ES2025710T3 - Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo. - Google Patents

Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo.

Info

Publication number
ES2025710T3
ES2025710T3 ES198888101515T ES88101515T ES2025710T3 ES 2025710 T3 ES2025710 T3 ES 2025710T3 ES 198888101515 T ES198888101515 T ES 198888101515T ES 88101515 T ES88101515 T ES 88101515T ES 2025710 T3 ES2025710 T3 ES 2025710T3
Authority
ES
Spain
Prior art keywords
chemical treatment
workpieces
cleaning
arrangement
wrapping box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198888101515T
Other languages
English (en)
Inventor
Manfred Kallweit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer Pharma AG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Application granted granted Critical
Publication of ES2025710T3 publication Critical patent/ES2025710T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0736—Methods for applying liquids, e.g. spraying
    • H05K2203/0746—Local treatment using a fluid jet, e.g. for removing or cleaning material; Providing mechanical pressure using a fluid jet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Coating Apparatus (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Absorbent Articles And Supports Therefor (AREA)

Abstract

LA INNOVACION SE TRATA DE UNA INSTALACION PARA LA DEPURACION O TRATAMIENTO QUIMICO DE PIEZAS DE TRABAJO, ESPECIALMENTE DE PLACAS DE CIRCUITO IMPRESO, MEDIANTE DISOLUCIONES, QUE SE DESPRENDEN DE TOBERAS SOBRE LA PIEZA DE TRABAJO, SE CARACTERIZA DE TAL MANERA, QUE ESTE SE FORMA DE UNA CAJA DE ENVUELTAS (3) CON CAJAS DE AFLUENCIA (5) DISPUESTAS BAJO TAL, DONDE LA CAJA DE ENVUELTAS (3) SE DISTRIBUYE MEDIANTE DE UN TABIQUE DE SEPARACION (4) EN DOS CAMARAS (7), DONDE SE ENCUENTRAN PLANOS DE PERFORACION (2), QUE ACOTAN LAS CAMARAS CONTRA LA PARED SUPERIOR DE ENVUELTAS, QUE ESTA FORMADA DE DOS MUESCAS DE LA TOBERA.
ES198888101515T 1987-02-25 1988-02-03 Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo. Expired - Lifetime ES2025710T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8703114U DE8703114U1 (de) 1987-02-25 1987-02-25 Einrichtung zur Reinigung oder chemischen Behandlung von Werkstücken

Publications (1)

Publication Number Publication Date
ES2025710T3 true ES2025710T3 (es) 1992-04-01

Family

ID=6805344

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198888101515T Expired - Lifetime ES2025710T3 (es) 1987-02-25 1988-02-03 Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo.

Country Status (6)

Country Link
US (1) US4846202A (es)
EP (1) EP0280078B1 (es)
JP (1) JPH0448872Y2 (es)
AT (1) AT395721B (es)
DE (2) DE8703114U1 (es)
ES (1) ES2025710T3 (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3916693A1 (de) * 1989-05-23 1990-11-29 Schering Ag Anordnung zur behandlung und/oder reinigung von gut, insbesondere von mit bohrungen versehenen leiterplatten
US5095926A (en) * 1990-01-16 1992-03-17 Wegner Paul C Apparatus for washing storage batteries
US5195547A (en) * 1991-11-01 1993-03-23 Allegheny Plastics, Inc. Pressurized weir for a fumeless pickling or cleaning system
JPH05291228A (ja) * 1992-04-07 1993-11-05 Fujitsu Ltd ウェーハ洗浄装置及び洗浄方法
DE19530989C1 (de) * 1995-08-23 1997-03-13 Atotech Deutschland Gmbh Verfahren zum Filmstrippen
US6269823B1 (en) * 1998-05-04 2001-08-07 Eagle-Picher Industries, Inc. Can washing apparatus with plastic risers
EP0959153A3 (en) 1998-05-20 2000-09-13 Process Automation International Limited An electroplating machine
US6261425B1 (en) 1998-08-28 2001-07-17 Process Automation International, Ltd. Electroplating machine
US6539963B1 (en) * 1999-07-14 2003-04-01 Micron Technology, Inc. Pressurized liquid diffuser
JP4215900B2 (ja) * 1999-08-13 2009-01-28 アルプス電気株式会社 ウェット処理用ノズル装置およびウェット処理装置
DE10255884B4 (de) * 2002-11-29 2006-05-11 Atotech Deutschland Gmbh Düsenanordnung
DE102004002421A1 (de) * 2004-01-16 2005-08-18 Atotech Deutschland Gmbh Düsenanordnung
DE102004053337A1 (de) * 2004-11-04 2006-05-11 Steag Hama Tech Ag Verfahren und Vorrichtung zum Behandeln von Substraten und Düseneinheit hierfür
DE102011004232B4 (de) * 2011-02-16 2024-04-18 Ecoclean Gmbh Düsenmodul und Reinigungsvorrichtung mit Düsenmodul

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2026027A (en) * 1934-06-27 1935-12-31 Ralph E Evans Gas burner
US2295522A (en) * 1940-09-12 1942-09-08 Linde Air Prod Co Blowpipe head
US2414874A (en) * 1942-09-17 1947-01-28 Union Carbide & Carbon Corp Welding
US3682185A (en) * 1970-03-10 1972-08-08 James J Murray Plated wire manufacturing cell
US3687145A (en) * 1970-06-26 1972-08-29 Inland Steel Co Quench system
US4227550A (en) * 1975-05-12 1980-10-14 Bowles Fluidics Corporation Liquid oscillator having control passages continuously communicating with ambient air
FR2335268A2 (fr) * 1974-01-04 1977-07-15 Fives Cail Babcock Dispositif de pulverisation notamment pour le refroidissement de produits coules en continu
US4076222A (en) * 1976-07-19 1978-02-28 Schaming Edward J Runout cooling method and apparatus for metal rolling mills
US4161285A (en) * 1977-12-22 1979-07-17 United Technologies Corporation Laser nozzle construction
DE2906648C3 (de) * 1979-02-21 1981-09-10 Alfred Kärcher GmbH & Co, 7057 Winnenden Spritzdüsenanordnung für Hochdruckreinigungsgeräte
US4367597A (en) * 1979-12-13 1983-01-11 Nippon Steel Corporation Gas-liquid cooling apparatus
GB2096490B (en) * 1981-04-13 1984-12-05 Davey Loewy Ltd Spraying apparatus
DE3528575A1 (de) * 1985-08-06 1987-02-19 Schering Ag Verfahren und einrichtung zur reinigung, aktivierung und/oder metallisierung von bohrloechern in horizontal gefuehrten leiterplatten

Also Published As

Publication number Publication date
EP0280078B1 (de) 1991-09-04
EP0280078A2 (de) 1988-08-31
JPS63149288U (es) 1988-09-30
US4846202A (en) 1989-07-11
DE8703114U1 (de) 1987-04-09
DE3864537D1 (de) 1991-10-10
ATA44088A (de) 1992-07-15
EP0280078A3 (en) 1989-03-08
AT395721B (de) 1993-02-25
JPH0448872Y2 (es) 1992-11-17

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