ES2025845T3 - Acelerometro pendular no condicionado a barra resonante. - Google Patents

Acelerometro pendular no condicionado a barra resonante.

Info

Publication number
ES2025845T3
ES2025845T3 ES198989400481T ES89400481T ES2025845T3 ES 2025845 T3 ES2025845 T3 ES 2025845T3 ES 198989400481 T ES198989400481 T ES 198989400481T ES 89400481 T ES89400481 T ES 89400481T ES 2025845 T3 ES2025845 T3 ES 2025845T3
Authority
ES
Spain
Prior art keywords
socket
beams
pendular
conditioned
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989400481T
Other languages
English (en)
Inventor
Yvon Amand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Application granted granted Critical
Publication of ES2025845T3 publication Critical patent/ES2025845T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • G01P1/006Details of instruments used for thermal compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00Measuring and testing
    • Y10S73/01Vibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

ACELEROMETRO UTILIZABLE CUANDO SE BUSCA UN PRECIO ESCASO, EN PARTICULAR PARA LAS MUNICIONES Y EL AUTOMOVIL, COMPORTA UNA MASA SISMICA PENDULAR (12) UNIDA A UN ZOCALO (16), UNA ARTICULACION (14) LE PERMITE DEBATIRSE EN LA DIRECCION DE UN EJE SENSIBLE Y UN CAPTADOR DE FUERZA CON VIGAS RESONANTES (12) UNIENDO LA MASA AL ZOCALO Y PROVISTA DE ELECTRODOS DE PUESTA EN VIBRACION DESTINADAS A SER ACOPLADAS A UN OSCILADOR Y A UN CIRCUITO DE MEDIDA DE FRECUENCIA. EL CAPTADOR COMPORTA AL MENOS DOS VIGAS VIBRANTES DE MATERIAL PIEZAELECTRICO, FIJADAS POR UN EXTREMO AL ZOCALO (16) PROVISTAS DE ELECTRODOS DE PUESTA EN VIBRACION EN FRECUENCIA DE RESONANCIA, UNA AL MENOS DE LAS VIGAS (20) QUE ESTA FIJADA A LA MASA POR SU EXTREMO OPUESTO AL ZOCALO PARA QUE LA APLICACION DE UNA ACELERACION SIGUIENDO AL EJE SENSIBLE CREE UNOS REFUERZOS DE TRACCION EN LA VIGA Y ESTANDO ORIENTADA PERPENDICULARMENTE AL EJE SENSIBLE.
ES198989400481T 1988-02-22 1989-02-21 Acelerometro pendular no condicionado a barra resonante. Expired - Lifetime ES2025845T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8802079A FR2627592B1 (fr) 1988-02-22 1988-02-22 Accelerometre pendulaire non asservi a poutre resonante

Publications (1)

Publication Number Publication Date
ES2025845T3 true ES2025845T3 (es) 1992-04-01

Family

ID=9363470

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989400481T Expired - Lifetime ES2025845T3 (es) 1988-02-22 1989-02-21 Acelerometro pendular no condicionado a barra resonante.

Country Status (7)

