024-06-21 Substrate transport apparatus

Publications (1)

Publication Number Publication Date
EP4731396A2 true EP4731396A2 (de) 2026-04-29

Family

ID=93936294

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24826681.9A Pending EP4731396A2 (de) 2023-06-22 2024-06-21 Substrattransportvorrichtung

Country Status (5)

Country Link
EP (1) EP4731396A2 (de)
KR (1) KR20260026528A (de)
CN (1) CN121729309A (de)
TW (1) TW202517416A (de)
WO (1) WO2024263830A2 (de)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10755960B2 (en) * 2014-11-04 2020-08-25 Brooks Automation, Inc. Wafer aligner
KR102587203B1 (ko) * 2015-07-13 2023-10-10 브룩스 오토메이션 인코퍼레이티드 온 더 플라이 자동 웨이퍼 센터링 방법 및 장치
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation

Also Published As

Publication number Publication date
WO2024263830A2 (en) 2024-12-26
TW202517416A (zh) 2025-05-01
WO2024263830A3 (en) 2025-04-03
KR20260026528A (ko) 2026-02-26
CN121729309A (zh) 2026-03-24

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