ES2022498B3 - Capas de nitruros mezclados con por lo menos dos metales y el procedimiento para su fabricacion - Google Patents

Capas de nitruros mezclados con por lo menos dos metales y el procedimiento para su fabricacion

Info

Publication number
ES2022498B3
ES2022498B3 ES88103809T ES88103809T ES2022498B3 ES 2022498 B3 ES2022498 B3 ES 2022498B3 ES 88103809 T ES88103809 T ES 88103809T ES 88103809 T ES88103809 T ES 88103809T ES 2022498 B3 ES2022498 B3 ES 2022498B3
Authority
ES
Spain
Prior art keywords
metals
mixed
nitrures
layers
procedure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88103809T
Other languages
English (en)
Inventor
Helmut Freller
Peter Schack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of ES2022498B3 publication Critical patent/ES2022498B3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Products (AREA)
  • Powder Metallurgy (AREA)
  • Chemically Coating (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
ES88103809T 1987-03-23 1988-03-10 Capas de nitruros mezclados con por lo menos dos metales y el procedimiento para su fabricacion Expired - Lifetime ES2022498B3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3709468 1987-03-23

Publications (1)

Publication Number Publication Date
ES2022498B3 true ES2022498B3 (es) 1991-12-01

Family

ID=6323772

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88103809T Expired - Lifetime ES2022498B3 (es) 1987-03-23 1988-03-10 Capas de nitruros mezclados con por lo menos dos metales y el procedimiento para su fabricacion

Country Status (8)

Country Link
US (1) US4842710A (es)
EP (1) EP0284854B1 (es)
JP (1) JPS63255358A (es)
AT (1) ATE63144T1 (es)
DE (1) DE3862600D1 (es)
ES (1) ES2022498B3 (es)
GR (1) GR3001890T3 (es)
PT (1) PT87038B (es)