Country Link
US (1) US4939935A (es)
EP (1) EP0331557B1 (es)
JP (1) JPH01302166A (es)
CA (1) CA1323502C (es)
DE (1) DE68900327D1 (es)
ES (1) ES2025845T3 (es)
FR (1) FR2627592B1 (es)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5165279A (en) * 1989-07-06 1992-11-24 Sundstrand Corporation Monolithic accelerometer with flexurally mounted force transducer
US5115291A (en) * 1989-07-27 1992-05-19 Honeywell Inc. Electrostatic silicon accelerometer
FR2650895B1 (fr) * 1989-08-08 1991-10-11 Onera (Off Nat Aerospatiale) Capteur accelerometrique a poutres vibrant en flexion
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
EP0543901B1 (en) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithic accelerometer
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
FR2667157B1 (fr) * 1990-09-25 1994-06-10 Sextant Avionique Micro-accelerometre a resonateurs et procede de fabrication.
FR2668833A1 (fr) * 1990-11-05 1992-05-07 Sundstrand Data Control Accelerometre.
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
US5334901A (en) * 1993-04-30 1994-08-02 Alliedsignal Inc. Vibrating beam accelerometer
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
WO1997047977A1 (en) * 1996-06-11 1997-12-18 Alliedsignal Inc. Compensation of second-order non-linearity in sensors employing double-ended tuning forks
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
US6723284B1 (en) 1997-04-11 2004-04-20 University Of Pittsburgh Membrane apparatus with enhanced mass transfer, heat transfer and pumping capabilities via active mixing
US6106776A (en) * 1997-04-11 2000-08-22 University Of Pittsburgh Membrane apparatus with enhanced mass transfer via active mixing
US5962784A (en) * 1997-05-27 1999-10-05 Alliedsignal Inc. Micromachined rate and acceleration sensor
US6161440A (en) * 1997-08-14 2000-12-19 Alliedsignal Inc. Low metalization creep sensor
FR2784752B1 (fr) * 1998-10-20 2000-11-17 Onera (Off Nat Aerospatiale) Accelerometre miniature monolithique
US6450033B1 (en) 1999-07-22 2002-09-17 Denso Corporation Semiconductor physical quantity sensor
US6450032B1 (en) * 2000-03-14 2002-09-17 Pressure Systems, Inc. Vibrating beam force sensor having improved producibility
FR2813122B1 (fr) * 2000-08-17 2002-11-15 Sagem Accelerometre miniature non asservi
US6568502B2 (en) 2001-04-11 2003-05-27 Shih Ming Chang Sounder, speaker and sound head using the sounder
US6595054B2 (en) 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
US20040016307A1 (en) * 2002-07-24 2004-01-29 Albert William C. Vibration isolation mechanism for a vibrating beam force sensor
FR2842914B1 (fr) * 2002-07-26 2004-08-27 Sagem Capteur inertiel compact
US6938334B2 (en) * 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
JP2005140516A (ja) * 2003-11-04 2005-06-02 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ
JP4779423B2 (ja) * 2005-04-26 2011-09-28 パナソニック株式会社 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ
FR2898884B1 (fr) * 2006-03-27 2008-05-02 Commissariat Energie Atomique Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface
FR2906038B1 (fr) * 2006-09-19 2008-11-28 Commissariat Energie Atomique Accelerometre a poutre resonante avec bras de levier articule en rotation
JP2008197031A (ja) * 2007-02-15 2008-08-28 Epson Toyocom Corp 加速度検知ユニット及び加速度センサ
CN100397086C (zh) * 2007-07-09 2008-06-25 北京信息工程学院 新型压电石英加速度计
JP2009080069A (ja) * 2007-09-27 2009-04-16 Seiko Epson Corp 加速度センサ、荷重センサ
US8117917B2 (en) 2008-03-27 2012-02-21 Honeywell International Inc. Vibrating beam accelerometer with improved performance in vibration environments
WO2010019278A1 (en) * 2008-08-15 2010-02-18 Sural Solid-state inertial sensor on chip
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
US8176617B2 (en) 2010-03-31 2012-05-15 Honeywell International Inc. Methods for making a sensitive resonating beam accelerometer
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP5712755B2 (ja) * 2011-04-14 2015-05-07 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
JP5896114B2 (ja) * 2011-10-31 2016-03-30 セイコーエプソン株式会社 物理量検出デバイス、物理量検出器、および電子機器
US20140182378A1 (en) * 2012-12-31 2014-07-03 Kcf Technologies, Inc. Energy harvester powered accelerometer
JP6089753B2 (ja) * 2013-02-15 2017-03-08 セイコーエプソン株式会社 物理量検出センサーの製造方法、物理量検出センサー、物理量検出装置、電子機器および移動体
US9360495B1 (en) 2013-03-14 2016-06-07 Lockheed Martin Corporation Low density underwater accelerometer
US10823754B2 (en) 2014-11-14 2020-11-03 Honeywell International Inc. Accelerometer with strain compensation
US9689888B2 (en) * 2014-11-14 2017-06-27 Honeywell International Inc. In-plane vibrating beam accelerometer
JP5867631B2 (ja) * 2015-01-07 2016-02-24 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP6513519B2 (ja) * 2015-07-17 2019-05-15 株式会社日立製作所 物理量センサ
CN106443068B (zh) * 2016-10-26 2020-06-02 西安交通大学 一种扭转差动式石英谐振加速度传感器芯片
JP6465097B2 (ja) * 2016-11-21 2019-02-06 横河電機株式会社 振動式トランスデューサ
US11112246B2 (en) * 2019-06-14 2021-09-07 United States Government As Represented By The Secretary Of The Army Torsional oscillator micro electro mechanical systems accelerometer
US11474126B2 (en) * 2020-03-05 2022-10-18 Quartz Seismic Sensors, Inc. High precision rotation sensor and method
US11459231B2 (en) 2020-11-23 2022-10-04 United States Government As Represented By The Secretary Of The Army Microelectronic isolation system
CN112710865B (zh) * 2020-12-11 2022-02-25 大连理工大学 一种基于模态局部化效应的可调加速度传感器
CN113433345B (zh) * 2021-05-13 2022-12-20 西安航天精密机电研究所 一种集成摆式石英谐振加速度计结构及其装配方法
US11965907B2 (en) * 2022-04-02 2024-04-23 Emcore Corporation Resonantly vibrating accelerometer driven in multiple vibrational modes
US11953514B2 (en) * 2022-04-02 2024-04-09 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
US11959935B2 (en) * 2022-04-02 2024-04-16 Emcore Corporation Resonantly vibrating accelerometer with cross-coupling signal suppression
US20230366909A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Vibrating beam accelerometer
CN117929782B (zh) * 2024-03-21 2024-06-07 中国工程物理研究院电子工程研究所 一种低应力摆式微加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2192306B1 (es) * 1972-07-13 1975-09-05 Commissariat Energie Atomique
GB1596982A (en) * 1978-02-21 1981-09-03 Standard Telephones Cables Ltd Mechanical resonator arrangements
US4244225A (en) * 1979-06-08 1981-01-13 Itt Industries, Inc. Mechanical resonator arrangements
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4479385A (en) * 1982-09-23 1984-10-30 The United States Of America As Represented By The Department Of Energy Double resonator cantilever accelerometer
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
US4766768A (en) * 1987-10-22 1988-08-30 Sundstrand Data Control, Inc. Accelerometer with isolator for common mode inputs

