ES2015459A6 - Temperature controlled distributor beam for chemical vapor deposition. - Google Patents

Temperature controlled distributor beam for chemical vapor deposition.

Info

Publication number
ES2015459A6
ES2015459A6 ES898903138A ES8903138A ES2015459A6 ES 2015459 A6 ES2015459 A6 ES 2015459A6 ES 898903138 A ES898903138 A ES 898903138A ES 8903138 A ES8903138 A ES 8903138A ES 2015459 A6 ES2015459 A6 ES 2015459A6
Authority
ES
Spain
Prior art keywords
sheet
impellent
glass
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES898903138A
Other languages
Spanish (es)
Inventor
William M Greenberg
Randall L Bauman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of ES2015459A6 publication Critical patent/ES2015459A6/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

APARATO PARA REVESTIR UNA SUPERFICIE DE UNA HOJA DE VIDRIO. UN PUENTE DISTRIBUIDOR PARA DEPOSITAR MATERIAL DE REVESTIMIENTO SOBRE LA SUPERFICIE DE UNA HOJA O LAMINA DE VIDRIO INCLUYE UNA CAMARA IMPELENTE PARA CADA GAS QUE SE HA DE MEZCLAR. LAS CAMARAS IMPELENTES ESTAN RODEADAS POR UN CONDUCTO DE FLUIDO DE REFRIGERACION Y HAY PREVISTOS ELEMENTOS DE CALENTAMIENTO PARA CONTROL DE LA TEMPERATURA. LOS TERMOPARES GENERAN SEÑALES QUE REPRESENTAN TEMPERATURAS REALES Y LOS CALENTADORES SON CONTROLADOS PARA MANTENER UNA TEMPERATURA OPTIMA PARA LOS GASES CUANDO CIRCULAN DESDE LAS CAMARAS IMPELENTES A TRAVES DE UNA CAMARA DE MEZCLADO A LA SUPERFICIE DE LA LAMINA DE VIDRIO QUE ESTA SITUADA POR DEBAJO DE UNA SALIDA DESDE LA CAMARA DE MEZCLADO. UNOS MEDIOS SUJETADORES APLICAN UNA PRESION DE FIJACION INCREMENTADA A LA ESTRUCTURA DEL PUENTE A MEDIDA QUE LA TEMPERATURA AUMENTA, PARA INCREMENTAR EL REGIMEN DE TRANSMISION DE CALOR AL FLUIDO DE REFRIGERACION.APPARATUS FOR COATING A SURFACE OF A GLASS SHEET. A DISTRIBUTOR BRIDGE TO DEPOSIT COATING MATERIAL ON THE SURFACE OF A SHEET OR SHEET OF GLASS INCLUDES AN IMPELLENT CHAMBER FOR EACH GAS TO BE MIXED. THE IMPELLENT CHAMBERS ARE SURROUNDED BY A COOLING FLUID DUCT AND HEATING ELEMENTS ARE PROVIDED FOR TEMPERATURE CONTROL. THE THERMOCOUPLES GENERATE SIGNALS REPRESENTING REAL TEMPERATURES AND THE HEATERS ARE CONTROLLED TO MAINTAIN AN OPTIMAL TEMPERATURE FOR THE GASES WHEN THEY CIRCULATE FROM THE IMPELLENT CHAMBERS THROUGH A MIXING CHAMBER TO THE SURFACE OF THE GLASS SHEET BY SIDE GLASS EXIT FROM THE MIXING CHAMBER. FASTENING MEANS APPLY AN INCREASED FIXING PRESSURE TO THE BRIDGE STRUCTURE AS THE TEMPERATURE INCREASES, TO INCREASE THE RATE OF HEAT TRANSMISSION TO THE REFRIGERATION FLUID.

ES898903138A 1988-09-16 1989-09-15 Temperature controlled distributor beam for chemical vapor deposition. Expired - Lifetime ES2015459A6 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24544488A 1988-09-16 1988-09-16

Publications (1)

Publication Number Publication Date
ES2015459A6 true ES2015459A6 (en) 1990-08-16

Family

ID=22926680

Family Applications (1)

Application Number Title Priority Date Filing Date
ES898903138A Expired - Lifetime ES2015459A6 (en) 1988-09-16 1989-09-15 Temperature controlled distributor beam for chemical vapor deposition.

Country Status (11)

Country Link
EP (1) EP0391996A4 (en)
JP (1) JPH03501474A (en)
KR (1) KR900702073A (en)
AU (1) AU618412B2 (en)
BR (1) BR8907091A (en)
CA (1) CA1332281C (en)
ES (1) ES2015459A6 (en)
FI (1) FI902414A7 (en)
MX (1) MX171806B (en)
TW (1) TW239165B (en)
WO (1) WO1990002826A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672519B1 (en) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int NOZZLE WITH HEAVY DOWNSTREAM HEEL, FOR DEPOSITING A COATING LAYER ON A TAPE OF GLASS, BY PYROLYSIS OF A GASEOUS MIXTURE.
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US6164557A (en) * 1998-04-30 2000-12-26 Sioux Steam Cleaner Corporation Fluid temperature control for a heated fluid cleaner with multiple outlets
JP4800845B2 (en) * 2006-05-30 2011-10-26 積水化学工業株式会社 Plasma processing equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100962A (en) * 1977-02-28 1978-07-18 James H. Housman Casting die
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass

Also Published As

Publication number Publication date
WO1990002826A1 (en) 1990-03-22
EP0391996A1 (en) 1990-10-17
JPH03501474A (en) 1991-04-04
MX171806B (en) 1993-11-15
EP0391996A4 (en) 1991-07-31
CA1332281C (en) 1994-10-11
TW239165B (en) 1995-01-21
AU4308489A (en) 1990-04-02
BR8907091A (en) 1991-01-08
KR900702073A (en) 1990-12-05
FI902414A0 (en) 1990-05-15
AU618412B2 (en) 1991-12-19
FI902414A7 (en) 1990-05-15

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Legal Events

Date Code Title Description
SA6 Expiration date (snapshot 920101)

Free format text: 2009-09-15

FD1A Patent lapsed

Effective date: 20001102