ES2010381A6 - Sistema de reostriccion de plasma y metodo para usar el mismo. - Google Patents

Sistema de reostriccion de plasma y metodo para usar el mismo.

Info

Publication number
ES2010381A6
ES2010381A6 ES8803711A ES8803711A ES2010381A6 ES 2010381 A6 ES2010381 A6 ES 2010381A6 ES 8803711 A ES8803711 A ES 8803711A ES 8803711 A ES8803711 A ES 8803711A ES 2010381 A6 ES2010381 A6 ES 2010381A6
Authority
ES
Spain
Prior art keywords
plasma
reostriction
fluid
incoherent light
plastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES8803711A
Other languages
English (en)
Inventor
John F Asmus
Ralph H Lovberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GERENTES de la UNIVERSIDAD DE
University of California
Original Assignee
GERENTES de la UNIVERSIDAD DE
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GERENTES de la UNIVERSIDAD DE, University of California filed Critical GERENTES de la UNIVERSIDAD DE
Publication of ES2010381A6 publication Critical patent/ES2010381A6/es
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/04—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using magnetic fields substantially generated by the discharge in the plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0442—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/045—Electric field

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • On-Site Construction Work That Accompanies The Preparation And Application Of Concrete (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

SISTEMA DE REOSTRICCION DE PLASMA Y METODO PARA USAR EL MISMO. UN SISTEMA DE REOSTRICCION DE PLASMA INCLUYE UN DISPOSITIVO DE PLASMA CONSISTENTE EN UNA NUBE PREACONDICIONADORA DE VAPOR TENUE QUE RODEA A UNA CORRIENTE DE FLUIDO FINA FLUYENTE CENTRAL, ESTRECHA, DE FLUIDO BAJO PRESION. CONECTADO ELECTRICAMENTE AL DISPOSITIVO DE REOSTRICCION DEL CHORRO DE FLUIDO SE ENCUENTRA UN DISPOSITIVO DE DESCARGA PARA QUE APORTE UN FLUJO ELECTRICO A TRAVES DE UNA PARTE DE LA CORRIENTE DE FLUIDO, PARA ESTABLECER UNA LUZ INCOHERENTE EMISORA DE PLASMA PARA FABRICAR SEMICONDUCTORES INCLUYE LA EXPOSICION DE UNA PASTILLA SEMICONDUCTORA A LA LUZ INCOHERENTE EMITIDA POR EL PLASMA, PARA FINES DE RECOCIDO O DE MORDENTADO.
ES8803711A 1987-12-07 1988-12-05 Sistema de reostriccion de plasma y metodo para usar el mismo. Expired ES2010381A6 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/129,152 US4889605A (en) 1987-12-07 1987-12-07 Plasma pinch system

Publications (1)

Publication Number Publication Date
ES2010381A6 true ES2010381A6 (es) 1989-11-01

Family

ID=22438680

Family Applications (1)

Application Number Title Priority Date Filing Date
ES8803711A Expired ES2010381A6 (es) 1987-12-07 1988-12-05 Sistema de reostriccion de plasma y metodo para usar el mismo.

Country Status (12)