Also Published As

Publication number Publication date
DE68900327D1 (de) 1991-11-21
CA1323502C (en) 1993-10-26
EP0331557A1 (fr) 1989-09-06
FR2627592A1 (fr) 1989-08-25
US4939935A (en) 1990-07-10
JPH01302166A (ja) 1989-12-06
EP0331557B1 (fr) 1991-10-16
FR2627592B1 (fr) 1990-07-27

Similar Documents

Publication Publication Date Title
ES2025845T3 (es) Acelerometro pendular no condicionado a barra resonante.
DE3777187D1 (en) Accelerometer.
CA2217683A1 (en) A rate sensor for sensing a rate on at least two and preferably three axes
FR2640045B1 (fr) Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
CA2263995A1 (en) Angular velocity detector
SE8402680D0 (sv) Anordning for dempning av svengningar
JPS5612513A (en) Film oscillation sensor
HK31386A (en) Vibratory cutting device
EP0926490A3 (en) Gas sensor
JPS5684530A (en) Load converter
SU1191833A1 (ru) Установка дл определени амплитудно-частотной характеристики акселерометра
EP0309963A3 (en) Vibration gyro having an h-shaped vibrator
SU618321A1 (ru) Устройство дл измерени параметров колебаний вибрационного конвейера
US4047428A (en) Force measuring transducer with frequency output signal
SE8500267D0 (sv) Enaxlig multidetektor
Nosachenko et al. Investigation of the dynamic properties of an oscillatory system subjected to a control excitation
ATE49142T1 (de) Mit halterung ausgestatteter vibrator.
JPS5636787A (en) Pedometer
JPS60118911U (ja) 音叉型振動式角速度計
FI844954L (fi) Kopplingsanordning foer ihaoliga byggdelar.
ATE33866T1 (de) Einrichtung zur zusammenstellung von laengstraegern mit winkel-veraenderungsmoeglichkeit.
FR2636744B1 (fr) Resonateur vibrant a excitation et detection optique a usage capteur
SU1420343A1 (ru) Преобразователь неэлектрических величин в электрический сигнал
SU1645217A1 (ru) Вибрационное загрузочное устройство
SU1493895A1 (ru) Датчик давлени

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 331557

Country of ref document: ES