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US4962612A (en) * 1987-04-23 1990-10-16 Nisshin Steel Co., Ltd. Decorative panel as construction material
DE3825399C5 (de) * 1988-07-23 2005-05-12 Cemecon Ag PVD- oder Plasma- CVD-Beschichtung
US4992153A (en) * 1989-04-26 1991-02-12 Balzers Aktiengesellschaft Sputter-CVD process for at least partially coating a workpiece
US5254359A (en) * 1989-06-02 1993-10-19 Air Products And Chemicals, Inc. Method of forming titanium nitride coatings on carbon/graphite substrates by electric arc thermal spray process using titanium feed wire and nitrogen as the atomizing gas
KR930010710B1 (ko) * 1989-09-29 1993-11-08 스미토모 일렉트릭 인더스트리즈, 엘티디. 절삭공구 또는 내마모성공구용 표면피복 경질부재
US5045344A (en) * 1989-11-16 1991-09-03 Vapor Technologies, Inc. Method of making reflective articles
CH680369A5 (es) * 1989-11-22 1992-08-14 Balzers Hochvakuum
JP2767972B2 (ja) * 1990-05-14 1998-06-25 トヨタ自動車株式会社 ＴｉＡｌ系金属間化合物層の製造方法
DE59106090D1 (de) * 1991-01-21 1995-08-31 Balzers Hochvakuum Beschichtetes hochverschleissfestes Werkzeug und physikalisches Beschichtungsverfahren zur Beschichtung von hochverschleissfesten Werkzeugen.
US5330853A (en) * 1991-03-16 1994-07-19 Leybold Ag Multilayer Ti-Al-N coating for tools
DE4115616C2 (de) * 1991-03-16 1994-11-24 Leybold Ag Hartstoff-Mehrlagenschichtsystem für Werkzeuge
JPH05106022A (ja) * 1991-10-15 1993-04-27 Sumitomo Metal Mining Co Ltd 耐摩耗性硬質被膜の製造方法
DE69310493T2 (de) * 1992-08-14 1997-12-18 Hughes Aircraft Co Oberflächepräparation und beschichtungs-methode für titannitrid auf gusseisen
JPH09501612A (ja) * 1994-04-08 1997-02-18 マーク エー． レイ， 選択的プラズマ成長
US5518780A (en) * 1994-06-16 1996-05-21 Ford Motor Company Method of making hard, transparent amorphous hydrogenated boron nitride films
CH688863A5 (de) * 1994-06-24 1998-04-30 Balzers Hochvakuum Verfahren zum Beschichten mindestens eines Werkstueckes und Anlage hierfuer.
DE19526387C2 (de) * 1994-07-19 1998-12-10 Sumitomo Metal Mining Co Doppelt beschichteter Stahlverbundgegenstand und Verfahren zu dessen Herstellung
WO1996031899A1 (en) * 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
FR2745299B1 (fr) * 1996-02-27 1998-06-19 Centre Nat Rech Scient Procede de formation de revetements de ti1-xalxn
US5760474A (en) * 1996-07-09 1998-06-02 Micron Technology, Inc. Capacitor, integrated circuitry, diffusion barriers, and method for forming an electrically conductive diffusion barrier
DE69730576T2 (de) * 1996-12-04 2005-02-03 Sumitomo Electric Industries, Ltd. Beschichtetes Werkzeug und Verfahren zu seiner Herstellung
US6027619A (en) * 1996-12-19 2000-02-22 Micron Technology, Inc. Fabrication of field emission array with filtered vacuum cathodic arc deposition
DE19756588A1 (de) * 1997-12-18 1999-07-01 Hartec Ges Fuer Hartstoffe Und Schichtsystem, Verfahren zu seiner Herstellung sowie seine Verwendung
EP0972091A1 (en) * 1998-02-04 2000-01-19 OSG Corporation Multilayer coated tool
GB9910842D0 (en) * 1999-05-10 1999-07-07 Univ Nanyang Composite coatings
US6200649B1 (en) * 1999-07-21 2001-03-13 Southwest Research Institute Method of making titanium boronitride coatings using ion beam assisted deposition
DE10011649C1 (de) * 2000-02-28 2001-09-27 Fraunhofer Ges Forschung Verfahren zur Herstellung eines Dünnschichtsystems
DE10233222B4 (de) * 2001-07-23 2007-03-01 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
US6984675B2 (en) * 2001-11-28 2006-01-10 Resolution Specialty Materials Llc Formaldehyde-free binder compositions for simultaneous warp sizing and coloration of filament yarns
US6660133B2 (en) 2002-03-14 2003-12-09 Kennametal Inc. Nanolayered coated cutting tool and method for making the same
DE10362382B3 (de) * 2002-12-27 2017-08-17 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel Co., Ltd.) Harter Überzug mit hervorragender Haftung
US7226670B2 (en) 2003-04-28 2007-06-05 Oc Oerlikon Balzers Ag Work piece with a hard film of AlCr-containing material, and process for its production
JP2005271190A (ja) * 2003-12-05 2005-10-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
GB2425780B (en) * 2005-04-27 2007-09-05 Univ Sheffield Hallam PVD coated substrate
JP5192642B2 (ja) * 2005-11-11 2013-05-08 三菱重工業株式会社 表面被覆部材及びその製造方法ならびに工具及び工作装置
US20100143232A1 (en) * 2006-06-21 2010-06-10 Benedict James Costello Metal binary and ternary compounds produced by cathodic arc deposition
US8080312B2 (en) * 2006-06-22 2011-12-20 Kennametal Inc. CVD coating scheme including alumina and/or titanium-containing materials and method of making the same
DE102012107129A1 (de) * 2012-08-03 2014-02-06 Walter Ag TiAIN-beschichtetes Werkzeug
US9476114B2 (en) 2012-08-03 2016-10-25 Walter Ag TiAlN-coated tool
DE102015222820A1 (de) * 2015-11-19 2016-10-20 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Oberflächenbearbeitung eines Elements für eine mikrolithographische Projektionsbelichtungsanlage
CN107299330A (zh) * 2017-04-07 2017-10-27 苏州星蓝纳米技术有限公司 一种低内应力涂层及其制备方法
CN112930417A (zh) * 2018-10-26 2021-06-08 欧瑞康表面处理解决方案股份公司普费菲孔 用钛和/或硅微合金化的钒铝氮化物(VAlN)
JP7093149B2 (ja) * 2018-12-27 2022-06-29 日本特殊陶業株式会社 表面被覆切削工具

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE790940A (fr) * 1971-11-04 1973-03-01 Rca Corp Procede de reglage de la composition d'un film
US4060471A (en) * 1975-05-19 1977-11-29 Rca Corporation Composite sputtering method
CH640886A5 (de) * 1979-08-02 1984-01-31 Balzers Hochvakuum Verfahren zum aufbringen harter verschleissfester ueberzuege auf unterlagen.
CH643421B (fr) * 1980-04-10 Asu Composants Sa Procede de depot d'un revetement dur d'un compose d'or, cible de depot pour un tel procede et piece de joaillerie comportant un tel revetement.
US4419202A (en) * 1980-12-22 1983-12-06 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Metal coatings
JPS57147781A (en) * 1981-03-06 1982-09-11 Nec Corp Pattern matching device
JPS58153776A (ja) * 1982-03-05 1983-09-12 Citizen Watch Co Ltd 装飾部品の製造方法およびそれに用いるイオンプレ−テイング装置
US4716083A (en) * 1983-09-23 1987-12-29 Ovonic Synthetic Materials Company Disordered coating
FR2557562A1 (fr) * 1983-12-29 1985-07-05 Menn Roger Procede de fabrication de couches non conductrices a variation de composition atomique
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus

Also Published As

Publication number Publication date
PT87038A (pt) 1989-03-30
DE3862600D1 (de) 1991-06-06
US4842710A (en) 1989-06-27
ATE63144T1 (de) 1991-05-15
EP0284854A1 (de) 1988-10-05
GR3001890T3 (en) 1992-11-23
PT87038B (pt) 1995-03-01
EP0284854B1 (de) 1991-05-02
JPS63255358A (ja) 1988-10-21

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