Country Link
US (1) US4889605A (es)
EP (1) EP0390871B1 (es)
JP (1) JPH03501500A (es)
KR (1) KR930008523B1 (es)
CN (1) CN1043846A (es)
AT (1) ATE123371T1 (es)
AU (1) AU2941389A (es)
CA (1) CA1307356C (es)
DE (1) DE3853919T2 (es)
ES (1) ES2010381A6 (es)
IL (1) IL88546A0 (es)
WO (1) WO1989005515A1 (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE127651T1 (de) * 1989-05-04 1995-09-15 Univ California Vorrichtung und verfahren zur behandlung von materialien.
US5102776A (en) * 1989-11-09 1992-04-07 Cornell Research Foundation, Inc. Method and apparatus for microlithography using x-pinch x-ray source
US6452199B1 (en) * 1997-05-12 2002-09-17 Cymer, Inc. Plasma focus high energy photon source with blast shield
US6541786B1 (en) * 1997-05-12 2003-04-01 Cymer, Inc. Plasma pinch high energy with debris collector
US6277202B1 (en) 1997-08-27 2001-08-21 Environmental Surface Technologies Method and apparatus for utilizing a laser-guided gas-embedded pinchlamp device
NZ336412A (en) * 1998-06-26 2001-01-26 Meinan Machinery Works Centering log on veneer lathe by rotating log through one revolution to determine centres of each end
US6445134B1 (en) 1999-11-30 2002-09-03 Environmental Surface Technologies Inner/outer coaxial tube arrangement for a plasma pinch chamber
US7059249B2 (en) * 2001-01-23 2006-06-13 United Defense Lp Transverse plasma injector ignitor
WO2006099190A2 (en) * 2005-03-11 2006-09-21 Perkinelmer, Inc. Plasmas and methods of using them
US7557366B2 (en) * 2006-05-04 2009-07-07 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
EP2534672B1 (en) 2010-02-09 2016-06-01 Energetiq Technology Inc. Laser-driven light source
US11587781B2 (en) 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition
US12165856B2 (en) 2022-02-21 2024-12-10 Hamamatsu Photonics K.K. Inductively coupled plasma light source
US12144072B2 (en) 2022-03-29 2024-11-12 Hamamatsu Photonics K.K. All-optical laser-driven light source with electrodeless ignition
US12156322B2 (en) 2022-12-08 2024-11-26 Hamamatsu Photonics K.K. Inductively coupled plasma light source with switched power supply
US12578076B2 (en) 2023-06-05 2026-03-17 Hamamatsu Photonics K.K. Dual-output laser-driven light source

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007430A (en) * 1969-10-14 1977-02-08 Nasa Continuous plasma laser
US3946382A (en) * 1970-01-28 1976-03-23 The United States Of America As Represented By The Secretary Of The Navy Search radar adaptive video processor
US3946332A (en) * 1974-06-13 1976-03-23 Samis Michael A High power density continuous wave plasma glow jet laser system
US4369514A (en) * 1980-10-30 1983-01-18 Bell Telephone Laboratories, Incorporated Recombination laser
US4450568A (en) * 1981-11-13 1984-05-22 Maxwell Laboratories, Inc. Pumping a photolytic laser utilizing a plasma pinch
US4641316A (en) * 1982-03-01 1987-02-03 Applied Electron Corp. D.C. electron beam method and apparatus for continuous laser excitation
US4454835A (en) * 1982-09-13 1984-06-19 The United States Of America As Represented By The Secretary Of The Navy Internal photolysis reactor
JPS59129772A (ja) * 1983-01-18 1984-07-26 Ushio Inc 光化学蒸着装置
US4525381A (en) * 1983-02-09 1985-06-25 Ushio Denki Kabushiki Kaisha Photochemical vapor deposition apparatus
JPS60175351A (ja) * 1984-02-14 1985-09-09 Nippon Telegr & Teleph Corp <Ntt> Ｘ線発生装置およびｘ線露光法

Also Published As

Publication number Publication date
IL88546A0 (en) 1989-06-30
CN1043846A (zh) 1990-07-11
JPH03501500A (ja) 1991-04-04
US4889605A (en) 1989-12-26
EP0390871B1 (en) 1995-05-31
DE3853919T2 (de) 1996-02-15
EP0390871A4 (en) 1991-12-11
ATE123371T1 (de) 1995-06-15
WO1989005515A1 (en) 1989-06-15
KR930008523B1 (ko) 1993-09-09
DE3853919D1 (de) 1995-07-06
EP0390871A1 (en) 1990-10-10
KR900701034A (ko) 1990-08-17
CA1307356C (en) 1992-09-08
AU2941389A (en) 1989-07-05

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Legal Events

Date Code Title Description
SA6 Expiration date (snapshot 920101)

Free format text: 2008-12-05